Enhanced Plasma Uniformity in RF Plasma With Side Multihole
Capacitively coupled plasma source with side multihole is studied. Due to the hollow cathode effect at the multihole, edge plasma density is strongly increased and thus, plasma uniformity is significantly enhanced.
Scaling laws for dual radio-frequency capacitively coupled discharges
The characteristics of dual radio-frequency capacitively coupled discharges are studied based on a homogeneous analytic model. We are considering a planar plasma device that can be approximated using a one-dimensional model. A set of equations describing the dynamics of the system are presented and used to give the analytic scaling laws. Scaling laws relating the drive frequencies and the applied voltages of dual radio-frequency sources to operating functions such as plasma density and plasma potential are examined and compared with numerical simulations.
VLA stereoscopy of solar active regions. 2: Altitude, relative motion, and center-to-limb darkening of 20 centimeter emission
A newly developed method of stereoscopic correlation is applied to solar radio maps at a wavelength of 20 cm. On the basis of stereoscopic correlations between radio maps obtained on 6 different days we establish the presence of 66 radio source components associated with 22 active regions. We find the following statistical results for active region source structures at 20 cm: 1. The observed lifetime is consistent with an exponential distribution having an e-folding time scale of greater than 18 days. 2. The average altitude of 20 cm sources is 25 +/- 15 Mm; 90% of the sources are found in heights less than 40 Mm. 3. The average diameter of discrete source structures is 48 +/- 15 Mm, implying a vertical/horizontal aspect ratio of q(sub A) approx. = 0.5. 4. No significant source motion has been found with respect to the standard differential rotation rate of Omega = 13.45 deg - ((3 deg (sin(exp 2)B)). 5. We find a statistical limb darkening, which can be described by the relation (T(sub B)(alpha))/T(sub B)(0)) = 0.4 + ((0.6(cos(exp 2) alpha)) for sources with T(sub B) greater than 0.5 MK. 6. The degree of source polarization is 15% +/- 10% and is independent of source location. 7. Bright sources (greater than or approximately equal to 0.5 MK), or equivalently, long-lived sources (greater than or approximately equal to 5 days) show a systematic variation of their altitude as function of the center-limb distance.