Low-K CMP process control by using interpolation method
For ILD CMP process, accurate polish time control is required to obtain expected film thickness. Comparisons between conventional SiO2 CMP process and low-k CMP process were studied and realized polishing time for low-k material can not be determined by only removal rate due to the existence of incubation time at first stage. Interpolation method was evaluated to determine polishing time for low-k CMP process. Correction of this incubation time was performed by using interpolation method and promising results were obtained.
Polishing time calculation method to reduce oxide-film-CMP send-ahead works
In order to obtain higher throughput maintaining high precision in the CMP process, it is important to reduce send-ahead work and rework related to film thickness over the within-wafer distribution. This paper presents a new polishing time calculation method that ensures film thicknesses at all measurement positions satisfy the control limit, and gives a judgment on whether send-ahead work is necessary, with the margin of variation of film thicknesses from the control limits after CMP based on the within-wafer distribution of the removal rate and film thickness before CMP. The CMP-APC system applying these methods reduces the defects in film thickness after CMP, along with the amount of send-ahead work, which is half that of the former CMP-APC run-to-run control system.
Evaluation of Impact of Yarn Count and Stitch Length on Pilling, Abrasion, Shrinkage and Tightness Factor of 1 ? 1 Rib Cotton Knitted Fabrics
This study investigates the impact of yarn count and stitch length of 100% cotton knitted fabrics. 1 × 1 ribs structured fabrics were used in this research work. The stitch length 2.50 mm, 2.52 mm, 2.60 mm, 2.70 mm, 2.80 mm and 2.96 mm were used of the yarn count of 26Ne, 28Ne and 36Ne. The areal densities of the grey fabrics were in various amounts. The impacts of yarn count and stitch length were measured concerning pilling resistance, abrasion resistance, and shrinkage and tightness factor. The result showed that the fabric pilling grade decreased while number of cycle increased. Abrasion resistance decreased but length wise shrinkage increased despite the fact that the stitch length increased. The results also exposed that the tightness factor of the fabric increased with the increase of the stitch length in both dyeing and washing state and finished state compared to grey state for the yarn count 26Ne and homogeneous result not found for yarn count 28Ne and 36 Ne. Evaluation of Impact of Yarn Count and Stitch Length on Pilling, Abrasion, Shrinkage and Tightness Factor of 1 × 1 Rib Cotton Knitted Fabrics