Magnetron Sputtering Preparation of Nitrogen Incorporated Lithium Aluminum Titanium Phosphate Based Thin Film Electrolytes for All Solid State Lithium Ion Batteries
We report for the first time a new lithium ion conducting Li Al Ti P O N thin film solid electrolyte for all solid state lithium ion batteries. It was prepared by radio frequency (RF) magnetron sputtering deposition using a NASICON structural Li Al Ti P O target in a N2 atmosphere at various temperatures. XRD and SEM test results showed that the thin film was composed of an amorphous structure and that its surface was smooth, dense, and homogeneous. FTIR and XPS analyses indicated that nitrogen atoms were actually incorporated into the Li Al Ti P O matrix framework. The substitution of nitrogen for oxygen in the thin film created more abundant cross linking structures and decreased the electrostatic energy, which favored the higher mobility of lithium ions. A high Li ionic conductivity of 1.22 x 10 6 S/cm was obtained for the thin film deposited at room temperature. Moreover, the higher value of 1.22 x 10 5 S/cm for the thin film deposited at 500 degC indicated that some crystallites in the amorphous film m.