CMOS Dual-Work-Function Engineering by Using Implanted Ni-FUSI
For the first time, a simple CMOS fully silicided (FUSI) process achieving n/pMOS band-edge work function was demonstrated, which is fully compatible with conventional CMOS process. Dual-work-function CMOS FUSI, with a wide range of 800 mV, was achieved by implantation of Yb into the poly of the nMOS gate (4.1-eV work function) and Ga into the poly of the pMOS gate (4.9-eV work function), respectively. The placement of the tuning elements at the metal/dielectric interface was engineered with the thermal budget, as well as the implant dose and species.
Novel FUSI Strained Engineering for 45-nm Node CMOS Performance Enhancement
FUSI metal gate with strained engineering is extensively investigated and reported for the first time. Enveloped FUSI (fully silicided) phase transfer and volume change induced stress exhibits 10% NMOS ION enhancement. Further, the second CESL (contact etch stop layer) induced stress raised another 8% NMOS ION gain. Although the first CESL on poly-gate top removed by FUSI CMP leads to 10% PMOS ION degradation, it can be recovered or further improved by a dual CESL process
Interaction of Diclofop-Methyl and MCPA on Wild Oats (Avena fatua)
Diclofop-methyl {methyl 2-[4-(2,4-dichlorophenoxy)phenoxy] propanoate} loses part of its activity on wild oats (Avena fatua L.) when it is applied in combination with ester or amine formulations of MCPA {[4-chloro-o-tolyl)oxy] acetic acid.} Uptake of diclofop-methyl is reduced in the presence of commercial formulations of MCPA, particularly amine formulations, which are only partly compatible with the diclofop-methyl formulation. With added MCPA, regardless of formulation, hydrolysis of diclofop-methyl to the acid diclofop is slowed down, both in intact wild oat plants and in a crude leaf extract. At the same time, conversion of any acid formed to inactive conjugates is accelerated in the presence of MCPA. It is concluded that the loss of activity of diclofop-methyl by MCPA can be accounted for by the effects of MCPA on uptake and metabolic conversion of diclofop-methyl.