a procedure is presented herein for formation of nems / mems components and systems with direct arbitrary three - dimensionality for the first time in nems / mems fabrication . this method leads also to a simple and effective external “ quick - connection ” interconnect scheme where ordinary fused silica tubes may be press - fitted into the surface opening of this system to withstand high pressure . this method may be extended for connection of multiple levels of polymer fluidic motherboards together using small sections of fused silica tubing , with no loss of stacking volume because of the lack of any connector lips or bosses . this scheme gives the flexibility of allowing multiple stacks of polymeric 3 - d components while being able to control the channel lengths within the stacks as desired . mixing chambers can also be molded in a single silicone elastomer layer , because true three - dimensionality is trivially possible without the complexity of multi stacked lithography .