Providing of MEMS inclinometer operation under external influencing factors
Research data of accelerometer noise parameters were used to calculate possible resolution. The layout scheme has been developed for design creation. Engineering calculations allow evaluating the reliability and the ability for MEMS inclinometer operation under external influencing factors. Protection technology has been developed to ensure reliable inclinometer operation from external influencing factors.
Influence of Technological Process for Microelectromechanical Sensors Manufacturing on their Technical Characteristics
The article discusses the technological process for MEMS sensors manufacturing, which provides the minimum allowable technological defects to achieve MEMS technical characteristics. The paper deals with experiments on the definition of technological operations and the choice of their parameters. The factors influencing the size of technological defects are revealed. There is a technology to manufacture MEMS considered as "silicon on glass." There were successful experiments with the use of mask thickness of 540 nm and 450 nm. The slope of the faces does not exceed 1o, the maximum height of the surface roughness profile was 75 nm.
Look-Ahead Based Sigma-Delta Modulation
The aim of this book is to expand and improve upon the existing knowledge on discrete-time 1-bit look-ahead sigma-delta modulation in general, and to come to a solution for the above mentioned specific issues arising from 1-bit sigma-delta modulation for SA-CD. In order to achieve this objective an analysis is made of the possibilities for improving the performance of digital noise-shaping look-ahead solutions. On the basis of the insights obtained from the analysis, several novel generic 1-bit look-ahead solutions that improve upon the state-of-the-art will be derived and their performance will be evaluated and compared. Finally, all the insights are combined with the knowledge of the SA-CD lossless data compression algorithm to come to a specifically for SA-CD optimized look-ahead design.