An algorithm for automatic prober movement control for better coverage of test sites on a wafer during measurement
Abstract In most of the methods employed for scanning semiconductor wafers during computer-aided measurement on test structures provided for process characterization and yield estimation there is a possibility of either loosing some sites or recording erroneous data corresponding to incomplete test structures. This leads to either over or under estimations. In the present paper an algorithm is presented for the movement of the prober across the wafer in such a manner that it provides a better coverage of test sites throughout the wafer.