Dopant influence on polysilicon capacitor oxide failure
In this work, we investigate polysilicon capacitor oxide defectivity as a function of dopant contamination in a 0.5 /spl mu/m mixed signal process. Experiments show that shallow n and p type dopant implants, used to mimic a cross contamination problem discovered in a PECVD cluster tool, can significantly degrade oxide integrity. Various possible mechanisms of the increased defectivity are discussed.
Effect of fluorine on boron diffusion in thin silicon dioxides and oxynitride
We investigated the effects of fluorine on boron diffusion in thin silicon oxides used for metal‐oxide‐semiconductor structures, including silicon dioxide and oxynitride. We used secondary ion mass spectroscopy to measure the boron penetration depth from p+‐polycrystalline silicon to the silicon substrate through the silicon oxides for various fluorine doses. We compared experimental and simulated results and determined the boron diffusion coefficients in the silicon oxides. The diffusion coefficients have an Arrhenius relationship for each fluorine dose. The diffusion coefficients at a fluorine dose of 1×1016 cm−2 were 30 times larger than with no fluorine dose, and at a fluorine dose of 1×1015 cm−2, diffusion coefficients were 5 times larger. With oxynitride, fluorine has the same enhancing effect. With no fluorine, the diffusion coefficients were independent of oxide thickness. When fluorine is implanted into polycrystalline silicon, especially with a high dose, the diffusion coefficient is larger for ...
Climate change, disasters and electricity generation
Abbrevia ons Foreword 1. Introduc on 8 2. The impacts of changing climate pa erns and changing disaster risks on energy 9 op ons and electricity genera on infrastructure 2.1 The rela onship between climate change and disaster risks 10 2.2 The impact of changing climate pa erns and changing disaster risks on electricity 11 genera on from fossil fuels 2.3 The impact of changing climate pa erns and changing disaster risks on electricity 14 from nuclear power 2.4 The impact of changing climate pa erns and changing disaster risks on electricity 17 genera on from renewable energy 2.4.1 Hydropower 17 2.4.2 Wind Energy 19 2.4.3 Bioenergy 22 2.4.4 Solar Energy 24 3. Climate change and changing disaster risks: implica ons for energy policy and 26 planning