CMOS Dual-Work-Function Engineering by Using Implanted Ni-FUSI
For the first time, a simple CMOS fully silicided (FUSI) process achieving n/pMOS band-edge work function was demonstrated, which is fully compatible with conventional CMOS process. Dual-work-function CMOS FUSI, with a wide range of 800 mV, was achieved by implantation of Yb into the poly of the nMOS gate (4.1-eV work function) and Ga into the poly of the pMOS gate (4.9-eV work function), respectively. The placement of the tuning elements at the metal/dielectric interface was engineered with the thermal budget, as well as the implant dose and species.
Advanced Dual Metal Gate MOSFETs with High-k Dielectric for CMOS Application
This paper reports the fabrication of MOSFETs with dual metal gate electrodes. Low threshold voltage (Vt) was achieved using TaC for nFETs and MoNx for pFETs. The transistors show excellent Ion-Ioff performance with well-controlled short channel effects. Benefited from a novel approach in base oxide formation, high mobility at ~90% of poly/SiO2 was achieved on thick HfO2 (30A). Improvement in current drivability by the incorporation of conventional cap stressor was also presented. The data demonstrates one of the best MOSFETs to date with dual metal gates on high-k dielectrics. It is further observed that high-k crystallization induces Vt non-uniformity in small devices. To our knowledge, the impact of crystallization to high- k manufacturability is addressed here for the first time
Evaluation of buckling load and dynamic performance of steel shear wall retrofitted with strips made of shape memory alloy
One of the most imperfections of the steel shear wall is out of plane displacements that cause severe damage in both structural and non-structural elements. In this paper, the effects of shape-memory alloys on steel shear walls are investigated. First, a numerical analysis using the finite element method in ABAQUS software has been carried out according to an experimental test. The results of the numerical analysis have been verified with experimental results. Next, shape-memory alloy fibers have been added vertically and horizontally to various parts of the steel shear wall. The results show that retrofitting with the shape-memory alloy reduces the out-of-plane displacement of the steel shear wall under both cyclic and seismic loadings. Besides, the buckling load in the steel shear wall increases when it is retrofitted with the shape-memory alloy. Also, the total out-of-plane movement (accumulated absolute displacements) of the steel shear wall and non-structural damage are controlled by the characteristic of a shape-memory alloy material called “super-elastic”.