A Simple Low-Vacuum Environmental Cell
The environmental cell device discussed in this paper provides a modest low-vacuum scanning electron microscopy (SEM) capability to a standard SEM without requiring additional pumping. This environmental cell confines a volume of low vacuum in contact with the sample surface using a container that has an aperture for admitting the primary electron beam. The aperture is large enough to permit a limited field of view of the sample, and small enough to limit the outflow of gas into the SEM chamber to that which can be accommodated by the standard SEM pumping system. This environmental cell also functions as a gaseous detector device.
Amplification measurements of alternative imaging gases in environmental SEM
In this paper, we present quantitative data on the amplification behaviour of alternative imaging gases in environmental SEM and describe the experimental methods used to obtain them. We investigated the gases' amplification abilities over the pressure range 0 - 12 Torr with respect to the primary beam energy, detector gap distance and detector accelerating field, in order to isolate optimum imaging conditions for each gas. The gases investigated were, in addition to water vapour, nitrous oxide, carbon dioxide, nitrogen and helium.
Compteurs paroi de verre et cathode externe
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