Effective annealing and crystallization of si film for advanced TFT system
Abstract The effect of the crystallization and activated annealing of Si films using an excimer laser and the new CW blue laser are described and compared with furnace annealing for application in advanced TFTs and for future applications. Pulsed excimer laser annealing (ELA) is currently being used extensively as a low‐temperature poly‐silicon (LTPS) process on glass substrates as its efficiency is high in the ultra‐violet (UV) region for thin Si films with thickness of 40–60 nm. ELA enables extremely low resistivity relating to high crystallinity for both the n‐ and p‐type Si films. On the other hand, CW blue laser diode annealing (BLDA) enables the smooth Si surface to have arbitral crystal grains from micro‐grains to an anisotropic huge grain structure only by controlling its power density. Both annealing techniques are expected to be applied in the future advanced TFT systems.
Highly Photoconductive Si Film Formed by Blue Laser Diode Annealing for System on Panel
Highly photosensitive Si film of new structure was successfully fabricated using semiconductor blue laser diode annealing (BLDA). By adopting back-reflection layer, simulation results show 86% increase of light absorption in red or IR region. Peaks from XRD results showed that Si film was crystallized clearly after BLDA in spite of the new back-reflection layer of Ti. All the process for photoconductive film was conducted using r.f. sputtering and vacuum evaporation without adopting CVD. After H2 annealing, photoconductivity for the patterned Si films of 50 nm thickness increased remarkably up from 1.2 ×10-4 to 3.2 ×10-1 S/cm under white light of 100 mW/cm2. Adopting back-reflection layer under the crystallized Si film using BLDA is promising to integrate functional photosensors with TFTs on panel.
First Insights into the Draft Genome Sequence of the Endophyte Paenibacillus amylolyticus Strain GM1FR, Isolated from Festuca rubra L.
ABSTRACT Paenibacillus amylolyticus strain GM1FR is an endophyte isolated from aerial plant tissues of Festuca rubra L. Here, we report the draft genome sequence (7.3 Mb) of GM1FR containing 6,241 protein-coding genes, some of which are potentially involved in plant growth promotion and biocontrol.