Nondestructive inspection of patterns formed on inner surfaces of small diameter pipes
Inspection of patterns formed on inner surfaces of copper pipes with a small diameter of 2 mm was investigated. At first, space patterns with widths of 20-30 μm were lithographically formed using a handmade laser-scan exposure system. The exposure system was equipped with a monitoring system of a laser beam spot irradiated on the inner surface of pipe for the exposure. Pattern inspection was executed utilizing this monitoring system. In the case of exposure for patterning, the beam monitor was used for confirming the position and size of the laser beam. However, being prevented by the bright beam spot, background views were not clearly observed. For this reason, the pinhole that is initially inserted for reshaping the laser beam and making an appropriately small spot was removed, and the brightness of the beam spot was mitigated. In addition, inspected camera images were stored as video images in a personal computer using a video capture. As samples for the inspection, space patterns in resist films and groove patterns etched in copper pipes were used. As a result, resist space patterns were observed quite clearly, and pattern widths were measurable. In addition, the measured pattern widths almost agreed with the ones measured using a scanning electron microscope after cutting a half of the pipe off. On the other hand, etched groove patterns were not so clear as resist patterns. However, it was clarified that fatal pattern defects such as kinks, shifts, and breaks were detected, if the pattern images stored in the computer were carefully investigated. The new nondestructive inspection method is effective.
Arbitrary Patterning onto Inner Surfaces of Small-Diameter Pipes Using Laser Scan Lithography
Arbitrary patterning onto inner surfaces of fine pipes with an inner diameter of 2 mm was investigated. A handmade exposure system was used as the patterning tool, and the specimen pipes were moved for relatively scanning the laser light-beam with a wavelength of 408 nm. At first, character patterns with a height of approximately 200 μm were delineated. Although several element patterns stuck out of the jointed patterns, all the delineated characters were legible, and the pattern widths were almost homogeneous except the parts where other element patterns were closely delineated. Next, arrays of V-shape patterns were delineated. Measured width fluctuation was approximately ±5 μm for the average width of 44 μm. Finally, the resolution limit or the the pattern-pitch limit of dense line-and-space patterns was investigated. As a result, the minimum pattern pitch was 29 μm, and the finest continuous resist pattern with a width of 6 μm was obtained. It was verified that arbitrary patterns were certainly delineated onto the inner surfaces of the fine pipes.
Atiyah's Introduction to the Law of Contract
1. Introduction 2. Definition and Classification PART I: FORMATION OF CONTRACTS 3. Offer and Acceptance 4. Beyond Offer and Acceptance: Formalities, Intent to Create Legal Relations, and Consideration PART II: THE CONTENT OF THE CONTRACT 5. Express Terms 6. Implied Terms 7. The Force and Scope of Contractual Obligations: Standards of Care, Mistake, Frustration, Breach, and Notice 8. Unenforceable Contracts and Terms PART III: EXCUSES FOR NON-PERFORMANCE 9. The Duty to Disclose Material Facts 10. Misrepresentation 11. Duress and Undue Influence 12. Unfair Contracts PART IV: ENFORCING THE CONTRACT 13. Third Party Rights 14. Remedies For Breach of Contract