Fabrication, Characterization, and Simulation of Glass Devices with <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" overflow="scroll"><mml:mrow><mml:mi>Al</mml:mi><mml:mi mathvariant="normal">N</mml:mi></mml:mrow></mml:math> Thin-Film Transducers for Excitation of Ultrasound Resonances
Physical review applied