Polishing damages to electrical properties of BLT thin film capacitors fabricated by damascene process of chemical mechanical polishing
BLT thin film capacitor was fabricated by the novel method of chemical mechanical polishing (CMP) process. The electrical characteristics including P-V and I-V of BLT capacitor were damaged by the polishing pressure which is one of the main factors to improve the CMP performance for BLT thin film; therefore, the lower polishing pressure must be selected for the good electrical characteristics although the removal rate was lower.
Structural and electrical properties of metal-ferroelectric-insulator-semiconductor field-effect transistors using a Pt/Bi3.25La0.75Ti3O12/CeO2/Si structure
The metal-ferroelectric-insulator-semiconductor (MFIS) capacitors were fabricated using a metal organic decomposition (MOD) method. The CeO2 thin films were deposited as a buffer layer on Si substrate and Bi3.25La0.75Ti3O12 (BLT) thin films were used as a ferroelectric layer. The electrical and structural properties of the MFIS structure were investigated by varying the CeO2 layer thickness. The width of the memory window in the capacitance–voltage (C–V) curves for the MFIS structure decreased with increasing thickness of the CeO2 layer. Auger electron spectroscopy (AES) and transmission electron microscopy (TEM) show no interdiffusion by using the CeO2 film as buffer layer between the BLT film and Si substrate. The experimental results show that the BLT-based MFIS structure is suitable for non-volatile memory field-effect-transistors (FETs) with large memory window.
History, criminology and the ‘use’ of the past
This article considers why, despite an apparent congruence of subject matter and methodologies, the disciplines of sociological criminology and criminal justice history are not more closely aligned. It contends that intellectual traffic between the two fields is not usually limited by institutional barriers, nor is it a legacy of the disciplinary antipathy which existed between history and sociology in Britain during the mid-twentieth century. Rather, it is due to the different ‘purposes’ with which sociological criminologists and criminal justice historians imbue their work and to the differing disciplinary perceptions of the relationship between the past, present and future which result from this. These different ‘purposes’ are traced via a consideration of the paths of development of the two disciplines from the 1940s. The article concludes by proposing an arena for future collaboration between criminal justice historians and sociological criminologists.