the invention provides sensor , preferably biosensor devices and method of fabrication . the devices have significant advantages over the prior art methods having compatibility with future trends in clinical diagnostics and chemical detection . the underlying principle involves the integration of nanometer diameter , micron long metal or semiconductor rods onto a substrate to form a suspended nanomechanical cantilevers . the cantilever rods are rigidly attached to the substrate on one or both ends , and resonate at a characteristic frequency depending on the diameter , length , and stiffness of the rod . the metal or semiconductor rods are integrated onto the substrate using electrofluidic or fluidic assembly techniques . a receptor coating is placed on the metal or semiconductor rods prior to or following rod alignment using self - assembly chemistries . sensing is accomplished when the target agent binds to the receptor substance , causing a change in the mass of the cantilever rod , and a corresponding change in the resonant frequency . this change in resonant frequency can be detected using an electrical readout . the sensing circuitry is integrated with cmos or tft technologies to form compact multi - analyte senor arrays on single crystal silicon , glass , or polymeric substrates . circuits can also be included on the substrate to transmit the array data via wireless methods to a remote workstation for analysis . devices may be integrated on chips with other analysis devices .