A planar transistor for the 32-nm node and beyond with an ultra-shallow junction fabricated using in-situ doped selective Si epitaxy
Shallower junctions must be formed to make transistors work for the 32-nm node. Many kinds of technologies, such as co-implantation, laser spike annealing (LSA), and flash lamp annealing, have been energetically studied to form ultra-shallow junctions. We focused on in-situ doped selective Si epitaxy, with which the short channel effect and the parasitic resistance can be made compatible. Using this epitaxy, ultra-shallow junctions (with effective junction depths (Xj,eff) under 9 nm@5E18) were formed, and 20-nm or shorter PMOS gate transistors were fabricated using the epitaxy
A hp22 nm node low operating power (LOP) technology with sub-10 nm gate length planar bulk CMOS devices
High performance 10 nm gate length CMOSFETs for hp22 nm node LOP is demonstrated for the first time. Key process, such as elevated source/drain extension combined with flash lamp annealing, fully silicided metal gate, novel SiON, and optimization method under high V/sub dd/ condition which taking care of SRAM performance is described. Record high transconductance of 1706 mS/mm and over 400 GHz f/sub i/ is achieved for nMOSFET. Bulk planar MOSFET structure can extend down to hp22 nm node.
In search of optimum chest radiography techniques.
A nation-wide study of chest radiography in Sweden had previously revealed a large variation in the physical and technical factors involved, in particular the radiation dose. In this study the image quality could not be assessed unambiguously. The aim of the present study was to try to establish a correlation between visual grading of radiographs and physical and technical factors in order to find the optimum chest X-ray system. The physical and technical performance of 24 chest units was evaluated. Radiographs were taken of an anthropomorphic chest phantom supplied with test structures simulating various pathologies. Image quality was assessed by visual grading analysis of the radiographs. The physical and technical parameters of the units rated best were used to exemplify good radiographic practice. The results were in agreement with the recommendations issued by the Commission of the European Communities (CEC). It was also shown that low radiation dose is compatible with high-quality radiographic imaging of the chest.