Enhanced contamination control methods in advanced wafer processing
Semiconductor manufacturing is a highly complex process, with a high need for process control, but equally important are effective methods for contamination control. Methods for detection of airborne and surface molecular contaminants were enhanced to meet the increasing requirements for future More Moore and More than Moore applications. Improved qualitative and quantitative contamination analysis methods of organic and inorganic compounds allow exact monitoring of contamination in front- as well as back-end processes. By the use of state-of-the-art analytical systems combined with validated analytical procedures and advanced sample preparation techniques contamination analytical results with higher reproducibility and reliability are being ensured.
Advanced contamination control methods for yield enhancement
Semiconductor manufacturing is a highly complex process, with a high need for process control, but equally important are effective methods for contamination control during and after the processes. Methods for detection of airborne and surface molecular contaminants were developed to meet the challenging requirements for More Moore and More than Moore applications. Qualitative and quantitative contamination analysis of organic and inorganic compounds allows monitoring of contamination in front- as well as back-end processes. In this way, cross contaminations including precious metals, e.g. Au, Ag, Pd, organic and inorganic compounds e.g. sulfur, fluorine can be avoided. By the use of state-of-the-art analytical systems, a contamination control for any cleanroom and all wafer sizes could be implemented.
Analogy, Supposition, and Transcendentality in Narrative Argument
Rodden writes, “How do stories persuade us? How do they ‘move’—and move us? The short answer: by analogies.” Rodden’s claim is a natural first view, also held by others. This chapter considers the extent to which this view is true and helpful in understanding how fictional narratives, taken as wholes, may be argumentative, comparing it to the two principal (though not necessarily exclusive) alternatives that have been proposed: understanding fictional narratives as exhibiting the structure of suppositional argument, or the structure of a kind of transcendental argument. Three key aspects of understanding a fictional narrative as an argument from analogy are identified. First, the argument will be relativistic or depend in an essential way upon the circumstances or intentions of the auditor or author. Second, in view of the first aspect, the argument will be loose and subjective, and accordingly less likely to yield knowledge. Third, the argument will not exhibit a distinctive structure applicable only to fictional narratives. I find that the third, and sometimes the first and second, of these same three aspects apply to understanding fictional narratives as suppositional arguments. I present considerations that point to a way of establishing that some extended fictions exhibit the structure of a kind of transcendental argument that is neither relativistic nor subjective, is knowledge-generating, and is uniquely applicable to fictional narratives. This supports literary cognitivism—the thesis that “literary fiction can be a source of knowledge in a way that depends crucially on its being fictional.”