Role of Hydrogen in Polycrystalline Si by Excimer Laser Annealing
The role of hydrogen in the Si film during excimer laser annealing (ELA) has been successfully studied by using a novel sample structure, which is stacked by a-Si film and SiN film. Hydrogen contents in the Si films during ELA are changed by preparing samples with hydrogen content of 2.3-8.2 at.% in the SiN films with a use of catalytic (Cat)-CVD method. For the low concentration of hydrogens in the Si film, the grain size increases by decreasing hydrogen concentration in the Si film, and the internal stress of the film decreases as increasing the shot number. For the high concentration of hydrogens in the Si film, hydrogen burst was observed at 500 mJ/cm 2 and the dependence of the internal stress on the shot number becomes weak even at 318 mJ/cm 2 . These phenomena can be understood basically using the secondary grain growth mechanism, which we have proposed.
Characteristics of Recrystallized poly-Si Film Prepared by ELA of a-Si Deposited on SiO2 / SiN / Glass Using PE-CVD Method
Mem Fac Eng Yamaguchi Univ
Mathematical Simulation of Combustion of Boron Powder Gas Suspension
Based on a two-phase two-velocity model of a reacting gas-dispersed medium, a mathematical model of combustion of a boron powder gas suspension has been formulated. The results of numerical solution of the problem are presented. The influence of the composition of the gas suspension, its size, size distribution of particles, mass concentration of particles, as well as of the presence of aluminum powder in the suspension on the visible and normal velocities of flame propagation in the gas suspension, is shown. A comparison of the results of calculation with the well-known experimental and theoretical data is carried out. Satisfactory agreement of the predicted results with experimental data is shown.