Studies of 2.45 GHz microwave induced plasma abatement of CF4.
Microwave plasmas at 2.45 GHz frequency operated at atmospheric pressure in synthetic gas mixtures containing N2 and CF4 are investigated experimentally for various operating conditions, with respect to their ability to destroy perfluorocompounds. It was found that the destruction and removal efficiency of the process is highly dependent on the total gas flow and concentration of CF4. Destruction and removal efficiencies of CF4 up to 98% have been achieved using 1.9 kW of microwave power at 16 L/min total flow rate.