Improving Three-Dimensional Semiconductor Modeling through Layout and Process Flow Analysis
Constructive Solid Geometry (CSG) is a solid modeling technique widely used for the design of semiconductor devices. With the simulation domain subdivision algorithm presented in this paper, the minimal number of solid modeling operations is required in order to build a three-dimensional (3D) device structure. The algorithm is based on a drawing method which combines information on photolithographic masks into a color raster. In this way, solid modeling operations are performed only once on regions having the same color.
Reliable solid modeling for three-dimensional semiconductor process and device simulation
Since general-purpose 3D process simulators are currently not available, solid modelers greatly help the designer in building geometries for device simulators. In this contribution, a solid modeler is presented that allows reliable geometrical operations. In order to avoid numerical errors occurring at the intersection of objects built with polygons, we have chosen a data structure based on a discretization of the x-y plane of the simulation domain.<<ETX>>
APPLICATION OF THE FINITE ELEMENT METHOD TO ROTARY-WING AEROELASTICITY.
Recent research in rotary-wing aeroelasticity has indicated that all fundamental problems in this area are inherently nonlinear. The non-linearities in this problem are due to the inclusion of finite slopes, due to moderate deflections, in the structural, inertia and aerodynamic operators associated with this aeroelastic problem. In this paper the equations of motion, which are both time and space dependent, for the aeroelastic problem are first formulated in P.D.E. form. Next the equations are linearized about a suitable equilibrium position. The spatial dependence in these equations is discretized using a local Galerkin method of weighted residuals resulting in a finite element formulation of the aeroelastic problem. As an illustration the method is applied to the coupled flap-lag problem of a helicopter rotor blade in hover. Comparison of the solutions with previously published solutions establishes the convergence properties of the method. It is concluded that this formulation is a practical tool for solving rotary-wing aeroelastic stability or response problems.