Near field integration of a Si3N4 nanobeam and a SiO2 microcavity for heisenberg limited displacement sensing
A single chip radio frequency optomechanical system, consisting of a Si<inf>3</inf>N<inf>4</inf> nanobeam in the evanescent near field of a SiO<inf>2</inf> optical microdisk resonator realizes displacement imprecision >30dB below the standard quantum limit at room temperature.
2016 Conference on Lasers and Electro Optics (CLEO)