Current imaging, EBIC/EBAC, and electrical probing combined for fast and reliable in situ electrical fault isolation
Abstract Using a compact nanoprobing setup comprising eight probe tips attached to piezo-driven micromanipulators, various techniques for fault isolation are performed on 28 nm samples inside an SEM. The employed techniques include nanoprobing as well as EBAC. The recently implemented Current Imaging technique is used to quickly image large arrays of contacts providing a means of locating faults. In this case, Current Imaging provides insight into the sample's behaviour yielding qualitatively comparable results to the more cumbersome cAFM technique. While the results of the TEM investigations including EDX mappings were inconclusive, the Current Imaging technique clearly shows that the root cause is located below the SiGe layer. By combining these techniques inside a FIB/SEM microscope, it is possible to locate and characterize a failure as well as prepare a TEM lamella for further investigation without the necessity to switch to a different tool.
Root Cause Analysis and Correction of Single Metal Contact Open-Induced Scan Chain Failure in 90nm node VLSI.
In this paper, the localization of open metal contact for 90nm node SOC is reported based on Electron Beam Absorbed Current (EBAC) technique and scan diagnosis for the first time. According to the detected excess carbon, silicon and oxygen signals obtained from X-ray energy dispersive spectroscopy (EDX), the failure was deemed to be caused by the incomplete removal of silicate photoresist polymer formed during the O2 plasma dry clean before copper plating. Based on this, we proposed to replace the dry clean with diluted HF clean prior to the copper plating, which can significantly remove the silicate polymers and increase the yield.
Numerical Simulation of Thermal Sensitivity for Explosives
In order to compare the thermal sensitivity of several typical explosives, this article solved numerically one-dimensional transient heat conduction equation including thermal decomposition for explosives with finite difference method. The explicit difference equations under different boundary conditions were established, and the corresponding stability criterion was derived. The ignition times for typical explosives were calculated, which was used to evaluate thermal sensitivity of explosives.