Superconducting YBa2Cu3O7-x thin films grown by organometallic chemical vapor deposition
Abstract Y-Ba-Cu-O thin films are grown on SrTiO 3 (100) substrates by organometallic chemical vapor deposition using tetramethylheptadione complexes. The effects of substrate temperatures and source gas conditions on crystallographic and superconducting properties are investigated. Crystallinity and superconducting properties deteriorate with decreasing of substrate temperature; however, they can be improved by decreasing the O 2 flow rate, even at temperatures as low as 600°C. Superconducting thin films with zero-resistivity temperatures of 71 K and 10 K are grown at substrate temperatures of 650°C and 600°C, respectively. Superconducting transition is observed to occur when full width at half maximum of the X-ray diffraction peaks narrowed.