methods and apparatus for the micro - scale , dielectrophoretic separation of particles are provided . fluid suspensions of particles are sorted and separated by dielectrophoretic separation chambers that have at least two consecutive , electrically coupled planar electrodes separated by a gap in a fluid flow channel . the gap distance as well as applied potential can be used to control the dielectrophoretic forces generated . using consecutive , electrically coupled electrodes rather than electrically coupled opposing electrodes facilitates higher flow volumes and rates . the methods and apparatus can be used , for example , to sort living , damaged , diseased , and / or dead cells and functionalized or ligand - bound polymer beads for subsequent identification and / or analysis .