Potentialities of micro supercapacitors as energy storage buffers in embedded micro systems
Thanks to their unique properties and potential applications in various smart electronic devices, micro supercapacitors have been increasingly investigated for on chip energy storage. In this presentation, we describe our most recent attempts to increase the areal capacitance and energy of micro supercapacitors. We deposited hydrated ruthenium oxide onto a highly porous gold current collector to realize a 3D electrode with unprecedented performances, fully compatible with current micro fabrication and silicon based device technology. The resulting electrode exhibits a capacitance per surface area in excess of 3 F.cm 2, and for the first time an all solid state micro supercapacitor with a specific energy per surface area comparable to that of lithium ion micro batteries has been achieved, but with superior power and cycling stability.
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)