Semiconductor nanostructures enabled by aerosol technology
Aerosol technology provides efficient methods for producing nanoparticles with well controlled composition and size distribution. This review provides an overview of methods and results obtained by using aerosol technology for producing nanostructures for a variety of applications in semiconductor physics and device technology. Examples are given from: production of metal and metal alloy particles; semiconductor nanoparticles; semiconductor nanowires, grown both in the aerosol phase and on substrates; physics studies based on individual aerosol generated devices; and large area devices based on aerosol particles.