Polishing damages to electrical properties of BLT thin film capacitors fabricated by damascene process of chemical mechanical polishing
BLT thin film capacitor was fabricated by the novel method of chemical mechanical polishing (CMP) process. The electrical characteristics including P-V and I-V of BLT capacitor were damaged by the polishing pressure which is one of the main factors to improve the CMP performance for BLT thin film; therefore, the lower polishing pressure must be selected for the good electrical characteristics although the removal rate was lower.
Electrical and Thermal Properties of Platinum Thin Films Prepared by DC Magnetron Sputtering for Micro-Heater of Microsensor Applications after CMP Process
Chemical mechanical polishing (CMP) of platinum thin films was performed for the improvement of surface morphology. Platinum thin films after CMP process with alumina slurry showed the increase of surface morphology without a remarkable difference of the thermal characteristics of as-annealed platinum thin films. The power consumption of platinum thin films micro-heater also became very low by improvement of surface morphology after CMP process. The similar or improved electrical and thermal characteristics of platinum thin films for micro-heater of sensor applications as well as evaluation possibility of sensing property by the improved surface morphology were obtained after CMP process.
A New Vacuum Pressure Infiltration CFRP Method and Preparation Experimental Study of Composite
In order to prepare a carbon-fiber-reinforced polymer composite (CFRP) with ideal microstructure and properties, a new vacuum pressure infiltration CFRP method is proposed based on an analysis of existing CFRP preparation process methods. Research on composite material preparation systems was carried out by using this new method principle. The system mainly includes a fiber pre-forming module, a vacuum heating infiltration module, a hot-press curing molding module, and a data acquisition control module. Under the conditions of natural curing at 0 MPa + 6 h + 25 °C, vacuum heating curing at –0.05 MPa + 30 min + 80 °C, and hot-press curing at 0.7 MPa + 5 min + 50 °C, a two-dimensional (2D) CFRP with excellent microstructure and properties was successfully prepared. Observing the microstructure of the prepared composite material, it can be found that the inside of the composite material was sufficiently and uniformly infiltrated, and common preparation defects such as holes and delamination were effectively controlled. Through the performance test, the bending strength of the material reached 790 MPa.