The invention relates to a light receiver having a plurality of avalanche photodiode elements that can each be biased above a breakdown voltage by a bias voltage and can thus be operated in a Geiger mode, wherein the avalanche photodiode elements form a plurality of groups, and having a control unit to change the sensitivity of the avalanche photodiode elements of a respective group. The invention further relates to a method of detecting light using a plurality of avalanche photodiode elements that are each operated at least phase-wise at a bias voltage above a breakdown voltage and thus in a Geiger mode, wherein the avalanche photodiode elements form a plurality of groups and the sensitivity of the avalanche photodiode elements of a respective group is changed.

A light receiver has the function of generating an electrical signal from incident received light. The detection sensitivity of simple photodiodes is not sufficient in a number of application cases. In an avalanche photodiode (APD), the incident light triggers a controlled avalanche effect. The charge carriers generated by incident photons are thus multiplied and a photocurrent is produced that is proportional to the received light intensity, but that is in this respect substantially larger than with a simple PIN diode. In the so-called Geiger mode, the avalanche photodiode is biased above the breakdown voltage such that a single charge carrier released by a single photon can already trigger an avalanche that then recruits all the available charger carriers due to the high field strength. The avalanche photodiode thus, like the eponymous Geiger counter, counts individual events. Geiger-mode avalanche photodiodes are also called SPADs (single photon avalanche diodes).

Geiger-mode APDs or SPADs are therefore very fast, highly sensitive photodiodes based on semiconductors. A disadvantage of the high sensitivity is that not only a useful light photon, but also a weak interference event due to extraneous light, optical crosstalk or dark noise can trigger the avalanche effect. This interference event then contributes to the measurement result with the same relatively strong signal like the received useful light and cannot be distinguished therefrom, even out of the signal. The sensitivity of the avalanche photodiode is subsequently dramatically reduced for a dead time or recovery time of approximately 5 to 100 ns so that it is practically down for further measurements for so long. It is therefore customary to evaluate a plurality of SPADs statistically. A typical silicon photomultiplier (SiPM) using SPADs has several thousand SPADs.

Light receivers using SPADs are also suitable for a time of flight (TOF) measurement for a distance measurement using laser pulses. A TDC (time-to-digital) converter is here, for example, started at a transmission time point of the laser pulse and is stopped again on a reception of the laser pulse after reflection by a target object. The described dead time effect can, for example, impair the measurement capability at higher temperatures with a large number of dark events without light reception or with a large amount of extraneous light irradiation. This should in any case be taken into account in the determination of a reception time point because the measured value is otherwise falsified, particularly if the number of photons reflected back by the target object within the recovery time substantially exceeds the total number of pixels.

However, the prior art does not provide any satisfactory solution for this. EP 2 708 914 A1 discloses a SPAD-based sensor for recording a depth map in which a transmitted light beam deflected by a MEMS mirror scans the scene. Only those SPADs are respectively active on which the region of the scene illuminated by the transmitted beam is imaged. This serves for a spatial resolution by scanning, but does not improve the respective distance measurement at the scanned location in any manner.

A further sensor having avalanche photodiodes in a Geiger mode is known from EP 3 270 182 A1. Its sensitivity is dynamically adapted by the bias voltage. In an embodiment, the sensitivity is initially set as low and is then increased in accordance with the propagation speed of light. The probability that avalanche photodiodes that have not yet triggered are also available on an echo from a distant object due to the initially lower sensitivity is thus admittedly increased. However, this measure is not sufficient under unfavorable conditions, for example with a large amount of extraneous light, and falsifications of the measured value due to effects of the dead times remain completely out of consideration.

A so-called electronic diaphragm for a SPAD-based light receiver is proposed in EP 3 339 887 A1. The electronic diaphragm provides a spatial distribution of the sensitivity through a different adaptation of the bias voltage via the light receiver or a suppression of the signals of specific SPADs on reading. A checkerboard having alternatingly active and inactive SPADs is proposed as an exemplary pattern. This pattern then remains fixed and there is no further discussion on the benefit this pattern has.

DE 10 2014 207 599 A1 discloses a photodetector having a plurality of avalanche photodiodes per picture element that are activated in turn with a time offset to one another. The individual active time duration is smaller than the regeneration time; however, summed over the avalanche photodiodes of a picture element, the time durations are greater than the regeneration time so that a continuous operation is made possible. However, a larger number of avalanche photodiodes per picture element is required for this purpose. In addition, the activation sequence for all the picture elements is the same so that no flexibility remains in the spatial distribution of the respectively active avalanche photodiodes.

It is therefore the object of the invention to improve the adaptation of the avalanche photodiodes to a measurement.

This object is satisfied by a light receiver and by a method of detecting light using a plurality of avalanche photodiode elements in accordance with the respective independent claim. If a bias voltage above the breakdown voltage is applied to the avalanche photodiode elements, they operate in Geiger mode. The avalanche photodiode elements are combined into groups, with the avalanche photodiode elements of one group in particular being distributed in a pattern-like manner over the light receiver. A control unit can change the sensitivity of the avalanche photodiode elements groupwise.

The invention starts from the basic idea of adjusting the sensitivities of the groups in a time sequence. A time distribution is thus added to the spatial distribution by means of the groups. Different points in time are assigned to the groups, preferably differing in a complete manner such that no two points in time are the same. At the assigned points in time, the avalanche photodiodes of the group are set to a sensitivity associated with the point in time and/or with the group. This sensitivity can be a configuration or a stored value, but the can also be predefined by the circuit, for instance by resistance values, capacitances, and the like in the interconnection of the avalanche photodiodes. The change in the sensitivity preferably includes the extreme case of an activation or deactivation, in particular in a form such that a change takes place between the linear mode and the Geiger mode. There is a factor of 105-106in sensitivity between this, which is equal to an activation and a deactivation.

The invention has the advantage that a high flexibility and adaptability to measurement demands is achieved. Groups of avalanche photodiodes are suitably distributed over the surface for this purpose and their sensitivity is adapted in a specific time sequence. This can in particular be optimized for time of flight measurements to correct or to avoid measurement errors efficiently and inexpensively by a black-and-white displacement. In addition, the dark triggers that are alternatingly active are reduced, for example to approximately half in the case of two groups, in favor of an improved signal-to-noise ratio and a smaller power consumption.

The control unit is preferably configured to activate avalanche photodiode elements by increasing the bias voltage above the breakdown voltage and/or by decreasing the bias voltage below the breakdown voltage. The sensitivity is here not only changed gradually, but is also activated and/or deactivated by changing between the linear mode (APD mode) and the Geiger mode.

The control unit is preferably configured to change the sensitivity by an overvoltage assigned to the group above the breakdown voltage. The breakdown voltage is the minimal required bias voltage for the Geiger mode. Strictly speaking however, the photon detection efficiency (PDE) and the gain are still zero at this limit value. Incident photons are only converted into corresponding Geiger current pulses when the bias voltage exceeds the breakdown voltage, with the trigger probability increasing with the overvoltage. A gradual sensitivity control with different sensitivities of the groups is thus achieved by means of different overvoltages. It is also conceivable to provide the same group with different overvoltages and thus sensitivities at two different points in time.

A time of flight measurement unit is preferably provided that is configured to determine a time of flight of a light pulse from the signals of the avalanche photodiode elements. A reception time point derived from the signals is for this purpose preferably compared with an optically or electrically acquired reference time point of the transmission of the light pulse, for example by means of TDCs. Since a measurement event and an interference event cannot be distinguished in a single avalanche photodiode in Geiger mode, statistical processes are preferably used over a plurality of avalanche photodiodes or measurement repetitions.

The points in time preferably define at least one adaptation time window per group at whose start the control unit sets the avalanche photodiode elements to a sensitivity assigned to the group and at whose end the control unit sets the avalanche photodiode elements to the previous sensitivity. The adaptation time window is in particular an activation time window at whose start the avalanche photodiodes are activated and whose end they are deactivated. A plurality of such time windows are possible. It is alternatively conceivable to activate the groups or to set them to the desired sensitivity only in a cascaded manner by means of the points in time and not to reset them or only to reset them after a longer time, for instance together at the end of a measurement.

The points in time with respect to the different groups are preferably distributed over an event time window. The points in time are therefore staggered so that the groups, preferably regularly, share the event time window. In this respect, exactly one group is preferably active or particularly sensitive at each moment. Times of interest can alternatively be present, for instance at an expected measurement event, at which a plurality of groups are active or particularly sensitive, or conversely masking time windows can be created in which all the groups are inactive or insensitive. An example for such a masking is the front pane reflection in a time of flight measurement that unnecessarily sets avalanche photodiode elements into the dead time, which can be avoided by an inactive time interval briefly after transmission of the light pulse.

The event time window preferably has a duration corresponding to a light pulse. A time of flight is in particular measured by a light pulse and it is a very short light pulse of at most some nanoseconds in length, where possible even in the picosecond range. The event time window does not have to have exactly the duration of a light pulse; the order of magnitude is sufficient since the received pulse does not ideally correspond to the transmitted pulse.

Alternatively, the event time window corresponds to a measurement time window, for example corresponding to the duration a light pulse requires on the way to and from the limit of the range of a time of flight process. In this case, however, the received pulse is as a rule only detected in one group, at best in two groups, so that this is only a measure against general interference due to extraneous light and dark noise, but hardly improves the measurement resolution for the received pulse itself.

The sequence of the points in time is preferably periodically repeated, in particular in that a further event time window respective adjoins an event time window and is treated in the same way. The respective time windows in which a group is set to a specific sensitivity can thus remain brief and greater time periods can also nevertheless be covered with few groups by the periodic repetition.

The points in time are preferably distributed such that the avalanche photodiode elements of a different group are alternatingly particularly sensitive. The sensitive groups thus alternate with one another according to a sequence predefined by the points in time. Exactly one group is in particular respectively active, while the other groups are deactivated. There are preferably only some groups, i.e. two, three, four, five, or six to ten groups. If the groups share a typical pulse duration for a time of flight process in the order of magnitude of at most some nanoseconds, the dead time is by no means bridged after one passage through all the groups.

However, this also does not have to be the case since only the received light pulse triggers a large number of the avalanche photodiodes. The received pulse is therefore registered with even greater numbers of avalanche photodiodes that are not in their dead times due to a preferred periodic repetition of the sequence. The measurement is anyway ended after the received pulse; all the avalanche photodiodes have recovered up to a measurement repeat. At least one further population of groups could be kept available for the detection of further received pulses for a system capable of multiple targets.

The avalanche photodiode elements preferably form a matrix arrangement, with each group having an avalanche photodiode element in each matrix element in a subdivision of the matrix arrangement into a grid of matrix elements. A matrix arrangement of n×m avalanche photodiodes is here divided into a grid of a plurality of matrix elements having i×j avalanche photodiodes. At least one avalanche photodiode from each group is present in each matrix element. A comparable sensitivity thus results over the light receiver.

The avalanche photodiode elements of two groups preferably form a checkerboard pattern. Different granularities are conceivable here in which respective regions having k avalanche photodiodes belong to the same pattern element of the checkerboard. The checkerboard pattern can be understood as a special case of a grid of matrix elements having two groups, with the additional condition that the order of the setting of the sensitivities of the avalanche photodiodes reverses in respective adjacent matrix elements.

Two respective avalanche photodiodes from two different groups preferably form an at least dual avalanche photodiode having at least one front avalanche photodiode and one rear avalanche photodiode in which an avalanche effect of the front avalanche photodiode changes the sensitivity of the rear avalanche photodiode. The terms front and rear avalanche photodiodes only serve the distinction of terms and are based on a preferred time sequence. In fact, both avalanche photodiodes can be of identical designs or can swap roles. In the dual avalanche photodiode, the point in time at which the rear avalanche photodiode becomes active is automatically controlled by the triggering of the front avalanche photodiode. The avalanche effect of the front avalanche photodiode particularly preferably provides a changed bias voltage at the rear avalanche photodiode. Changes in both directions, that is a rise and a fall, are conceivable here and this change can gradually set the sensitivity by means of an adapted overvoltage or can cross the threshold of the breakdown voltage and thus effectively activate or deactivate the rear avalanche photodiode.

The sequential switching of an at least dual avalanche photodiode has a number of advantages. It effects a suppression of pixel crosstalk. Defective avalanche photodiodes that erroneously trigger can be suppressed in that the intact avalanche photodiode is operated at a higher overvoltage and the defective avalanche photodiode is only operated at the breakdown voltage. An extinction resistance that is responsible for the extinction of the avalanche on a detection event can be reduced and a higher output signal can thus be reached. The output capacity of the light receiver can specifically be reduced to a quarter by a serial connection of the front and rear avalanche photodiodes. n cells with n capacitances connected in parallel can be replaced with n/2 dual cells each having half the capacitance. It is possible to expand the concept of the dual cells to k-fold avalanche photodiodes having a chain of k avalanche photodiodes, with then a respective avalanche in an avalanche photodiode changing the sensitivity of the next avalanche photodiode in the chain. The switchover between the two avalanche photodiodes can take place electrically without interference, that is without generating interference signals on the switching procedure. The switching effort for the separate control of the second avalanche photodiode is minimal and only requires a coupling resistance, for example. The dead time or recovery time can be influenced and controlled by the selection of the coupling resistance and the capacitances. The electrical and optical crosstalk can be reduced by reducing the number of simultaneously active adjacent avalanche photodiodes.

An interconnection unit is preferably associated with the dual avalanche photodiode that maintains the front avalanche photodiode at a bias voltage above the breakdown voltage and the rear avalanche photodiode at a bias voltage below the breakdown voltage in the state of rest before an avalanche effect. A voltage divider circuit is in particular provided for this purpose that represents a very simple and inexpensive implementation option. It asymmetrically distributes a total voltage that is in an order of magnitude of twice the breakdown voltage. In the state of rest only the front avalanche photodiode is supplied above the breakdown voltage and is thus active. It becomes low ohmic on an avalanche effect so that now a higher voltage is applied to the rear avalanche photodiode that moves it over the breakdown voltage and thus into the Geiger mode and thus activates it.

Alternatively, the total voltage and the ratio are such that the front and rear avalanche photodiodes are supplied with different overvoltages and therefore gradually differ in their sensitivities, with an avalanche effect changing the ratio of the sensitivities. In a further embodiment, the avalanche effect in the one avalanche photodiode does not produce an activation, but rather conversely produces a deactivation of the other avalanche photodiode whose bias voltage is urged below the breakdown voltage. Both avalanche photodiodes are thus active in the rest state. With a strong received signal, a receiving avalanche photodiode suppresses a received signal of its partner. This prevents an overmodulation and as soon as the bias voltage of the second avalanche photodiode increases above the breakdown voltage again directly after the avalanche effect, the second avalanche photodiode is available for a further detection without any recovery time for charging.

The voltage dividers and thus the respectively applied voltages can be provided per dual avalanche photodiode, but can also be provided interconnected in parallel for a plurality of avalanche photodiodes, in particular a row or column. The division ratio can be fixed or settable by the switching elements.

A delay circuit is preferably provided that activates or deactivates the rear avalanche photodiode after a predefinable delay time after an avalanche effect in the front avalanche photodiode. The delay time can be fixed by elements of the delay circuit or it can be set by a control. The choice of the ratio of a voltage divider is one possibility of influencing the delay time for a crossing of the bias voltage via the required voltage difference.

In an advantageous further development, an optoelectronic sensor having at least one light receiver in accordance with the invention is provided, with the sensor being configured for a distance measurement and/or as a code reader and/or for data transmission. The distance can be determined by triangulation such as in a triangulation scanner or a stereo camera. Further non-exclusive applications of the light receiver in an optoelectronic sensor are code reading or data transfer or combinations of these applications in a sensor.

The sensor is particularly preferably a distance measuring sensor having a light transmitter for transmitting a light signal and having a time of flight measurement unit that is configured to determine a distance of the object from a time of flight between the transmission of the light signal and the reception of the light signal remitted from the monitored zone. The light signal preferably has a light pulse and the sensor measures distances according to the pulse method. More complicated shapes such as double pulses or even pulse codes are also conceivable here. A plurality of light pulses can also be consecutively transmitted and the respective individual results can be statistically evaluated together, for instance in a pulse averaging method. The time of flight process can be used in a one-dimensional distance scanner, a laser scanner or an image sensor of a 3D camera in accordance with the time of flight principle.

The method in accordance with the invention can be further developed in a similar manner and shows similar advantages in so doing. Such advantageous features are described in an exemplary, but not exclusive manner in the subordinate claims dependent on the independent claims.

