a synthesis for a silated acidic polymer by a copolymerization of several monomers includes one acidic monomer and one silated monomer . the silated acidic polymer is used as a resist barrier in imprint lithography and is easily removed by an environmental basic aqua - solution during the stripping process without using rie process or organic solvent at the last step of resist stripping so that the throughput is enhanced and good etching resistibility together with cost - saving is obtained .