Dopant influence on polysilicon capacitor oxide failure
In this work, we investigate polysilicon capacitor oxide defectivity as a function of dopant contamination in a 0.5 /spl mu/m mixed signal process. Experiments show that shallow n and p type dopant implants, used to mimic a cross contamination problem discovered in a PECVD cluster tool, can significantly degrade oxide integrity. Various possible mechanisms of the increased defectivity are discussed.
Effect of fluorine on boron diffusion in thin silicon dioxides and oxynitride
We investigated the effects of fluorine on boron diffusion in thin silicon oxides used for metal‐oxide‐semiconductor structures, including silicon dioxide and oxynitride. We used secondary ion mass spectroscopy to measure the boron penetration depth from p+‐polycrystalline silicon to the silicon substrate through the silicon oxides for various fluorine doses. We compared experimental and simulated results and determined the boron diffusion coefficients in the silicon oxides. The diffusion coefficients have an Arrhenius relationship for each fluorine dose. The diffusion coefficients at a fluorine dose of 1×1016 cm−2 were 30 times larger than with no fluorine dose, and at a fluorine dose of 1×1015 cm−2, diffusion coefficients were 5 times larger. With oxynitride, fluorine has the same enhancing effect. With no fluorine, the diffusion coefficients were independent of oxide thickness. When fluorine is implanted into polycrystalline silicon, especially with a high dose, the diffusion coefficient is larger for ...
Properties of a monopivot centrifugal blood pump manufactured by 3D printing
An impeller the same geometry as the impeller of a commercial monopivot cardiopulmonary bypass pump was manufactured using 3D printing. The 3D-printed impeller was integrated into the pump casing of the commercially available pump to form a 3D-printed pump model. The surface roughness of the impeller, the hydraulic performance, the axial displacement of the rotating impeller, and the hemolytic properties of the 3D-printed model were measured and compared with those of the commercially available model. Although the surface roughness of the 3D-printed model was significantly larger than that of the commercially available model, the hydraulic performance of the two models almost coincided. The hemolysis level of the 3D-printed model roughly coincided with that of the commercially available model under low-pressure head conditions, but increased greatly under high-pressure head conditions, as a result of the narrow gap between the rotating impeller and the pump casing. The gap became narrow under high-pressure head conditions, because the axial thrust applied to the impeller increased with increasing impeller rotational speed. Moreover, the axial displacement of the rotating impeller was twice that of the commercially available model, confirming that the elastic deformation of the 3D-printed impeller was larger than that of the commercially available impeller. These results suggest that trial models manufactured by 3D printing can reproduce the hydraulic performance of the commercial product. However, both the surface roughness and the deformation of the trial models must be considered to precisely evaluate the hemolytic properties of the model.