Thin films of titanium and titanium oxide for microminiaturization
Abstract Experimental results on the electrical properties of thin-film passive and active devices based on titanium/titanium oxide layers are described. Thin-film resistors can be made with sheet resistivities of 1 to 10 9 Ω/□. The conduction phenomena in the three-layer titanium/titanium oxide/metal structures, such as capacitors and diodes, are explained on the basis of a p - i - n and p - n junction within the anodically formed oxide films.