Continuous Fabrication and Perpendicular Recording Characteristics of Co-Cr Magnetic Tape
A new sputtering source (named an SPT target) was modified so as to enable high-rate deposition and continuous fabrication of Co-Cr composite perpendicular recording media. In order to improve the orientation and crystallinity of the Co-Cr layer and the permalloy backlayer, the aperture position was optimized and a magnetic return path plate was added to the target. The Co-Cr tape medium deposited on a 9 m thick polyimide film using this modified sputtering source showed good high-density recording performance.
Effects of high deposition rate on perpendicular magnetic recording media prepared by SPT target.
A new sputtering source (named SPT target) has been proposed, aiming at improvement in a continuous sputtering system for a Co-Cr double layer perpendicular recording medium. Very low discharge voltage was realized compared with sputtering source targets for magnetic medium so far proposed. Both Permalloy and Co-Cr films deposited by the source showed high crystal orientation even at a high-rate deposition. High through-input of Permalloy and Co-Cr layers deposition corresponded to higher 2nd peak ratio and D50* on recording density response for the resulting media. It was shown that the new SPT target is preferable for getting a high through-put in a magnetic recording medium production.
Perpendicular magnetic anisotropy and microstructure of sputter-deposited Co-Cr film
Abstract The Ar pressure dependence of both the microstructure and the magnetic properties of sputter-deposited Co-Cr film is investigated. As the Ar pressure decreases, the structural binding between columns in the film becomes denser and stronger. The columnar structure has no relation to the crystal orientation. A domain structure change is suggested.