Cu(InGa)Se/sub 2/ thin films by elemental co-evaporation/sputtering and large area module results
We report process optimization and understanding resulting in high quality Cu(In,Ga)Se/sub 2/ (CIGS) films and high efficiency devices/modules using a hybrid process for CIGS formation. In the hybrid process, the Cu is supplied by magnetron sputtering, and the In, Ga, and Se are supplied by linear thermal sources. The advantages of the hybrid process include: i) the ease and precision of Cu thickness control; and ii) flexibility to adjust the Ga depth profile. The investigation was conducted in a large-area, pilot-line system. Among others, important parameters were found to be the Cu/(In+Ga) ratio of the Cu/(InGa)/sub 2/Se/sub 3/ precursor, selenization temperature, and timing of the Ga and In fluxes. Cell efficiencies of over 13.0% and module efficiencies of 7.5% (26 W, 0.35 m/sup 2/) were achieved. The film properties were investigated by XRD, SEM, and AES.
New technologies for CIGS photovoltaics
Abstract This paper describes a new process for forming Cu(In,Ga)Se 2 (CIGS) by vacuum processing. It is termed the hybrid process, and it involves thermal delivery of In, Ga, and Se and sputtering of Cu. The optimization of the process is described, followed by its successful application to large area processing of CIGS devices and modules. Other processing issues in module formation are also discussed and analyzed, including deposition of the buffer and window layers, and interconnect resistance. The paper also describes the application of a new sputtering process for compound film formation to the area of CIGS processing. This process is termed reactive environment sputtering, and is based on a hollow cathode discharge. The process is applied to the formation of transparent conducting oxides (TCO) such as ZnO:Al, ZnO:B, In 2 O 3 :Mo (IMO) and In 2 O 3 :Ti (ITiO), and to their use as window layers for CIGS devices.
Intensification of Bubble Disintegration and Dispersion by Mechanical Stirring in Gas Injection Refining
Water model experiments were performed for establishing highly efficient gas injection refining processes. Mechanical stirring was applied to disintegrate the injected bubbles and to disperse them widely in the bath. The bubble disintegration and dispersion were investigated by changing rotation mode (direction of rotation), rotation speed, blade size of the impeller and gas flow rate. Forward rotation of the impeller induced a stable tangential flow and could not disperse bubbles in the bath due to formation of a vortex around the impeller shaft. The tangential flow could be suppressed by forward–interrupt rotation, which could reduce the vortex formation to some degree. However, forward–interrupt rotation could not disperse the bubbles widely in the bath. Forward–reverse rotation could prevent the vortex formation completely and create a strong shear stress field, which intensified the bubble disintegration and dispersion in the bath. Higher impeller rotation speed and larger blade length in forward–reverse rotation could enhance the bubble disintegration and make the dispersed bubbles smaller. The bubble dispersion zone became wider with larger blade length. The bubble size tended to be larger at higher gas flow rates. However, its dependence on the gas flow rate became smaller at higher impeller rotation speed.