Electron Density Oscillations in CC-RF Oxygen Plasma Investigated by Gaussian Beam Microwave Interferometry
Gaussian beam microwave interferometry (160 GHz, beam waist of 5 mm) is applied to study the electron density in capacitively coupled radio-frequency (RF) oxygen plasma. The microwave interferometry provides immediately the line-integrated electron density without model assumptions. In the considered range of RF power and total pressure, the investigations have shown that the oxygen plasma is dominated by electron density oscillations due to the attachment-induced ionization instability. The frequency of the mostly nonharmonic oscillations ranges between 0.3 and 3 kHz with peak-to-peak line-integrated electron density variations up to 3.5 × 1015 m-2.
Particle-In-Cell simulation of laser photodetachment in capacitively coupled radio frequency oxygen discharges
Particle-In-Cell simulations with Monte Carlo collision of capacitively coupled radio frequency oxygen discharges are used to study the appearance and characteristics of two experimentally observed electronegative modes, the high electronegative mode for low peak-to-peak voltage, and the low electronegative mode for high peak-to-peak voltage. For the high electronegative mode, the simulated laser photodetachment signal agrees very well with the experiment. The simulation identifies the dominant transport processes for high electronegativities: electrons flow fast out of the perturbed region, where the laser pulse generates laser detachment of negative ions. Negative ions are not streaming inward, but are produced within this region by dissociative attachment after the laser pulse.
Resonant Auger decay study of C1s -> pi* core-excited OCS
The present work aims at characterizing short-lived C1s((-1)) pi*((1)) core-excited states of the OCS molecule based on the analysis of the vibrational fine structure and lineshape profiles of the high-resolution resonant Auger decay spectra recorded at the excitation energies along the C1s -> pi* resonance in the binding energy region 15-19eV. Very different behavior in terms of lineshape and resonant enhancement is observed for the (A) over tilde, (B) over tilde and (C) over tilde final states. This is explained by (1) the variation in the C-O bond lengths for the states involved in the electronic relaxation and (2) different contributions in terms of Mulliken population to the molecular orbitals determining the electronic character of the corresponding states. Since the final-state geometries are known from a number of previous experiments and ab initio calculations, the geometry of the C1s((-1)) pi*((1)) intermediate states can be predicted in analogy with e.g. the N-2, CO2 and N2O molecules. (C) 2009 Elsevier B.V. All rights reserved. (Less)