A Dependence of Crystallinity of In2O3 Thin Films by a Two-Step Heat Treatment of Indium Films on the Heating Atmosphere
A difference in crystallinity of In2O3 thin films on sapphire substrates by heat treatment of indium films was reported. Indium films were heated in an inert atmosphere or in air until they reached a specified temperature and then oxidized in air at much higher temperatures. Crystallinity of the In2O3 thin film which was heat-treated in air from room temperature was quite poor. On the other hand, narrow X-ray rocking curves of the In2O3 films were obtained when the temperature was increased in an inert atmosphere to a specified tem-perature.
Sputter-deposited films for display devices
Abstract Many of the electrode requirements of sandwich structure light valve devices using either ferroelectric ceramic plates or liquid crystal layers as the control medium have been satisfied by sputter-deposited layers. The sputtering parameters can be modified to allow film deposition within the constraints of a given substrate material such that useful photoconductive layers are obtained on thermally sensitive as well as thermally stable substrates. The use of Cd 1− x Zn x S films permits selection of the photoconductivity peak to match the specific emission of a laser. These Cd 1− x Zn x S films also permit greater visible light transmission, can be relatively insensitive to projection light, posses dark resistivity in excess of 10 12 ohms cm and are suited to real-time display applications. Sputter-dedeposited layers of CdS, though of narrower band gap than Cd 1− x Zn x S, can be deposited with photoconductive gain of the order of 4 × 10 3 and dadrk resistivity in excess of 10 7 ohms cm. Transparent electrodes of sputter-deposited In 2− x Sn x O 3− y have excellent mechanical, elecrrical and optical properties. Routine deposition of films with less than 3×10 −4 ohms cm resistivity on thermally stable substrates and with resistivity less than 10 −3 ohms cm on thermally sensitive substrates has been demonstrated.
The distinctiveness of Belfast medicine and its medical school.
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