Copper/low-k process characterization for 90nm technology using SEM and TEM imaging
Artificial vertical and lateral shrinkage of different carbon-doped oxide (CDO) low-k materials is observed for electron beam exposure. The effect depends on SEM and TEM imaging conditions and sample preparation procedures. Typical artifacts include layer thinning and delamination of the CDO material from surrounding materials. TEM imaging is less critical compared to SEM. This is partly due to the favorable conditions during TEM sample preparation employing ion milling steps, which avoid the mechanical stress of conventional SEM sample cross-sectioning. Samples also absorb less energy from the electron beam during TEM scanning, which minimizes the impact of CDO shrink. Some artifacts are difficult to distinguish from real process issues, e.g. de-lamination caused by poor layer adhesion. Therefore, careful sample preparation and imaging are necessary to provide meaningful information.
Failures in copper interconnects-localization, analysis and degradation mechanisms
In this paper, we focussed about the failures in copper interconnects and on analytical techniques that are applied for physical failure analysis. Electromigration test structure after partial degradation by voiding was observed using SEM images.
The Bastille: A History of a Symbol of Despotism and Freedom
This book is both an analysis of the Bastille as cultural paradigm and a case study on the history of French political culture. It examines in particular the storming and subsequent fall of the Bastille in Paris on July 14, 1789 and how it came to represent the cornerstone of the French Revolution, becoming a symbol of the repression of the Old Regime. Lusebrink and Reichardt use this semiotic reading of the Bastille to reveal how historical symbols are generated; what these symbols’ functions are in the collective memory of societies; and how they are used by social, political, and ideological groups.

To facilitate the symbolic nature of the investigation, this analysis of the evolving signification of the Bastille moves from the French Revolution to the nineteenth century to contemporary history. The narrative also shifts from France to other cultural arenas, like the modern European colonial sphere, where the overthrow of the Bastille acquired radical new signification in the decolonization period of the 1940s and 1950s. The Bastille demonstrates the potency of the interdisciplinary historical research that has characterized the end of this century, combining quantitative and qualitative approaches, and taking its methodological tools from history, sociology, linguistics, and cultural and literary studies.