Etch rates for Si-face 4H-SiC using H2 and a C3H8 partial pressure
In an effort to calibrate nitrogen incorporation into the growing layer, a nitrogen step-doped sample was grown. In an attempt to reduce or eliminate incidental etching during pre- and post- growth temperature ramps, additional samples were etched under different propane partial pressures. With increasing propane partial pressure the etch rate decreases.
Effect of Additional Silane on In Situ H2 Etching prior to 4H-SiC Homoepitaxial Growth
We have investigated the influence of in-situ H2 etching on the surface morphology of the 4H-SiC substrate prior to homoepitaxial growth. In this study, we varied the types of gas atmosphere during in-situ H2 etching; namely, hydrogen (H2) alone, hydrogen-propane (H2+C3H8), and hydrogen-silane (H2+SiH4). We found that in-situ H2 etching using H2 + SiH4 significantly improved the surface morphology of 4H-SiC substrate just after in-situ H2 etching. By adding SiH4, formation of bunched step structure during in-situ H2 etching could be significantly suppressed. In addition, H2 etching using H2 + SiH4 was able to remove scratches by etching a thinner layer than that using H2 alone. We also discussed the in-situ H2 etching mechanism under the additional SiH4 condition.
Experimental investigation of the geotechnical properties and microstructure of lime-stabilized saline soils under freeze-thaw cycling
Abstract The Song-Nen Plain in northeastern China holds one of the three largest expanses of soda saline-alkali soil in the world. Due to its disadvantageous geotechnical properties, the saline soil in this area is unable to meet the needs of construction projects. This study evaluates the stabilizing effect of adding lime to such soils. Specifically, it investigates how the physicochemical and mechanical properties and microstructure of soda saline-alkali soil are altered by lime and how these changes are affected by both freeze-thaw cycling and the duration of curing. The results reveal that adding lime to saline soil transforms clay particles into sand and silt particles and causes the pore size distribution (PSD) to become bimodal, with small-pore and macropore populations. An increase in lime content leads to an increase in the unconfined compressive strength (UCS) but a gradual decrease in both the cation exchange capacity (CEC) and plastic index. Freeze-thaw cycles break up coarse particles and aggregate finer particles, increasing the diameter of macropores and decreasing the USC; however, the effect on specimens with >9% lime is negligible. It is further shown that the geotechnical properties of the soil change immediately after the addition of lime, indicating that the cation exchange reaction takes place very quickly. Furthermore, the pozzolanic reaction leads to an increase in the percentage of sand-sized particles and a decrease in porosity after 28 days of curing. Overall, these results indicate that it is feasible to use lime to improve the engineering properties of soda saline-alkali soil in this area.