Detailed investigation of SEM-results by TEM at one sample using FIB-technique
We show how different analytical methods were applied to one sample to get maximum information. By SEM strings of an unknown material in the centre of the array, where bitline shorts appeared, were detected. For the identification of the material and the technology step which caused the fail the modification from the compact SEM-sample to a thin foil for TEM-analysis was necessary. The most critical steps were executed by FIB. Using analytical TEM the origins of the shorts were determined as different materials.