Glow Characterization in Low-Pressure Radio-Frequency $\hbox{CH}_{2} \hbox{F}_{2}$ and $\hbox{C}_{2}\hbox{H}_{2}\hbox{F}_{4}$  Plasma Deposition Systems
The glow characteristics and deposited film structures of fluorocarbon monomers in radio-frequency glow discharges are investigated using CH<sub>2</sub>F<sub>2</sub> and C<sub>2</sub>H<sub>2</sub>F<sub>4</sub>, which were compared to hydrocarbon monomer such as CH<sub>4</sub>. The glow was characterized and investigated by optical photography, optical emission spectroscopy, and Fourier transform infrared spectrometry. The glow differences were attributed to the nature of the luminous gas phase in respect to polymer-forming species.
The study of creation of polymerizable species in radio frequency hydrocarbon plasma polymerization in a closed reactor system
Abstract The study of radio frequency glow discharge of saturated hydrocarbon monomer indicated that the glow forms distinctive glow in plasma polymerization systems. The radio-frequency ethane plasma polymerization in a closed reactor system was studied. The composition of reactive species in the luminous gas phase was monitored during the deposition process by optical emission spectroscopy. Optical emission analysis indicates that polymerizable species are mainly formed in the glow region. It was found that, in such a closed plasma system, the deposition of ethane plasma polymers could be visualized as the batch processes. In the early stage of radio-frequency plasma initiation, the deposition of plasma polymers was dominated by the hydrocarbon-based species because the hydrocarbon-based species polymerized much quicker than hydrogen-based species. In the final stage, because of the exhaustion of all polymerizable species in the system, the deposition terminated and the deposited plasma polymer surface was endlessly treated by nonpolymer forming gas plasma. The growth of radio frequency plasma polymerized hydrocarbon film clearly showed the dominating effects of luminous gas phases on the polymerizable tendency in plasma polymerization system.
Spatial distributions of electron density and electron temperature in direct current glow discharge
The spatial distributions of electron temperature and density in a dc glow discharge that is created by a pair of planar electrodes were studied using double Langmuir probes. The measurement was carried out on the horizontal center plane across vertically placed circular planar parallel plate electrodes. One electrode with magnetic enhancement (magnetron) was paired with a nonmagnetron in the two possible combinations. The measurements were carried out for the following three modes: (nonmagnetron) cathode/(nonmagnetron) anode (C–A), cathode magnetron/(nonmagnetron) anode (CM–A), and (nonmagnetron) cathode/anode magnetron (C–AM). In the C–A mode, electrons gain energy from the imposed electric field, and the electron temperature (Te) rises very sharply from the cathode to the leading edge of the negative glow where Te reaches the maximum. In this region, the number of electrons (Ne) is relatively small and does not increase much. The accelerated electrons lose energy by ionizing gas atoms, and Te decreases...