A 100-kV, 100-A/cm2 Electron Optical System for the EB-X3 X-Ray Mask Writer
In order to increase the throughput of the EB-X3 variably shaped electron beam writing system, a method of increasing the current density with a zoom lens was introduced into the electron optical system. The electron optical characteristics were measured at current densities of 50 and 100 A/cm2 under various zoom-lens conditions, and the results show that this method can increase the current density to 100 A/cm2 without any change in the major electron optical characteristics. At this current density, the patterning resolution was estimated to be 55 nm, and no melting of the first shaping aperture and no microdischarges in the 100-kV electron gun were observed. This confirms that the current density of the EB-X3 can in fact be extended to 100 A/cm2 for the fabrication of X-ray masks with a minimum feature size of 100 nm and below.
A 100 kV Electron Gun for the X-Ray Mask Writer, EB-X2
A 100-kV thermal-emission electron gun was developed for the X-ray mask writer EB-X2, which employs a variable-shaped electron beam with a beam edge resolution of 20 nm. The optimized design of the EB-X2 electron optical system requires that the electron gun has crossover diameters of 50 µ m and an optical length of less than 100 mm. So the crossover diameters of the gun were accurately calculated with an electron ray tracing program, and a gun with the required crossover diameters and optical length was designed. The gun was constructed, and the crossover diameters were measured. The measured values agree well with the calculated ones, and this confirms that the gun is suitable for use in the EB-X2 electron optical system.
Geomagnetic Polarity Epochs: Sierra Nevada Data, 3
Available paleomagnetic and radiometric results for about 60 igneous rocks 3.6 m.y. old or less are consistent with the following geomagnetic polarity epoch time scale: Brunhes normal polarity epoch, 0.0 to 0.85±0.15 million years; Matuyama reversed polarity epoch, 0.85±0.15 to 2.4±0.1 million years; Gauss normal polarity epoch, 2.4±0.1 to 3.35±0.1 million years; Gilbert reversed polarity epoch, 3.35±0.1 million years to (?). A brief interval of normal polarity (the Olduvai event) occurs within the Matuyama reversed epoch at about 1.9 m.y., and a brief interval of reversed polarity (the Mammoth event) occurs within the Gauss normal epoch at about 3.06 m.y. Data for twelve units from eastern California and Nevada, reported here for the first time, are particularly useful in defining the Gauss-Gilbert boundary and for recognizing the Mammoth event.