Providing of MEMS inclinometer operation under external influencing factors
Research data of accelerometer noise parameters were used to calculate possible resolution. The layout scheme has been developed for design creation. Engineering calculations allow evaluating the reliability and the ability for MEMS inclinometer operation under external influencing factors. Protection technology has been developed to ensure reliable inclinometer operation from external influencing factors.
Materials for Electronics by Thermal Spraying
In this paper, dielectric and conductive properties of thermally sprayed Al2O3- and Cu-based coatings on steel and alumina substrates were studied. Alumina powders with nanoand micro-sized additions of Ni, NiO, TiO2, silica, and commercial glass were used in High Velocity Oxygen Fuel (HVOF) deposition. The conventional commercial copper powder and three Ag, WC and H2 -modified powders were used in Direct Write Thermal Spray (DWTS) deposition. Mixed phases of α-Al2O3 and γ-Al2O3 were found to be present in the as-deposited coatings. Sprayed alumina-based composites exhibited dielectric permittivity of 5.3-13.9 and losses of 0.002-0.178 at 1 MHz and 1 GHz while the additions tend to increase the values. Sprayed compositions with glass-type additions were found to retain α-Al2O3 crystalline phase after the deposition. Cu depositions, especially modified ones, realised by Direct Write Thermal Spray (DWTS) showed conductivity values as high as 4256 % of IACS values. The results demonstrate that ceramic and conductive coatings fabricated by thermal spray techniques show feasible properties for electrical applications, such as low-frequency components and insulation layers to be utilised in embedded 3D circuitry, in a way that is not possible through traditional manufacturing methods.
Electrical conductivity of plasma-sprayed titanium oxide (rutile) coatings
Abstract Plasma spraying has been used to prepare n-type polycrystalline TiO2 coatings on SUS304 steel substrates. The influence of plasma spray process on the phases (corundum type Ti2O3, monoclinic Ti3O5, triclinic magneli phases, and tetragonal rutile) formed and the relation between deoxidation and the electrical conductivity of plasma-sprayed TiO2 coatings have been studied. The amount of oxygen loss in the plasma-sprayed TiO2 coatings is influenced greatly by the addition of hydrogen in the plasma gas. Accordingly, the electrical conductivity of TiO2 coatings increases with decreasing oxygen during plasma spraying. The amount of reduced TiO2 coating increases with a drop in pressure of the plasma spray atmosphere and an increase in the quantity of hydrogen. The amounte of Ti2O3 and Ti3O5 phases formed by plasma spraying increase with the deoxidation of TiO2 coatings.