CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to Japanese Patent Application No. 2018-222546, filed on Nov. 28, 2018, the entire contents of which are incorporated herein by reference.

TECHNICAL FIELD

The present disclosure relates to an inspection device, a maintenance method, and a program.

BACKGROUND

In a semiconductor device manufacturing process, an inspection device for performing inspection such as electric characteristic test or the like on a manufactured semiconductor device (wafer) is used. As such an inspection device, there is an inspection device capable of inspecting a plurality of wafers simultaneously.

Japanese Patent Application Publication No. 2017-112387 discloses an inspection device having a plurality of inspection chambers. In this inspection device, an inspection area in which a test head is disposed is formed between a transfer area where a transfer unit for transferring a wafer is disposed and a maintenance area where maintenance of the test head is performed in order to facilitate the replacement of a test head provided with a main board that is an inspection circuit. Further, in the inspection area, the inspection chambers accommodating test heads are arranged close to each other. The test heads can be transferred from the inspection chambers to the maintenance area.

SUMMARY

The present disclosure provides a technique capable of improving the maintenance performance of an inspection device having a plurality of inspection chambers.

In accordance with an aspect of the present disclosure, there is provided an inspection device having a plurality of inspection chambers and configured to inspect target objects in the inspection chambers, comprising: a display unit configured to display a screen for operating the inspection device; a maintenance control unit configured to perform a maintenance process on a mechanism related to the inspection chambers; a display control unit configured to display a maintenance screen for receiving an operation for performing the maintenance process on the display unit; a connection unit configured to connect the inspection device and an external device; and an exclusive control unit configured to perform exclusive control for preventing competition in the inspection process or the maintenance process for the same mechanism, wherein the display control unit displays the maintenance screen on the external device connected to the connection unit, the maintenance control unit performs the maintenance process in response to an operation on the maintenance screen displayed on the external device, and the exclusive control unit enables only one operation between an operation on the maintenance screen displayed on the external device or an operation on the screen displayed on the display unit in the case of performing the maintenance process on one mechanism.

