Simulations of consecutive diffusion process
Process simulation based on virtual reality can comprehensively present the real process on the computer. It can play an important role in the development and manufacturing field of diffusion furnace. This paper researches the establishment of consecutive diffusion process and the key techniques of process simulation. In the process of creating process simulation, V code would be created to control motion of each part. A simulation that reflects on the real process could be acquired with this research. This process simulation not only shortens the development time of diffusion furnace, but also makes designer have a perspective to the defects of product in the design process. It promotes the effective of design, and reduces changes in later period of design.
Diffusion furnace dopant activation matching through a ramped temperature idle
Significant non-uniform 'time at temperature' or Dt variation is observed across a horizontal furnace load in diffusion batch processes. Non uniform activation of dopants is observed in 800degC, short duration processes with high mobility dopant species. Dt matching across the furnace is obtained by changing the temperature zone set points at furnace idle prior to pushing and processing a full wafer batch. A ramped idle temperature ranging 120degC across the furnace improves activation uniformity. Boron implanted test wafers show an 85% reduction in activation non uniformity across the furnace when using a ramped idle.
A New Vacuum Pressure Infiltration CFRP Method and Preparation Experimental Study of Composite
In order to prepare a carbon-fiber-reinforced polymer composite (CFRP) with ideal microstructure and properties, a new vacuum pressure infiltration CFRP method is proposed based on an analysis of existing CFRP preparation process methods. Research on composite material preparation systems was carried out by using this new method principle. The system mainly includes a fiber pre-forming module, a vacuum heating infiltration module, a hot-press curing molding module, and a data acquisition control module. Under the conditions of natural curing at 0 MPa + 6 h + 25 °C, vacuum heating curing at –0.05 MPa + 30 min + 80 °C, and hot-press curing at 0.7 MPa + 5 min + 50 °C, a two-dimensional (2D) CFRP with excellent microstructure and properties was successfully prepared. Observing the microstructure of the prepared composite material, it can be found that the inside of the composite material was sufficiently and uniformly infiltrated, and common preparation defects such as holes and delamination were effectively controlled. Through the performance test, the bending strength of the material reached 790 MPa.