3D Magnetic Microactuator Made of Newly Developed Magnetically Modified Photocurable Polymer and Application to Swimming Micromachine and Microscrewpump
This paper describes a newly developed photocurable polymer with ferromagnetic property for microstereolitho graphy to fabricate magnetic microactuators with three dimensional (3D) structures and its application to a wirelessly controllable swimming micromachine and microscrewpump. This polymer was prepared by mixing a photocurable polymer with magnetic particles, together a viscosity increasing agent to maintain the particle dispersion. It was demonstrated that this polymer were rapidly fabricated into various complicated 3D magnetic microstructures using microstereolithography. Finally, a swimming micromachine and microscrewpump driven by magnetic force wirelessly were developed using screw type microactuators made of the polymer with a diameter of submillimeter order.
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems