and a so-called xe2x80x9ctrailing phenomenonxe2x80x9d that patterns in the vicinity of a basic substrate, particularly, a substrate made of silicon nitride or titanium nitride are widened.
It is presumed that the T-top profile results from lowering in the solubility of the surface of a resist film, while the trailing phenomenon on a substrate results from lowering in solubility in the vicinity of the substrate.
In addition, during the time from exposure to PEB, a dark reaction for eliminating an acid-labile group proceeds, leading to a problem that the leaving size of the line of a positive resist decreases.
These problems are serious hindrance to practical use of the chemically amplified resist. Such problems of the conventional chemically amplified positive resist material not only make difficult dimensional control upon lithography but alsoThe youngest son of former vice presidential candidate and Virginia Senator Tim Kaine was arrested in Minnesota last weekend for his alleged role in an organized riot against Donald Trump and his policies.

Authorities discovered that Linwood Michael Kaine, 24, had planned his participation in a counter-demonstration in St. Paul, Minnesota, against a pro-Trump rally in a clash that led to scuffles and the arrest of six people:

WATCH: 'March 4 Trump' participants and counterprotesters engage in dueling chants at MN Capitol rotunda https://t.co/UkkgwTNVbi — KSTP (@KSTP) March 4, 2017

According to St. Paul police spokesman Steve Linders, Kaine, who goes by the name Woody, “turned around and squared up to fight with the officer” as police tried to detain him.

“The officer was able to place Mr. Kaine under arrest and