Ngokusekelwe kulesi sigaba, sicela unikeze uhlu lwezinqubo ezisetshenziselwa ukulungiselela izinto ezihamba phambili ze-semiconductor ze-integrated circuits (ICs).
Context:Kukhona inhlanganisela yezinqubo ezisetshenziselwa ukulungiselela izinto ze-semiconductor ze-ICs. Enye inqubo ibizwa ngokuthi i-thermal oxidation, eyakha i-silicon dioxide ebusweni be-silicon. Lokhu kusetshenziselwa ukuvimbela isango kanye ne-oxide yensimu. Ezinye izinqubo zibizwa ngokuthi ama-photomask ne-photolithography. Le nqubo iyona edala amaphethini esekethe esekethe elihlanganisiwe. Ukukhanya kwe-ultraviolet kusetshenziswa kanye nesendlalelo se-photoresist ukuze kwenziwe ushintsho lwamakhemikhali olwenza amaphethini esekethe.  Ukuqopha kuyinqubo elandelayo edingekayo. Ingxenye yesilicon eyayingahlanganisiwe ungqimba lwe-photoresist kusuka esinyathelweni esedlule manje ingakhishwa. Inqubo eyinhloko evame ukusetshenziswa namuhla ibizwa ngokuthi i-plasma etching. Ukudweba nge-plasma ngokuvamile kuhilela igesi yokudweba ephonswa ekamelweni elinengcindezi ephansi ukuze kudalwe i-plasma. Igesi evame ukusetshenziselwa ukuloba i-chlorofluorocarbon, noma eyaziwa ngokuthi i-Freon. Amandla kagesi omsakazo aphakeme phakathi kwe-cathode ne-anode yiwo akha i-plasma esegumbini. I-silicon wafer itholakala ku-cathode, okubangela ukuba ishaywe ama-ion akhokhiswe kahle akhishwa kuyi-plasma. Umphumela uba i-silicon eqoshwe ngendlela engabonakali.  Le nqubo yokugcina ibizwa ngokuthi ukusabalala. Lena inqubo enikeza izinto ezisebenza ngogesi izakhiwo ezifiselekayo. Kuyaziwa nangokuthi i-doping. Le nqubo yethula i-athomu engahlanzekile ohlelweni, okudala i-p<unk>n junction. Ukuze ama-athomu angcolile afakwe kuyi-silicon wafer, i-wafer kuqala ifakwa ekamelweni elishisa ngo - 1,100 degrees Celsius. Ama-athomu ayafakwa bese ekugcineni ahlakazeka nesilicon. Ngemva kokuthi inqubo isiphelile futhi i-silicon ifinyelele ekamelweni lokushisa, inqubo yokufaka i-doping iyaqedwa futhi into eyi-semiconductor isilungele ukusetshenziswa kusekethe ehlanganisiwe.
- Ukushisa okushisayo -Imaski/i-photolithography -Ukuqopha (ikakhulukazi ukuqopha nge-plasma) - Ukusakazeka/ukusetshenziswa kwezidakamizwa