a mass flow controller ( mfc ) device , and methods therein , with various space saving layouts is described . fig1 is a schematic diagram illustrating a prior art layout of a pressure based mass flow controller ( mfc ) 100 with a conventionally - located p1 pressure transducer 104 coupled to a base 220 within a standard envelope , according to a prior art embodiment . one example of the prior art mfc 100 is the device manufactured by fugasity . the prior art mfc 100 can be 4 . 13 ″ long to fit industry standards . it consists of a proportional flow control valve 105 at an inlet 101 of the device , followed by the p1 pressure transducer 104 downstream of a proportional flow control valve 105 , followed by a characterized laminar flow element ( lfe ) 105 acting as a flow restrictor , and a p2 pressure transducer 106 near the outlet 102 of the device . the prior art mfc 100 also utilizes a printed control board ( pcb ) ( not shown ) containing supporting electronics , software and calibration coefficient for receiving , pressure signals , a temperature signal ( e . g ., from a temperature sensor 107 embedded in the device ) and an external set point indicating the target flow . given these inputs the pcb drives a voltage to the proportional inlet valve 105 until sufficient pressure was achieved in the volume between a poppet of a valve and the downstream restrictor , to achieve the needed flow through the restrictor . this particular pressurized volume is referred to herein as a p1 volume . under the conventional paradigm , the p1 pressure transducer 105 is coupled to the base in order to monitor the pressure of p1 volume . fig2 a is a schematic diagram illustrating a layout for a pressure based mfc 200 a with a p1 pressure transducer 210 a decoupled from a base 220 , according to an embodiment . because the p1 pressure transducer 210 a no longer occupies space on the base 220 , the envelope can be reduced from the standard size of 4 . 13 ″ or the freed up space on the base can be used to add additional components and functionality . the inlet 211 of the mfc 200 a receives a process gas into a conduit ( e . g ., an inlet conduit ). nitrogen is an exemplary process gas , but any suitable gas or fluid could be substituted . the conduit can be any suitable tubing , plumbing or machined block , either rigid or flexible . a ks1 substrate block ( not shown ) as manufactured by hytron corporation , serves as an interconnecting platform for the base 220 of the mfc 200 a and other components for supplying gas to and receiving gas from the mfc 200 a . the proportional inlet valve 230 a can be a solenoid or other appropriate component physically coupled to the base 220 to control gas flow through an inlet 211 of the mfc 200 a . process gas is received from the conduit ( e . g ., the inlet conduit ) and sent back to the conduit after processing ( e . g ., the intermediate conduit ). rather than being directly connected to the base 220 , the p1 pressure transducer 210 is communicatively coupled to monitor process gas internally downstream of from the valve seat and poppet of proportional inlet valve 230 a . in some embodiments , the proportional inlet valve 230 a has a movable portion and a fixed portion , and the p1 pressure transducer 210 a is coupled to the fixed portion . more specifically , the proportional inlet valve 210 a has a solid upper pole rigidly attached to an outer tube , also rigidly attached to the base of the valve which is sealed to the base 220 of the mfc 200 a . the mechanism contains the pressurized gas flowing through the proportional inlet valve 230 a . inside the outer tube a movable plunger is suspended via a radial spring . a conduit is bored through the fixed pole to communicate gas pressure to the p1 pressure transducer 210 a attach to an end of the fixed pole , on top of the proportional inlet valve 230 . as a result , the process gas and its associated pressure can communicate from the exits of the valve seat to the p1 pressure transducer 210 a allowing the p1 pressure upstream of the restrictor to be sensed and controlled . details 201 and 204 are detail views showing the gas passages connecting the valve seat to the p1 pressure transducer 210 . detail 201 shows the small passages that contain gas from the valve seat to the movable plunger . detail 202 illustrates the flow passage in the area of the movable plunger and orifice valve seat . detail 203 shows the gas passage past the radial spring and into the small annular gap between the movable plunger and the lower details of the fixed outer tube assembly . detail 204 illustrates the annular gap passage between the top section of the fixed outer tube assembly and the movable plunger and a second passage between the gap between the movable plunger and the fixed core where it enters the bore drilled through the length of the fixed plunger . although these passages are small , little flow is needed to pressurize or depressurize the small volume , hence , the pressure measured by the p1 pressure transducer 210 effectively represents the pressure at an outlet 212 of the valve seat and the inlet to the characterized restrictor . a p2 pressure transducer 240 measures process gas in the conduit ( e . g ., outlet conduit ) between an lfe 225 and the outlet 212 . the outlet 212 delivers the process gas to a next conduit for eventual use by the process . in some embodiments , additional processing is performed on the process gas , such as mixing with other gases , or the like . a temperature sensor 245 provides temperature readings and a pcb 235 processes the temperature readings and other information in controlling the components on the mfc 200 a . in an embodiment of an igs style mfc , due to arranging the p1 pressure transducer on top , the mfc functionality can be provided by a smaller envelope ( e . g ., see fig8 and 9 ). in more detail , rather than complying with the traditional interface standard of semi f82 - 0304 for a rectangular - shaped interface having a 4 . 13 ″ long base , the igs style mfc can comply with the semi f84 - 0304 standard for a square - shaped interface having a 1 . 1 ″ base . both standard are hereby incorporated by reference in their entirety . fig2 b is a schematic diagram illustrating a layout for a pressure based mfc 200 b with a p1 pressure transducer 210 b decoupled from the base an additional component coupled to the base within a standard envelope , according to an embodiment . relative to fig2 a , the newly available real estate along the base of mfc 200 b is utilized for integrating one or more additional components 270 within the standard size envelope rather than reducing the envelope ( e . g ., see fig3 - 7 for examples of additional components ). fig3 is a schematic diagram illustrating a layout for a pressure based mfc 300 with a p1 pressure transducer 310 decoupled from the base and a relief valve 370 coupled to the base within a standard envelope , according to an embodiment . space for the relief valve 370 is enabled by the relocation of the p1 pressure transducer . for mfcs having a small flow range , 500 sccm and below for example , the pressurized mass of gas between the valve seat of the proportional inlet valve and the inlet of the flow restrictor , the p1 volume , is significant compared to the desired flow rate to the process . traditionally , when one gives the mfc a command to stop flow , via outputting a set point value of zero , the inlet proportional valve closes immediately but flow continues to bleed through the restrictor and to the process as the pressure in the p1 volume bleeds down to equalize with the pressure downstream of the restrictor . in the current pressure based mfc 300 , the mass at p1 pressures that correspond to 100 % full scale flow is roughly 1 to 2 standard cubic centimeters ( i . e ., 1 scc = 1 cc of gas at 0 c and 1 atm ). if the mfc is relatively large , say 1000 sccm at full scale , fs , ( i . e ., 1000 scc per minute ) then the mass in the p1 volume is insignificant compared to the working flow rate and it bleeds off relatively quickly . however , flow rates below 1 sccm are now being requested . if the mfc is a 1 sccm fs device the p1 mass is very significant and the time constant of bleeding off the p1 mass is 1 minute . if the process is 5 seconds in length , then having an mfc that continues to flow gas to the process minutes after the command to stop flow , is not an acceptable situation . as a practical matter , the traditional mechanical full scale of pressure based mfc are limited to be above 250 sccm , to avoid this issue . pressure based mfcs , which are built and labeled with full scales below this value , typically have the large 250 sccm laminar flow element restrictor but operate in the lower range operation by electronically or numerically scaling the flow calculation so that although the device is mechanically large its full scale reading is much smaller . the larger restrictor lowers the p1 pressure and bleeds down the p1 volume quicker , however this method induces larger device calibration drift . the relief valve 370 of fig3 , by contrast , routes the p1 volume mass to a non - process abatements system via a vent or vacuum pump ( also see fig4 , 6 , 7 and 9 ). in operation , a pcb controls a proportional valve controlled by a pcb . when it is desired to reduce the flow from the mfc 300 faster than the natural bleed down time constant of the bleed off through the restrictor to the process , the proportional p1 relief valve will open and control the p1 pressure to a lesser pressure . the lesser pressure can be controlled to quickly reduce to a lower flow rate or to stop flow . in the igs 900 of fig9 , an orifice 910 replaces the proportional valve for cost and space savings . the orifice 910 is sized to bleed off a mass flow rate typically between 50 and 500 sccm ( give a 1 cc p1 volume ) to allow the speedy depressurization , relative to the intended process time , of the p1 area . it is noted that an on / off valve might be placed downstream and in series with the vent line if it is desired to reduce the quantity of gas vented . in this case continuous venting is avoided and gas is only vented when it is desired to reduce the p1 pressure . fig4 is a schematic diagram illustrating a layout for a pressure based mfc 400 with a p2 pressure transducer 440 decoupled from the base and located remote to the envelope , and a relief valve 470 coupled to the base , according to an embodiment . the gas box of a modern semiconductor fabrication tool controls and mixes the flows of multiple gas species . typically these gases combine at a common header connected to the exhaust of each of different gas sticks contain the different mfcs . although there is typically a shut off air valve at the end of each mfc , its conductance is sufficiently high compared to the flow rate of the mfc that the pressure of the common header is sufficiently indicative of the p2 pressure seen by the individual mfcs when the shut off air valve is open and gas is flowing from the mfc . as a result , the p2 pressure information from a single pressure transducer located on this exhaust header ( via analog or digital connections ) can be shared with the pcbs of the individual mfcs to provide the p2 pressure information without the need for individual p2 pressure transducers located on each mfc . optionally the p2 information may be read by the tool controller and sent electronically to the mfcs . in this layout , space is gained by removing the second pressure transducer allowing a smaller envelope or additional integrated components . moreover , cost savings is realized because p2 pressure transducers are not needed on each mfc . in one embodiment , as shown by fig8 and 9 , the p2 pressure transducer 840 , 940 can be located remotely to an igs style mfc 800 , 900 . in other embodiments , the p1 pressure transducer can be placed on top of the proportional inlet valve as described herein . furthermore , other embodiments can add a second lfe or a self - relieving valve . fig5 is a schematic diagram illustrating a layout for a pressure based mfc 500 with a p1 pressure transducer 510 decoupled from the base and a second lfe 525 b , according to an embodiment . in fig7 , the mfc with a p1 pressure transducer 710 decoupled from the base and a second lfe 725 b also has a remotely - located p2 pressure transducer 740 . returning to fig5 , the second lfe 525 b is configured in series with a high conductance valve 575 . the high conductance valve 575 for this embodiment can be characterized by a pressure drop through the valve sufficiently small compared to a pressure drop across the second lfe 225 b , such that the flow calculation error induced by ignoring the valve pressure drop is acceptably small . for example , ignoring the pressure drop a standard ¾ ″ valve used in the industry in series with a lfe typically induces a 0 . 15 % r error at 5 , 000 sccm flow of n2 . it is noted that this error can be further reduced , or flow rates increased without loss of accuracy , by numerically correcting the flow calculation based on the characterization of the valve used . this additional lfe 525 b and valve are placed in parallel with the initial lfe 525 a . when the high conductance valve is closed the mfc 500 has the full scale of the single initial lfe . when the high conductance valve is open , the mfc 500 has the full scale of the two lfes 525 a , 525 b in parallel . by making the added lfe 525 b markedly larger ( i . e ., much more flow at the same p1 and p2 pressures ) than the initial lfe 525 a , the mfc 500 will have a markedly higher full scale flow capability . effectively , the mfc 500 has the novel aspect of operating as a high flow and a low flow mfc that shares the same inlet valve , transducers and pcb in the same package size as a current conventional mfc . the mfc 500 allows the replacement of multiple gas lines and mfcs for a single gas species , a situation commonly seen in a modern gas box , by a single gas line and mfc saving both space and cost . the present mfc 500 meets dueling industry demands for accurate flow control and wider ranges than current mfcs can support . the o2 flow rates from 0 . 1 sccm to 10 , 000 sccm are now achievable on the same tool . conventionally , separate o2 mfcs of different full scale values are configured to cover the desired flow range at the intended accuracy . the additional lfe 525 b with the high conductance on / off valve in series can cut the number of o2 ( or other gas ) mfcs in half , saving space and money . while the initial lfe 525 a of the pressure based mfc 500 can maintain 1 % reading accuracy over a dynamic range of 20 to 1 , the dual lfe operation of the mfc 500 , with the proper ratio between the lfe &# 39 ; s 525 a , 525 b , can maintain a 1 % of reading accuracy over a dynamic range of 20 × 20 to 1 or 400 to 1 . one of ordinary skill in the art will recognize that a dynamic range of 20 to 1 and a reading accuracy of 1 % are just examples that can be varied for different implementations . optionally , the two lfes 525 a , 525 b may be sized to focus on separate flow ranges that are not adjacent but that are further apart . for example , the smaller restrictor controlling flow accurately from 0 . 5 sccm to 10 sccm and the larger lfe sized to control flows from 200 sccm to 4000 when the high . in other embodiments a third or more lfes can be added for additional range . in the layout embodiment of fig6 , a pressure based mfc 600 with a second lfe 625 b also includes a p1 pressure transducer 610 decoupled from the base , and a relief valve . additionally , in the layout embodiment of fig7 , a pressure based mfc 700 with a second lfe with a p1 pressure transducer decoupled and a relief also includes a p2 pressure transducer decoupled from the base and located remote to the envelope . as described above , the p2 pressure transducer can be locate downstream , for example , at a common exhaust header shared by several mfcs . this description of the invention has been presented for the purposes of illustration and description . it is not intended to be exhaustive or to limit the invention to the precise form described , and many modifications and variations are possible in light of the teaching above . the embodiments were chosen and described in order to best explain the principles of the invention and its practical applications . this description will enable others skilled in the art to best utilize and practice the invention in various embodiments and with various modifications as are suited to a particular use .