Optimization of 3o Method for Phase Change Materials Thermal Conductivity Measurement at High Temperature
Thermal conductivity (kth) of Ge rich Ge Sb Te phase change material (GGST) is here investigated at temperatures up to $400\ \circ}\mathrm{C} through "3o method" We present the engineering of the test vehicle, with the optimization of the metal based heater to achieve a reliable measurement even at high temperature. Finally, we compare the results from four different approaches, showing which method is more accurate for the kth evaluation in phase change materials.
2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)