HARMST

HARMST is an acronym for "h"igh "a"spect "r"atio "m"icrostructure "t"echnology, which describes fabrication technologies,
used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.