Height-selective etching for regrowth of self-aligned contacts using MBE
Advanced III-V transistors require unprecedented low-resistance contacts in order to simultaneously scale bandwidth, f max and f t with the physical active region [M.J.W. Rodwell, M. Le, B. Brar, in: Proceedings of the IEEE, 96, 2008, p. 748]. Low-resistance contacts have been previously demonstrated using molecular beam epitaxy (MBE), which provides active doping above 4 x 10 19 cm -3 and permits in-situ metal deposition for the lowest resistances [U. Singisetti, M.A. Wistey, J.D. Zimmerman, B.J. Thibeault, M.J.W. Rodwell, A.C. Gossard, S.R. Bank, Appl. Phys. Lett., submitted]. But MBE is a blanket deposition technique, and applying MBE regrowth to deep-submicron lateral device dimensions is difficult even with advanced lithography techniques. We present a simple method for selectively etching undesired regrowth from the gate or mesa of a III-V MOSFET or laser, resulting in self-aligned source/drain contacts regardless of the device dimensions. This turns MBE into an effectively selective area growth technique.
Reduction of base-collector capacitance in InP/InGaAs HBT's using a novel double polyimide planarization process
The parasitic base-collector capacitance (C/sub BC/) in InP/InGaAs heterojunction bipolar transistors (HBTs) has been reduced using a novel double polyimide planarization process which avoids damage of the extrinsic base layer. The extrinsic base metal outside the base-collector mesa is placed on the polyimide by polyimide coating and etch-back to the base layer. We obtained f/sub T/ of 81 GHz and f/sub MAX/ of 103 GHz with a 2/spl times/10 /spl mu/m emitter. Performance comparison between two devices with the same area of 2/spl times/2 /spl mu/m but with different base-collector mesa area showed 56% reduction of C/sub BC/ and 35% increase of f/sub T/ and f/sub MAX/.
Impacts of climate and land use changes on flood risk management for the Schijn River, Belgium
Abstract Flooding is the most common natural disaster in Europe. Modern flood risk management relies not only infrastructure development but also on governmental and non-governmental actors applying legal, economic and communicative water management instruments. Within the European Union (EU), flood management closely relies on policy set at the EU and national levels. It is now recognized that a sound understanding of climate change is required in addition to current management by taking into account land use change and socio-political context, as climate and land use changes have major impacts on hydrological responses. This paper investigates the hydrological behavior due to urbanization under current and future climate scenarios of high summer and high winter rainfall for 20 sub-catchments of the Schijn River, located in the Flanders region near Antwerp, Belgium. As urbanization increases and existing rainfall-runoff models neglecting the specific behavior of urban runoff, a hydrological model was developed based on a basic reservoir concept and applied to the existing rainfall-runoff model (PDM) flow to examine the specific urban contribution. Results revealed that peak flow for urban runoff and the total peak flow (i.e. rural and urban runoff) were significantly higher (i.e. ranges from 200% to 500%) than the existing rainfall-runoff model (PDM) flows, because of faster and more peaked urban runoff response. The impact of climate change on current and future conditions was also assessed by estimating peak flows with respect to return periods from the flood frequency curve. The predicted peak flow of high summer future climate scenario was significantly higher (i.e. ranges from 200% to 250%) than that of the current climatic condition for this region. Furthermore, hourly peak flow and daily volume ratios of 100-year return period for the highest, lowest and average impervious area were projected for the time horizon of the year 2100. It is concluded that climate change impacts contribute the most in producing peak flow in coming years, while increased urbanization takes the second place for both hourly and daily values. Results on urbanization effect and climate change impact assessment are useful to the water managers for spatial planning, emergency planning and insurance industry.