BACKGROUND

The present disclosure relates to a fluid heater used in a fluid control apparatus used in a semiconductor production apparatus or the like, a fluid control apparatus, and a production method for the fluid heater.

Conventionally, a fluid control apparatus for heating fluid to be supplied into a gas line unit with the aid of a heater has been proposed on H10-246356. Moreover, a fluid heater for heating a purge gas is sometimes provided in a purge gas pipe that is a predetermined gas line among a plurality of gas line units. A fluid heater includes a passage member in which a purge gas flows and a heater for heating the passage member, and a passage extending linearly in an axial direction is formed in the passage member.

SUMMARY

However, the passage member of the conventional fluid heater has poor heating efficiency, and it is necessary to lengthen a heating distance with respect to the gas line unit for heating gas when a desired temperature is high. When the heating distance increases, the size of a passage member and a fluid heater increases, which makes it difficult to realize a further reduction in the size of fluid control apparatuses in recent years.

Therefore, one of the objects of the present disclosure is to provide a fluid heater capable of enhancing fluid heating efficiency and a fluid control apparatus.

A fluid heater in accordance with one or more embodiments includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape.

A fluid control apparatus in accordance with one or more embodiments includes: a plurality of fluid control devices fixed to a joint; and a fluid heater for heating fluid flowing into the fluid control device. The fluid heater includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to the fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape

A production method for producing a fluid heater in accordance with one or more embodiments, the fluid heater including: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape. The method includes: manufacturing the passage member by a metal powder sintering shaping method; and combining the heater, the fixing member, and the connection member with the passage member.

