Design, Fabrication, and Testing of a Modular Magnetic Field Microsensor on a Flexible Polymer Foil
In contrast to existing microelectromechanical systems (MEMS), this paper describes the development, fabrication, and testing of an anisotropic magnetoresistance (AMR) microsensor using a 7 μm thick polymer foil as substrate material. The modular magnetic field micro sensors are fabricated on a standard 4 in Si Wafer due to handling purposes during the sensor fabrication process. To enable a release of the micro sensors at the end of the fabrication process, initial investigations concentrated on the proof of principle applying a deep reactive-ion etching (DRIE) process to structure the Si wafer. The DRIE process was used to structure Si frames, which serve as carriers for the modular magnetic field micro sensors. For the evaluation of the fabricated modular magnetic field micro sensors, electrical resistance measurements were accomplished. The aim of these investigations was the characterization of the magnetic field dependence of the electrical resistance. The electrical output signal of the AMR sensors were subsequently compared to electrical resistance measurements of AMR sensors fabricated on a Si substrate and served as reference. The measurement results show a marginal effect of the substrate material on the characteristics of the AMR sensors.
Towards flexible magnetoelectronics for robotic applications
This paper presents the technological advancements in the field of flexible magnetic sensors for robotics applications. Various magnetic devices (e.g. Hall, GMR, AMR and TMR) have been studied and their suitability for flexible application has been presented. Further, the system level integration of magnetic sensors in robotics is briefly discussed. With rapid development in flexible electronics, a robot with multi-functional conformable electronic skin will be possible in the foreseeable future. This will also open new avenues for a wide range of other applications including wearable electronics and interactive electronic-skin for robots and prosthesis.
Mechanical behaviour and durability of high volume fly ash cementitious composites
The purpose of this research is to separate different morphological particles of ASTM class F fly ash, and study their effect on mechanical behaviour and durability of high volume cementitious mixtures. In this research wet separation of raw fly ash is carried out, which resulted in three layers of different morphological particles. The first layer of particles float, comprise of about 1-5% of fly ash, is identified as cenospheres or hollow spheres. The second layer of particles is measured to be 55-60% of raw fly ash and consisting of porous spherical and rounded particles rich in Si and Al. The third layer particles is measured to be about 35-40% of raw fly ash. High volume fly ash cementitious composites containing second or third layer particles are tested under compression and bending, highlighting a higher strength and ductility in comparison to cementitious ones containing raw fly ash particles. KEYWORDS. Cementitious matrix; Raw fly ash; Second layer particles; Third layer particles.