Vacuum sealed and getter activated MEMS Quad Mass Gyroscope demonstrating better than 1.2 million quality factor
This paper presents the in run bias stability of a high Q factor Quad Mass Gyroscope (QMG) vacuum sealed with getter activated in Leadless Chip Carrier (LCC) package. Quality factors of 1.2 and 1.1 Million were measured along the layout defined drive and sense modes. As fabricated, frequency mismatch of 35Hz was electrostatically tuned to 200mHz, for a device with 2kHz center frequency. A performance improvement of 4X in Angle Random Walk (ARW) and 15X reduction in in run bias stability were achieved after the electrostatic frequency matching between drive and sense modes, resulting in below 0.1 deg/hr bias stability. The results showed a strong dependency of the in run bias stability of the gyroscope due to quality factor and frequency mismatches.
2016 IEEE International Symposium on Inertial Sensors and Systems