23462768
A method for deep etching in dielectric films for 3D-chip and photonics applications
Abstract In this paper, RIE of thick undoped silicate glass (USG) films for various applications is described. Though moderate etch rates (∼0.4 μm/min) were achieved for USG film, process development was quite challenging due to stringent requirements of deep USG etching (>6 μm) and vertical profile. Alternatively, etch process with higher etch rate (1.0 μm/min) was also evaluated for profile angle and results were found not comparable to low etch rate process. However, low etch rate process was found to have tool limitations and an alternate method called ‘discrete etching’ was proposed and successfully verified. Promising results were obtained with etch depth (6 μm) and vertical profile (∼89.50°) in USG as well as SiON films. Based on the results discrete etching method was found to have provided advantage of unlimited capability for deep etching.
1111313
Resist pattern peeling assessment in DUV chemically amplified resist
As device size shrinks resist line peeling becomes more challenging. In this paper we studied the resist pattern peeling based on resist processing parameters and type of bottom antireflective coating (BARC), for patterning trench structures with different duty ratios, in copper and low k dual damascene process. To minimize resist poisoning in dual damascene process, acetal-based resist was used. Significant improvement in via poisoning was observed with this chemistry as compared to environmentally stable chemically amplified resist chemistry but at the cost of pattern peeling. In order to solve pattern peeling problem we tried to analyze key factors such as compatibility with BARC, post-exposure bake, BARC curing, adhesion and their effects. Pitch dependency on pattern peeling margin is observed.
26545951
Placement of scattering bars in binary and attenuated phase shift mask for damascene trench patterning
Abstract Scattering bars have been very effective technique to increase the common lithography process window for patterns with design rules 0.18 μm and below. This paper studies the placement of scattering bars in binary and attenuated phase shift mask in damascene trench patterning. Different partial coherence values are used to compare the scattering bar effect in binary and 8% attenuated phase shift mask. At low partial coherence ( σ ) the trench size has been found more sensitive to scattering bar parameters than at high σ . Scattering bar separation is found more effective than size to affect the trench critical dimension (CD). At low partial coherence a deep valley or ‘V’ shaped CD trend is found in scattering bar separation versus CD curve. CD dip is more using APSM as compared to binary mask. The process latitude is poor at valley as compared to top. Also, 3 sigma CD variation and range is higher at valley as compared to other separations of the scattering bars.
113025
Distributed peak power management for many-core architectures
Recently proposed techniques for peak power management involve centralized decision-making and assume quick evaluation of the various power management states. These techniques do not prevent instantaneous power from exceeding the peak power budget, but instead trigger corrective action when the budget has been exceeded. Similarly, they are not suitable for many-core architectures (processors with tens or possibly hundreds of cores on the same die) due to an exponential explosion in the number of global power management states. In this paper, we look at a hierarchical and a gradient ascent-based technique for decentralized peak power management for many-core architectures. The proposed techniques prevent power from exceeding the peak power budget and enable the placement of several more cores on a die than what the power budget would normally allow. We show up to 47% (33% on average) improvements in throughput for a given power budget. Our techniques outperform the static oracle by 22%.
27240142
Two optimal peer selection problems
Many peer computers today participate in peer-to-peer file sharing applications in which the computers contribute storage and bandwidth resources. Of course, applications can only harness the resource pool if peers make available their surplus resources to them. It is widely documented, however, that the P2P systems are havens for "free riders": a significant fraction of users do not contribute any resources, and a minute fraction of users contribute the majority of the resources. Clearly, to improve the performance of existing P2P file sharing systems, and to enable new classes of P2P applications, a compelling incentive system needs to be put in place.
17431951
Analyzing Performance of Web-Based Metrics for Evaluating Reliability and Maintainability of Hypermedia Applications
This paper has been designed to identify the Web metrics for evaluating the reliability and maintainability of hypermedia applications. In the age of information and communication technology (ICT), Web and the Internet, have brought significant changes in information technology (IT) and their related scenarios. Therefore in this paper an attempt has been made to trace out the Web-based measurements towards the creation of efficient Web centric applications. The dramatic increase in Web site development and their relative usage has led to the need of Web-based metrics. These metrics will accurately assess the efforts in the Web-based applications. Here we promote the simple, but elegant approaches to estimate the efforts needed for designing Web-based applications with the help of user behavior model graph (UBMG), Web page replacement algorithms, and RS Web Application Effort Assessment (RSWAEA) method. Effort assessment of hyperdocuments is crucial for Web-based systems, where outages can result in loss of revenue and dissatisfied customers. Here we advocate a simple, but elegant approach for effort estimation for Web applications from an empirical point of view. The proposed methods and models have been designed after carrying out an empirical study with the students of an advanced university class and Web designers that used various client-server based Web technologies. Our first aim was to compare the relative importance of each Web-based metric and method. Second, we also implemented the quality of the designs obtained based by constructing the User Behavior Model Graphs (UBMGs) to capture the reliability of Web-based applications. Thirdly, we use Web page replacement algorithms for increasing the Web site usability index, maintainability, reliability, and ranking. The results obtained from the above Web-based metrics can help us to analytically identify the effort assessment and failure points in Web-based systems and makes the evaluation of reliability of these systems simple.
13502244
Object Tracking with Bayesian Estimation of Dynamic Layer Representations
Decomposing video frames into coherent 2D motion layers is a powerful method for representing videos. Such a representation provides an intermediate description that enables applications such as object tracking, video summarization and visualization, video insertion, and sprite-based video compression. Previous work on motion layer analysis has largely concentrated on two-frame or multi-frame batch formulations. The temporal coherency of motion layers and the domain constraints on shapes have not been exploited. This paper introduces a complete dynamic motion layer representation in which spatial and temporal constraints on shape, motion and layer appearance are modeled and estimated in a maximum a-posteriori (MAP) framework using the generalized expectation-maximization (EM) algorithm. In order to limit the computational complexity of tracking arbitrarily shaped layer ownership, we propose a shape prior that parameterizes the representation of shape and prevents motion layers from evolving into arbitrary shapes. In this work, a Gaussian shape prior is chosen to specifically develop a near-real-time tracker for vehicle tracking in aerial videos. However, the general idea of using a parametric shape representation as part of the state of a tracker is a powerful one that can be extended to other domains as well. Based on the dynamic layer representation, an iterative algorithm is developed for continuous object tracking over time. The proposed method has been successfully applied in an airborne vehicle tracking system. Its performance is compared with that of a correlation-based tracker and a motion change-based tracker to demonstrate the advantages of the new method. Examples of tracking when the backgrounds are cluttered and the vehicles undergo various rigid motions and complex interactions such as passing, turning, and stop-and-go demonstrate the strength of the complete dynamic layer representation.
16199663
Dynamic layer representation with applications to tracking
A dynamic layer representation is proposed for tracking moving objects. Previous work on layered representations has largely concentrated on two-/multi-frame batch formulations, and tracking research has not addressed the issue of joint estimation of object motion ownership and appearance. The paper extends the estimation of layers in a dynamic scene to incremental estimation formulation and demonstrates how this naturally solves the tracking problem. The three components of the dynamic layer representation, namely, layer motion, ownership, and appearance, are estimated simultaneously over time in a MAP framework. In order to enforce a global shape constraint and to maintain the layer segmentation over time, a parametric segmentation prior is proposed. The generalized EM algorithm is employed to compute the optimal solution. We show the results on real-time tracking of multiple moving or static objects in a cluttered scene imaged from a moving aerial video camera. The moving objects may do complex motions, and have complex interactions such as passing. By using both the appearance and the segmentation information, many difficult tracking tasks are reliably handled.