Measurement of dynamic magnetization induced by a pulsed field: Proposal for a new rock magnetism method
This study proposes a new method for measuring transient magnetization of natural samples induced by a pulsed field with duration of 11 ms using a pulse magnetizer. An experimental system was constructed, consisting of a pair of differential sensing coils connected with a high-speed digital oscilloscope for data acquisition. The data were transferred to a computer to obtain an initial magnetization curve and a descending branch of a hysteresis loop in a rapidly changing positive field. This system was tested with synthetic samples (permalloy ribbon, aluminum plate, and nickel powder) as well as two volcanic rock samples. Results from the synthetic samples showed considerable differences from those measured by a quasi-static method using a vibrating sample magnetometer (VSM). These differences were principally due to the time-dependent magnetic properties or to electromagnetic effects, such as magnetic viscosity, eddy current loss, or magnetic relaxation. Results from the natural samples showed that the transient magnetization–field curves were largely comparable to the corresponding portions of the hysteresis loops. However, the relative magnetization (scaled to the saturation magnetization) at the end of a pulse was greater than that measured by a VSM. This discrepancy, together with the occurrence of rapid exponential decay after a pulse, indicates magnetic relaxations that could be interpreted in terms of domain wall displacement. These results suggest that with further developments, the proposed technique can become a useful tool for characterizing magnetic particles contained in a variety of natural materials.
Pulsed-field magnetometry for rock magnetism
An improved method is proposed for measuring dynamic magnetizations of bulk volcanic rock samples induced by a pulsed-field of 0.7 T and a duration of 10 ms. The transient magnetization is measured by a sensing system that consists of a pair of inductive differential coils, an analog preamplifier and integrator, and a high-speed digital storage scope. The system was calibrated using a paramagnetic salt (Gd2O3) and was tested to different kinds of volcanic rocks with their magnetic properties well-documented previously. The results were comparable with those measured by a quasi-static method using a vibrating sample magnetometer, although there were small discrepancies in hysteresis parameters suggesting the time-dependence of the magnetic properties. The proposed system provides not only the magnetization over the short interval of a pulse but also the rapid (~3 ms) exponential decay after a pulse. The decay time constant was different among the samples under study, indicating the variations of their magnetic relaxation time. Although the present system is not sensitive enough to characterize varieties of natural samples including sediments, it has the potential as a versatile and convenient tool for rock magnetism.
Bevel RIE application to reduce defectivity in copper BEOL processing
Bevel etch used during wafer fabrication for semiconductor devices is discussed. In this case, the bevel etch process was utilized in middle of the line processing (MOL) to reduce back end of line (BEOL) defectivity. Tungsten and titanium nitride films, from the formation of contacts to the transistors, extend into the bevel region of the wafer and have been shown to initiate arcing. This can spread foreign material defects on the front side of the wafer in various BEOL post processing steps including subsequent reactive ion etching, SEM metrology and film depositions. The bevel etch tool confines a plasma etch to the outer edge of the front side of the wafer (which can be individually adjusted) and can remove dielectric, organic and Ti/TiN/W films using a fluorine based chemistry.