CROSS-REFERENCE TO RELATED APPLICATION

This application is a national stage application under 35 U.S.C. § 371 of International Application No. PCT/CN2018/098071, filed Aug. 1, 2018, the contents of which are incorporated by reference in the entirety.

TECHNICAL FIELD

The present invention relates to micro-fluidic technology, more particularly, to a micro-channel structure, a sensor, a micro-fluidic device, a lab-on-chip device, and a method of fabricating a micro-channel structure.

BACKGROUND

Microfluidics deals with the behavior, precise control and manipulation of fluids that are geometrically constrained to a small, typically sub-millimeter, scale. It is a multidisciplinary field at the intersection of engineering, physics, chemistry, biochemistry, nanotechnology, and biotechnology, with practical applications in the design of systems in which low volumes of fluids are processed to achieve multiplexing, automation, and high-throughput screening. Microfluidics emerged in the beginning of the 1980s and is used in the development of inkjet printheads, DNA chips, lab-on-a-chip technology, micro-propulsion, and micro-thermal technologies.

SUMMARY

In one aspect, the present invention provides a micro-channel structure, comprising a base substrate; a rail layer on the base substrate and comprising a first rail and a second rail spaced apart from each other; and a wall layer on a side of the rail layer distal to the base substrate, and comprising a first wall and a second wall at least partially spaced apart from each other, thereby forming a micro-channel between the first wall and the second wall; wherein the micro-channel has an extension direction along a plane substantially parallel to a main surface of the base substrate, the extension direction being substantially parallel to extension directions of the first rail and the second rail along the plane substantially parallel to the main surface of the base substrate.

Optionally, an orthographic projection of the first wall on the base substrate substantially covers an orthographic projection of the first rail on the base substrate; and an orthographic projection of the second wall on the base substrate substantially covers an orthographic projection of the second rail on the base substrate.

Optionally, the first wall protrudes away from a side of the first rail distal to the base substrate along a protrusion direction and the second wall protrudes away from a side of the second rail distal to the base substrate along the protrusion direction; and the first wall and the second wall are completely spaced apart from each other along the protrusion direction in at least a portion of the wall layer thereby forming the micro-channel that is at least partially open on a side opposite to the base substrate.

Optionally, the first wall protrudes away from a side of the first rail distal to the base substrate along a protrusion direction and the second wall protrudes away from a side of the second rail distal to the base substrate along the protrusion direction; and the first wall and the second wall are connected to each other in a first region of the wall layer and are spaced apart from each other in a second region of the wall layer thereby forming the micro-channel that is substantially closed on a side opposite to the base substrate, the first region on a side of the second region distal to the base substrate along the protrusion direction.

Optionally, the wall layer further comprises a third wall connecting the first rail and the second rail; and the third wall is in direct contact with the base substrate.

Optionally, the rail layer further comprises a base connecting the first rail and the second rail; a cross-section along a plane substantially perpendicular to the extension directions of the first rail and the second rail has a U shape.

Optionally, the first rail and the second rail comprise a conductive material.

Optionally, the rail layer comprises a material different from a material of the wall layer.

In another aspect, the present invention provides a multi-layer micro-channel structure, comprising a first layer of the multi-layer micro-channel structure and a second layer of the multi-layer micro-channel structure; wherein the first layer of the multi-layer micro-channel structure comprises a base substrate; a rail layer on the base substrate and comprising a first rail and a second rail spaced apart from each other; and a wall layer on a side of the rail layer distal to the base substrate, and comprising a first wall and a second wall at least partially spaced apart from each other, thereby forming a micro-channel between the first wall and the second wall; wherein the micro-channel has an extension direction along a plane substantially parallel to a main surface of the base substrate, the extension direction being substantially parallel to extension directions of the first rail and the second rail along the plane substantially parallel to the main surface of the base substrate; wherein the second layer of the multi-layer micro-channel structure comprises a second base substrate; a second rail layer on the second base substrate and comprising a third rail and a fourth rail spaced apart from each other, and a second wall layer on a side of the second rail layer distal to the second base substrate, and comprising a fourth wall and a fifth wall at least partially spaced apart from each other, thereby forming a second micro-channel between the fourth wall and the fifth wall; wherein the second micro-channel has a second extension direction along a plane substantially parallel to a main surface of the second base substrate, the second extension direction being substantially parallel to extension directions of the third rail and the fourth rail along the plane substantially parallel to the main surface of the second base substrate.

In another aspect, the present invention provides a micro-fluidic system, comprising the micro-channel structure described herein or fabricated by a method described herein.

Optionally, the micro-fluidic system further includes a sensing circuit; wherein the rail layer constitutes one or more sensing electrodes.

Optionally, the rail layer constitutes a control electrode for controlling transport of a substance in the micro-channel.

Optionally, the first rail and the second rail constitute two separate electrodes of the micro-fluidic system, and are configured to control transport of a substance through the micro-channel.

Optionally, the micro-fluidic system comprises an ionic transistor; wherein the rail layer constitutes a gate electrode of the ionic transistor.

Optionally, the rail layer further comprises a base connecting the first rail and the second rail; and a cross-section along a plane substantially perpendicular to the extension directions of the first rail and the second rail has a U shape.

In another aspect, the present invention provides a method of fabricating a micro-channel structure, comprising forming a rail layer on a base substrate; and subsequent to forming the rail layer, forming a wall layer on a side of the rail layer distal to the base substrate; wherein forming the rail layer comprises forming a first rail and a second rail spaced apart from each other; forming the wall layer comprises forming a first wall and a second wall spaced apart from each other, thereby forming a micro-channel between the first wall and the second wall; and the micro-channel is formed to have an extension direction along a plane substantially parallel to a main surface of the base substrate, the extension direction being substantially parallel to extension directions of the first rail and the second rail along the plane substantially parallel to the main surface of the base substrate.

Optionally, forming the wall layer comprises sputtering a wall layer material on a base substrate having the first rail and the second rail formed thereon.

Optionally, the method further comprises controlling a dimension and shape of the micro-channel by controlling a duration or a power of sputtering the wall layer material.

Optionally, the duration or the power is controlled in a range such that the first wall and the second wall are formed at least partially separated from each other on a side of the micro-channel opposite to the base substrate; and the micro-channel is formed to be at least partially open on a side opposite to the base substrate.

Optionally, the duration or the power is controlled in a range such that the first wall and the second wall are formed to be connected to each other on a side of the micro-channel opposite to the base substrate; and the micro-channel is formed to be substantially closed on a side opposite to the base substrate.

Optionally, sputtering the wall layer material is performed at room temperature, in a sputtering atmosphere comprising oxygen and argon, using a sputtering power of approximately 5 kW, under a sputtering atmosphere pressure of approximately 0.2 Pa.

Optionally, forming the wall layer further comprises forming a third wall connecting the first rail and the second rail; and the third wall is formed to be in direct contact with the base substrate.

In another aspect, the present invention provides a method of fabricating a sensor chip, comprising forming a micro-channel structure according to the method described herein; and forming an electrode structure of the sensor chip on a base substrate.

Optionally, the first rail and the second rail are formed using an electrode material; and the first rail and the second rail are formed as two sensor electrodes of the sensor chip.

