Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics
The requirements on the quality of ultra-precise X-ray optical components for application in the Synchrotron Radiation (SR) community are increasing continually and strongly depend on the quality of the metrology devices available to measure such optics. To meet the upcoming accuracy goal of 50 nrad rms for slope measuring profilers, a dedicated project, SIB58 Angles, consisting of 16 worldwide partners and supported by the European Metrology Research Programme (EMRP) was started in Sep 2013. The project covers investigations on autocollimators under extremely challenging measuring conditions, ray-tracing models, 2D autocollimator calibration (for the first time worldwide), determination of error sources in angle encoders providing traceability by ‘sub-division of 2π rad’ with nrad uncertainty, angle generation by 'ratio of two lengths' in nrad level, and on the development of portable precise Small Angle Generators (SAGs) for regular in-situ checks of autocollimators’ performance. Highlights from the project will be reported in the paper and the community of metrology for X-Ray and EUV Optics will be informed about its progress and the latest work in angle metrology.
Modelling PTB's spatial angle autocollimator calibrator
The accurate and traceable form measurement of optical surfaces has been greatly advanced by a new generation of surface profilometers which are based on the reflection of light at the surface and the measurement of the reflection angle. For this application, high-resolution electronic autocollimators provide accurate and traceable angle metrology. In recent years, great progress has been made at the Physikalisch-Technische Bundesanstalt (PTB) in autocollimator calibration. For an advanced autocollimator characterisation, a novel calibration device has been built up at PTB: the Spatial Angle Autocollimator Calibrator (SAAC). The system makes use of an innovative Cartesian arrangement of three autocollimators (two reference autocollimators and the autocollimator to be calibrated), which allows a precise measurement of the angular orientation of a reflector cube. Each reference autocollimator is sensitive primarily to changes in one of the two relevant tilt angles, whereas the autocollimator to be calibrated is sensitive to both. The distance between the reflector cube and the autocollimator to be calibrated can be varied flexibly. In this contribution, we present the SAAC and aspects of the mathematical modelling of the system for deriving analytical expressions for the autocollimators’ angle responses. These efforts will allow advancing the form measurement substantially with autocollimator-based profilometers and approaching fundamental measurement limits. Additionally, they will help manufacturers of autocollimators to improve their instruments and will provide improved angle measurement methods for precision engineering.
Angle measurement based on the internal-reflection effect and the use of right-angle prisms.
A new development in angle measurement based on the internal-reflection effect (AMIRE) is described in which a pair of right-angle prisms is used to replace the previously used elongated critical-angle prisms, resulting in lower costs and a more compact size. Excellent linearity is achieved through careful alignment of the right-angle prisms. The measurement sensitivity and range can be selected through the use of light sources with different polarization states. Experiments with a prototype sensor demonstrated a measurement range of 1.6°, a resolution of 0.04 arcsec, and a nonlinearity error of ±0.1%. Both analytical and experimental results are presented.