a semiconductor equipment that is useful for the fabrication of integrated circuits . more specifically , this invention relates to a “ reactive - reactor ” for a transport polymerization process module , wherein the process module is useful for the deposition of low dielectric thin films in ic manufacture . the reactive - reactor has reactive metal interior surfaces for effective conversion of precursors to intermediates . the resultant reaction products of the precursor and the interior surface material of the reactive - reactor are very stable , and do not cause metallic contamination of the semiconductors . the reactive - reactor of this invention is also equipped with reactor re - generating capacity to restore the reactive metal interior surfaces .