Polishing damages to electrical properties of BLT thin film capacitors fabricated by damascene process of chemical mechanical polishing
BLT thin film capacitor was fabricated by the novel method of chemical mechanical polishing (CMP) process. The electrical characteristics including P-V and I-V of BLT capacitor were damaged by the polishing pressure which is one of the main factors to improve the CMP performance for BLT thin film; therefore, the lower polishing pressure must be selected for the good electrical characteristics although the removal rate was lower.
Enhancement of optical properties for CdTe absorber through improving thickness uniformity by CMP process
The enhanced optical properties including absorbance of cadmium telluride (CdTe) thin film as an absorber in heterojunctioned solar cells were experimentally obtained by the chemical mechanical planarisation (CMP) process after sputtering deposition, which had been caused by improving the thickness uniformity of the as-deposited CdTe thin film.
Multiplication of Displacements of the Langevin Type Piezoelectric Transducer using Various Shapes of Horns
【Bolt-tightened Langevin type vibrators using longitudinal mode of bar were designed and fabricated. In order to amplify the displacement of the tip of the vibrators, stacked ceramics were used and five different shapes of the horns were designed and jointed. Resonant frequencies and vibration characteristics of vibrators and horns were analyzed by ANSYS(finite element analysis computer program), and the displacements of tips of the horns were measured. As results, when the numbers of the stacked ceramics were increased, the displacements of the tips were increased and the driving voltages were decreased. Step l horn (BLT-St1) showed maximum displacement of 36.92 $\mu\textrm{m}$ at 36.7 ㎑ with 45 V $\sub$ rms/ and 0.11 A. The displacement amplification ratio was about 5.2. But, the stress of step l horn was concentrated on intersection, where two diameters meet. To lessen the stress, step3 shaped hem is recommended.】