Misted Deposition of [3D] Trenches for Drams and Frams III. PZT Thin Films and PZT Nanotubes
Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700degC exhibit good ferroelectric properties with remanent polarisation of ca. 15 muC/cm2. The step coverage was 59% on the side wall and 79% on the bottom wall.
Preparation of Pb(Zrx, Ti1-x)O3 Thin Films by Source Gas Pulse-Introduced Metalorganic Chemical Vapor Deposition
We prepared Pb(Zrx, Ti1-x)O3 [PZT] thin films on (111)Pt/Ti/SiO2/Si substrates at 620°C by metalorganic chemical vapor deposition (MOCVD). PZT [Zr/(Zr+Ti)=0.68] thin films of different thicknesses prepared by the conventional continuous source gas introduction MOCVD (continuous-MOCVD) and by pulsed gas introduction MOCVD (pulse-MOCVD) were compared to investigate the growth mechanism of these films. Stoichiometric PZT films were obtained for a wider range of Pb source input gas flow rates under fixed Zr and Ti sources for pulse-MOCVD compared with that for continuous-MOCVD. Highly (111)-oriented films were obtained for pulse-MOCVD regardless of their thickness, while the (111)-orientation decreased with film thickness for continuous-MOCVD. This suggests that the orientation homogeneity along the film thickness is higher for pulse-MOCVD films than for continuous-MOCVD films. The surface roughness of the pulse-MOCVD films was smaller than that of the continuous-MOCVD films and this result corresponds to the decrease of the leakage current density of the film. Well-saturated hysteresis loops with good square shapes were obtained, and the remanent polarization (Pr) and the coercive field (Ec) values of 100-nm-thick films prepared by pulse-MOCVD were 37 µC/cm2 and 82 kV/cm, respectively.
The Intuitive Physics of the Equilibrium of the Lever and of the Hydraulic Pressures: Implications for the Teaching of Elementary Physics.
The research field of intuitive physics focuses on discrepancies between 
theoretical and intuitive physical knowledge. Consideration of these 
discrepancies can help in the teaching of elementary physics. However, 
evidence shows that theoretical and intuitive physical knowledge may also 
be congruent. Physics teaching could further benefit from understanding the 
reasons for this congruence. The present study explored these reasons by 
investigating the intuitive physics of the equilibrium of the lever and of the 
hydraulic pressures. It was found that the intuitive-physics law of the lever 
was multiplicative for all participants while the intuitive-physics law of the 
hydraulic pressures differed among participants. Since these laws are 
equally simple and the layman probably has had extensive experience with 
the lever and scarce or no experience with the hydraulic lift, these findings 
support the general hypothesis that physical laws and corresponding 
intuitive-physics laws are congruent when people have had experience with 
the respective phenomena. The results and theoretical considerations suggest 
two strategic principles for teaching elementary physics.