Effects of hydrogen dilution on electron density in multi-hollow discharges with magnetic field for A-Si:H film deposition
We have measured dependence of electron density n<inf>e</inf> on hydrogen dilution ratio R= [H<inf>2</inf>]/([SiH<inf>4</inf>]+[H<inf>2</inf>]) in the multi-hollow discharges with or without magnetic fields to obtain information about the deposition rate enhancement due to hydrogen dilution and applying the magnetic fields. The R dependence of the n<inf>e</inf> did not correlate with that of the deposition rate. The n<inf>e</inf> exponentially decreases with a distance from the discharges z. The n<inf>e</inf> decreases faster for higher R. These complicated behaviors of n<inf>e</inf> may be explained by electron attachment to the clusters generated in the SiH<inf>4</inf>+H<inf>2</inf> discharges. For R=0, the n<inf>e</inf> was almost same value regardless with or without magnetic fields. For R=1, n<inf>e</inf> with magnetic fields was 1/10 of that without magnetic fields. We also found that, for R=0, ne drastically decreased with increasing the z, while for R=1, ne showed a gradual decrease with z. The effects of applying magnetic fields on the deposition are unclear but applying the magnetic fields may affect the electron energy distribution.
Clustering phenomena in low-pressure reactive plasmas. Basis and applications
Abstract Clustering phenomena of particles below a few nm in size in low-pressure reactive plasmas have been studied in capacitively coupled high-frequency SiH4 discharges. Clusters nucleate around a size of 0.5 nm, Si4Hx and subsequently grow due to influxes of SinHx (1 < n < 4) and other molecular species. Because of long gas-residence time and small surface loss-probability of clusters, even neutral ones accumulate to nucleate in the reactor. Appearance of negatively charged clusters is considered to become noticeable at around Si4Hx. The growth of clusters is suppressed by using thermophoretic force, gas flow, periodical discharge modulation, and hydrogen dilution. The reactor has been newly developed to suppress the growth of clusters both by thermophoretic force and by gas flow and evacuation without stagnation. Using the reactor, a-Si:H films of extremely high quality have been successfully deposited.
The comparison of characteristics of π− mesons produced in central Mg-Mg interactions with the quark gluon string model predictions

Abstract: A detailed study of pion production in central Mg-Mg collisions at a momentum of 4.3 GeV/c per incident nucleon was carried out with use of the setup GIBS. The average kinematical characteristics of pions (multiplicity n−, momentum P, transverse momentum PT, emission angle Θ, rapidity Y) and corresponding distributions have been obtained. The experimental results have been compared with the predictions of the Quark Gluon String Model (QGSM) and satisfactory agreement between the experimental data and the model has been found. The QGSM reproduces also the dependence of average PT on n−.
The temperatures of π− mesons have been estimated in the rapidity interval of 0.5 ≤ Y ≤ 2.1. A satisfactory fit for π− mesons has been achieved by using a form involving two temperatures T1 and T2. It is found that the QGSM underestimates T2 by (10−15)%.
The data have been analyzed using the transverse momentum technique. The observed dependence of the  on Y shows the S-shape behaviour. The slope at midrapidity F has been determined. The QGSM reproduces the  distribution satisfactorily, but underestimates the parameter F.