Buckingham married the daughter of the 6th Earl of Rutland, Lady Katherine Manners, later suo jure Baroness de Ros, on 16 May 1620, against her father's objections.
The children of this marriage were:
Mary Villiers (before 30 March 1622 – November 1685), married firstly Charles Herbert, Lord Herbert, secondly James Stewart, 1st Duke of Richmond and thirdly Colonel Thomas Howard.

Charles Villiers, Earl of Coventry (17 November 1625 – 16 March 1627), died in infancy.

George Villiers, 2nd Duke of Buckingham (30 January 1628 – 16 April 1687).

Lord Francis Villiers (bef.
21 April 1629 – 7 July 1648), died in a skirmish at Kingston during the Second English Civil War.
Buckingham married the daughter of the 6th Earl of Rutland, Lady Katherine Manners, later suo jure Baroness de Ros, on 16 May 1620, against her father's objections. The children of this marriage were:
Mary Villiers (before 30 March 1622 – November 1685), married firstly Charles Herbert, Lord Herbert, secondly James Stewart, 1st Duke of Richmond and thirdly Colonel Thomas Howard.
Charles Villiers, Earl of Coventry (17 November 1625 – 16 March 1627), died in infancy.
George Villiers, 2nd Duke of Buckingham (30 January 1628 – 16 April 1687).
Lord Francis Villiers (bef. 21 April 1629 – 7 July 1648), died in a skirmish at Kingston during the Second English Civil War.
George Villiers, 1st Duke of Buckingham