Study on EDM Deposition Process for Metal Micro Supporting Structures
The process conditions of micro EDM deposition were researched. The characteristic of micro deposition unit in each discharge and accumulation forming in multi-discharges was analyzed. The bearing capacity of the deposited micro structure and the microstructure of deposited material were tested. Results show that the deposited material has compact fine texture and good anti-bearing capacity of the compression load. For brass deposited material, the compressive strength can reach 496.8 MPa. And the micro EDM deposition method is suitable for the fabrication of micro metal supporting structure in micro electro-machine system(MEMS).