Theory for shear horizontal surface acoustic waves in finite synchronous resonators
An analytic approach is developed for simulating synchronous resonators employing shear horizontally polarized surface acoustic waves, such as surface transverse waves, and leaky surface acoustic waves on LiTaO/sub 3/ and LiNbO/sub 3/ substrates. The approach, based on a simplified parametrized Green's function theory, allows the description of the localization of the wave and the interaction with bulk acoustic waves. An analytic expression is found for the harmonic admittance of an infinite periodic electrode array, and approximate corrections for finite structures are presented. The model enables fast computation of the admittance of synchronous resonators, and it compares favorably with experiments and numerical simulations.
CAREER: Acoustic Wave Filters for High Frequency Wireless Communication Applications
Pure shear horizontal piezoelectrically active surface and bulk acoustic waves (SH-SAW and SH-BAW) exist along rotated Y-cuts, Euler angles (0 , , 90 ), of trigonal class 32 group crystals, which include the LGX family of crystals (langasite, langatate, and langanite). In this paper both SH-SAW and SH-BAW generated by finite-length, interdigital transducers (IDTs) on langasite, Euler angles (0 , 22 , 90 ), are simulated using combined finiteand boundary-element methods (FEM/BEM). Aluminum and gold IDT electrodes ranging in thickness from 600 A to 2000 A have been simulated, fabricated, and tested, with both free and metalized surfaces outside the IDT regions considered. Around the device’s operating frequency, the percent difference between the calculated IDT impedance magnitude using the FEM/BEM model and the measurements is better than 5% for the different metal layers and thicknesses considered. The proportioning of SH-SAW and SH-BAW power is analyzed as a function of the number of IDT electrodes; type of electrode metal; and relative thickness of the electrode film, h , where is the SHSAW wavelength. Simulation results show that moderate mechanical loading by gold electrodes increases the proportion of input power converted to SH-SAW. For example, with a split-electrode IDT, comprising 238 electrodes with a relative thickness h = 0 63% and surrounded by an infinitesimally thin conducting film, nearly 9% more input power is radiated as SH-SAW when gold instead of aluminum electrodes are used.
Self‐Consistent Theory of Interdigital Transducers
The generation and absorption of surface waves by an interdigital transducer with uniform finger spacing are calculated with the aid of a surface dielectric constant related to the TM‐wave impedance. It is found that the response of an infinite transducer can be calculated with complete consistency, i.e., the field due to the distortion of the piezoelectric medium is correctly included in the determination of the distortion. For a finite transducer, the solutions given are in error only at lines on the surface at either end of the transducer, and are therefore accurate when the transducer is long. It is found that the parallel equivalent circuit derived in the weak coupling approximation is a reasonably accurate representation of the transducer when the coupling is strong and the transducer long, but that the central resonance is then distorted.