Coral Name: NSOM_Renishaw
FIC: Vladimir Shalaev
Process/Equipment Owner: Alexei Lagoutchev
Max Wafer Size: N/A
Dual microscope system with precision independent piezo manipulators for the sample and the tip capable of full spectrum of near-field image acquisition modes
Near-field scanning optical microscopy with Raman capability
* Must install Coral and be a trained user to reserve a slot on this system.