A New Isolation Process for VLSI Devices
In this paper we present a new zero-bird's beak process which, with an additional photolithographic step, substitutes the thermal fully-recessed field oxide for a CVD oxide. With this process we have fabricated devices which present a very small narrow channel effect. Moreover, the use of a reference mask increases the process reproductivity and reduces the probability of the double-threshold voltage effect. The cross-section and electrical results are presented.
Experimental study of the electrical performance of isolation structures
The electrical behaviour of the parasitic Al-gate MOS transistor on LOCOS and SILO isolation structures is investigated. The influence of the two-dimensional parasitic channel on the isolation performances is pointed out by studying the bird's-beak length, the field oxide thickness, and the use of a semi- or fully recessed structure. The measured characteristics are discussed and explained with the assistance of the two-dimensional process simulations of the isolation structures.<<ETX>>
Complex Systems Architecture Framework: Extension to Multi-objective Optimization
This paper shows the utility to follow an architecture framework in order to design complex systems with a holistic approach. Multi-objective Optimization techniques extend and complete the architecture framework to support trade-off analysis and decision making in the Systems Engineering design process. The merging and combination of these two approaches, decision making and systems engineering, contribute to the efficient design of systems by helping to meet needs and constraints stemming mainly from the system analysis.