A Flat-field XUV Spectrometer with 155mm Incidence Dist ance
Using a ray-tracing cod e, A flat-field grazing-incidence spectrometer with 155mm inc ident distance was designed. This is different from the conventional design for a flat-field grazing-incidence spectrometer. This spectrometer has good spectral resolution as well as smaller size and improved flexibility. The spectrum covers wavelength ranges of 4～40nm and the spectral resolution is 0.01nm.