Investigation of Ni-based silicide formation by different dynamic surface annealing approaches
Sub-melt millisecond anneal (MSA) is one of major anneal techniques for forming ultra-shallow and highly activated junctions. Besides post-implant anneal for source/drain and source/drain extensions, MSA has also attracted increased interests in nickel-silicide formation recently. During the silicidation process, desired Ni diffusion in forming silicides is competing with un-wanted Ni diffusion along defects paths. The latter will cause higher junction leakage and/or source/drain leakage. Since the activation energy for the un-wanted diffusion is lower, higher process temperature with shorter duration is beneficial for minimizing the un-wanted diffusion. Furthermore, MSA allows high process temperature to be used for silicide formation, which can re-activate some dopants, such as arsenic and phosphors. These dopants are easily deactivated during lower temperature thermal processes post source/drain formation such as silicide block film deposition; therefore, transistor performance can be improved by using MSA for silicidation processes. In this work, dynamic surface annealing (DSA), which is one form of MSA techniques, was applied to form Ni-based silicides. The impacts of different combinations of soak RTA and DSA for thermal steps before and after selective nickel/NiSi strip were examined. One step DSA has been demonstrated effective reduction of Nickel piping by e-beam inspection count, improved NiSi resistance and junction leakage w/o device performance degradation.
Pt-doped Ni-silicide films formed by pulsed-laser annealing: Microstructural evolution and thermally robust Ni1-xPtxSi2 formation
Abstract Pulsed-laser annealing (PLA) was performed on a preformed Pt-doped Ni-rich silicide film (Ni2Si phase), and its microstructural and phase evolution were studied from submelting to melting condition by varying the laser power density (P). Vertically nonuniform compositional profile with an interfacial intermixing was observed under a solid state reaction regime (P
Experimental Study on Acoustic Agglomeration of Fine Particles from Coal Combustion
The removal of fine particles in coal-fired fumes was experimentally studied based on acoustic agglomeration. An experiment facility was designed and set up. In this facility, a fluidized bed coal combustor was used as fume generator, and an Electrical Low Pressure Impact or (ELPI) was used to measure the fine particle concentration and size distribution in the fumes. The results show that under the effect of high intensity sound waves, there is good performance to remove fine particles in coal-fired fumes, which with a number mean diameter of 0.07μm. Especially, under the conditions of the frequency of 1 000Hz and the sound intensity of 161.5dB, the number concentration of 0.0233~9.314μm particles decreased by 85.2%, and their mass concentration decreased by 92.5%.