Preparation and luminescence properties of patterned SOG/Sr2MgSi2O7:Eu2+ Dy3+ long persistent luminescence composite thin films by one step photolithography
In this paper, patterned photosensitive silicon organic hybrid glass material/Sr2MgSi2O7:Eu2+ Dy3+ (SOG/SMS) long persistent luminescence composite films with lines (widths 50 mm and 250 mm) dots (50 mm) and holes (50 mm) patterns on silicon wafer were fabricated by one step photolithography. SMS particles were first synthesized by sol gel method and their structure was analyzed by XRD. Patterned SOG/SMS composite films containing 5 wt% of SMS particles were then fabricated by one step photolithography. SEM, fluorescent microscope and spectrofluorophotometer were used for the characterization of the patterned SOG/SMS composite films. It was found that the obtained patterns are of good shapes and order. The fluorescent emission band of the composite films shows a major peak at 468 nm. Decay curves of the composite films have a similar tendency with that of the pure SMS particles, except for slightly lower intensity for the former.