a method for forming a non - deformable patterned template includes providing a stable mesh , wherein the stable mesh is resistant to deformation ; providing a curable liquid polymer ; placing the stable mesh in the curable liquid polymer such that the stable mesh is completely enclosed within the liquid polymer ; curing the liquid polymer to form a polymer sheet with the stable mesh embedded therein ; and forming a surface pattern on at least one of the faces of the polymer sheet , the surface pattern including at least two fiducial marks .