Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics
The requirements on the quality of ultra-precise X-ray optical components for application in the Synchrotron Radiation (SR) community are increasing continually and strongly depend on the quality of the metrology devices available to measure such optics. To meet the upcoming accuracy goal of 50 nrad rms for slope measuring profilers, a dedicated project, SIB58 Angles, consisting of 16 worldwide partners and supported by the European Metrology Research Programme (EMRP) was started in Sep 2013. The project covers investigations on autocollimators under extremely challenging measuring conditions, ray-tracing models, 2D autocollimator calibration (for the first time worldwide), determination of error sources in angle encoders providing traceability by ‘sub-division of 2π rad’ with nrad uncertainty, angle generation by 'ratio of two lengths' in nrad level, and on the development of portable precise Small Angle Generators (SAGs) for regular in-situ checks of autocollimators’ performance. Highlights from the project will be reported in the paper and the community of metrology for X-Ray and EUV Optics will be informed about its progress and the latest work in angle metrology.
Self-calibration of precision angle sensor and polygon mirror
Abstract The present paper describes a high-precision angle sensor and a new method for calibrating precision angle sensors absolutely without the use of any accurate reference instruments. Two angle sensors with compensating devices which compensate thermal drift of the light source are developed and calibrated by themselves. The repeatability error of the evaluated mean sensitivity was improved to 0.01% by the compensating device. The repeatability of the calibrated linearity error was reduced to 0.025 s (arc). This paper also describes a new differential method that can calibrate simultaneously the dividing errors of a polygon mirror and angular profile of polygonal surfaces by using the developed angle sensors. Calibration of a 24-sided polygon mirror showed the repeatability error of dividing angle and angular profile to be approximately 0.2 s (arc).
DESIGN CONSIDERATION TO PPM KLYSTRONS FOR INDUSTRIAL LINAC
Toshiba has been developing the C-band and X-band Periodic Permanent Magnet (PPM) focused klystron in collaboration with KEK and manufactured prototypes for the JLC project. [1] The PPM klystron has an advantage to enhance the total efficiency as a result of eliminating the electric power for the focusing magnet. From experience on the development the PPM focused klystrons for the JLC project, we plan to apply the PPM focused klystron to the medical and industrial linac. The periodic magnet focusing scheme has some technical difficulties such as stop band voltage. To design the PPM klystron for the medical and industrial linac, it is necessary to give heed to electron beam instability; so that the tube parameters of the PPM focused klystrons have some constraints. The size of the accelerator system is substantially reduced if a PPM focused klystron is used. The majority of medical and industrial linacs use frequencies of S-band range. We discuss the availability of the S-band PPM focused klystron in this paper.