This application claims priority under 35 U.S.C. § 119 to Korean Patent Application No. 10-2018-0171550, filed on Dec. 28, 2018 the disclosure of which is incorporated by reference herein in its entirety.

Technical Field

Exemplary embodiments of the inventive concept relate to a display apparatus, and a method of manufacturing the display apparatus.

Description of the Related Art

Electronic viewing technologies enable people to see content in a range of entertainment, consumer electronics, personal computer and mobile devices. These electronic viewing technologies may employ a display apparatus such as a plasma display apparatus, a liquid crystal display apparatus or an organic light emitting display apparatus. These display apparatuses are highly regarded due to their small size, light weight and low-power-consumption.

The plasma, liquid crystal or organic light emitting display apparatus may include a base substrate, a plurality of layered structures formed on the base substrate, and a contact structure. As the display apparatus becomes a higher-resolution device, a gap between circuit structures decreases, thereby lowering process margins.

SUMMARY

According to an exemplary embodiment of the inventive concept, a display apparatus includes a base substrate, a first active pattern disposed on the base substrate, a first insulating layer disposed on the first active pattern, a first gate electrode disposed on the first insulating layer, a second insulating layer disposed on the first gate electrode, a first ring dummy pattern disposed on the second insulating layer, a third insulating layer disposed on the second insulating layer, and a first drain electrode disposed on the third insulating layer, and electrically connected to the first active pattern through a first contact hole which is formed through the third insulating layer, the second insulating layer and the first insulating layer, wherein the first drain electrode is disposed in an opening of the first ring dummy pattern.

In an exemplary embodiment of the inventive concept, a periphery of an upper portion of the first contact hole may overlap at least a portion of the first ring dummy pattern in a plan view.

In an exemplary embodiment of the inventive concept, the periphery of the upper portion of the first contact hole may be larger than an inner circumference of the first ring dummy pattern, and smaller than an outer circumference of the first ring dummy pattern.

In an exemplary embodiment of the inventive concept, the first drain electrode and the first ring dummy pattern may contact each other.

In an exemplary embodiment of the inventive concept, the first ring dummy pattern partially may overlap the first gate electrode.

In an exemplary embodiment of the inventive concept, a periphery of a lower portion of the first contact hole may be located in the first ring dummy pattern in a plan view.

In an exemplary embodiment of the inventive concept, the first contact hole may have a shape of a circle, a rectangle, or a square with rounded corners in a plan view. The first ring dummy pattern may have a shape of a circle, a rectangle, or a square with rounded corners in a plan view.

In an exemplary embodiment of the inventive concept, the display apparatus may further include a first interlayer insulating layer disposed between the second insulating layer and the third insulating layer, a second active pattern disposed between the first interlayer insulating layer and the third insulating layer, and a second gate electrode disposed on the second active pattern.

In an exemplary embodiment of the inventive concept, a sum of thicknesses of the first insulating layer, the second insulating layer, the first interlayer insulating layer and the third insulating layer may not be less than 10,000 Å.

In an exemplary embodiment of the inventive concept, the display apparatus may further include a second ring dummy pattern disposed between the first interlayer insulating layer and the third insulating layer and overlapping the first ring dummy pattern.

In an exemplary embodiment of the inventive concept, the display apparatus may further include an insulating pattern disposed between the second ring dummy pattern and the first interlayer insulating layer and between the second gate electrode and the first interlayer insulating layer.

In an exemplary embodiment of the inventive concept, a width of an inner circumference of the second ring dummy pattern may be larger than a width of an inner circumference of the first ring dummy pattern.

In an exemplary embodiment of the inventive concept, the display apparatus may further include a storage electrode overlapping the first gate electrode and spaced apart from the first ring dummy pattern.

In an exemplary embodiment of the inventive concept, the display apparatus may further include an interlayer insulating layer disposed between the third insulating layer and the second insulating layer, and a storage electrode disposed between the interlayer insulating layer and the second insulating layer and overlapping the first gate electrode. The first ring dummy pattern may be disposed between the interlayer insulating layer and the third insulating layer.

In an exemplary embodiment of the inventive concept, the display apparatus may further include an interlayer insulating layer disposed between the third insulating layer and the second insulating layer, a storage electrode disposed between the interlayer insulating layer and the second insulating layer and overlapping the first gate electrode. The first ring dummy pattern may be disposed between the interlayer insulating layer and the second insulating layer, and in the same layer as the storage electrode.

In an exemplary embodiment of the inventive concept, the display apparatus may further include a via insulating layer disposed on the third insulating layer, and a light emitting layer disposed on the via insulating layer.

In an exemplary embodiment of the inventive concept, the first drain electrode may be electrically connected to the second active pattern through a second contact hole formed through the third insulating layer. The first contact hole and the second contact hole may be disposed adjacent to each other in a plan view. The second contact hole may not be provided with the first dummy pattern corresponding to the first contact hole.

According to an exemplary embodiment of the inventive concept, a method of manufacturing a display apparatus includes forming a first active pattern on a base substrate, forming a first insulating layer on the first active pattern, forming a first gate electrode on the first insulating layer, forming a second insulating layer on the first gate electrode, forming a first ring dummy pattern on the second insulating layer, the first ring dummy pattern overlapping the first active pattern, forming a third insulating layer on the first ring dummy pattern, forming a contact hole, which exposes a portion of the first active pattern, by penetrating the third insulating layer, a hole of the first ring dummy pattern, the second insulating layer, and the first insulating layer in order, and forming a drain electrode electrically connected to the first active pattern by filling the contact hole.

In an exemplary embodiment of the inventive concept, a depth of the contact hole may not be less than 10,000 Å.

In an exemplary embodiment of the inventive concept, the method may further include forming an interlayer insulating layer on the second insulating layer before forming the third insulating layer, and forming a second ring dummy pattern overlapping the first ring dummy pattern on the interlayer insulating layer. The contact hole may be formed by partially removing the third insulating layer, a portion of the second ring dummy pattern, the interlayer insulating layer, a portion of the ring dummy pattern, the second insulating layer, and the first insulating layer in order.

According to an exemplary embodiment of the inventive concept, a display apparatus includes a base substrate, a first conductive pattern disposed on the base substrate, a first insulating layer disposed on the first conductive pattern, a second conductive pattern disposed on the first insulating layer, a second insulating layer disposed on second conductive pattern, a ring dummy pattern disposed on the second insulating layer, a third insulating layer disposed on the ring dummy pattern, and a third conductive pattern disposed on the third insulating layer. A contact hole may be formed through the third insulating layer, the second insulating layer, and the first insulating layer, and the contact hole passes through an opening of the ring dummy pattern. The third conductive pattern may be disposed in the contact hole, and electrically connected to the first conductive pattern.

