Research on a MEMS technology based corrugated horn antenna designed in Tera Hertz regime
A new kind of Tera Hertz (THz) antenna, on chip wide flare angle axial corrugated horn antenna, based on MEMS technology and focused ion beam (FIB) technology is presented in this paper. Optimal design for size and the number of corrugated structure together with exploring on the impact of the corrugated structure on electromagnetic radiation performance is studied in the research. The simulation results show the antenna gets an average gain above 15dB covered the frequency band (1050GHz~1100GHz) with a return loss better than 17dB. The antenna has the advantages of miniaturization, high gain, and can be integrated on chip. It has important applications in the field of Tera Hertz, especially in the direction of the THz communication integrated circuit.
2016 IEEE International Conference on Microwave and Millimeter Wave Technology (ICMMT)