Shapes of agglomerates in plasma etching reactors
Dust particle contamination of wafers in reactive ion etching (RIE) plasma tools is a continuing concern in the microelectronics industry. It is common to find that particles collected on surfaces or downstream of the etch chamber are agglomerates of smaller monodisperse spherical particles. The shapes of the agglomerates vary from compact, high fractal dimension structures to filamentary, low fractal dimension structures. These shapes are important with respect to the transport of particles in RIE tools under the influence electrostatic and ion drag forces, and the possible generation of polarization forces. A molecular dynamics simulation has been developed to investigate the shapes of agglomerates in plasma etching reactors. We find that filamentary, low fractal dimension structures are generally produced by smaller (<100s nm) particles in low powered plasmas where the kinetic energy of primary particles is insufficient to overcome the larger Coulomb repulsion of a compact agglomerate. This is analogou...
Particle growth in a sputtering discharge
Submicron to micron size particles are produced in the gas phase of sputtering discharges. These particles can contaminate thin films grown by sputter deposition. On the other hand, particle production in a discharge can be desirable when used for manufacturing fine powders. Here, experimental results are presented demonstrating particle production in an argon discharge, using a variety of target materials. The rate of particle growth varied widely, depending on the target material. Particles grown to 300 nm–5 μm, usually have one of two different shapes. Compact particles with a nearly spherical shape were produced by sputtering graphite, titanium, tungsten, and stainless steel targets, while filamentary-shaped fractal particles formed when sputtering aluminum and copper targets. Particle growth was also observed for a target made of an insulating material.
Numerical tools applied to power reactor noise analysis
In order to be able to calculate the space- and frequency-dependent neutron noise in real inhomogeneous systems in two-group theory, a code was developed for the calculation of the Green's function (dynamic transfer function) of such systems. This paper reports on the development as well as the test and application of the numerical tools employed. The code that was developed yields the space-dependence of the fluctuations of the neutron flux induced by fluctuating properties of the medium in the two-group diffusion approximation and in a two-dimensional representation of heterogeneous systems, for both critical systems and non-critical systems with an external source. Some applications of these tools to power reactor noise analysis are then described, including the unfolding of the parameters of the noise source from the induced neutron noise, measured at a few discrete locations throughout the core. Other concrete applications concern the study of the space-dependence of the Decay Ratio in Boiling Water Reactors, the noise-based estimation of the Moderator Temperature Coefficient of reactivity in Pressurized Water Reactors, the modeling of the beam- and shell-mode core-barrel vibrations in Pressurized Water Reactors, and the investigation of the validity of the point-kinetic approximation in subcritical systems driven by an external source. In most of these applications, calculations performed using the code are compared with at-power plant measurements. Power reactor noise analysis applications of the above type, i.e. core monitoring without disturbing plant operation, is of particular interest in the framework of the extensive program of power uprates worldwide.