Near field integration of a Si 3 N 4 nanobeam and a SiO 2 microcavity for heisenberg limited displacement sensing
A single chip radio frequency optomechanical system, consisting of a Si 3 N 4 nanobeam in the evanescent near field of a SiO 2 optical microdisk resonator realizes displacement imprecision >30dB below the standard quantum limit at room temperature.
CLEO 2016