Structual and Dielectric Properties of Pb(Zr0.53Ti0.47)O3 Thin Films Grown on LaNiO3 Buffered Si Substrates
Ferroelectric Pb(Zr0.53Ti0.47)O3 thin films with thickness of around 800 nm were prepared on LaNiO3 (LNO) buffered SiO2/Si substrates by sol-gel method. The LNO buffer layer serves as the bottom electrode and the template for growing PZT thin films with preferred orientation. The (110)-textured PZT thin films can be obtained on 250 nm-thick LNO buffered SiO2/Si substrates. Upon using the LNO buffer layer, the annealing temperature of the PZT films is lowered to 600degC. Our results indicate that PZT thin films prepared on LNO buffered Si substrates have good structural and dielectric properties for sensor and actuator applications.
Combined annealing temperature and thickness effects on properties of PbZr0.53Ti0.47O3 films on LaNiO3/Si substrate by sol–gel process
Abstract PbZr 0.53 Ti 0.47 O 3 (PZT) films with different thickness were deposited on LaNiO 3 -coated Si substrate by modified sol–gel process. The thickness effect on structure and properties of PZT films annealed at different temperature have been investigated. Single perovskite-phase PZT films with preferred [1 0 0] orientation and denser columnar structure were obtained, when annealed at a lower temperature of 600 °C, whereas a higher annealing temperature of 700 °C resulted in [1 1 0] preferred orientation and porous structure. The dielectric and ferroelectric properties of PZT films annealed at different temperature were evaluated systemically as a function of thickness, and the dielectric and ferroelectric properties of PZT films were found to greatly depend on both thickness and annealing temperature.
Effects of poly(ethylene glycol) additive molecular weight on the microstructure and properties of sol-gel-derived lead zirconate titanate thin films
Poly(ethylene glycol) (PEG) additives with different molecular weights were used to modify sol-gel precursor solutions for preparing lead zirconate titanate (PZT) thin films. The morphology, crystalline structure, and mechanical and electrical properties of the films were characterized. The relationship between the characteristics of the films and the molecular weight of PEG was investigated. It was observed that the PEG eliminated cracking of the films during multiple pyrolysis treatments. However, with the increase of the PEG molecular weight, the films became less dense, which led to decreased Young's modulus and dielectric constant and increased coercive field. Our experiments showed that films prepared from sols modified by PEG with a molecular weight of 200 exhibited a dense morphology and excellent mechanical and electric properties without cracking.