Misted Deposition of [3D] Trenches for Drams and Frams III. PZT Thin Films and PZT Nanotubes
Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700degC exhibit good ferroelectric properties with remanent polarisation of ca. 15 muC/cm2. The step coverage was 59% on the side wall and 79% on the bottom wall.
Low-Temperature Fabrication of Ir/Pb(Zr,Ti)O3/Ir Capacitors Solely by Metalorganic Chemical Vapor Deposition
Ir/Pb(Zr, Ti)O3(PZT)/Ir capacitors were fabricated solely by metalorganic chemical vapor deposition (MOCVD). Both top and bottom Ir electrodes with mirror like surfaces were obtained at 300°C by MOCVD. Ferroelectric PZT thin films were successfully prepared at 395-540°C by MOCVD using (C2H5)3PbOCH2C(CH3)3 as a Pb precursor and PbTiO3 as a seed. Both Ir electrodes and PZT thin films showed good step coverage of 70–80%. PZT films prepared at 445–540°C exhibited well-saturated hysteresis loops with remanent polarization of 19–25 µC/cm2.
Texture Feature Extraction of RGB, HSV, YIQ and Dithered Images using GLCM, Wavelet Decomposition Techniques
When changing the format of an image from simple RGB to HSV, YIQ and Dithered image, the characteristics of image also change. In this paper, the similar images in the above formats are retrieved using statistical and structural retrieving techniques i.e. GLCM (Gray Level Co-occurrence Matrix) and Wavelet Decomposition techniques. The best results are coming for dithered, HSV images by using GLCM technique for feature extraction and by using Wavelet decomposition; HSV images are giving the best results. While other formats also give the correct retrieval but from the accuracy point of view, HSV images are retrieved with better accuracy using both techniques.