Experimental study of the boron redistribution in bilayer films silicon-based by SIMS technique
The present work focuses on the study two sets of films bilayers obtained by Low Pressure Chemical Vapor Deposition (LPCVD), for use as material to MOS gate structures (transistors, chemical sensor ISFET, etc.). The first series of films are composed by two layers, silicon amorphous un-doped layer (poly1) and polysilicon boron doped in situ (poly2). The second series are constituted by boron doped polysilicon (polySi) and nitrogen doped polysilicon (NIDOS). These films (poly1/poly2 and polySi/NIDOS) are annealed in tem the same conditions of deposit and annealing. The boron concentration is monitored by secondary ion mass spectrometry (SIMS). The superposition between the SIMS profiles of poly1/poly2 and polySi/NIDOS films have shown that low thermal annealing budget at 600°C/2h, ensures long boron redistribution to the interface poly2/SiO2. At the contrary, a high thermal budget the second layer (poly2) was recristallyzed and reached to the doped oxide. For polySi/NIDOS films, SIMS profiles confirmed the presence of low nitrogen (X = 1%) which can effectively suppress the boron penetration at the interface NIDOS/SiO2.
Reduction of boron penetration through thin silicon oxide with a nitrogen doped silicon layer
Abstract This paper deals with the development of the disilane Si 2 H 6 gaseous source for gate technology and more precisely, reports on the use of nitrogen doped silicon (NIDOS) deposited from disilane and ammonia for the realisation of polycrystalline gate. Boron diffusivity into the NIDOS films is studied thanks to SIMS experiments, and results are extended to the fabrication of P + -poly-Si/NIDOS/SiO 2 /Si capacitive structures. Electrical characterisations evidenced finally the influence of boron and nitrogen atoms on the electrical properties of PMOS devices.
The contribution of charcoal production to rural livelihoods in a semi-arid area in Kenya
Forest incomes in the form of both timber and non-timber forest products are an important source of livelihood for many communities in Africa. A major forest resource is charcoal, which contributes to the livelihoods of millions across the region. While incomes from charcoal are used to meet a wide spectrum of needs within rural livelihoods, the role of charcoal production on livelihoods of small-scale producers is not well understood. Therefore, we provide an example on the importance of charcoal on livelihoods in an agropastoralist community in a semi-arid region in Kenya. Based on a household questionnaire targeting 150 charcoal and 150 non-charcoal makers, as well as focus group discussions, we assessed the determinants for participation in charcoal production and developed a household typology based on charcoal income dependence. We also determined the role of charcoal in income equalization and poverty reduction. Our study shows that charcoal contributes about 20% of the household income in the study area. Gender, land size and the number of food-scarce months are the key determinants of participation in charcoal production. Based on the poverty analysis, we conclude that even though charcoal income does not lift the producers out of poverty, it can mitigate the impacts of poverty by reducing the poverty gap and poverty severity. Based on our findings, we recommend a multipronged approach to address sustainable rural livelihoods including a more explicit acknowledgement of charcoal production as a source of rural income. We also recommend broadening of the local livelihood base and a more active management of the woodland to ensure the sustainability of the income.