Enhanced Plasma Uniformity in RF Plasma With Side Multihole
Capacitively coupled plasma source with side multihole is studied. Due to the hollow cathode effect at the multihole, edge plasma density is strongly increased and thus, plasma uniformity is significantly enhanced.
Scaling laws for dual radio-frequency capacitively coupled discharges
The characteristics of dual radio-frequency capacitively coupled discharges are studied based on a homogeneous analytic model. We are considering a planar plasma device that can be approximated using a one-dimensional model. A set of equations describing the dynamics of the system are presented and used to give the analytic scaling laws. Scaling laws relating the drive frequencies and the applied voltages of dual radio-frequency sources to operating functions such as plasma density and plasma potential are examined and compared with numerical simulations.
Enhancement of ohmic and stochastic heating by resonance effects in capacitive radio frequency discharges: a theoretical approach.
In low-pressure capacitive radio frequency discharges, two mechanisms of electron heating are dominant: (i) Ohmic heating due to collisions of electrons with neutrals of the background gas and (ii) stochastic heating due to momentum transfer from the oscillating boundary sheath. In this work we show by means of a nonlinear global model that the self-excitation of the plasma series resonance which arises in asymmetric capacitive discharges due to nonlinear interaction of plasma bulk and sheath significantly affects both Ohmic heating and stochastic heating. We observe that the series resonance effect increases the dissipation by factors of 2-5. We conclude that the nonlinear plasma dynamics should be taken into account in order to describe quantitatively correct electron heating in asymmetric capacitive radio frequency discharges.