A 100-kV, 100-A/cm2 Electron Optical System for the EB-X3 X-Ray Mask Writer
In order to increase the throughput of the EB-X3 variably shaped electron beam writing system, a method of increasing the current density with a zoom lens was introduced into the electron optical system. The electron optical characteristics were measured at current densities of 50 and 100 A/cm2 under various zoom-lens conditions, and the results show that this method can increase the current density to 100 A/cm2 without any change in the major electron optical characteristics. At this current density, the patterning resolution was estimated to be 55 nm, and no melting of the first shaping aperture and no microdischarges in the 100-kV electron gun were observed. This confirms that the current density of the EB-X3 can in fact be extended to 100 A/cm2 for the fabrication of X-ray masks with a minimum feature size of 100 nm and below.
A 100 kV Electron Gun for the X-Ray Mask Writer, EB-X2
A 100-kV thermal-emission electron gun was developed for the X-ray mask writer EB-X2, which employs a variable-shaped electron beam with a beam edge resolution of 20 nm. The optimized design of the EB-X2 electron optical system requires that the electron gun has crossover diameters of 50 µ m and an optical length of less than 100 mm. So the crossover diameters of the gun were accurately calculated with an electron ray tracing program, and a gun with the required crossover diameters and optical length was designed. The gun was constructed, and the crossover diameters were measured. The measured values agree well with the calculated ones, and this confirms that the gun is suitable for use in the EB-X2 electron optical system.
An analytical approach to the design of electrodes in high-power, fast-transverse-flow CO2 lasers
Abstract Usually, the design of the electrodes of fast-transverse-flow CO 2 lasers relies more on experimental data than on theoretical analysis. Traditional systems sustain a stable, high-power discharge but the current distribution generates a peaked, non-uniform small-signal-gain pattern. We present a theoretical model suitable for the design of electrodes that achieves a quasi uniform gain distribution. The analysis, based on a two-temperature model and the gas-transport equations, computes the electron density that supports a flat gain pattern. Combining the desired electron density with the electron-balance equations, the model determines the required electric field. The results were used to design a new set of electrodes for a home-made fast transverse flow CO 2 laser. A stable, large volume discharge ( 4 × 8 × 90 cm 3 ) with very good uniformity was obtained. The resulting gain distribution was registered in a bi-dimensional map. The peak gain rose from 1.2 m - 1 , attained with the old electrode set, to 1.6 m - 1 with the new one and the gain showed a homogeneous profile.