a method of making a charge dissipative surface of a dielectric polymeric material with tunable surface resistivity , comprises the step of controllably carbonizing the surface of the polymeric material in a vacuum environment by bombarding the polymeric surface with an ion beam of rare gas ions , the energy level of the ion source being from 2 . 5 to 30 kev , in the fluence range 1e16 - 5e17 ion / cm 2 so as to reach a surface resistivity in the static dissipative range of 1e6 to 1e9 ohm / square at room temperature , with a temperature dependence of less than three orders of magnitude between − 150 ° c . and + 150 ° c ., while having no impact on the rf performance of the material , with high rf power handling capability , and with tunable thermo - optical properties of the surface , including negligible impact on the thermo - optical properties and rf performance of the material , if required by applications .