Zvichienderana nechikamu ichi, ndapota ipa runyorwa rwezvibodzwa zvemaitiro anoshandiswa kugadzirira semiconductor zvinhu zvemaseketi akabatanidzwa (ICs).
Context:Pane mubatanidzwa wemaitiro anoshandiswa kugadzirira zvinhu zve semiconductor zveICs. Imwe muitiro inonzi kupisa oxidation, iyo inoumba silicon dioxide pamusoro pe silicon. Izvi zvinoshandiswa sechinhu chinodzivirira gedhi uye oxide yemunda. Dzimwe nzira dzinonzi photomasks uye photolithography. Iyi muitiro ndiyo inogadzira mienzaniso iri padenderedzwa mudenderedzwa rakabatanidzwa. Chiedza cheultraviolet chinoshandiswa pamwe chete nechiedza chinorwisa kupenya kuti pave nokuchinja kwemakemikari kunogadzira mienzaniso yechikwata chacho.  Kuveza ndiro basa rinotevera rinodiwa. Chikamu chesirilicon chisina kufukidzwa nechiedza chinodzivirira kubva padanho rapfuura zvino chinogona kunyorwa. Nzira huru inoshandiswa zvikuru nhasi inonzi plasma etching. Kazhinji kacho, gasi rinoshandiswa pakuveza rinoputirwa mumudziyo unenge uri pasi pemhepo kuti pave neplasma. Gasi rinowanzoshandiswa pakunyora rinonzi chlorofluorocarbon, kana kuti rinowanzonzi Freon. Magetsi omufaranzi mukuru ari pakati pekathode neanode ndiwo anogadzira plasma iri mukamuri racho. Silicium wafer iri pa cathode, iyo inoita kuti irohwe ne positively charged ions dzinoburitswa kubva mu plasma. Mugumisiro wacho isilicon yakavezwa anisotropically.  Nzira yokupedzisira inonzi kupararira. Iyi ndiyo nzira inopa zvinhu zvinotungamirira semiconductor zvinhu zvinotungamirira semiconductor zvavanoda. Inozivikanwawo sedoping. Nzira yacho inounza atomu risina kuchena muchirongwa, iro rinogadzira p<unk>n junction. Kuti maatomu asina kuchena aiswe muchikamu chesilicon, chokutanga chichikamu chacho chinoiswa mukamuri rinopisa madhigirii 1.100. Maatomu anoiswa mukati uye pakupedzisira anoparadzirwa nesilicon. Mushure mokunge muitiro wapedzwa uye silicon yasvika patembiricha yemukamuri, muitiro wokupinza zvinhu mumudziyo wapera uye zvinhu zvinopinza zvinhu zviri kugadzirira kushandiswa mumutambo wakabatanidzwa.
-Thermal oxidation -Photomasks/photolithography - Kuchera (kunyanya kuchera neplasma) -Kupararira/kushandiswa kwezvinodhaka