Corrosion resistance consolidation of a diaphragm type vacuum sensor
This paper describes the corrosion resistance consolidation of a diaphragm type vacuum sensor using a high corrosion resistance material. Initially, we had fabricated a vacuum sensor using a Ru based thin film amorphous alloy, whose high corrosion resistance was confirmed in wet tests. In the high corrosion gas tests, however, the sensor resists NF<inf>3</inf> and COF<inf>2</inf> gases but does not resist ClF<inf>3</inf> gas. Therefore, we searched for new Ni based amorphous alloys which can also resist ClF<inf>3</inf> using a combinatorial search based on a MEMS process. We were able to fabricate new sensors using Ni<inf>56</inf>Nb<inf>33</inf>Ti<inf>11</inf> and Ni<inf>49</inf>Nb<inf>35</inf>Ti<inf>16</inf> amorphous alloys which were shown to resist all three mentioned gases.
Thermal, Mechanical and Electrical Properties of Pd-Based Thin-Film Metallic Glass
As a kind of amorphous alloy, metallic glasses are suitable materials for micromachines because their size effect is considered to be absent. However, neither the fabrication process nor the physical properties of thin-film metallic glasses (TFMGs) have yet been examined. In this paper, Pd-based (Pd76Cu7Si17, atomic composition) TFMG was first fabricated by an RF-magnetron sputtering method. The existence of a supercooled liquid region (SCLR) and the thermal stability with respect to crystallization were measured by a differential scanning calorimeter (DSC). The existence of the SCLR was reconfirmed by a thermomechanical analyzer (TMA). The hardness of Pd-TFMG was measured by a mechanical testing machine for micro-sized specimens (MMT2000), while the Young's modulus was measured by a MMT2000 in the bending mode as well as by a TMA in the tensile mode. The resistivity of Pd-TFMG was tested by the four-point probe method. Finally, the influences of deposition conditions were discussed and the physical properties of TFMG were compared with those of Pd-based bulk metallic glass.
Researches on Structural Factor Involvement in Oral Tribology
This study is focused on two ceramic materials, D.SING (Ivoclar) and VM13 (emphasis the VITA TN), frequently used in restorative dentistry practice and it comes to complete a full set of results obtained by the authors over several years of research on oral tribology with main influence on oral health. In this way there are involved more specific structural aspects of dental restorative ceramic materials quality as is shown in [1].