CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority from Japanese Patent Application No. 2019-057092, filed in the Japanese Patent Office on Mar. 25, 2019, and Japanese Patent Application No. 2019-194959, filed in the Japanese Patent Office on Oct. 28, 2019, the entire contents of each of which are herein incorporated by reference in their entireties.

BACKGROUND

1. Field

The present disclosure relates to an ion beam irradiation apparatus and a program therefor.

2. Description of Related Art

An ion implantation apparatus is equipped with a plurality of modules for generating an ion beam, and each module typically is set up based on various preliminarily set basic operation parameters. .

Typically, an initial value is preliminarily stored in a memory according to a recipe for the processing, or a value used during a previous set up under the same recipe is used as an initial value in a later set up procedure.

However, there is a disadvantage in that, if a state of a module changes due to degradation or maintenance such that the state is different from the previous processing, a setup time period to obtain the adjusted value can be extended, or the quality of an ion beam can be changed, even when the same recipe is used to in the set up procedure and a same value is input as the initial value.

SUMMARY

It is an aspect to make it possible to adequately determine an initial value in a set up procedure for a module to allow a setup time period to be shortened, or to allow a desired ion beam to be generated.

According to an aspect of one or more embodiments, there is provided an ion beam irradiation apparatus comprising a plurality of modules for generating an ion beam meeting a processing condition; a memory storing program code; and at least one central processing unit (CPU) which accesses the memory to read the program code and execute the program code to operation as a machine learning part that generates a learning algorithm using, as an explanatory variable, a processing condition during new processing and a monitored value that indicates a state of at least one of the modules during a last processing immediately before the new processing; and a basic operation parameter output part that uses the learning algorithm to output an initial value of a basic operation parameter for controlling an operation of the at least one of the modules.

According to another aspect of one or more embodiments, there is provided a computer readable storage medium storing program code for operating the ion beam irradiation apparatus as the machine learning part and the basic operation parameter output part.

