Chapter 4. High Temperature Barrier Layers
The concept of hybrid electrode-barrier layers is introduced in the first section. The experimental process and ferroelectric properties of PZT films on the electrode-barrier layers are explained in detail in the second section. The fatigue problem and minimization of the fatigue are reviewed, and the improvement of the fatigue properties using the high temperature multi-layer substrates are discussed in the last section. 4.1 INTRODUCTION In the previous two chapters, high density destructive readout (DRO) FRAM were investigated by primarily focusing on materials processing temperature. The low temperature processing was successfully achieved for the high density DRO FRAM applications by using a modified sol-gel processing. The other approach we have taken for integrating PZT films into high density CMOS devices is to develop novel electrode-barrier layers for high temperature processing. Since the currently used diffusion barrier layers such as TiN and TiSi 2 maintain their electrical conductivity only up to 550 °C, high temperature barrier layers are desirable for the integration of PZT films into high density CMOS devices. Ideal electrode materials for the DRO FRAM devices should possesses good electrical conductivity, outstanding thermal and chemical stability, and amenability to dry etching. In particular, the electrode-barrier should be a good diffusion barrier without reacting the ferroelectric materials or the underlying substrate (poly-Si) during high temperature processing. In this research, we propose Pt/IrO 2 /Ir hybrid electrode

 Report

ra n g e d f ro m 3 0 t o 1 9 0 m g /L .  C h a n n e l d iv e rs io n  N o m a jo r c h a n g e in o v e ra ll c a tc h m e n t a n d th u s a d v e rs e im p a c t to h y d ro lo g y a n d th e a s s o c ia te d w a te r q u a lit y im p a c t is n o t a n ti c ip a te d .  S e w e ra g e p ro p o s e d b y t h e d e v e lo p m e n t c o u ld b e b e n e fi c ia l to e x is ti n g w a te r q u a lit y.
Numerical Simulation of Induction Heating Process of Continuous Casting Slab
Compared with traditional blazing furnace, the Continuous Casting-Direct Rolling is an advanced manufacturing steel technology, which can reduce energy waste, decrease pollution and enhance efficiency. The characteristics of steels during induction heating are complex, the change of material properties with temperature makes exact analysis methods very difficult to implement. Therefore, a powerful computer aided numerical tool (i.e., finite difference analysis) is selected to numerically model the induction heating process in this paper. The mathematic model coupling with electromagnetic field and thermal field was established, and it was solved by finite difference method (FDM), thus the slab temperature distribution and its variation with time were obtained, and the characteristics in whole induction heating process were studied. To validate the program feasible, the results were evaluated and compared with experiment results, which showed that the simulation results are reliable and effective. The skin effect in heating process from the two results was studied and demonstrated, the temperature change caused by different parameters such as the induced power intensity and the corner radian were also presented, which indicate that the slab temperature can be heated uniformly through adjusting these parameters, thus the continuous casting slab can meet the rolling requirement.