page_title: Microscanner
section_title: Manufacture
hierarchical_section_title: Microscanner / Manufacture
caption_attribution_description: Deutsch: Mit dem Fraunhofer AME75-Prozess fertig prozessierte Mikroscanner bei designspezifischer Strukturierung ausgehend von einem blanken BSOI-Wafer.
context_page_description: A microscanner, or micro scanning mirror, is a microoptoelectromechanical system in the category of micromirror actuators for dynamic light modulation. Depending upon the type of microscanner the modulatory movement of a single mirror can be either translatory or rotational, on one or two axes. In the first case, a phase shifting effect takes place. In the second case, the incident light wave is deflected.
  Therefore, they have to be differentiated from spatial light modulators, other micromirror actuators which need a matrix of individually addressable mirrors for their mode of operation. If a single array mirror already fulfils the desired modulation but is operated in parallel with other array mirrors in order to increase the light yield, then the term microscanner array is used.
context_section_description: Microscanners are usually manufactured with surface or bulk micromechanic processes. As a rule, silicon or BSOI (bonded silicon on insulator) are used.
caption: Wafer with resonant microscanners, ready-processed with the Fraunhofer AME75 process (based on blank BSOI wafers), before dicing the devices.
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