Properties of Fe-Zr-N Thin Films
Gases emerging from Fe-Zr-N films with various compositions during heating were analyzed by thermal desorption spectroscopy. The structures and magnetic properties of films were also investigated. H2, N2 and Ar were detected at 300-400°C, 500°C and 650°C, respectively. Larger amounts of N2 were emitted by films which contained larger amounts of N2. The changes in composition of films due to the emerging N2 is as follows. The composition changed for N/Zr ratios ranging from N/Zr≫1 to N/Zr~1, but was unchanged when N/Zr1. A (100) preferred orientation occurred in films in which the composition was N~Zr≫8 at% in the as-deposited state, while either a (100) orientation or random orientation occurred in all other cases. Under the former conditions, Fe-Zr-N films showed excellent soft magnetic properties and thermal stability up to 700°C.
Fe-X-N(X=Zr, Hf, Nb, Ta)薄膜の磁気特性
To obtain ultra fine grains of α-Fe sputtered films of Fe-X-N (X=Zr, Hf, Nb, Ta), ternary systems in which each element X had strong affinity for nitrogen and ability of amorphous formation were prepared and the dependence of soft magnetic properties on composition of films was investigated. Good soft magnetic properties and high saturation flux density Bs were obtained in each system. In particular, Fe-Zr-N and Fe-Hf-N systems had a widespread soft magnetic region and exhibited zero magnetostriction and high Bs up to 16 kG at a certain composition.
Quantitative Calculation of the Magnetic Ripple of Uniaxial Thin Permalloy Films
The magnetic ripple of thin films with uniaxial anisotropy is calculated for the field and the magnetization lying along the easy and the hard direction of the uniaxial anisotropy. For small dispersion of the direction of magnetization, the variational principle, applied to all energy terms including the exchange, crystalline anisotropy, uniaxial anisotropy, magnetostriction, magnetostatic, and stray field energies, yields a Bessel's differential equation. Its solutions (cylindrical functions) describe the two‐dimensional magnetic ripple of the film. Along the mean direction of the magnetization the fluctuations of the magnetization vector are much greater than perpendicular to it. In the first case these fluctuations are coupled by exchange forces, and in the second case by the stray field. The dispersion of the magnetization depends on the dispersion of the anisotropy, on the magnetic constants of the film, on the thickness of the film, and on the applied field. The theory is able to explain the image o...