Gas discharge ion source. I. Duoplasmatron.
The effects of the plasma expansion cup on the operation of a duoplasmatron ion source have been investigated by measuring the total ion current and the distributions of the ion energy, mass, and current density. A copper expansion cup did not affect the magnetic field near the anode of the ion source and consequently the ion current density distribution was sharply peaked near the center of the cup. Ion energy distributions were approximately symmetrical about anode potential. The dominant ionic species were D(+) (3) and D(+) at low and high arc currents, respectively. Changes in the electrical potential of the copper cup with respect to the anode produced negligible changes in the above data. A mild steel plasma expansion cup caused the magnetic field to diverge and intercept the cup walls, resulting in ion current density distributions that were flatter and more amenable to focusing than the ones with the copper cup. With the steel cup at anode potential, the ion mass distribution was similar to that from the copper cup; however, the ion energy distribution was asymmetrical about the anode potential with a peak about 10-20 V above anode potential. The total ion current from this mode of operation was about one-third the value from the copper cup. If the steel cup assumed floating potential, about 50 V below anode potential, the total current increased to the level observed from the copper cup and the ion energy distribution was similar to that observed with the copper cup but the current density distribution was much flatter than that of the copper cup. The ion mass distribution was 60%-70% atomic ions over the entire arc current range investigated. Based on these data, a modified plasma expansion cup was designed with tapered steel walls lined with a boron nitride insert. The overall performance of the duoplasmatron ion source with this cup was superior to any of the previous three modes of operation. The improved design uses a molybdenum anode insert which is far superior to copper in regard to erosion over extended operating times. A total beam current of 200 mA was produced at an arc current of 24 A.
Ion beams and their applications in high-resolution probe formation
The most critical demand for high-brightness ion beams emerged from the realm of industrial applications of focused ion beams and it was met by using liquid metal ion source technology. Although recognized as a successful technology, liquid metal ion sources have major limitations in view of beam species. Noncontaminating ion beam species with beam brightness comparable to liquid metal ion source, i.e., /spl sim/10/sup 6/ A cm/sup -2/ sr/sup -1/ and energy spread of /spl sim/1 eV will be ideal for many cutting-edge applications including ion beam milling, mask repair, and imaging studies. This paper attempts to bring out the essential points in the development of high-resolution probe forming beams. With this specific objective in view, this study is based on an analysis of point sources and then a variety of other sources, under the general classification of "broad" source (primarily plasma sources), are discussed. Several sources in this category including a Penning-type source, a multicusp source, and new-generation high-charged state sources seem to have merits for circumventing the limitations of liquid metal ion sources, although further research is needed to improve the beam brightness and advance the state-of-the art.
Magnetic properties of Lu2Fe17 crystals
Abstract We present the results of crystal structure and magnetization studies of three single crystals grown from melts of different nominal compositions in the vicinity of the Lu2Fe17 stoichiometry. The ferromagnetic state of the crystals is strongly dependent on the real sample composition and the local atomic ordering. A drastic difference is observed in the behaviour of the ferro–antiferromagnetic transition, even in crystals for which almost identical composition and crystal parameters were determined by microprobe and X-ray analysis.