Suppression of cobalt silicide agglomeration using nitrogen (N/sub 2//sup +/) implantation
In this paper, the effects of nitrogen coimplantation with boron into p/sup +/-poly gate in PMOSFETs on the agglomeration effects of CoSi/sub 2/ are studied. The thermal stability of CoSi/sub 2//poly-Si stacked layers can be significantly improved by using nitrogen implantation. Samples with 40-nm cobalt silicide (CoSi/sub 2/) on 210-nm poly-Si implanted by 2/spl times/10/sup 15//cm/sup 2/ N/sub 2//sup +/ are thermally stable above 950/spl deg/C for 30 s in N/sub 2/ ambient. If the dose of nitrogen is increased up to 6/spl times/10/sup 15//cm/sup 2/, the sheet resistance of CoSi/sub 2/ film is not increased at all, and TEM photographs show that the agglomeration of CoSi/sub 2/ film is completely suppressed.
Thermal Stability of Thin Submicrometer Lines of CoSi2
The thermal stability of thin CoSi 2 submicrometer lines on Si substrate was investigated using electrical evaluation, in situ transmission electron microscopy observations, Rutherford backscattering, and scanning electron microscopy measurements. Heat-treatments were performed at temperatures ranging from 800 o C up to 1100 o C for 10 s in N 2 or Ar ambients. It was found that as-formed silicide was thinner at the edges of features giving rise to an apparent difference between the electrically equivalent line width and its physical size
Thermal stability of reconstituted collagen fibrils. Shrinkage characteristics upon in vitro maturation
Thermal stability measured as area shrinkage without tension during heating was determined for membranes of collagen fibrils reconstituted from solutions of highly purified rat skin collagens. Shrinkage in per cent of area at 25 degrees C and shrinkage temperature were quantitated in a standardized way and determined as a function of in vitro maturation time for 11 to 104 days after aggregation for the collagen membranes. Similar to reports on intact rat skin, shrinkage temperature remained constant and shrinkage per cent declined with a rate decreasing with time during maturation. Solubility in water at 80 degrees C for 2 hours was 95-96% and remained unchanged for the maturation time (about 2 months) studied. The decreased shrinkage reflecting a lower degree of collapse is ascribed to an increasing thermal stability of the membranes during maturation. Development of heat-stable bonds in the reconstituted collagen fibrils is taken up to be amenable to this increased stability. Similarity in changes of shrinkage characteristics during in vivo and in vitro maturation indicates that maturation changes in reconstituted collagen fibrils reflect those occurring in intact collagen during in vivo aging.