Structure-Designable Formation-Method of Super Low-k SiOC Film (k=2.2) by Neutral-Beam-Enhanced-CVD
Ar neutral beam enhanced chemical vapor deposition can control the dielectric constant and film modulus of low-k SiOC deposited on Si substrates precisely because it avoids precursor dissociation due to electron collisions and UV photons in plasma. Optimizing the ratio between Si-O and Si-(CH3)x as well as the proportions of linear, network, and cage Si-O structures by changing the precursor, we obtained a k of 2.2 and a reasonable modulus by using either dimethyl diethoxy silane or dimethyl dimethoxy silane as a precursor.
Evaluation of interconnection capacitances in IC's with heterogeneous isolating materials
Parameters of interconnection lines have an effect on the electrical parameters of modern VLSI chips, so precise models of interconnection capacitances are indispensable in verification of the design. In our previous works we have shown importance of geometric configuration of the interconnection bus, taking into account further neighbourhood, and proposed a model of corresponding capacitances, verified numerically and experimentally [1], [2]. Our model was developed for technologies using only SiO2 as the isolation material between interconnection lines and metal layers. In most advanced technologies low-k materials displace SiO2, as they enable to reduce capacitances significantly. In this paper we present results of our studies on usability of our model in the cases of technologies using different and heterogeneous isolating materials in respect of dielectric permittivity.
The REX-ISOLDE project
The Radioactive Beam Experiment REX-ISOLDE [1–3] is a pilot experiment at ISOLDE (CERN) testing the new concept of post acceleration of radioactive ion beams by using charge breeding of the ions in a high charge state ion source and the efficient acceleration of the highly charged ions in a short LINAC using modern ion accelerator structures. In order to prepare the ions for the experiments singly charged radioactive ions from the on-line mass separator ISOLDE will be cooled and bunched in a Penning trap, charge bred in an electron beam ion source (EBIS) and finally accelerated in the LINAC. The LINAC consists of a radiofrequency quadrupole (RFQ) accelerator, which accelerates the ions up to 0.3 MeV/u, an interdigital H-type (IH) structure with a final energy between 1.1 and 1.2 MeV/u and three seven gap resonators, which allow the variation of the final energy. With an energy of the radioactive beams between 0.8 MeV/u and 2.2 MeV/u a wide range of experiments in the field of nuclear spectroscopy, astrophysics and solid state physics will be addressed by REX-ISOLDE.