the method of reactive sputtering is effective to form an insulating film to cover the semiconductor devices or to insulate interconnecting layers already fabricated on a semiconductor substrate.
Particularly, in the reactive sputtering method which uses a magnetron sputtering apparatus, crossed (at right angles) electric and magnetic fields are created near a target material to enhance the efficiency in generating plasma for activating the reactive gas. And thus, with a relatively low degree of vacuum, atoms ejected by sputtering and a reactive gas are caused to react efficiently with each other. Because of this, the reactive sputtering method excells in forming a quality film having a high degree of adhesiveness, and has come to be frequently used.
In spite of these advantages found with the magnetron sputtering apparatus, it isSauber experience behind strong start to 2012

Sauber CEO Monisha Kaltenborn has put the team's good start to 2012 down to experience after watching second year driver Sergio Perez take the fight to Fernando Alonso's Ferrari in Malaysia.

Few who witnessed the team's struggle at the end of 2011, when it slipped to rear of a battle with Force India and Toro Rosso, would have expected to see the young Mexican become a leading light of round two, but Kaltenborn insists that, despite being adversely affected by the decision not to ban blown diffusers midway through the season, Sauber - which was also still returning to health after being unceremoniously dumped by BMW - always had the potential to bounce back.

"The second half of 2011 was definitely painful for us,