Design, Fabrication, and Testing of a Modular Magnetic Field Microsensor on a Flexible Polymer Foil
In contrast to existing microelectromechanical systems (MEMS), this paper describes the development, fabrication, and testing of an anisotropic magnetoresistance (AMR) microsensor using a 7 μm thick polymer foil as substrate material. The modular magnetic field micro sensors are fabricated on a standard 4 in Si Wafer due to handling purposes during the sensor fabrication process. To enable a release of the micro sensors at the end of the fabrication process, initial investigations concentrated on the proof of principle applying a deep reactive-ion etching (DRIE) process to structure the Si wafer. The DRIE process was used to structure Si frames, which serve as carriers for the modular magnetic field micro sensors. For the evaluation of the fabricated modular magnetic field micro sensors, electrical resistance measurements were accomplished. The aim of these investigations was the characterization of the magnetic field dependence of the electrical resistance. The electrical output signal of the AMR sensors were subsequently compared to electrical resistance measurements of AMR sensors fabricated on a Si substrate and served as reference. The measurement results show a marginal effect of the substrate material on the characteristics of the AMR sensors.
A review on stretchable magnetic field sensorics
The current establishment of stretchable electronics to form a seamless link between soft or even living materials and the digital world is at the forefront of multidisciplinary research efforts, bridging physics, engineering and materials science. Magnetic functionalities can provide a sense of displacement, orientation or proximity to this novel formulation of electronics. This work reviews the recent development of stretchable magnetic field sensorics relying on the combination of metallic thin films revealing a giant magnetoresistance effect with elastomeric materials. Stretchability of the magnetic nanomembranes is achieved by specific morphologic features (e.g. wrinkles or microcracks), which accommodate the applied tensile deformation while maintaining the electrical and magnetic integrity of the sensor device. The entire development, from the demonstration of the world’s first elastically stretchable magnetic sensor to the realization of a technology platform for robust, ready-to-use elastic magnetosensorics is described. Soft giant magnetoresistive elements exhibiting the same sensing performance as on conventional rigid supports, but with fully strain invariant properties up to 270% stretching have been demonstrated. With their unique mechanical properties, these sensor elements readily conform to ubiquitous objects of arbitrary shapes including the human skin. Stretchable magnetoelectronic sensors can equip soft and epidermal electronic systems with navigation, orientation, motion tracking and touchless control capabilities. A variety of novel technologies, like electronic skins, smart textiles, soft robotics and actuators, active medical implants and soft consumer electronics will benefit from these new magnetic functionalities.
A concept of general monotonicity and applications
In this paper we investigate properties of the general monotone sequences and functions, a generalization of monotone sequences and functions as well as of those of bounded variation. Some applications to various problems of analysis are given. © 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim