Misted Deposition of [3D] Trenches for Drams and Frams III. PZT Thin Films and PZT Nanotubes
Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700degC exhibit good ferroelectric properties with remanent polarisation of ca. 15 muC/cm2. The step coverage was 59% on the side wall and 79% on the bottom wall.
Low-Temperature Fabrication of Ir/Pb(Zr,Ti)O3/Ir Capacitors Solely by Metalorganic Chemical Vapor Deposition
Ir/Pb(Zr, Ti)O3(PZT)/Ir capacitors were fabricated solely by metalorganic chemical vapor deposition (MOCVD). Both top and bottom Ir electrodes with mirror like surfaces were obtained at 300°C by MOCVD. Ferroelectric PZT thin films were successfully prepared at 395-540°C by MOCVD using (C2H5)3PbOCH2C(CH3)3 as a Pb precursor and PbTiO3 as a seed. Both Ir electrodes and PZT thin films showed good step coverage of 70–80%. PZT films prepared at 445–540°C exhibited well-saturated hysteresis loops with remanent polarization of 19–25 µC/cm2.
Measurement and Demonstration of Thermal Expansion Coefficient
There are many classroom demonstrations, such as the ball-and-ring experiment, for showing the existence of thermal expansion of solids. The coefficient of linear expansion α (= increase in length divided by the original length times the change in temperature) may be measured in high school laboratories using a number of methods.1–4 In this paper we describe an especially simple experiment for determining α for a metal rod. It is based on the well-known optical lever method and is suitable for either a laboratory experiment or a classroom exercise.