Physics-Based Circuit Model for a Water-Wall High-Temperature Arc Lamp Using Finite Volume Method
High-temperature arc lamps are used for thermal processing of semiconductor wafers. A vortex water wall on the inner surface of the lamp's enclosure is used to provide cooling for the glass. It has been experimentally observed that, above certain levels of injected energy, the arc shows an unstable behavior and is self-extinguished. In this paper, a physics-based model for the water-wall high-temperature arc lamp is derived and implemented in the form of an equivalent electrical circuit. The equivalent circuit is then coupled to the flash power supply equivalent circuit to validate the derived model against experimental voltage and current waveforms.
Development of a powerful vortex stabilized waterwall flash lamp for RTP applications
A 300 mm long flash lamp based on a water-vortex stabilized high-pressure high-power arc lamp has been developed to meet future requirements in semiconductor rapid thermal processing. This flash lamp is much more powerful than any other commercially available flash lamp. Typical operating parameters are peak currents of up to 50 kA and pulse widths in the order of 0.5 to 2 ms FWHM.
Arc-induced turbulent mixing in an SF6 circuit breaker model
Dielectric interruption performance of SF6 high-voltage gas circuit breakers depends on the temperature distribution of the gas during the post-arc phase. Understanding the details of the mixing process occurring inside the breaker during arcing is therefore fundamental for the design. Multiphysics simulations are nowadays used to predict the flow field and the energy distribution inside the interrupter during and after the arcing phase. In this paper we make use of an optical technique to observe the arc-induced SF6 mixing process inside a dedicated test device. We extract qualitative and quantitative information and we compare this with simulations to conclude on the suitability of the models used.