This application claims the benefit of German Application No. 102018207605.7, filed on May 16, 2018, which application is hereby incorporated herein by reference.

TECHNICAL FIELD

The present disclosure relates to a MEMS sensor, for example a MEMS microphone or a pressure sensor, to a MEMS sensor system and to a method for providing a MEMS sensor system. The present disclosure furthermore relates to a MEMS microphone comprising two sound entry openings (Dual Port Microphone).

BACKGROUND

Microelectromechanical systems (MEMS) comprising membranes can be produced using silicon technology and can have a functionality based on the deflection of the membrane. Examples of such MEMS are MEMS microphones and/or MEMS loudspeakers, which, on the basis of inverse operation, convert an electrical signal into a sound pressure (loudspeaker) or convert a variation in the sound pressure into an electrical signal (microphones). Pressure sensors are also based on the principle of converting a sound pressure into an electrical signal, and are likewise able to be embodied as MEMS.

MEMS sensors, MEMS sensor systems and a method for producing a MEMS sensor system which have a high diversity with respect to the device or systems in which the later MEMS sensor is used would be desirable.

SUMMARY

Exemplary embodiments provide a MEMS sensor comprising a sensor package and a membrane arranged in the sensor package, wherein a first partial volume of the sensor package adjoins a first main side of the membrane and a second partial volume of the sensor package adjoins a second main side of the membrane, wherein the second main side is arranged opposite the first main side. The MEMS sensor comprises a first opening in the sensor package, said first opening connecting the first partial volume to an external environment of the sensor package in an acoustic fashion. The MEMS sensor comprises a second opening in the sensor package, said second opening connecting the second partial volume to the external environment of the sensor package in an acoustic fashion. This makes it possible to use the MEMS sensor in different systems with an identical or comparable design of the individual components. In this regard, by way of example, a back volume can be configured differently in order to influence or to set the frequency response of the membrane, such that an identical MEMS module exhibits different properties in different systems (back volumes) and is therefore usable in a flexible manner.

In accordance with one exemplary embodiment, a MEMS sensor comprises a sensor package and a membrane arranged in the sensor package. A first partial volume of the sensor package adjoins a first main side of the membrane and a second partial volume of the sensor package adjoins a second main side of the membrane. The second main side is arranged opposite the first main side. A first opening in the sensor package connects the first partial volume to an external environment of the sensor package in an acoustically transparent fashion. A second opening in the sensor package adjoins the second partial volume. The MEMS sensor comprises an elastic element arranged in the second opening and configured to alter a content of the second partial volume on the basis of a fluid pressure in the external environment. This enables a setting of a pressure in the second partial volume by deflection of the flexible element and thus a setting of the frequency response of the membrane, such that this MEMS sensor is also usable in a flexible manner.

Exemplary embodiments provide a MEMS sensor system comprising a sensor package having a system volume. The MEMS sensor system comprises a MEMS sensor, wherein the system volume is coupled to the first partial volume either via the first opening or via the second opening, wherein the MEMS sensor is fluidically coupled to an environment of the MEMS sensor system via the other opening of the first and second openings. The system volume sets a resonant frequency of the membrane for fluid sound in the environment of the MEMS sensor system.

In accordance with one exemplary embodiment, a method for producing a MEMS sensor system comprises arranging a membrane in a system volume of a MEMS sensor system, such that the membrane is arranged between a first partial volume of the MEMS sensor system and a second partial volume of the MEMS sensor system. The second partial volume is configured such that a frequency response of the membrane responding to a pressure change in a system environment that is fluidically coupled to the first partial volume is adapted to a target specification.

