Chapter 4. High Temperature Barrier Layers
The concept of hybrid electrode-barrier layers is introduced in the first section. The experimental process and ferroelectric properties of PZT films on the electrode-barrier layers are explained in detail in the second section. The fatigue problem and minimization of the fatigue are reviewed, and the improvement of the fatigue properties using the high temperature multi-layer substrates are discussed in the last section. 4.1 INTRODUCTION In the previous two chapters, high density destructive readout (DRO) FRAM were investigated by primarily focusing on materials processing temperature. The low temperature processing was successfully achieved for the high density DRO FRAM applications by using a modified sol-gel processing. The other approach we have taken for integrating PZT films into high density CMOS devices is to develop novel electrode-barrier layers for high temperature processing. Since the currently used diffusion barrier layers such as TiN and TiSi 2 maintain their electrical conductivity only up to 550 °C, high temperature barrier layers are desirable for the integration of PZT films into high density CMOS devices. Ideal electrode materials for the DRO FRAM devices should possesses good electrical conductivity, outstanding thermal and chemical stability, and amenability to dry etching. In particular, the electrode-barrier should be a good diffusion barrier without reacting the ferroelectric materials or the underlying substrate (poly-Si) during high temperature processing. In this research, we propose Pt/IrO 2 /Ir hybrid electrode

 Report

ra n g e d f ro m 3 0 t o 1 9 0 m g /L .  C h a n n e l d iv e rs io n  N o m a jo r c h a n g e in o v e ra ll c a tc h m e n t a n d th u s a d v e rs e im p a c t to h y d ro lo g y a n d th e a s s o c ia te d w a te r q u a lit y im p a c t is n o t a n ti c ip a te d .  S e w e ra g e p ro p o s e d b y t h e d e v e lo p m e n t c o u ld b e b e n e fi c ia l to e x is ti n g w a te r q u a lit y.
The International Law of the Shipmaster
Part 1: The Shipmaster in Context Chapter 1. Introduction to the Law of the Shipmaster Chapter 2. Overview and Introduction to the International Law Affecting the Shipmaster Chapter 3. International Organisations and Conventions and the Shipmaster Chapter 4. Domestic Laws and the Shipmaster Chapter 5. Overview of Jurisdiction Chapter 6. The Flag State and the Shipmaster Chapter 7. Coastal and Port States and the Shipmaster Part 2: The Doctrines of the Law of the Shipmaster Chapter 8. The Shipmaster, the Owner and the Charterer Chapter 9. The Powers, Duties and Rights of the Shipmaster Chapter 10. Shipmasters and Safety and Seaworthiness Chapter 11. The Shipmaster and Cargo and Bills of Lading Chapter 12. The Shipmaster and the Environment Chapter 13. Labour and the Shipmaster Chapter 14. Limitation of the Shipmaster's Liability Part 3: The Principal Domestic Laws Governing the Shipmaster in the States of the United Nations and the International Maritime Organisation