Failure analysis on the standby current due to dislocation in STI structure of flash memory
The technology of increasing Internal Vcc without using memory tester is used to enhance the photon emission and the failure range is defined in detail by nano probing. With these methods, we found out that the leakage current was caused by dislocations of STI arranged in a row.
Application of three-dimensional dislocation dynamics simulation to the STI semiconductor structure
Abstract As the size of semiconductor devices continues to shrink, the control of dislocation nucleation is becoming a severe problem due to high accumulated stress. In this paper, we propose a method to infer the initiation points and slip systems of nucleated dislocations through a combination of TEM observation and dislocation dynamics simulation based on FEM calculation. In order to reproduce the behaviors of dislocations on the nanometer scale, we adopted the core splitting concept first proposed by Brown and employed by Schwarz. We applied our method to a shallow trench isolation (STI) structure. The initiation points and slip systems of four kinds of nucleated dislocations can be detected. It is found that the line tension of the dislocation strongly affects the loop’s final shape, unlike the macroscopic dislocations observed in wafer slip.
CNC Desktop Vertical Machining Bench Design and Cooling Fluid Application
Today's manufacturing technologies, the human work force is used and at least a minimum level of margin of error is used in CNC machines. Desktop CNC machine tools and CNC machine tools are developed in parallel with the development of personal computers. This study provides CNC training institutions for education, small and medium-sized enterprises for commercial purposes use the low-cost desktop machine has been designing and manufacturing of CNC vertical machining was carried out. Desktop CNC machine tools and production capacity to handle the kind of material was applied to increase the cooling fluid. Through A199 and Fe37 the cooling fluid application desktop CNC machine tools, such as processing of materials that are difficult to successfully processed. Keywords—CNC, Desktop CNC Machine, CNC Design