Batch fabrication of polymer microsystems with shape memory microactuators
This paper introduces the technologies of ultrasonic welding and heat-activated bonding for batch integration of micromachined polymer layers and shape memory alloy (SMA) foils or films. A series of ultrasonic welding tests is performed to achieve matter-free bonds on the wafer level with vertical accuracy of 1 mum. Heat-activated bonding is tested for various pressure and temperature conditions using micromachined foils of 60 mum thickness. The technologies are combined in a new process flow for batch fabrication of mechanically active polymer microsystems. The process flow is validated by the fabrication and characterization of SMA-actuated polymer microvalves.
Design and Wafer-Level Fabrication of SMA Wire Microactuators on Silicon
This paper reports on the fabrication of microactuators through wafer-level integration of prestrained shape memory alloy wires to silicon structures. In contrast to previous work, the wires are strained under pure tension, and the cold-state reset is provided by single-crystalline silicon cantilevers. The fabrication is based on standard microelectromechanical systems manufacturing technologies, and it enables an actuation scheme featuring high work densities. A mathematical model is discussed, which provides a useful approximation for practical designs and allows analyzing the actuators performance. Prototypes have been tested, and the influence of constructive variations on the actuator behavior is theoretically and experimentally evaluated. The test results are in close agreement with the calculated values, and they show that the actuators feature displacements that are among the highest reported.
The first ground cricket (Orthoptera: Trigonidiidae: Nemobiinae) from mid-Cretaceous Burmese amber
Abstract A new genus and species, Birmaninemobius hirsutus gen. et sp. nov., is described on the basis of a well-preserved orthopteran specimen in mid-Cretaceous Burmese amber and attributed to the subfamily Nemobiinae (ground crickets) of the family Trigonidiidae (Grylloidea). As the first record of Nemobiinae from mid-Cretaceous Burmese amber, this new taxon not only provides novel morphological diversity in ground crickets but also indicates that the ground crickets lived in Burma (Tethyan islands) as early as the mid-Cretaceous.