Technological process and resonator design optimization of Ir/LGS high temperature SAW devices
Photolithography together with ion beam etching was used for fabrication of high temperature SAW devices. Ir thin film of 0.3 μm thick was deposited by magnetron sputtering without additional adhesion layers and than Ir film was annealed after electrode patterning in different conditions. The resistivity of magnetron sputtered thick Ir films drops noticeably after annealing. However, this process requires special care in order to avoid delaminating of the film due to developing high stress during such procedures. We have annealed the substrates with Ir films in different regimes and in different gas/vacuum conditions. The results of these studies have shown that annealing in air up to about 500 °C decreases the Ir film resistivity 1.5-2 times. Vacuum annealing did not show much improvement in comparison to open air annealing. Magnetron sputtered thin Ir films have somewhat porous structure allowing oxygen to diffuse from the substrate surface through Ir films. Resonator structures with thick Ir electrodes were prepared and tested. Examples of the resonator structures show very promising properties, such as high conductance and high Q-factor.
Optimal Design of TSM Langasite Resonator for High-Temperature Applications: A Review
In this review article, we address two vital design considerations that govern the high-temperature operation of a thickness–shear mode langasite resonator: 1) electrode design and 2) electrode material. Optimal electrode designs to mitigate unwanted spurious modes and achieve a high Q-factor for fundamental and higher overtone modes have been discussed in great detail. Governing equations that determine the size, shape, and orientation of these electrodes have also been presented. In addition, the suitability of six platinum-group metals as electrode materials for high-temperature resonators have been assessed and summarized. Furthermore, the adhesion to the substrate, electrical conductivity, thermal stability, and various other temperature-dependent properties of these metals have been discussed. Finally, several combinations and operating ranges of these electrode materials have been thoroughly evaluated.
LAND DEGRADATION IN THE DEVELOPING WORLD: ISSUES AND POLICY OPTIONS FOR 2020
Land degradation takes a number of forms, including depletion of soil nutrients, salinization, agrochemical pollution, soil erosion, vegetative degradation as a result of overgrazing, and the cutting of forests for farmland. All of these types of degradation cause a decline in the productive capacity of the land, reducing potential yields. Farmers may need to use more inputs such as fertilizer or manure in order to maintain yields, or they may temporarily or permanently abandon some plots. Degradation may also induce farmers to convert land to lower-value uses. For example, farmers may plant cassava, which demands few nutrients, instead of maize, or convert cropland to grazing land.