Observation and Utilization of Boron Segregation in Trench MOSFETs to Improve Figure of Merit (FOM)
We report the observation and utilization of boron segregation in trench MOSFETs (UMOS) to reduce on-resistance. A trenched LOCOS process has been applied to a UMOS structure to reduce the gate-to-source overlap capacitance (C gs), and it is observed that not only 40% reduction in C gs is achieved but also 45% reduction in specific on-resistance (R on, sp). Figure of merit is improved by 58%. TSUPREM-4 doping profile simulation at the silicon and oxide interface revealed the presence of boron segregation. On-resistance reduction is attributed by the shortened vertical channel length due to boron segregation.
Improved Programming Efficiency through Additional Boron Implantation at the Active Area Edge in 90 nm Localized Charge-Trapping Non-volatile Memory
As the scaling-down of non-volatile memory (NVM) cells continues, the impact of shallow trench isolation (STI) on NVM cells becomes more severe. It has been observed in the 90 nm localized charge-trapping non-volatile memory (NROM™) that the programming efficiency of edge cells adjacent to STI is remarkably lower than that of other cells when channel hot electron injection is applied. Boron segregation is found to be mainly responsible for the low programming efficiency of edge cells. Meanwhile, an additional boron implantation of 10° tilt at the active area edge as a new solution to solve this problem is developed.
Melanocins A, B and C, new melanin synthesis inhibitors produced by Eupenicillium shearii. I. Taxonomy, fermentation, isolation and biological properties.
New melanin synthesis inhibitors, melanocins A, B and C, were isolated from the fermentation broth and mycelium extract of Eupenicillium shearii F80695. Melanocin A, an isocyanide compound, inhibited mushroom tyrosinase and melanin biosynthesis of B16 melanoma cells with IC50 value of 9.0 nM and MIC value of 0.9 microM, respectively. Melanocin A also inhibited growth of Streptomyces bikiniensis. While, the structurally very related but non-isocyanide compounds melanocins B and C did not show inhibitory activity in these assays. Melanocins A, B and C showed potent antioxidant activity with scavenging activity of DPPH radical and superoxide anion radical.