metal at the first region and the second region of the substrate during a chemical mechanical polishing process to be performed. Additionally, the method includes depositing the metal on the substrate by electroplating, wherein a deposition thickness of the metal in the first and second regions is adjusted in correspondence to the estimated expected removal rate in the first and second regions. Moreover, excess metal is removed by chemical mechanical polishing to produce the metal lines.
In a further embodiment, a method of forming metal lines comprises providing a substrate with a central region and a peripheral region, wherein the central region and the peripheral region each have a recessed portion defining a height dimension. Moreover, a metal layer is deposited over the substrate, wherein an averaged layer thicknessNASA Shows Off Next-Generation Spaceship

WASHINGTON – NASA gave visitors to the National Mall in Washington a peek at a full-size mock-up of the spacecraft designed to carry U.S. astronauts back to the moon and then on to Mars one day.

The U.S. Navy-built Orion crew exploration vehicle will replace the space shuttle NASA plans to retire in 2010, and become the cornerstone of the agency's Constellation Program to explore the moon, Mars and beyond.

"We're just very proud to build this, do some testing and demonstrate to America that we're moving beyond the space shuttle onto another generation of spacecraft," said Don Pearson, project manager for the Post-Landing Orion Recovery Test or PORT.

NASA plans to use Orion to carry astronauts to the International Space Station by 2015. The capsule will