Observation of Higher-Order Yoneda Resonances in the Diffuse X-ray Scattering from Structured Surfaces
The characteristic diffuse scatter contributions from periodic nanostructures were studied with grazing incidence small angle X-ray scattering. Yoneda resonant enhanced scattering and waveguide effects are well known for layer (vertically structured) systems. We show that similar effects appear on laterally structured surfaces. The waveguide effect can be directly used for structure density determination of the grating effective layer. Here, we observe also higher order Yoneda bands which appear as additional sharp bended lines in the diffuse scattering background. This can be explained with dynamic scattering, combining Yoneda enhanced surface scattering with diffraction from a grating. Resonant diffuse diffraction causes a palm like diffuse scattering pattern.