10 Gb/s single-mode vertical-cavity surface-emitting laser with large aperture and oxygen implantation
High-speed single transverse mode 850 nm vertical cavity surface emitting lasers (VCSELs) with large emission aperture with a diameter of 8 µm were fabricated. These VCSELs exhibit good performance with threshold currents of 1.5 mA, a single transverse mode emission within the full operational range and a maximum output power of 3.8 mW. The large aperture is advantageous to these VCSELs with a smaller dynamic resistance (60 Ω) than that of conventional single-mode VCSEL. These single-mode VCSELs also demonstrate superior high-speed performance up to 10 Gb s−1.