page_title: Static secondary-ion mass spectrometry
section_title: Spectrum
hierarchical_section_title: Static secondary-ion mass spectrometry / Spectrum
caption_attribution_description: English: Static SIMS spectra from the surface of PTFE (polytetrafluoroethylene)
context_page_description: Static secondary-ion mass spectrometry, or static SIMS is a secondary ion mass spectrometry technique for chemical analysis including elemental composition and chemical structure of the uppermost atomic or molecular layer of a solid which may be a metal, semiconductor or plastic with insignificant disturbance to its composition and structure. It is one of the two principal modes of operation of SIMS, which is the mass spectrometry of ionized particles emitted by a solid surface upon bombardment by energetic primary particles.
context_section_description: The mass spectrum of the secondary ions emitted from the bombarded surface during SSIMS provides direct information of not only chemical composition but also of chemical structure of the bombarded area. This is because the mass spectrum includes cluster ions as well as elemental ions. These cluster ions reflect the surface chemistry in a detailed way. Figure shows the mass spectrum obtained from a SSIMS analysis of polytetrafluoroethylene (PTFE). Positive ion spectrum shows positive atomic ion (i.e. C⁺) and molecular ions (i.e. CF⁺, CF3⁺, C3F3⁺) of the target. Negative ion spectrum shows the atomic ion (i.e. F⁻) and molecular ions (i.e. F2⁻, CF3⁻, C3F3⁻).
caption: Static SIMS spectra from the surface of PTFE (polytetrafluoroethylene)