CROSS-REFERENCE TO RELATED APPLICATION

This application claims the priority benefit of Japan Application No. 2018-044129, filed on Mar. 12, 2018. The entirety of the above-mentioned patent application is hereby incorporated by reference herein and made a part of this specification.

BACKGROUND

Technical Field

The disclosure relates to an optical measuring device.

Description of Related Art

Conventionally, an optical measuring device capable of measuring the surface shape of a measurement object, etc. by a white confocal method is used.

For example, the optical measuring device described in the following Patent Document 1 includes a light source that generates irradiation light having a plurality of wavelength components; an optical system that generates axial chromatic aberration in the irradiation light from the light source and receives reflected light from a measurement object at least a part of which is arranged on an extension line of the optical axis; a light receiving part including a spectroscope that divides the reflected light received by the optical system into each wavelength component, and a detector in which a plurality of light receiving elements are one-dimensionally arranged corresponding to the spectral direction of the spectroscope; a light guide part that includes a plurality of cores optically connecting the optical system and the light receiving part; and a processing part that calculates the distance from the optical system to the measurement object based on values detected by the plurality of light receiving elements of the light receiving part.

RELATED ART

Patent Document(s)

[Patent Document 1] Japanese Laid-open No. 2017-102067

Problems to be Solved

In the optical measuring device described in Patent Document 1, an optical fiber including a plurality of cores is provided, and as the interval between adjacent cores becomes narrower, the following phenomenon (hereinafter also referred to as “crosstalk”) may occur. That is, light of a wavelength outside a confocal point reflected from the measurement object may enter the optical fiber having the confocal point. Therefore, in the optical fiber, the interval between adjacent cores and the arrangement of the cores are set so as to reduce crosstalk.

However, it is required to detect the position of the measurement object with even more sufficient accuracy by further reducing the crosstalk.

Therefore, the disclosure provides an optical measuring device with further improved detection accuracy of the position of a measurement object.

SUMMARY

An optical measuring device according to an embodiment of the disclosure includes a light source, a sensor head, and a spectroscope. The light source outputs light of a plurality of wavelengths. The sensor head includes a conversion lens that converts the light incident via a light guide part, which includes a plurality of cores, into parallel light, and an objective lens that irradiates the light in which chromatic aberration is generated to a measurement object. The spectroscope acquires reflected light reflected by the measurement object and condensed by the sensor head via the light guide part and measures a spectrum of the reflected light. In the sensor head, a shield that shields light is arranged between the conversion lens and the objective lens to inhibit light emitted from one core among the plurality of cores included in the light guide part from entering cores other than the one core as the reflected light.

