Enhanced contamination control methods in advanced wafer processing
Semiconductor manufacturing is a highly complex process, with a high need for process control, but equally important are effective methods for contamination control. Methods for detection of airborne and surface molecular contaminants were enhanced to meet the increasing requirements for future More Moore and More than Moore applications. Improved qualitative and quantitative contamination analysis methods of organic and inorganic compounds allow exact monitoring of contamination in front- as well as back-end processes. By the use of state-of-the-art analytical systems combined with validated analytical procedures and advanced sample preparation techniques contamination analytical results with higher reproducibility and reliability are being ensured.
Advanced contamination control methods for yield enhancement
Semiconductor manufacturing is a highly complex process, with a high need for process control, but equally important are effective methods for contamination control during and after the processes. Methods for detection of airborne and surface molecular contaminants were developed to meet the challenging requirements for More Moore and More than Moore applications. Qualitative and quantitative contamination analysis of organic and inorganic compounds allows monitoring of contamination in front- as well as back-end processes. In this way, cross contaminations including precious metals, e.g. Au, Ag, Pd, organic and inorganic compounds e.g. sulfur, fluorine can be avoided. By the use of state-of-the-art analytical systems, a contamination control for any cleanroom and all wafer sizes could be implemented.
Between identity and difference: Three ways of reading Nishida's non-dualism
The philosophy of Nishida KitarŌ offers the reader today not only a paradigm for a comparative philosophy, but also a methodological framework to construct a Buddhist philosophy. The key and, at the same time, the obstacle to his philosophy is the concept of the "self-identity of the absolute contradiction." This conceptual cornerstone of Nishida's philosophy is as controversial among scholars today as it is central to his philosophy. Critics, such as Tanabe Hajime and Takahashi Satomi, argue that Nishida's philosophy privileges the principle of identity over that of difference and falls into a monism; his supporters, most of all Nishitani Keiji and Ueda Shizuteru, to the contrary, claim that it comprises the key to philosophical non-dualism. In general, I am convinced that even his "self-identity of the absolute contradiction," if it is read carefully within the context of Nishida's philosophy, will render a paradigm that falls neither into a logical contradiction nor into a monism but that provides the foundation for a non-dualist philosophy. To this end, I will reread it first in the context of Nishida's overall project and, then, on the background of Nishida's debates with his critics.