Novel Program Method of String Select Transistors for Layer Selection in Channel-Stacked NAND Flash Memory
In this paper, we propose new string select transistors (SSTs)/dummy SSTs (DSSTs) threshold voltage (Vth) setting methods in simplified channel-stacked array with layer selection by multilevel operation (SLSM). In these methods, SSTs/DSSTs on each layer are set to their targeted Vth values by incremental step pulse program/one erase with various erase voltages, respectively. In the fabricated pseudo-SLSM, the validity of the new methods is verified. As a result, it is confirmed that the Vth values of SSTs/DSSTs are set to the targeted Vth values by the new methods and SSTs with extremely narrow Vth distribution can be obtained in the consequence. Moreover, memory operations such as erase, program, and read are performed in the fabricated structure after setting the Vth values of all the SSTs/DSSTs by the new methods. Despite unique LSM operations, stable memory operations are obtained successfully without the interference between stacked layers.
Program scheme using common source lines in channel stacked NAND flash memory with layer selection by multilevel operation
Abstract To obtain high channel boosting potential and reduce a program disturbance in channel stacked NAND flash memory with layer selection by multilevel (LSM) operation, a new program scheme using boosted common source line (CSL) is proposed. The proposed scheme can be achieved by applying proper bias to each layer through its own CSL. Technology computer-aided design (TCAD) simulations are performed to verify the validity of the new method in LSM. Through TCAD simulation, it is revealed that the program disturbance characteristics is effectively improved by the proposed scheme.
Optimal Integration and Characteristics of Vertical Array Devices for Ultra-High Density, Bit-Cost Scalable Flash Memory
Optimal process integration for array devices of bit-cost scalable (BiCS) flash memory is successfully developed. We adopt SiN-based gate dielectrics for the consistency with the 'gate-first' process which is unique to BiCS flash technology, and 'macaroni' body FETs for better controllability over the sub-threshold characteristics of depletion-mode poly-silicon transistors. With these technologies and newly devised 4F2 cell array, BiCS flash becomes a promising candidate for future ultra-high density memory.