FIELD OF THE DISCLOSURE

The present disclosure relates generally to a microelectromechanical systems (MEMS) device having a diaphragm, and more particularly to MEMS acoustic transducer having a diaphragm including a slotted layer.

BACKGROUND

It has generally been accepted that a multi-layered diaphragm for a MEMS acoustic transducer can suffer from performance degradation resulting from a CTE mismatch between the layers. Slots disposed through one of the layers as presented herein decouples the two layers while also minimizing the stress in the slotted layer.

