The use of micromechanical resonant structures in RF electronics possesses often a problem caused by a very low signal amplitude. In order to alleviate the influence of parasitic capacitance we propose here the use of the differential amplifier and demonstrate its use here on the processed electrostatically driven resonators. The component used in verifying the use of differential amplifier is a clamped-clamped beam resonator with Q = 8000 and resonant frequency of f 0 = 12.3 MHz. A low-noise high input-impedance amplifier was used as a reference.
|Title of host publication||Transducers ’01 Eurosensors XV|
|Publication status||Published - 2001|
|MoE publication type||A4 Article in a conference publication|
|Event||11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV - Munich, Germany|
Duration: 10 Jun 2001 → 14 Jun 2001
|Conference||11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV|
|Period||10/06/01 → 14/06/01|