Fiber Optic Fabry Perot Acoustic Sensor With Multilayer Graphene Diaphragm
A fiber optic Fabry Perot acoustic sensor with a ~100 nm thick multilayer graphene diaphragm is reported. Acoustic testing demonstrates a pressure induced deflection of 1100 nm/kPa and a noise equivalent acoustic signal level of 60 mPa/Hz1/2 at the frequency of 10 kHz. The sensor exhibits a flat frequency response from 0.2 to 22 kHz and may be useful for highly sensitive acoustic sensing.
IEEE Photonics Technology Letters