Effects of hydrogen dilution on electron density in multi-hollow discharges with magnetic field for A-Si:H film deposition
We have measured dependence of electron density n<inf>e</inf> on hydrogen dilution ratio R= [H<inf>2</inf>]/([SiH<inf>4</inf>]+[H<inf>2</inf>]) in the multi-hollow discharges with or without magnetic fields to obtain information about the deposition rate enhancement due to hydrogen dilution and applying the magnetic fields. The R dependence of the n<inf>e</inf> did not correlate with that of the deposition rate. The n<inf>e</inf> exponentially decreases with a distance from the discharges z. The n<inf>e</inf> decreases faster for higher R. These complicated behaviors of n<inf>e</inf> may be explained by electron attachment to the clusters generated in the SiH<inf>4</inf>+H<inf>2</inf> discharges. For R=0, the n<inf>e</inf> was almost same value regardless with or without magnetic fields. For R=1, n<inf>e</inf> with magnetic fields was 1/10 of that without magnetic fields. We also found that, for R=0, ne drastically decreased with increasing the z, while for R=1, ne showed a gradual decrease with z. The effects of applying magnetic fields on the deposition are unclear but applying the magnetic fields may affect the electron energy distribution.
On the Way towards High-Efficiency Thin Film Silicon Solar Cells by the "Micromorph" Concept
Note: IMT-NE Number: 222 Reference PV-LAB-CONF-1996-008 Record created on 2009-02-10, modified on 2017-05-10
High resolution infrared study of hydrogen chemisorbed on Si(100)
Abstract The vibrational spectrum associated with hydrogen chemisorbed on Si(100) was studied for the first time by means of Fourier transform infrared spectroscopy. The low coverage phase (monohydride) is characterized at room temperature by a broad line (Δ=17cm −1 ) at 2095cm −1 which sharpens upon mild annealing, indicating an ordering of the hydrogen monolayer. The high coverage phase (dihydride) features symmetric [ν 1 =2099cm −1 , Δ=5cm −1 ] and antisymmetric [ν 3 =2087cm −1 , Δ=5cm −1 ] stretching modes with dynamic dipole moments perpendicular and parallel to the surface, respectively. The effective charge, e * /e=0.01, is consistent with early theoretical predictions. The resulting dipolar interaction is too weak to account for the 12cm −1 splitting, suggesting a small chemical interaction.