Evaporated Zr V, Zr Ti and Zr Co getter thin films: Activation temperature and microstructure
Activation of evaporated getter films was indirectly evaluated by characterizing their oxidation. Alloys of Zr V, Zr Ti and Zr Co with different content in Zr were studied. XRD measurements confirmed that the evaporated films have a microstructure suitable for gettering activity: the films are nanocrystalline with a columnar structure. The films were oxidized by a thermal treatment in an Ar atmosphere with traces of O2 and H2O. To evaluate the oxidation degree, sheet resistance were measured by 4 probes electrical measurement and oxygen content in the films was deduced from EDX and XPS analysis. The oxidation of the getter film reflects its oxygen sorption ability, and thus allows evaluating its activation temperature. Estimation of the activation temperature for a 1h15 annealing is 325degC for Zr Ti getters. For Zr Co and Zr V getters, it varies from 320degC to 350degC and 220degC to 270degC respectively, depending on the Zr content in the alloy.
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)