The present application is based on, and claims priority from JP Application Serial Number 2019-057447, filed Mar. 25, 2019, the disclosure of which is hereby incorporated by reference herein in its entirety.

BACKGROUND

1. Technical Field

The present disclosure relates to a vibrator device, an electronic apparatus, and a vehicle.

2. Related Art

A vibrator element disclosed in JP-A-2017-194485 (Patent Literature 1) includes a vibrator body, a first support portion and a second support portion that support the vibrator body and that are fixed to a package or the like, a pair of beam portions that couple the vibrator body and the first support portion, and a pair of beam portions that couple the vibrator body and the second support portion.

However, since the beam portions have to be formed to fill in a gap of the vibrator body, a shape of the beam portions is limited. Therefore, a frequency design of an unnecessary vibration is limited and it is difficult to implement a vibrator element in which the unnecessary vibration is sufficiently prevented.

SUMMARY

A vibrator device according to an application example of the present disclosure includes a vibrator structure body. When three axes orthogonal to each other are defined as an A axis, a B axis, and a C axis, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.

In the vibrator device according to the application example of the present disclosure, a relationship Ka>Kb may be satisfied in which Ka is a spring constant of an elastic deformation of the beam along the A axis and Kb is a spring constant of an elastic deformation of the beam along the B axis. In a plan view from a direction along the C axis, the support may include a first support positioned at one side of the A axis with respect to the vibrator element and a second support positioned at another side of the A axis with respect to the vibrator element.

In the vibrator device according to the application example of the present disclosure, in a plan view from a direction along the C axis, the support may include a first support positioned at one side of the B axis with respect to the vibrator element and a second support positioned at another side of the B axis with respect to the vibrator element.

In the vibrator device according to the application example of the present disclosure, the vibrator element may include: an element base; detection arms extending from the element base towards both sides of the B axis; a first coupling arm extending from the element base along the A-axis; a second coupling arm extending from the element base along the A-axis towards an opposite side to a direction in which the first coupling arm extends; and the vibrating arms including: first vibrating arms extending from a tip end of the first coupling arm towards both sides of the B axis, and second vibrating arms extending from a tip end of the second coupling arm towards both sides of the B axis. The element base may be fixed to the base via a joining member.

In the vibrator device according to the application example of the present disclosure, a displacement amplitude magnification of a vibration of the vibrator element along the B axis at the drive frequency f1 may be less than 0.8.

In the vibrator device according to the application example of the present disclosure, the vibrator element may include a vibrator substrate and an electrode that is provided on the vibrator substrate. The vibrator substrate and the support substrate may be formed of quartz crystal substrates having the same cut angle.

In the vibrator device according to the application example of the present disclosure, in a plan view from a direction along the C axis, the support substrate may overlap the vibrating arm.

In the vibrator device according to the application example of the present disclosure, the vibrator element may be a physical quantity sensor element configured to detect a physical quantity.

An electronic apparatus according to an application example of the present disclosure includes: the vibrator device; and a signal processing circuit configured to perform signal processing based on an output signal from the vibrator device.

A vehicle according to an application example of the present disclosure includes: the vibrator device; and a signal processing circuit configured to perform signal processing based on an output signal from the vibrator device.

