A matched expansion probe card for high temperature LSI testing
This paper describes the fabrication process and mechanical properties of a novel probe card were described. To match the thermal expansion between the probe card and a silicon wafer in wafer-level burn-in test, a Pyrex glass substrate with feedthrough connections was used to support the probes. To make the slantwise probe contactors, spray coating was used to form a uniform photoresist film on a deeply-wet-etched silicon wafer. The fabricated probe card has 13185 p/sup +/ silicon probe contactors at a pitch of 150 /spl mu/m on an area of 44.0 mm /spl times/ 45.7 mm. The rigidity of the probes is approximately 91.45 N/m. The planarity of the probe tips is within /spl plusmn/ 1 /spl mu/m from the base level.
Laterally stacked glass substrates with high density electrical feedthroughs
This paper reports a novel method to produce high density feedthrough glass wafers with sufficient thickness for the packaging and interconnection of high density array micro electromechanical systems (MEMS). Pyrex glass wafers with thin film metal lines on the surface are stacked and bonded with each other using phenyl methyl siloxane-based adhesive. The stacked glass wafer block is then sliced using a wire saw as the slicing surfaces cross the adhesive bonding interfaces vertically. Prototyped feedthrough glass wafers were subjected to anodic bonding to a silicon wafer with diaphragms. The anodic bonding was successful, but hermetic sealing was not achieved. The bending of the bonded sample can be reduced by annealing the sample at 400 °C in a vacuum before anodic bonding.
Parboiled rice effluent: A wastewater niche for microalgae and cyanobacteria with growth coupled to comprehensive remediation and phosphorus biofertilization
Abstract The potential of microalgae and cyanobacteria for bioremediation of wastewater by nutrient uptake combined with simultaneous biomass production is a well recognized perception of today's world. The present study illustrates the treatment of a highly polluted wastewater generated during parboiling of paddy in rice mill industries, widely operational in developing countries where rice is the staple food crop, with the help of microalgal and cyanobacterial isolates capable of growing at high rates in parboiled rice mill effluent (RME). This endeavor leads to comprehensive bioremediation of the said effluent and subsequent use of the harvested biomass as slow release phosphorus biofertilizers and the treated effluent for crop irrigation. The RME-acclimatized algal consortium demonstrated highest growth in terms of fresh weight and greatest remediation efficiency at the end of 36 days' treatment of RME, with 93.9% phosphorus and 100% ammonia-nitrogen removal, 98.7%, 91.6% and 93.5% reduction in biological oxygen demand, chemical oxygen demand and total dissolved solid, respectively, and an increment of 186 ± 0.3 mg L − 1 dissolved oxygen, bringing down the pollutants level well below the discharge limits suggested by Central Pollution Control Board, India. Additionally, microalgae in the consortium aggregated in clumps spontaneously in presence of the filaments of Phormidium sp. facilitating easy harvest. The RME-acclimatized algal consortium demonstrated highest accumulation of polyphosphate (poly-P) (0.76 ± 0.01% of dry weight) as well as highest release of phosphorus in non-sterile soil emphasizing the essential role of soil phosphorus solubilizing organisms to leach soluble phosphorus from the insoluble poly-P present in the biomass. The rice seedlings watered with treated RME also showed improved growth effect on shoot height and leaf width. The study results establish the suitability of RME as an excellent growth media for microalgae and cyanobacteria.