Simulations of consecutive diffusion process
Process simulation based on virtual reality can comprehensively present the real process on the computer. It can play an important role in the development and manufacturing field of diffusion furnace. This paper researches the establishment of consecutive diffusion process and the key techniques of process simulation. In the process of creating process simulation, V code would be created to control motion of each part. A simulation that reflects on the real process could be acquired with this research. This process simulation not only shortens the development time of diffusion furnace, but also makes designer have a perspective to the defects of product in the design process. It promotes the effective of design, and reduces changes in later period of design.
Optimization of diffusion furnace loading based on substrate and recipe selection
Traditional furnace batching in semiconductor manufacturing considers trade offs between wait-to-batch time and processing time to determine cycle reductions afforded by batching. An interesting aspect of this problem is the creation of potential batching opportunities through the appropriate insertion of substrates at the start of the line. In this paper we present a Mixed Integer Programming model as a decision support tool to provide substrate selection recommendations based on wafer start requirements with the objective of maximizing batching opportunities in the diffusion furnace, with consequent reductions in the furnace loading. Our MIP model takes into account the exclusivity requirements and aid the substrate material and recipe selection process for weekly starts in the Fab. We have achieved a 10% improvement in the overall furnace loading.
Numerical Simulation for Natural State of Two-Phase Liquid Dominated Geothermal Reservoir with Steam Cap Underlying Brine Reservoir
Hydrothermal reservoir which liquid-dominated hydrothermal reservoir is a type of geothermal reservoir that most widely used for power plant. The exploitation of mass and heat from the geothermal fluid will decrease the pressure in the reservoir over time. Therefore the pressure drop in the reservoir will have an impact on the formation of boiling zones or boiling will increase. The impacts are an increase in the fraction of steam, dryness, in the reservoir and with good vertical permeability will form a steam cap underlying the brine reservoir. The two- phase liquid dominated reservoir is sensitive to the porosity and difficult to assign average properties of the entire reservoir when there is boiling zone in some area of the reservoir. These paper showed successful development of two-phase liquid dominated geothermal reservoir and discussed the formation of steam cap above brine reservoir through numerical simulation for state natural conditions. The natural state modeling in steam cap shows a match with the conceptual model of the vapor-dominated developed. These paper also proofed the presence of transition zone, boiling zone, between steam cap and brine reservoir.