Microactuator for autofocus and optical image stabilization in mobile phone cameras using unleveled comb electrodes
Out of plane translatory and tilting motions were demonstrated using electrostatic microactuators for autofocus and optical image stabilization. The vertical displacement of the device was 90.5 mm at 40 V, with a response time of 10 ms.
2016 International Conference on Optical MEMS and Nanophotonics (OMN)