processing. It can be appreciated that teaching the precise location of each of the chambers prevents an undesired collision of the substrate with the walls of the chambers while the substrate is being transported. A collision may damage the substrate.
Teaching the location of each of the adjacent chambers is often performed at atmospheric pressure. During normal non-teaching operation, however, the transport chamber is usually evacuated to a desired operating vacuum pressure. Mechanical deflections may occur in the transport chamber as a result of this evacuation. The mechanical deflections may result in a significant variation in the location of the transport robot which is mounted to the transport chamber. As the location of the transport robot varies, the location of each of the processing chambers relative to those taughtantiquarian
enough to know; nor would it be worth while to correct myself,
perhaps, of an agreeable error, by reading the date of its
erection on the tablet over the door. It is a stately church,
surrounded by an inclosure of the loveliest green, within which
appear urns, pillars, obelisks, and other forms of monumental
marble, the tributes of private affection, or more splendid
memorials of historic dust. With such a place, though the tumult
of the city rolls beneath its tower, one would be willing to
connect some legendary interest.

The marriage might be considered as the result of an early
engagement, though there had been two intermediate weddings on
the lady's part, and forty years of celibacy on that of the
gentleman. At sixty-five, Mr. Ellenwood was a shy, but not quite
a secluded man; selfish, like all men who