Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
Abstract TiN/Cu bilayers were grown by unbalanced DC magnetron sputter deposition on (001)-oriented MgO substrates. Pole figures and electron back-scatter diffraction orientation maps indicate that both layers in the as-deposited state are single-crystalline with a cube-on-cube epitaxial relationship with the substrate. This is confirmed by selected area electron diffraction patterns. To study the efficiency of the TiN barrier layer against in-diffusion of Cu, we annealed samples at 900 °C for 1 h in vacuum and at 1000 °C for 12 h in Ar atmosphere. The single-crystalline structure of the TiN layer is stable up to annealing temperatures of 1000 °C as shown by high resolution transmission electron microscopy. While no Cu diffusion was evident after annealing at 900 °C, scanning transmission electron microscopy images and energy-dispersive X-ray spectrometry maps show a uniform diffusion layer of about 12 nm after annealing at 1000 °C for 12 h. Concentration depth profiles obtained from 3D atom probe tomography reconstructions confirm these findings and reveal that the TiN film is slightly substoichiometric with a N/Ti ratio of 0.92. Considering this composition, we propose a lattice diffusion mechanism of Cu in TiN via the formation of Cu–N vacancy complexes. The excellent diffusion barrier properties of single-crystalline TiN are further attributed to the lack of fast diffusion paths such as grain boundaries.
Functional Thin Films for Display and Microelectronics Applications
Within the last three decades, thin films grown by physical vapor deposition methods have found widespread applications. This article reports about recent research examples on molybdenum thin films, as used for thin film transistor liquid crystal displays, and on TiN diffusion barrier films, as used for microelectronics.ZusammenfassungInnerhalb der letzten drei Jahrzehnte haben dünne mit Hilfe der physikalischen Dampfphasenabscheidung hergestellte Schichten breite Anwendung gefunden. Dieser Beitrag berichtet über jüngste Forschungsbeispiele von Molybdänschichten für Dünnschichttransistor-Flüssigkristall-Bildschirme und von TiN-Barriereschichten für die Mikroelektronik.
Assessment of fractures in endodontically treated teeth restored with and without root canal posts using high-resolution cone beam computed tomography
Background Root fractures are a diagnostic challenge for dentists in endodontic treatment. This study aimed to determine the relationship between the characteristics of tooth fractures and the presence of root canal posts in endodontically treated teeth using high-resolution cone beam computed tomography (CBCT). Material and Methods Fifty high-resolution CBCT scans of endodontically treated teeth with a diagnosis of fracture were obtained, of which 30 were from women and 20 were from men. These scans were acquired with three Veraviewepocs 3D units and one 3D Accuitomo 170 unit, with a 40 × 40-mm field of view and 125 μm voxel size. The variables assessed included the type of fracture, extent of fracture, type of retention, post length, cause of endodontic failure, location of the lesion, and time required to detect the fracture (difficulty score). For data analysis, the chi-squared test, Student’s t-test, and multiple linear regression (α <0.05) were used. Results No association was found between the type of fracture and type of retention or between the type of fracture and its extent (P>0.05). On the other hand, the type of fracture significantly influenced the time required for its detection. Additionally, the most difficult plane for detecting the fracture and the difficulty score were associated, with statistically significant results. Conclusions The type of fracture in endodontically treated teeth was not associated with the type of post used for restoration. All of the CBCT systems used to detect tooth fracture showed the same efficiency. Key words:Cone-Beam CT, Tooth Fracture, Root Canal Post.