A New CD Measurement Method Linked with the Electrical Properties of Devices
This paper describes a new measurement method of a CD-SEM with nanometer-level precision and good correlation with electrical characteristics for an actual device of ultra-large-scale integration (ULSI). With the decrease in feature size, the pattern to be measured tends to become a curved shape. In order to measure such a pattern within measurement precision on the order of 5 nm, two-dimensional measurement is effective. Here we report a new measurement algorithm featuring that the critical dimension is derived from the value of the area of a measurement pattern. We apply this measurement method to actual device of 64-Mbit DRAM and confirm the reproducibility of 3.6 nm for the gate linewidth measurement, and that of 5.6 nm for the hole diameter measurement. Furthermore, we verify that the measurement values of the gate linewidth have a strong correlation with the threshold voltage and those of the hole diameter also have a strong correlation with the contact resistance, respectively. key words: CD SEM, metrology, curved structure, electrical
Reconstruction of LSI Microstructures from Secondary Electron Intensity Profiles
A best-fitting method and a slope-integrating method are proposed for the reconstruction of ISI (large scale integrated circuit) microstructures from secondary electron intensity profiles. In the former method, a rounded edge profile of the photoresist pattern is reconstructed by best-fitting the analytical secondary electron intensity profile for an assumed edge model to the experimental secondary electron intensity profile. The model is a hyperbola with fitting parameters which approximates the cross section of the photoresist pattern. In the latter method, the rounded edge profile is reconstructed by integrating the slope obtained, considering the dependence of the secondary electron yield on the primary electron incidence angle to the specimen
Creativity profile of university and conservatory dance students.
What are dance students' creative potential, Special personality characteristics and preferences for high energy activities? Using standardized and original paper and pencil instruments, comparisons were made among dance students in university and conservatory settings, college students and art students. The results demonstrated that dance students are creative, show strong preference for dynamic figures, and have distinct personality characteristics. The university dance students differed from the conservatory students in several important ways.