Research on photodiode integrated with wide spectrum focusing reflector using nonperiodic subwavelength gratings
The fabrication and characterization of p i n photodiodes integrated with wide spectrum focusing reflectors using nonperiodic strip and concentric circular subwavelength gratings are presented. The experimental results show that the gratings can reflect and focus the incident light on the absorber of the photodiode, and thus can simultaneously achieve high speed and high efficiency. For the gratings' integrated photodiodes, the responsivity is improved over a wide spectral range, and when the absorber was 600 nm and the mesa diameter was 40 mm, a responsivity of 0.46 A/W at a wavelength of 1.55 mm and a 3 dB bandwidth of 21.6 GHz under a reverse bias of 3 V were simultaneously obtained. OCIS codes: 130.3120, 230.5170, 250.0040. doi: 10.3788/COL201816.051301.