Characterization of Ion Implanted Silicon Annealed with a Graphite Radiation Source
A Varian IA-200 isothermal annealer has been used to anneal ion implantation damage and electrically activate dopants in As and B implanted silicon with minimal redistribution of the impurity. The anneal occurs in vacuum using infrared radiation from a resistively heated sheet of graphite. Good quality anneals of /sup 11/B implanted samples have been obtained with minimal boron diffusion. Arsenic implanted wafers have also be annealed with excellent results except for a substantial loss of As which occurs unless the wafer has an SiO/sub 2/ cap. The anneal quality of (100) wafers was independent of dose, however, the anneal quality of the (111) wafers improved with increasing As dose.
Rapid thermal annealing of arsenic-phosphorus (n+ − n−) double-diffused shallow junctions
Abstract Double-diffused shallow junctions have been formed by ion implantation of both phosphorus and arsenic ions into silicon substrates followed by rapid thermal annealing. Experimental results on defect removal, impurity activation and redistribution, effects of silicon pre-amorphization and electrical characteristics of titanium-silicided junctions are presented.
Brushite-collagen composites for bone regeneration.
Brushite-based biomaterials are of special interest in bone regeneration due to their biocompatibility and biodegradability; on the other hand, collagen is a well-known osteoconductive biomaterial. In the present study a new brushite-collagen composite biomaterial is reported. This new biomaterial was prepared by combining citric acid/collagen type I solutions with a brushite cement powder. The obtained biomaterial was a cement paste, with improved handling properties. The effect of collagen on the setting reaction of brushite cement was studied, and was found to speed up the cement setting reaction. The cement paste set into a hard ceramic material within 18.5+/-2.1min and had compressive strength similar to that of spongeous bone (48.9+/-5.9MPa in dry conditions and 12.7+/-1.5MPa in humid conditions). The combination of collagen with citric acid revealed an interesting synergistic effect on the compressive strength of the composite material. Moreover, this new biomaterial had excellent cohesion properties (ninefold better than brushite cement), and high cellular adhesion capacity (threefold higher than brushite cement). The composite biomaterial described in this study combines good handling properties, compressive strength, cohesion and cell adhesion capacity, along with the osteoconductive and biodegradable properties inherent in brushite and in collagen-based biomaterials.