Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs
The evaluation of via structures, metallisations as well as a miniaturisation of the layout dimensions lead to the determination of new test structures. The time for prediction of the reliability of such structures should be very short but also effective. For instance for fast reliability prediction, constant power or constant current tests can be used. Due to a change in fault mechanisms an extrapolation to working conditions is sometimes difficult. Simulations can help in prediction of the failure mechanism as well as the determination of the weakest link in the structures. In this study the void location as well as the mass flux divergence distribution of a conventional tungsten-plugged metallisation structure was investigated by finite element simulation (using ANSYS/spl reg/). A calculation routine is used for the determination of the mass flux divergences and the void formation in the model. The suitability of the simulation in test structure design will be shown. Based on the default models the overlap of the metallisation, the metallisation length, and width and the applied current density was varied. The stress free temperature was set to 450/spl deg/C. This temperature was taken from the last process step. The substrate temperature was set to 150/spl deg/C like the temperature in the reliability stress test. The mechanical stress and temperature and current density distribution as well as the influence of the different migration mechanism was determined. Using these results the void formation and its localisation was calculated and compared with the measurement.
Simulation-based prediction of reliability and robustness of interconnect systems for semiconductor applications
The article at hand presents the results of thermoelectrical simulations of migration effects in integrated interconnect systems in comparison to measurement data. The simulation concept will be described and the output values as mass flux divergence and time-to-failure (TTF) will be discussed. Based on the example of via chain structures, different geometry factors have been investigated with respect to the impact on the robustness. The simulation can support the reliability prediction and the determination of failure mechanisms in terms of process qualification and design optimization.
Simulation and control of hybrid renewable energy system connected to the grid
This paper presents a control and simulation of hybrid renewable energy system connected to the grid. The studied system includes a photovoltaic panel, synchronous permanent magnet generator based wind turbine, and a battery for storage energy. The PV array and wind systems are connected to the common DC bus by a boost converter. The battery is connected by a bi-directional DC/DC converter, and then integrated into the AC utility grid via a common DC/AC inverter. In order to extract the maximum energy, a simulation study has been carried out according to the meteorological conditions (wind speed and variable solar irradiance) while maintaining power quality at a satisfactory level. In order to capture the maximum power, a MPPT algorithm is applied for both wind turbine and photovoltaic panel. The modeling and simulation of the whole system has been performed under Matlab/Simulink environment. The obtained results show that the current and the voltage of grid side are sinusoidal and alternative forms, and the power injected to the grid is around the power produced by the hybrid system.