CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to and the benefit of Korean Patent Application No. 10-2019-0108846, filed on Sep. 3, 2019, the entire content of which is hereby incorporated by reference.

BACKGROUND

1. Field

The present disclosure herein relates to a deposition apparatus, and more particularly, to a deposition apparatus with improved uniformity of deposition.

2. Description of the Related Art

A display device may include a plurality of pixels. Each of the plurality of pixels may include an emission layer (or a light emitting layer) disposed between opposite electrodes. The electrodes and the emission layer may be formed by various suitable methods, and one of the various suitable methods may be a vacuum deposition method that deposits a set or predetermined material in a vacuum environment to form a thin layer. In the vacuum deposition method, a mask assembly may be disposed between a source unit and a target substrate in a chamber, and a material of the source unit may be sublimated or evaporated to be deposited on the target substrate.

SUMMARY

Aspects of embodiments of the present disclosure are directed toward a deposition apparatus capable of improving uniformity of deposition.

In an embodiment of the present disclosure, a deposition apparatus may include a chamber, a crucible in the chamber, a cover part covering the crucible, and 2n nozzles (where ‘n’ is a positive integer number) protruding from the cover part and arranged in a first direction. Among the 2n nozzles, a distance between a n-th nozzle and a (n+1)-th nozzle may be greater than a distance between a (2n−1)-th nozzle and a 2n-th nozzle.

In an embodiment, each of the 2n nozzles may include an inlet defined in the same plane as a bottom surface of the cover part, an outlet overlapping a portion of the inlet, and an opening connecting the inlet to the outlet. The outlet may be greater in area than the inlet.

In an embodiment, the opening may include a first opening extending from the inlet in an extending direction, and a second opening extending from the first opening to the outlet in the extending direction. The first opening in a direction perpendicular to the extending direction may be constant in breadth throughout the first opening along the extending direction, and the second opening in the direction perpendicular to the extending direction may have breadth that becomes progressively greater toward the outlet along the extending direction.

In an embodiment, the first opening in the extending direction may be equal to in length to the second opening in the extending direction.

In an embodiment, the lengths of the first and second openings may each be 16 mm.

In an embodiment, a maximum breadth of the second opening may be 2.3 times the breadth of the first opening.

In an embodiment, the breadth of the first opening may be 9.5 mm, and a maximum breadth of the second opening may be 22 mm.

In an embodiment, the cover part may include a top surface parallel to both the first direction and a second direction crossing the first direction, and each of the 2n nozzles may be inclined with respect to a third direction perpendicular to the top surface.

In an embodiment, a first angle between a straight line parallel to the third direction and the (n+1)-th nozzle may be less than a second angle between the straight line parallel to the third direction and the 2n-th nozzle.

In an embodiment, the first angle may be 5 degrees, and the second angle may be 20 degrees.

In an embodiment, the 2n nozzles may include first nozzles inclined at a first angle with respect to a vertical line perpendicular to a top surface of the cover part, second nozzles inclined at a second angle greater than the first angle with respect to the vertical line, third nozzles inclined at a third angle greater than the second angle with respect to the vertical line, fourth nozzles inclined at a fourth angle greater than the third angle with respect to the vertical line, and fifth nozzles inclined at a fifth angle greater than the fourth angle with respect to the vertical line.

In an embodiment, the fifth nozzles may be more in number than the first nozzles, more in number than the second nozzles, more in number than the third nozzles, and more in number than the fourth nozzles.

In an embodiment, the third nozzles may be more in number than the first nozzles, more in number than the second nozzles, and more in number than the fourth nozzles and may be less in number than the fifth nozzles.

In an embodiment, among distances, each of which is a distance between adjacent two of the 2n nozzles, the distance between adjacent two of the fourth nozzles may be the greatest.

In an embodiment, the first nozzles, the second nozzles, the third nozzles, the fourth nozzles and the fifth nozzles may be sequentially arranged in a direction away from a center of the cover part. The n-th nozzle and the (n+1)-th nozzle may be the first nozzles, and a 1st nozzle among the 2n nozzles and the 2n-th nozzle may be the fifth nozzles.

In an embodiment, the deposition apparatus may further include angle limiting parts each having a length extending in the first direction and spaced apart from each other with the 2n nozzles interposed therebetween.

In an embodiment of the present disclosure, a deposition apparatus may include a chamber, a crucible in the chamber, a cover part covering the crucible and including a top surface parallel to both a first direction and a second direction crossing the first direction, and a plurality of nozzles protruding from the cover part and arranged with each other in the first direction. A distance between adjacent two of the plurality of nozzles may be varied depending on a position, and each of the nozzles may be inclined with respect to a third direction perpendicular to the top surface.

In an embodiment, the plurality of nozzles may be 2n in number, where ‘n’ is a positive integer number. Among the nozzles, a distance between a n-th nozzle and a (n+1)-th nozzle which are in a central area of the cover part may be greater than a distance between a (2n−1)-th nozzle and a 2n-th nozzle which are in an outer area of the cover part.

In an embodiment, the plurality of nozzles may be 2n in number, where ‘n’ is a positive integer number. Among the 2n nozzles, a distance between a n-th nozzle and a (n+1)-th nozzle which are in a central area of the cover part may be greater than a distance between a (2n−1)-th nozzle and a 2n-th nozzle which are in an outer area of the cover part.

In an embodiment, each of the plurality of nozzles may include an inlet defined in the same plane as a bottom surface of the cover part, an outlet overlapping a portion of the inlet and being greater in area than the inlet, and an opening connecting the inlet to the outlet. The opening may include a first opening extending from the inlet in an extending direction, and a second opening extending from the first opening to the outlet in the extending direction. The first opening in a direction perpendicular to the extending direction may be constant in breadth throughout the first opening along the extending direction, and the second opening in the direction perpendicular to the extending direction may have breadth that becomes progressively greater toward the outlet along the extending direction.

