Dopant influence on polysilicon capacitor oxide failure
In this work, we investigate polysilicon capacitor oxide defectivity as a function of dopant contamination in a 0.5 /spl mu/m mixed signal process. Experiments show that shallow n and p type dopant implants, used to mimic a cross contamination problem discovered in a PECVD cluster tool, can significantly degrade oxide integrity. Various possible mechanisms of the increased defectivity are discussed.
On the electrical conduction in the interpolysilicon dielectric layers
To reduce the low-field electrical conductivity of interpolysilicon dielectrics used in electrically erasable programmable read-only (EEPROM) memories devices, the roughness of the poly-SiO/sub 2/ interface until now has been decreased in two ways: (1) by increasing the temperature of oxidation and doping of polysilicon combined with low-pressure chemical vapor deposition (LPCVD) of silicon (undoped or in-situ doped) in the amorphous phase, or (2) by the use of LPCVD high-temperature oxide (HTO) deposited over polycrystalline silicon. The advantages of both methods are combined, and electrical conduction results for an interpoly structure based on LPCVD smooth surface polysilicon and LPCVD HTO SiO/sub 2/ are presented. The data are interpreted in terms of the Fowler-Nordheim mechanism.<<ETX>>
Calyculins and Related Marine Natural Products as Serine-Threonine Protein Phosphatase PP1 and PP2A Inhibitors and Total Syntheses of Calyculin A, B, and C
Calyculins, highly cytotoxic polyketides, originally isolated from the marine sponge Discodermia calyx by Fusetani and co-workers, belong to the lithistid sponges group. These molecules have become interesting targets for cell biologists and synthetic organic chemists. The serine/threonine protein phosphatases play an essential role in the cellular signalling, metabolism, and cell cycle control. Calyculins express potent protein phosphatase 1 and 2A inhibitory activity, and have therefore become valuable tools for cellular biologists studying intracellular processes and their control by reversible phosphorylation. Calyculins might also play an important role in the development of several diseases such as cancer, neurodegenerative diseases, and type 2-diabetes mellitus. The fascinating structures of calyculins have inspired various groups of synthetic organic chemists to develop total syntheses of the most abundant calyculins A and C. However, with fifteen chiral centres, a cyano-capped tetraene unit, a phosphate-bearing spiroketal, an anti, anti, anti dipropionate segment, an α-chiral oxazole, and a trihydroxylated γ-amino acid, calyculins reach versatility that only few natural products can surpass, and truly challenge modern chemists’ asymmetric synthesis skills.