quantitative measurements of target debris produced in a laser-plasma light source show ( 1 ) that low pressures ( ~ 100 mtorr ) of he buffer gas reduce the debris collected 150 mm from the target by more than an order of magnitude and ( 2 ) that the amount of debris collected rises faster than linearly with laser pulse energy in the 100-300-mj range .
C0392762
quantitative
C1514721
range