Constant-psi constant-delta contour maps: applications to ellipsometry and to reflection-type optical devices.
Constant-psi constant-delta contour maps in the reduced angle-of-incidence-film-thickness plane that are useful in ellipsometry and in design of reflection-type optical devices are discussed. As a specific example, a contour map is given for the SiO(2)-Si film-substrate system at the 6328-A He-Ne laser wavelength.