Scanning Hartmann inspection apparatus
A scanning Hartmann inspection apparatus has been developed on the basis of the traditional Hartmann test principle.It can inspect large-aperture focusing lenses up to 300 mm in diameter within the full aperture.The apparatus consists of a large-aperture collimator,a scanning Hartmann screen,a focusing lens to be tested,a CCD camera and a computer.The longitudinal aberration and the encircled energy of the aspheric collimating lens of the Fizeau plane interferometer with the effective aperture of 154 mm are measured,and it is tested by a WYKO interferometer as well.The results obtained from the two above mentioned methods agree well,which proves that the scanning Hartmann inspection apparatus is reliable.