TECHNICAL FIELD

This disclosure relates to actuators in general and, more particularly, to miniaturized MEMS actuators configured for use within camera packages.

BACKGROUND

As is known in the art, actuators may be used to convert electronic signals into mechanical motion. In many applications such as e.g., portable devices, imaging-related devices, telecommunications components, and medical instruments, it may be beneficial for miniature actuators to fit within the small size, low power, and cost constraints of these application.

Micro-electrical-mechanical system (MEMS) technology is the technology that in its most general form may be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of microfabrication. The critical dimensions of MEMS devices may vary from well below one micron to several millimeters. In general, MEMS actuators are more compact than conventional actuators, and they consume less power.

SUMMARY OF DISCLOSURE

Invention #5

In one implementation, a micro-electrical-mechanical system (MEMS) assembly includes a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.

One or more of the following features may be included. The at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage may include two or more flexible electrodes coupled and essentially orthogonal to one of the stationary stage and the rigid stage. The at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage may include two or more rigid electrodes coupled and essentially orthogonal to the other of the stationary stage and the rigid stage. The at least one flexible electrode may be configured to be energized at a first voltage potential. The at least one rigid electrode may be configured to be energized at a second voltage potential. The at least one flexible electrode may be generally curved in shape. The at least one flexible electrode may be generally straight in shape. The at least one rigid electrode may be generally rectangular in shape. The at least one rigid electrode may include at least one surface that is not orthogonal to the other of the stationary stage and the rigid stage.

In another implementation, a micro-electrical-mechanical system (MEMS) assembly includes: a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, wherein the at least one flexible electrode is generally straight in shape, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage, wherein the at least one rigid electrode includes at least one surface that is not orthogonal to the other of the stationary stage and the rigid stage.

One or more of the following features may be included. The at least one flexible electrode may be configured to be energized at a first voltage potential. The at least one rigid electrode may be configured to be energized at a second voltage potential.

In another implementation, a micro-electrical-mechanical system (MEMS) actuator includes: a first micro-electrical-mechanical system (MEMS) assembly, and at least a second micro-electrical-mechanical system (MEMS) assembly, wherein each of the micro-electrical-mechanical system (MEMS) assemblies includes: a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.

One or more of the following features may be included. The at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage may include two or more flexible electrodes coupled and essentially orthogonal to one of the stationary stage and the rigid stage. The at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage may include two or more rigid electrodes coupled and essentially orthogonal to the other of the stationary stage and the rigid stage. The at least one flexible electrode may be generally curved in shape. The at least one flexible electrode may be generally straight in shape. The at least one rigid electrode may be generally rectangular in shape. The at least one rigid electrode may include at least one surface that is not orthogonal to the other of the stationary stage and the rigid stage. The first micro-electrical-mechanical system (MEMS) assembly and the at least a second micro-electrical-mechanical system (MEMS) assembly may be coupled in a parallel configuration. The first micro-electrical-mechanical system (MEMS) assembly and the at least a second micro-electrical-mechanical system (MEMS) assembly may be coupled in a series configuration. The first micro-electrical-mechanical system (MEMS) assembly and the at least a second micro-electrical-mechanical system (MEMS) assembly may be coupled in a parallel-series configuration.

The details of one or more implementations are set forth in the accompanying drawings and the description below. Other features and advantages will become apparent from the description, the drawings, and the claims.

