Application of Vertical Micororeactor Stack with Polystylene Microbeads to Immuno Assay
This paper proposes a vertical microreactor stack, a new concept of the microreactor, using vertical fluid flow operation and multifunctional fluid filters and vertically stacked reservoirs. The vertical fluid flow operation utilizes the surface tension of the liquid/ gas interface and pneumatic pressure to control the liquid behavior in vertical microreactor stack. The functions as microvalve, microcahnnel and micromixer of the fluid filter are estimated by computational fluid dynamics (CFD) simulation and experiments. The enzyme linked immuno-solvent assay is demonstrated by using vertical microreactor stack and the calibration curve was successfully taken.
Large area and wide dimension range x-ray lithography for lithographite, galvanoformung, and abformung process using energy variable synchrotron radiation
We developed an x-ray lithography system for the “lithographite, galvanoformung, and abformung” process using synchrotron radiation at the NewSUBARU facility of the University of Hyogo, Hyogo, Japan. The x-ray lithography system can utilize two different energy regions: one is a high-energy region: from 2 to 12 keV, and the other is a low-energy region from 1 to 2 keV. Each energy region can be selected in accordance with the size and shape of the desired microstructures. Large-area patterning across an A4-size area was successfully performed with a highly uniform pattern thickness. Furthermore, high-aspect-ratio patterning using a high-x-ray-energy region was also achieved using this x-ray lithography system.
17 &mgr;m pixel 640 x 480 microbolometer FPA development at BAE Systems
BAE Systems has developed an advanced 640 x 480 focal plane array (FPA) with a 17 &mgr;m pixel pitch. Sensitivity of ≤ 50 mK was demonstrated and the FPAs were used in imaging demonstrations. Successful scaling of BAE Systems' patented single contact per pixel, single-level microbolometer process to 17 &mgr;m pitch provides a path toward next generation microbolometer imaging systems.