a method for forming a multilayer structure comprises the steps of : depositing a first polymerizable layer on a substrate ; applying microwave energy to the polymerizable layer while monitoring at least one property of the layer ; and , ending the application of microwave energy when the monitored property indicates that the polymerizable layer has reached a desired degree of cure . the property monitored may be optical , e . g ., raman spectrum , or electrical , e . g ., dielectric loss . this process control strategy lowers the overall thermal budget , and is especially suitable for curing polymer films on silicon . the method may be used repetitively to cure multiple layers of polymeric material when a thicker film is needed .