TECHNICAL FIELD

The present application relates to SiC (silicon carbide) semiconductor components, for example semiconductor switches with low on resistance and high dielectric strength.

BACKGROUND

Semiconductor components with a broad bandgap are based on a semiconductor material having a bandgap of at least 2 eV or at least 3 eV and, by comparison with conventional silicon-based semiconductor devices, enable a lower on resistance, operation at high temperatures, lower switching losses and/or lower leakage currents. In the configuration of SiC semiconductor components, it is necessary to optimize a multitude of different component parameters, for example doping and dimensioning of semiconductor areas with regard to required component properties such as on resistance or else turn-off characteristics. Compromises have to be entered into here in the required component properties since the change in one component parameter can have different effects on the component properties, for example can lead to an improvement in one component property with simultaneous deterioration in another component property. Against this background, the application is concerned with the improvement of the turn-off operation of SiC semiconductor components.

SUMMARY

This disclosure relates to a semiconductor component having an SiC semiconductor body. A first load terminal is formed on a first surface of the SiC semiconductor body. A second load terminal is formed on a second surface, opposite the first surface, of the SiC semiconductor body. The semiconductor component additionally has a drift zone of a first conductivity type in the SiC semiconductor body and a first semiconductor area of a second conductivity type electrically connected to the first load terminal. A pn junction between the drift zone and the first semiconductor area defines a voltage blocking strength of the semiconductor component. A second semiconductor area of the second conductivity type is formed between at least part of the drift zone and the second surface.

Those skilled in the art will recognize additional features and advantages upon reading the following detailed description, and upon viewing the accompanying drawings.

