Room temperature deposited dielectrics and superconductors for integrated photonics
We present an approach to fabrication and packaging of integrated photonic devices that utilizes waveguide and detector layers deposited at near ambient temperature. All lithography is performed with a 365 nm i line stepper, facilitating low cost and high scalability. We have shown low loss SiN waveguides, high Q ring resonators, critically coupled ring resonators, 50/50 beam splitters, Mach Zehnder interferometers (MZIs) and a process agnostic fiber packaging scheme. We have further explored the utility of this process for applications in nonlinear optics and quantum photonics. We demonstrate spectral tailoring and octave spanning supercontinuum generation as well as the integration of superconducting nanowire single photon detectors with MZIs and channel dropping filters. The packaging approach is suitable for operation up to 160 *C as well as below 1 K. The process is well suited for augmentation of existing foundry capabilities or as a stand alone process. c (c) 2017 Optical Society of America OCIS codes: (130.0130) Integrated optics; (130.3990) Micro optical devices; (230.3120) Integrated optics devices; (230.4000) Microstructure fabrication; (230.7370) Waveguides; (230.0040) Detectors. References and links 1. F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, J. Rahn, M. V. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. S. Tsai, J. Bostak, A. Dentai, K. T. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strezelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. T. S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, "Current status of large scale InP photonic integrated circuits," IEEE J. Sel. Top. Quantum Electron. 17, 1470 (2011) 2. N. Nader and K.C. Cossel and E. Baumann and I.R. Coddington and N.R. Newbury and R. Mirin and J.M. Shainline, "Spectral engineering of frequency combs using deposited waveguides" in Proceedings of Conference on Lasers and Electro optics (CLEO, 2016) 3. F. Vollmer and S. Arnold, "Whispering gallery mode biosensing: label free detection down to single molecules," Nat. Methods 5, 591 (2008) 4. N. Jokerst, M. Royal, S. Palit, L. Luan, S. Dhar, and T. Tyler, "Chip scale integrated microresonator sensing systems," J. Biophotonics 2, 212 (2009) 5. A. Washburn, L. Gunn, and R. Bailey, "Label free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators," Anal. Chem. 81, 9499 (2009) 6. A. Washburn, M. Luchansky, A. Bowman, and R. Bailey, "Quantitative, label free detection of five protein biomarkers using multiplexed arrays of silicon photonic microring resonators," Anal. Chem. 82, 69 (2010) 7. Y. Chen, F. Yu, C. Yang, J. Song, L. Tang, M. Li, and J. J. He, "Label free biosensing using cascaded double microring resonators integrated with microfluidic channels," Opt. Comm. 344, 129 (2015) 8. K. Yamada, T. Tsuchizawa, H. Nishi, R. Kou, T. Hiraki, K. Takeda, H. Fukuda, Y. Ishikawa, K. Wada, and T. Yamamoto, "High performance silicon photonics technology for telecommunications applications," Sci. Technol. Adv. Mater. 15, 024603 (2014) 9. C. Doerr, "Silicon photonic integration in telecommunications," Front. Phys. 3, 37 (2015) Vol. 25, No. 9 1 May 2017 OPTICS EXPRESS 10322 #282457 https:/doi.org/10.1364/OE.25.010322 Journal (c) 2017 Received 7 Dec 2016; revised 14 Apr 2017; accepted 16 Apr 2017; published 26 Apr 2017 10. C. Kachris and I. Tomkos, "A survey on optical interconnects for data centers," IEEE Commun. Surveys Tutorials 14, 1021 (2012) 11. D. Nikolova, S. Rumley, D. Calhoun, A. Li, R. Hendry, P. Samadi, and K. Bergman, "Scaling silicon photonic switch fabrics for data center interconnection networks," Opt. Express 23, 1159 (2015) 12. S. Rumley, D. Nikolova, R. Hendry, Q. Li, D. Calhoun, and K. Bergman, "Silicon photonics for exascale systems," J. Lightwave Technol. 33, 547 (2015) 13. C. Sun, M. Wade, Y. Lee, J. Orcutt, L. Alloatti, M. Georgas, A. Waterman, J. Shainline, R. Avizienis, S. Lin, B. Moss, R. Kumar, F. Pavanello, A. Atabaki, H. Cook, A. Ou, J. Leu, Y. H. Chen, K. Asanovic, R. Ram, M. Popovic, and V. Stojanovic, "Single chip microprocessor that communicates directly using light," Nature 528, 534 (2015) 14. D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris Morini, E. Cassan, L. Virot, and J. M Fedeli, "Roadmap on silicon photonics" J. Opt. 18, 073003 (2016) 15. A. E. J. Lim, J. Song, Q. Fang, C. Li, X. Tu, N. Duan, K. K. Chen, R. P. C. Tern, and T. Y. Liow, "Review of silicon photonics foundry efforts" IEEE J. Sel. Top. Quantum Electron. 20, 8300112 (2014) 16. K. A. Williams, E. A. J. M Bente, D. Heiss, Y. Jiao, K. Lawniczuk, X. J. M. Leijtens, J. J. G. M van der Tol, and M. K. Smit, "InP photonic circuits using generic integration" Photon. Res. 3, B60 (2015) 17. "American Institute for Manufacturing Integrated Photonics," URL http:/www.aimphotonics.com/ 18. K. Worhoff, R. G. Heideman, A. Leinse and M. Hoekman, "TriPleX: a versatile dielectric photonic platform" Adv. Opt. Technol. 4, 189 (2015) 19. D. J. Moss, R. Morandotti, A. L. Gaeta, and M. Lipson, "New CMOS compatible platforms based on silicon nitride and Hydex for nonlinear optics," Nat. Photonics 7, 597 607 (2013) 20. R. A. Soref, S. J. Emelett, and W. R. Buchwald, "Silicon waveguided components for the long wave infrared region," J. Opt. A 8, 840 848 (2006) 21. J. M. Shainline, S. M. Buckley, R. P. Mirin, and S. W. Nam, "Superconducting optoelectronic circuits for neuromorphic computing," Phys. Rev. Appl. 7, 034013 (2017) 22. F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, "Detecting single infrared photons with 93% system efficiency," Nat. Photonics 7, 210 214 (2013) 23. Y. H. D. Lee and M. Lipson, "Back End Deposited Silicon Photonics for Monolithic Integration on CMOS," IEEE J. Sel. Top. Quantum Electron. 19, 8200207 (2013) 24. Z. Shao, Y. Chen, H. Chen, Y. Zhang, F. Zhang, J. Jian, Z. Fan, L. Liu, C. Yang, L. Zhou, and S. Yu, "Ultra low temperature silicon nitride photonic integration platform," Opt. Express 24, 1865 (2016) 25. S. Zhu, G. Lo, and D. Kwong, "Low loss amorphous silicon wire waveguide for integrated photonics: effect of fabrication process and the thermal stability," Opt. Express 18, 25283 (2010) 26. R. Takei, S. Manako, E. Omoda, Y. Sakakibara, M. Mori, and T. Kamei, "Sub 1 dB/cm submicrometer scale amorphous silicon waveguide for backend on chip optical interconnect," Opt. Express 22, 4779 (2014) 27. W. Sacher, Z. Yong, J. Mikkelsen, A. Bois, Y. Yang, J. Mak, P. Dumais, D. Goodwill, C. Ma, J. Jeong, E. Bernier, and J. Poon, "Multilayer silicon nitride on silicon integrated photonic platform for 3D photonic circuits," in Proceedings of Conference on Lasers and Electro optics (CLEO, 2016) p. JTh4C.3. 28. A. Biberman, K. Preston, G. Hendry, N. Sherwood Droz, J. Chan, J. S. Levy, M. Lipson, and K. Bergman, "Photonic network on chip architectures using multilayer deposited silicon materials for high performance chip multiprocessors," ACM J. Emerg. Technol. Comput. Syst. 7, 1 25 (2011) 29. N. Sherwood Droz and M. Lipson, "Scalable 3D dense integration of photonics on bulk silicon," Opt. Express 19, 17758 (2011) 30. J. F. Bauters, M. J. R. Heck, D. John, D. Dai, M. C. Tien, J. S. Barton, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, "Ultra low loss high aspect ratio Si3N4 waveguides," Opt. Express 19, 3163 (2011) 31. C. R. Doerr, L. Chen, Y. K. Chen, and L. L. Buhl, "Wide bandwidth silicon nitride grating coupler," IEEE Photon. Technol. Lett. 22, 1461 1463 (2010) 32. H. Zhang, C. Li, X. Tu, H. Zhou, X. Luo, M. Yu, and P. G. Q. Lo, "High efficiency silicon nitride grating coupler with DBR," in Optical Fiber Communication Conference (OSA, 2014) p. Th1A.4. 33. G. Roelkens, D. Van Thourhout, and R. Baets, "High efficiency Silicon on Insulator grating coupler based on a poly Silicon overlay," Opt. Express 14, 11622 (2006) 34. G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K. B. Gylfason, A. Griol, D. Marris Morini, E. Cassan, D. Giannone, H. Sohlstrom, and D. Hill, "High efficiency silicon nitride surface grating couplers," Opt. Express 16, 328 (2008) 35. A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, "A Grating CouplerEnabled CMOS Photonics Platform," IEEE J. Sel. Top. Quantum Electron. 17, 597 608 (2011) 36. W. S. Zaoui, A. Kunze, W. Vogel, M. Berroth, J. Butschke, F. Letzkus, and J. Burghartz, "Bridging the gap between optical fibers and silicon photonic integrated circuits," Opt. Express 22, 1277 (2014) 37. J. Notaros and M. Popovic, "Band structure approach to synthesis of grating couplers with ultra high coupling efficiency and directivity," in Optical Fiber Communication Conference (OSA, 2015) p. Th3F.2. 38. J. F. Bauters, M. L. Davenport, M. J. R. Heck, J. K. Doylend, A. Chen, A. W. Fang, and J. E. Bowers, "Silicon on ultra low loss waveguide photonic integration platform," Opt. Express 21, 544 (2013) 39. M. Pfeiffer, A. Kordts, V. Brasch, M. Zervas, M. Geiselmann, J. Jost, and T. Kippenberg, "Photonic damascene Vol. 25, No. 9 1 May 2017 OPTICS EXPRESS 10323