Current imaging, EBIC/EBAC, and electrical probing combined for fast and reliable in situ electrical fault isolation
Abstract Using a compact nanoprobing setup comprising eight probe tips attached to piezo-driven micromanipulators, various techniques for fault isolation are performed on 28 nm samples inside an SEM. The employed techniques include nanoprobing as well as EBAC. The recently implemented Current Imaging technique is used to quickly image large arrays of contacts providing a means of locating faults. In this case, Current Imaging provides insight into the sample's behaviour yielding qualitatively comparable results to the more cumbersome cAFM technique. While the results of the TEM investigations including EDX mappings were inconclusive, the Current Imaging technique clearly shows that the root cause is located below the SiGe layer. By combining these techniques inside a FIB/SEM microscope, it is possible to locate and characterize a failure as well as prepare a TEM lamella for further investigation without the necessity to switch to a different tool.
Resistive contrast imaging applied to multilevel interconnection failure analysis
Resistive contrast imaging (RCI) is a new failure analysis technique that uses a scanning electron microscope to generate a relative resistance map of an integrated circuit. The RCI map can be used to localize abrupt changes in resistance and verify continuity. Results using RCI on several two-level interconnection devices are described. The images demonstrate how RCI can be used to differentiate between levels and to localize metal shorts and opens. Methods for improving image quality and level differentiation as well as future development work are discussed.<<ETX>>
Mechanics of deformable directed surfaces
Abstract The paper develops a simple, yet complete and consistent non-linear dynamic thermo-elastic shell theory based on the concepts of a two-dimensional directed continuum. The constitutive equations are postulated in a general form. Stress-strain relations are derived using the equation of energy balance and the two entropy production inequalities, which are rewritten in a special form. The linear theory is discussed in detail. The structure of the stress-strain relations is presented in the most general form and then specialized to concrete examples, in particular, to the classical shell theory, using their invariance properties with respective to certain symmetry groups. The elastic moduli are determined by demanding the coincidence of the frequency dispersion surfaces obtained using the two-dimensional theory with the lowest foils of the corresponding surfaces resulting from the three-dimensional theory of elasticity.