Chapter 4. High Temperature Barrier Layers
The concept of hybrid electrode-barrier layers is introduced in the first section. The experimental process and ferroelectric properties of PZT films on the electrode-barrier layers are explained in detail in the second section. The fatigue problem and minimization of the fatigue are reviewed, and the improvement of the fatigue properties using the high temperature multi-layer substrates are discussed in the last section. 4.1 INTRODUCTION In the previous two chapters, high density destructive readout (DRO) FRAM were investigated by primarily focusing on materials processing temperature. The low temperature processing was successfully achieved for the high density DRO FRAM applications by using a modified sol-gel processing. The other approach we have taken for integrating PZT films into high density CMOS devices is to develop novel electrode-barrier layers for high temperature processing. Since the currently used diffusion barrier layers such as TiN and TiSi 2 maintain their electrical conductivity only up to 550 °C, high temperature barrier layers are desirable for the integration of PZT films into high density CMOS devices. Ideal electrode materials for the DRO FRAM devices should possesses good electrical conductivity, outstanding thermal and chemical stability, and amenability to dry etching. In particular, the electrode-barrier should be a good diffusion barrier without reacting the ferroelectric materials or the underlying substrate (poly-Si) during high temperature processing. In this research, we propose Pt/IrO 2 /Ir hybrid electrode

 Report

ra n g e d f ro m 3 0 t o 1 9 0 m g /L .  C h a n n e l d iv e rs io n  N o m a jo r c h a n g e in o v e ra ll c a tc h m e n t a n d th u s a d v e rs e im p a c t to h y d ro lo g y a n d th e a s s o c ia te d w a te r q u a lit y im p a c t is n o t a n ti c ip a te d .  S e w e ra g e p ro p o s e d b y t h e d e v e lo p m e n t c o u ld b e b e n e fi c ia l to e x is ti n g w a te r q u a lit y.
Characterization of Aqueous Dispersions and Gels Made of Sodium Caseinate and Basil Seed Gum: Phase Behavior, Rheology, and Microstructure
The interactions between sodium caseinate (NaCas) and basil seed gum (BSG) in the presence of calcium chloride (CaCl 2 ) were investigated. The phase behavior of the mixed aqueous dispersions and their gels revealed a homogeneous mixture, obtained at the higher concentrations of both CaCl 2 and BSG. The Herschel-Bulkley model sufficiently fitted the flow behavior of the mixture solution data. Apparent viscosity increased significantly ( p  < 0.05) by increasing the concentration of BSG, where the addition of CaCl 2 had no significant effect on the viscosity of the samples ( p  > 0.05). Furthermore, there was an increase in thixotropy due to the higher concentrations of BSG and CaCl 2 . Based on the frequency sweep test, at the low frequencies, a more gel-like behavior was observed in the case of the higher concentrations of either BSG or CaCl 2 . The rheological and SEM data suggested that the stronger structure of NaCas-BSG gel in the presence of the higher concentrations of CaCl 2 was related to the induction of complex formation between the two biopolymers.