Impact of irregular geometries on low-k dielectric breakdown
Backend geometries on chips contain a wide variety of features. We are developing a full-chip reliability simulator for low-k dielectric breakdown that takes into account the vulnerable area, linewidth, vias, and line edge roughness. The simulator provides a link between test structure results and predictions of chip dielectric lifetime. However, these factors may not be sufficient for large chips with a wider variety of features. In this paper, we analyze data from backend dielectric test structures with irregular geometries to determine if more layout features need to be added to a full-chip reliability simulator for low-k dielectric breakdown.