Molecular beam epitaxial growth of P-ZnSe:N using a novel plasma source
We have studied the p-type doping in ZnSe molecular beam epitaxial growth using a novel high-power (5 kW) radio frequency (rf) plasma source. The effect of growth conditions such as the rf power, the Se/Zn flux ratio and the growth temperature on p-ZnSe:N was investigated. The net acceptor concentration (NA—ND) of around 1 × 1018 cm−3 was reproducibly achieved. The activation ratio ((NA—ND)/[N]) of p-ZnSe:N with NA—ND of 1.2 × 1018 cm−3 was found to be as high as 60%, which is the highest value so far obtained for NA—ND ∼ 1018 cm−3. The 4.2K photoluminescence spectra of p-ZnSe:N grown under the optimized growth condition showed well-resolved deep donor-acceptor pair emissions even with high NA—ND.