( ( ( The ( first ( metrology ( development activities ) ) ) ) ( at ( ( ( ( NIST , ) ( then ( called ( ( the ( National Bureau ) ) ( of Standards ) ) ) ) ) , ) ( in ( support ( of ( the ( semiconductor ( manufacturing industry ) ) ) ) ) ) ) ) ) ( ( began ( when ( ( the industry ) ( was ( in ( its ( infancy year ) ) ) ) ) ) ) . ) )
(ROOT (S (NP (NP (DT The) (JJ first) (JJ metrology) (NN development) (NNS activities)) (PP (IN at) (NP (NP (NNP NIST)) (, ,) (VP (ADVP (RB then)) (VBN called) (NP (NP (DT the) (NNP National) (NNP Bureau)) (PP (IN of) (NP (NNP Standards))))) (, ,) (PP (IN in) (NP (NP (NN support)) (PP (IN of) (NP (DT the) (NN semiconductor) (VBG manufacturing) (NN industry)))))))) (VP (VBD began) (SBAR (WHADVP (WRB when)) (S (NP (DT the) (NN industry)) (VP (VBD was) (PP (IN in) (NP (PRP$ its) (NN infancy) (NN year))))))) (. .)))
The first metrology development activities at NIST, then called the National Bureau of Standards, in support of the semiconductor manufacturing industry began when the industry was in its infancy year.
(ROOT (S (NP (NP (DT The) (JJ first) (NN year)) (PP (IN after) (NP (NN birth)))) (VP (VBZ is) (VP (VBN called) (NP (NN infancy)))) (. .)))