SIMULATION AND EMPIRICAL INVESTIGATION OF MICRO ELECTRO MECHANICAL PIEZORESISITIVE PRESSURE SENSOR PACKAGE BASED ON THE REQUIREMENTS OF PETROCHEMICAL INDUSTRY
Navid SeyedKazem Viliani1* Mehdi Hashemi2 Hadi Vadizadeh3 Hassan Pourrostami1 Seyed Mohsen Mostafavi4 Faramand Hashemizadeh4 1Department of Engineering, Islamic Azad University, Abhar Branch, Abhar, Iran. 2Department of Mechanical Engineering, Sharif University of Technology, Tehran, Iran 3 Young Researchers and Elite Club, South Tehran Branch, Islamic Azad University, Tehran, Iran 4Department of Research and Development, Fanavaran Petrochemical Co. Mahshahr, Iran P.O.B. 1998664799 Tehran, Iran. n.viliani@abhariau.ac.ir ARTICLE INFORMATION ABSTRACT