300 mm Monolithic Silicon Photonics Foundry Technology
A competitive 300 mm silicon photonics foundry technology has been developed by GLOBALFOUNDRIES for general availability, which takes advantage of advanced CMOS process technology and provides a manufacturing scale. A state of the art process design kit offers a codesign environment with access to a comprehensive photonics device library along with a monolithically integrated SOI CMOS device library. Advances in automated wafer level optical test enable statistical photonic device characterization for development, photonic modeling, and manufacturing controls. The key challenges and solutions in developing a manufacturable photonic technology with state of the art performance are described, as well as a roadmap for next generation high performance monolithic silicon photonics are outlined.
IEEE Journal of Selected Topics in Quantum Electronics