CMOS Dual-Work-Function Engineering by Using Implanted Ni-FUSI
For the first time, a simple CMOS fully silicided (FUSI) process achieving n/pMOS band-edge work function was demonstrated, which is fully compatible with conventional CMOS process. Dual-work-function CMOS FUSI, with a wide range of 800 mV, was achieved by implantation of Yb into the poly of the nMOS gate (4.1-eV work function) and Ga into the poly of the pMOS gate (4.9-eV work function), respectively. The placement of the tuning elements at the metal/dielectric interface was engineered with the thermal budget, as well as the implant dose and species.
High performance 35nm L/sub GATE/ CMOS transistors featuring NiSi metal gate (FUSI), uniaxial strained silicon channels and 1.2nm gate oxide
This paper describes the fabrication and performance of uniaxial strained silicon CMOS transistors with NiSi metal gate electrodes and ultra-thin 1.2nm gate oxide. This work offers the first comprehensive evaluation of Si CMOS devices integrating NiSi metal gate (FUSI) process with highly strained Si channels. Performance gains from FUSI gate stack and uniaxial strained Si channels are demonstrated to be fully additive and enable record high drive currents - NMOS lDSAT=1.75mA/mum, PMOS IDSAT=1.06mA/mum (VDD=1.2V, IOFF=100nA/mum). These devices have the best IDSAT vs. IOFF characteristics reported to date in the industry
Contractor Failure: Analysis
The possibility exists for any construction contractor to fail to filfill the contract requirements associated with a facility. Contractor failure occurs when a contractor is unable to perform his/her contractual duties, thus requiring the facility owner to invoke the contract's nonperformance clause. This paper provides aggregate contractor business failure statistics and outlines potential causes for failure. A framework to identify and quantify the associated costs is also introduced. Several case studies are presented to examine the cause and cost of failure and the means by which the facilities were completed. Alternatives available for project completion when contractor failure occurs are discussed. Recommendations to identify and monitor contractors at high risk for failure are outlined as well. This paper provides facility owners with a greater awareness of the possibility of contractor failure, how to quantify costs of contractor failure, and avoidance techniques.