CROSS-REFERENCE TO RELATED APPLICATIONS

This patent application is based upon and claims priority to Japanese Patent Application No. 2018-210060, filed on Nov. 7, 2018, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The disclosure relates to a cleaning method and a film deposition method.

2. Description of the Related Art

Japanese Patent Application Publication No. 2010-153805 discloses a method of cleaning a film deposition apparatus that includes steps of: rotating a rotatable susceptor that is disposed in a chamber of a film deposition apparatus and includes a substrate receiving region in one face, supplying a cleaning gas to a reverse concave space that is disposed above the susceptor and is defined by a first concave member that opens toward the one surface of the susceptor, and evacuating the cleaning gas through a gas flow passage defined between the first concave member and a second concave member that covers the first concave member.

SUMMARY OF THE INVENTION

The present disclosure provides a cleaning method and a film deposition method for cleaning using etching without damaging a susceptor.

In order to achieve the above-described object, a cleaning method according to one aspect of the present disclosure is provided for dry cleaning a susceptor disposed in a process chamber of a film deposition apparatus. In the method, a protective member is placed on a substrate receiving region provided in the susceptor. A cleaning gas is supplied to the susceptor having the protective member placed on the substrate receiving region, thereby removing a film deposited on a surface of the susceptor by etching.

Additional objects and advantages of the embodiments are set forth in part in the description which follows, and in part will become obvious from the description, or may be learned by practice of the invention. The objects and advantages of the invention will be realized and attained by means of the elements and combinations particularly pointed out in the appended claims. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention as claimed.

