Simple, high current, antimony ion source.
A simple metal ion source capable of producing a continuous, uncontaminated, high current beam of Sb ions is presented. It produced a total ion current of 200 muA at 1 kV extraction voltage. A discharge occurred in the source at a pressure of 6x10(-4) Torr. The ion current extracted from the source increased with the 3/2 power of the extraction voltage. The perveance of the source and ion density in the plasma were 8x10(-9) and 1.8x10(11) cm(-3), respectively.
Small, simple and high efficiency arsenic ion source
Abstract An ion source is presented which produces a continuous, uncontaminated, high current (1–100 ωA) beam of arsenic with a high charge utilization efficiency. The main advantages of this source are related to two unique features: (1) the unmagnetized hot cathode discharge in which the primary electrons are electrostatistically trapped: (2) the design of the cylindrical oven, which is all around the 10mm dia ionization chamber and is connected to it through a pneumatic valve. The source has the following characteristics which make it suitable for application into UHV reactors: (1) small size; (2) no support gas; (3) stable and reproducible beam performances: (4) low power requirements-about 30 W for the oven, and 10 W for the discharge; (5) cathode life about 100 h, (6) low charge utilization rate, about 10 mg h −1 , (7) ability to operate efficiently on either gas or solids. The basic characteristics of a 80 ωA beam accelerated to 3 kV are: composition over polyatomic ions- As + 20%, As 2 + As 3 + 10%, As 4 + 50%; axial energy spread-15 eV; divergence-5°; normalized emittance-4 × 10 −9 πrad × m; neutral ionization efficiency-7%.
High Intensity Source of 20‐keV Hydrogen Atoms
A continuous source of energetic hydrogen atoms has been developed for use in a plasma experiment. The mechanical design and some operating characteristics of the ion source are described, as well as the beam focusing and neutralizing system. An output of 65‐mA power equivalent of 20‐keV hydrogen atoms has been measured on a 2.0×6.3 cm target located 350 cm from the ion source.