The Impact of Surface Defects on SiC Schottky and Ohmic Contact Formation
Silicon carbide is a leading semiconductor for high power, high temperature electronics, yet SiC devices still face problems of electrical contact control and reproducibility. Recent work worldwide shows that point and extended defects in SiC as well as chemical reactions at metal-SiC interfaces can influence contact transport properties. Yet Schottky barrier and ohmic contact formation at the intimate metal-SiC junction are relatively unexplored on the microscopic level. We have used depth-resolved cathodoluminescence spectroscopy (DRCLS) and Auger electron spectroscopy (AES) to measure the optical emissions of defects near 4H-SiC surfaces and metallized interfaces on a nanometer scale. These techniques reveal that a variety of metals on clean 4H-SiC surfaces in ultrahigh vacuum (UHV) promote the formation of mid-gap defects extending only nanometers away from the junction. These states vary in their ranges of depth and depend sensitively on interface reactivity and subsequent UHV annealing
Observation of 4H–SiC to 3C–SiC polytypic transformation during oxidation
We have observed the formation of single and multiple stacking faults that sometimes give rise to 3C–SiC bands in a highly doped n-type 4H–SiC epilayer following dry thermal oxidation. Transmission electron microscopy following oxidation revealed single stacking faults and bands of 3C–SiC in a 4H–SiC matrix within the 4H–SiC epilayer. These bands, parallel to the (0001) basal plane, were not detected in unoxidized control samples. In addition to the 3.22 eV peak of 4H–SiC, Cathodoluminescence spectroscopy at 300 K after oxidation revealed a spectral peak at 2.5 eV photon energy that was not present in the sample prior to oxidation. The polytypic transformation is tentatively attributed to the motion of Shockley partial dislocations on parallel (0001) slip planes. The generation and motion of these partials may have been induced by stresses caused either by the heavy doping of the epilayer or nucleation from defect.
An Essay on the Nature and Significance of the Normative Nature of Economics
It is conventional in economics to distinguish between the normative and the positive. The normative has to do with goodness and badness, and with what ought and ought not to be done;1 and the positive has to do with objective description and/or explanation, with what is and with what is necessary given some normative end. The normative has to do with desirability; the positive has to do with truth (in the sense of either descriptive accuracy or serviceability of a means to a given end).2