Structural, optical and electrical properties of nanocrystalline TiO2 -- HfO2 thin films
In the present work the properties of mixed HfxTi1-xO2 solid solution thin films in metal-oxide-semiconductor (MOS) configuration have been studied. Thin films, were grown on monocrystalline silicon substrates using the low pressure hot target reactive sputtering from the Ti:Hf mosaic target. From optical transmission measurements the 3.42 (eV) bandgap of the thin films has been estimated. Electrical characterization of the prepared MOS structures shows classical capacitance- and current-voltage behaviors indicating medium-k gate oxide properties with the low leakage current
Microstructure and Optical Properties of TiO2 Thin Films Prepared by Low Pressure Hot Target Reactive Magnetron Sputtering
Abstract Thin films of TiO2 were deposited onto (1 0 0) oriented silicon and glass substrates using modified magnetron sputtering method. The method, among the others, consisted in employing low pressure of reactive gas (
Resonant Auger decay study of C1s -> pi* core-excited OCS
The present work aims at characterizing short-lived C1s((-1)) pi*((1)) core-excited states of the OCS molecule based on the analysis of the vibrational fine structure and lineshape profiles of the high-resolution resonant Auger decay spectra recorded at the excitation energies along the C1s -> pi* resonance in the binding energy region 15-19eV. Very different behavior in terms of lineshape and resonant enhancement is observed for the (A) over tilde, (B) over tilde and (C) over tilde final states. This is explained by (1) the variation in the C-O bond lengths for the states involved in the electronic relaxation and (2) different contributions in terms of Mulliken population to the molecular orbitals determining the electronic character of the corresponding states. Since the final-state geometries are known from a number of previous experiments and ab initio calculations, the geometry of the C1s((-1)) pi*((1)) intermediate states can be predicted in analogy with e.g. the N-2, CO2 and N2O molecules. (C) 2009 Elsevier B.V. All rights reserved. (Less)