Design of high-speed diamond microswitch
In this work, microswitches based on polycrystalline diamond films are investigated. Device properties such as switch-on and switch-off times are calculated and compared to measurement results obtained from fabricated structures. Pre-stress effects, common in free-standing diamond structures, have been included in the model. The influence of various geometric parameters on the transient behaviour of the switches is calculated. Diamond is shown to improve the transient behaviour of the devices in comparison with other materials such as silicon.