The present disclosure relates generally to fluid distributors and methods for using the same to deposit a layer and, more particularly, to fluid distributors comprising a first conduit circumscribed by a second conduit and methods for using the same to deposit a layer.

BACKGROUND

Known fluid distributors fail to distribute fluid uniformly. In deposition methods, nonuniform fluid distribution can lead to variations in thickness of the deposited layer. In optical applications involving carefully tuned interference stacks or other applications, such variation can lead to unacceptably low yield rates. Additionally, variations in thickness can produce internal stress distributions that can impair the functionality of the resulting device. Example devices can include liquid crystal displays (LCDs), electrophoretic displays (EPD), organic light emitting diode displays (OLEDs), plasma display panels (PDPs), and touch sensors.

Also, known fluid distributors may distribute fluid that is not well-mixed. In reactive deposition methods, this can produce layers with variations in stoichiometry. For optical applications, variations in stoichiometry can correspond to variations in refractive index. In high performance optical devices such as those listed above, such variations may be noticeable by consumers.

Accordingly, there is a need for new fluid distributors, which distribute well-mixed fluids with substantially uniform stoichiometry and mass-flow rates. Such fluid distributors are needed to increase deposition yield rates and enable new technologies requiring more uniform distributions.

SUMMARY

There are set forth fluid distributors comprising a first conduit circumscribed by a second conduit that can be used to deposit a layer with substantially uniform thickness and substantially uniform stoichiometry. Some example embodiments of the disclosure are described below with the understanding that any of the embodiments may be used alone or in combination with one another.

Embodiment 1

A fluid distributor comprises a first conduit that can extend along a first elongated axis and a second conduit that may circumscribe the first conduit. The first conduit can comprise a first flow area comprising a cross-sectional area taken perpendicular to the first elongated axis. Also, the first conduit can comprise a first plurality of orifices comprising a first combined cross-sectional flow area. A first ratio of the first cross-sectional area to the first combined cross-sectional flow area can be about 2 or more. A first orifice of the first plurality of orifices may comprise an orifice axis that is perpendicular to the first elongated axis. The second conduit can extend along a second elongated axis. The second conduit can comprise a second plurality of orifices comprising a second combined cross-sectional flow area. A second ratio of the first combined cross-sectional flow area of the first plurality of orifices to the second combined cross-sectional flow area of the second plurality of orifices can be about 2 or more. A first orifice of the second plurality of orifices may comprise an orifice axis that can be perpendicular to the second elongated axis. A first angle between a direction of the orifice axis of the first orifice of the first plurality of orifices and a direction of the orifice axis of the first orifice of the second plurality of orifices can be in a range from about 45° to about 180°.

Embodiment 2

The fluid distributor of embodiment 1, where the first ratio is greater than the second ratio.

Embodiment 3

The fluid distributor of embodiment 1 or embodiment 2, where the first angle is in a range from about 90° to about 180°.

Embodiment 4

The fluid distributor of any one of embodiments 1-3, where the first angle is in a range from about 90° to about 135°.

Embodiment 5

The fluid distributor of any one of embodiments 1-3, where the first angle is in a range from about 170° to about 180°.

Embodiment 6

The fluid distributor of any one of embodiments 1-5, where the first plurality of orifices is staggered relative to the second plurality of orifices in a direction of the first elongated axis.

Embodiment 7

The fluid distributor of any one of embodiments 1-6, where the first conduit comprises an inner circular profile taken along a cross-section perpendicular to the first elongated axis.

Embodiment 8

The fluid distributor of any one of embodiments 1-7, where the second conduit comprises an inner circular profile taken along a cross-section perpendicular to the second elongated axis.

Embodiment 9

The fluid distributor of any one of embodiments 1-8, where a second orifice of the second plurality of orifices comprises an orifice axis that can be perpendicular to the second elongated axis. An angle between the direction of the orifice axis of the first orifice of the second plurality of orifices and a direction of the orifice axis of the second orifice of the second plurality of orifices is in a range from about 45° to about 180°.

Embodiment 10

The fluid distributor of embodiment 9, where the angle between the direction of the orifice axis of the first orifice of the second plurality of orifices and the direction of the orifice axis of the second orifice of the second plurality of orifices is in a range from about 90° to about 135°.

Embodiment 11

The fluid distributor of any one of embodiments 1-8, where a second orifice of the second plurality of orifices comprises an orifice axis that can be perpendicular to the second elongated axis. The orifice axis of the first orifice of the second plurality of orifices and the orifice axis of the second orifice of the second plurality of orifices extends along a first common plane that can be perpendicular to the second elongated axis.

Embodiment 12

The fluid distributor of any one of embodiments 1-8, where a second orifice of the second plurality of orifices may comprise a second orifice cross-sectional flow area. The first orifice of the second plurality of orifices comprises a first orifice cross-sectional flow area. The first orifice of the second plurality of orifices may be closer to an inlet of the first conduit than the second orifice of the second plurality of orifices. The second orifice cross-sectional flow area can be greater than the first orifice cross-sectional flow area.

Embodiment 13

The fluid distributor of any one of embodiments 1-8, where a second orifice of the second plurality of orifices may comprise a second orifice cross-sectional flow area. The first orifice of the second plurality of orifices may comprise a first orifice cross-sectional flow area that can be substantially equal to the second orifice cross-sectional flow area.

Embodiment 14

The fluid distributor of any one of embodiments 1-13, where a second orifice of the first plurality of orifices comprises an orifice axis extending perpendicular to the first elongated axis. A third orifice of the first plurality of orifices comprises an orifice axis extending perpendicular to the first elongated axis. The orifice axis of the first orifice of the first plurality of orifices is spaced a first distance from the orifice axis of the second orifice of the first plurality of orifices. The orifice axis of the third orifice of the first plurality of orifices is spaced a second distance from the orifice axis of the second orifice of the first plurality of orifices. The first distance may be substantially equal to the second distance.

Embodiment 15

The fluid distributor of embodiment 14, where the orifice axis of the first orifice of the first plurality of orifices, the orifice axis of the second orifice of the first plurality of orifices, and the orifice axis of the third orifice of the first plurality of orifices extend along a second common plane containing the first elongated axis.

Embodiment 16

The fluid distributor of any one of embodiments 1-13, where the first elongated axis is coincident with the second elongated axis.

Embodiment 17

The fluid distributor of embodiment 16, where a second orifice of the first plurality of orifices comprises an orifice axis extending perpendicular to the first elongated axis. The orifice axis of the first orifice of the first plurality of orifices is spaced a first distance from the orifice axis of the first orifice of the second plurality of orifices. The orifice axis of the second orifice of the first plurality of orifices is spaced a second distance from the orifice axis of the second orifice of the first plurality of orifices. The first distance can be substantially equal to the second distance.

Embodiment 18

The fluid distributor of any one of embodiments 1-13, where a second orifice of the first plurality of orifices comprises a second orifice cross-sectional flow area. The first orifice of the first plurality of orifices may comprise a first orifice cross-sectional flow area. The first orifice of the first plurality of orifices is closer to an inlet of the first conduit than the second orifice of the first plurality of orifices. The second cross-sectional flow area can be greater than the first cross-sectional flow area.

Embodiment 19

The fluid distributor of any one of embodiments 1-13, where a second orifice of the first plurality of orifices comprises a second orifice cross-sectional flow area. The first orifice of the first plurality of orifices comprises a first orifice cross-sectional flow area that can be substantially equal to the second cross-sectional flow area.

Embodiment 20

A method of distributing fluid with the fluid distributor of any one of embodiments 1-19 may comprising flowing the fluid within the first flow area of the first conduit. The method may also comprise flowing the fluid through orifices of the first plurality of orifices. The method may also comprise flowing the fluid through the second flow area of the second conduit. The method may also comprise flowing the fluid through orifices of the second plurality of orifices. The method may also comprise reacting the fluid with a metal to form a product. The method may also comprise depositing the product on a substrate to form a layer of the product on the substrate.

Embodiment 21

The method of distributing fluid of embodiment 20, where a first mass flow rate through the first orifice of the second plurality of orifices is within about 3% of a second mass flow rate through a second orifice in the second plurality of orifices.

Embodiment 22

The method of distributing fluid of embodiment 21, where the first mass flow rate is substantially equal to the second mass flow rate.

Embodiment 23

The method of distributing fluid of any one of embodiments 20-22, where the fluid comprises at least one of argon, neon, helium, krypton.

Embodiment 24

The method of distributing fluid of any one of embodiments 20-23, where the fluid comprises oxygen.

Embodiment 24

The method of distributing fluid of any one of embodiments 20-24, where the fluid comprises nitrogen.

