SiGe/Si Microwave Photonic devices and Interconnects towards Silicon based full Optical Links
With the recent explosive growth of connected objects, for example in Home Area Networks, the wireless and optical communication technologies see more opportunity to merge with low cost MicroWave Photonic (MWP) technologies. Millimeter frequency band from 57GHz to 67GHz is used to accommodate the very high speed wireless data communication requirements. However, the coverage distance of these wireless systems is limited to few meters (10m) The propagation is then limiting to a single room mostly, due to both the high propagation attenuation of signals in this frequency range and to the wall absorption and reflections. Therefore, an infrastructure is needed to lead the signal to the distributed antennas configuration through MWP technology. Moreover, MWP technology has recently extended to address a considerable number of novel applications including 5G mobile communication, biomedical analysis, Datacom, optical signal processing and for interconnection in vehicles and airplanes. Many of these application areas also demand high speed, bandwidth and dynamic range at the same time they require devices that are small, light and low power consuming. Furthermore, implementation cost is a key consideration for the deployment of such MWP systems in home environment and various integrated MWP application.This PhD deals with very cheap, Bipolar or BiCMOS integrated SiGe/Si MWP devices such as SiGe HPTs, Si LEDs and SiGe LEDs, and focused on the combined integration of mm wave and optoelectronic devices for various applications involving short wavelength links (750nm to 950nm).This research focused on the study of the following points:The better understanding of vertical and lateral illuminated SiGe phototransistors designed in a 80 GHz Telefunken GmbH SiGe HBT technology. We draw conclusions on the optimal performances of the phototransistor. The light sensitive Si substrate and two dimensional carrier flow effects on SiGe phototransistor performance are investigated. This study helps to derive design rules to improve frequency behavior of the HPT for the targeted applications.For future intra /inter chip hybrid interconnections, we design polymer based low loss microwave transmission lines and optical waveguides on low resistive silicon substrate. It is a step to envisage further Silicon based platforms where SiGe HPT could be integrated at ultra low cost and high performances with other structures such high speed VCSEL to build up a complete optical transceiver on a Silicon optical interposer. The polymer is used as dielectric interface between the line and the substrate for electrical interconnections and to design the core and cladding of the optical waveguide.The design, fabrication and characterization of the first on chip microwave photonic links at mid infrared wavelength (0.65 0.85mm) based on 80 GHz Telefunken GmbH SiGe HBT technological processes. The full optical link combines Silicon Avalanche based Light Emitting Devices (Si Av LEDs) silicon nitride based waveguides and SiGe HPT. Such device could permit hosting microfluidic systems, on chip data communication and bio chemical analysis applications