Physics-Based Circuit Model for a Water-Wall High-Temperature Arc Lamp Using Finite Volume Method
High-temperature arc lamps are used for thermal processing of semiconductor wafers. A vortex water wall on the inner surface of the lamp's enclosure is used to provide cooling for the glass. It has been experimentally observed that, above certain levels of injected energy, the arc shows an unstable behavior and is self-extinguished. In this paper, a physics-based model for the water-wall high-temperature arc lamp is derived and implemented in the form of an equivalent electrical circuit. The equivalent circuit is then coupled to the flash power supply equivalent circuit to validate the derived model against experimental voltage and current waveforms.
Modeling of a Vortex Water-Wall Argon Arc Lamp for Rapid Thermal Annealing Applications
This paper describes a modeling approach for a vortex water-wall argon arc lamp that is amenable to implementation in real-time controller hardware. The net emission coefficient (NEC) method has been successfully applied for different current levels and can predict the electrical properties of the positive column to sufficient accuracy. The radiation efficiency as a function of the isothermal core temperature has been explained qualitatively, but the correction for radiation efficiency as a function of input power has been implemented as a lookup table using experimental data.
Investigations of dielectric gratings using electrodynamic models based on volume integral equations
Eigenmodes of planar and cylindrical dielectric gratings (DGs) and electromagnetic wave scattering from multiplayer DGs are investigated. The DG characteristics are calculated using numerical-analytical solution of integral equations (IEs).