Improving Three-Dimensional Semiconductor Modeling through Layout and Process Flow Analysis
Constructive Solid Geometry (CSG) is a solid modeling technique widely used for the design of semiconductor devices. With the simulation domain subdivision algorithm presented in this paper, the minimal number of solid modeling operations is required in order to build a three-dimensional (3D) device structure. The algorithm is based on a drawing method which combines information on photolithographic masks into a color raster. In this way, solid modeling operations are performed only once on regions having the same color.
Multi-Dimensional TCAD: The PROMPT/DESSIS Approach
Designing new semiconductor devices for very large scale integrated circuits (VLSI) requires intensive use of process and device simulation tools to reduce development costs. However, valid device simulation results can only be achieved when a high geometrical modeling precision has been reached during the process simulation phase. Accurate finite element simulators embedded in a multi-dimensional process simulation environment help to fulfill this quality requirement. Since general-purpose three-dimensional (3D) process simulators are not yet available, a modern design environment combines solid modeling techniques with one-dimensional (1D) and two-dimensional (2D) finite element simulators. In this article we present a consistent and integrated process simulation environment that eases the characterization and optimization of semiconductor devices. The straightforward modeling in all three dimensions of an EEPROM cell illustrates the presented approach.
Substation automation based on IEC 61850 with new process-close technologies
New technologies in primary equipment like nonconventional instrument transformers require new interfaces to the substation automation system. The future standard IEC 61850 perfectly supports this requirement. With the introduction of the new technologies and the use of IEC 61850, a more decentralized architecture of the substation automation system will be possible. This provides several benefits but a careful system design is required to maintain the overall reliability of the system.