Growth and properties of ZnO film grown on AlN buffer layer by PLD
In this work, c plane AlN/c sapphire templates have been used to grow high quality ZnO films by pulsed laser deposition. The thickness of AlN buffer layer was 150nm and the ZnO thin films was investigated using photoluminescence (PL) spectroscopy, Raman measurements, high resolution x ray diffraction (HRXRD) and atomic force microscopy (AFM)