Electromechanical tuning of double-membrane Photonic Crystal Cavities
PL spectra and peak shift obtained by applying a gradually increasing voltage are shown in Fig. 1b. We report up to 7 nm mode shift when the applied bias reaches 8.6 V. By further increasing the voltage we observe the well-known pull-in phenomenon: the cantilever collapses on the substrate because electrostatic forces win over elastic forces. We attribute the need for high voltages to fabrication issues and imperfections such as the complete erosion of the p-doped InGaAsP layer in the photonic crystal region during the sacrificial layer etching. Further process optimization should result in PCCs with Q factors>10'000, electromechanically tunable over >30 nm.
High performance continuously tunable top-emitting vertical cavity laser with 20 nm wavelength range
The authors demonstrate the first micromechanical tunable top-emitting laser with a continuous wavelength tuning range of 20 nm centred at 926 nm. For 11 nm of the tuning range, its threshold current and peak output power are 0.92 mW.
High performance 1.3 /spl mu/m vertical-cavity surface-emitting lasers with oxygen-implanted confinement regions and wafer-bonded mirrors
We show schematically the oxygen-implanted VCSELs. The devices consist of an oxygen implanted p-GaAs-AlGaAs (28 pairs) mirror, AlGaInAs-InP strain-compensated multiple quantum well (SC-MQW) cavity layers, and a top ZnSe/MgF (6 pairs) dielectric mirror.