CROSS-REFERENCE TO RELATED APPLICATION(S)

This application claims the priority to and benefits of Korean Patent Application No. 10-2019-0143933 under 35 U.S.C. § 119, filed on Nov. 12, 2019 in the Korean Intellectual Property Office, the entire contents of which are incorporated herein by reference.

BACKGROUND

1. Technical Field

Embodiments of the disclosure relate to a display apparatus, and to a display apparatus that is capable of preventing or reducing the deterioration of image quality during a manufacturing process or use.

2. Description of the Related Art

Display apparatuses have been diversified in use. In recent developments, the thickness of the display apparatuses is smaller and the weight thereof is lighter, and thus, they are used in a wider range of use. For example, the use of display apparatuses is expanding to not only small devices such as MP3 players and mobile phones, but also medium and large devices such as big-screen televisions.

In addition, there has been research and development of foldable or rollable display apparatuses. To this end, it is desirable to improve the flexibility of substrates of display apparatuses.

SUMMARY

Embodiments of the disclosure provide a display apparatus that is capable of preventing or reducing the deterioration of image quality during a manufacturing process or use and a method of manufacturing the same.

Technical objectives to be achieved by the disclosure are not limited to the above-mentioned embodiments, and other technical objectives which have not been described will be clearly understood by those skilled in the art from the description of the disclosure.

Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments of the disclosure.

In one embodiment, a display apparatus may include a substrate, a first conductive layer disposed on the substrate, and a first insulating pattern disposed on the first conductive layer, wherein the first insulating pattern includes a fluorine compound.

In one embodiment, concentration of the fluorine compound may be reduced from a first surface of the first insulating pattern to a second surface of the first insulating pattern, and the first surface faces the second surface.

In one embodiment, the second surface of the first insulating pattern is in contact with the conductive layer.

In one embodiment, the first insulating pattern may further include a nitrogen compound.

In one embodiment, the nitrogen compound may be represented by Formula 1.
NR1R2R3OH  <Formula 1>

In Formula 1, R1to R3may each independently be selected from hydrogen, a substituted or unsubstituted C1-C20alkyl group, a substituted or unsubstituted C6-C30aryl group, and a substituted or unsubstituted C7-C30aralkyl group.

In one embodiment, concentration of the nitrogen compound may be reduced from a first surface of the first insulating pattern to a second surface of the first insulating pattern, wherein the first surface faces the second surface.

In one embodiment, the first insulating pattern may further include a nitrogen compound and a first material, and the first material may be different from the fluorine compound and the nitrogen compound.

In one embodiment, the first insulating pattern consists essentially of the first material.

In one embodiment, the first material may be an alkali soluble polymer.

In one embodiment, the first material may be a siloxane-based polymer.

In one embodiment, the first insulating pattern includes a first region and a second region, the second region may be between the first conductive layer and the first region, and an amount of the first material in the first region may be greater than an amount of the first material in the second region.

In one embodiment, a ratio of the amount of the fluorine compound in the first region to the amount of the fluorine compound in the second region may be from about 10:1 to about 10,000:1.

In one embodiment, a ratio of the thickness of the first region to the thickness of the second region may be from about 1:10 to about 1:1,000.

In one embodiment, the first conductive layer may include molybdenum, aluminum, titanium, neodymium, copper, or a combination thereof.

In one embodiment, the display apparatus may further include a pixel electrode that is disposed on the first insulating pattern and electrically connected to the first conductive layer.

In one embodiment, the first insulating pattern may include an opening that exposes a portion of the first conductive layer, and the pixel electrode may contact the first conductive layer through the opening.

In one embodiment, a portion of the first conductive layer exposed by the opening may include molybdenum.

In one embodiment, the display apparatus may further include a second insulating pattern disposed on the pixel electrode and contacts the first insulating pattern outside the pixel electrode.

In one embodiment, the first insulating pattern may include a first material, the second insulating pattern may include a second material, and the first material and the second material may comprise a same material.

In one embodiment, a method of manufacturing a display apparatus includes forming a first conductive layer on a substrate, forming a preliminary first insulating pattern on the first conductive layer, forming a first insulating pattern by developing with a first solution, and treating the first insulating pattern with a second solution, wherein the first solution includes a nitrogen compound and the second solution includes HF.

In one embodiment, the method may further include, prior to the treating, forming a pixel electrode on the first insulating pattern wherein the pixel electrode may be electrically connected to the first conductive layer.

In one embodiment, the method may further include, after the treating, forming a pixel electrode on the first insulating pattern wherein the pixel electrode is electrically connected to the first conductive layer.

