Ceramic capacitors
United States Patent 11 1 Rutt et al.  
 [ 1 CERAMIC CAPACITORS [75] Inventors: Truman C. Rutt. Niagara Falls;  
 James A. Stynes. Lewiston. both of [73] Assignee: N L Industries. Inc.. New York.  
 [22] Filed: Sept. 24. I973 [21] Appl. No.: 400.243  
 [52] U.S. CI 317/258: 317/261 [51] Int. Cl 01g 3/06 [58] Field of Search 161/196, 145; 117/98;  
 [56] References Cited UNITED STATES PATENTS 2.919.483 1/1960 Gravley 317/261 X 1 51 Apr. 22, 1975 Brcedlovc 317/258 Rutt 317/258 FOREIGN PATENTS OR APPLICATIONS 625.776 8/1927 France 317/261 Prinmry Examiner-E. A. Goldberg Attorney. Agent. or FirmAsh1an F. Harlan. Jr.  
 [57] ABSTRACT Monolithic ceramic capacitors are formed by producing suitered ceramic bodies with voids. The voids are produced during sintering. In the voids are distinct pillars which remain after sintering. The voids are filled with metal to form conductive electrodes.  
 12 Claims. 10 Drawing Figures FATENTEDAPRZZIQYS 3.879.645  
 sum 1 q 3 P-ZTENTEB APR 2 21975 sumaqga,  
 CERAMIC CAPACITORS BACKGROUND OF THE INVENTION In its simplest form a ceramic capacitor consists of a relatively thin wafer of desired shape and size formed by firing a ceramic dielectric composition. the wafer having electrodes on the opposite faces thereof. In many cases, however, it is desired to use a capacitor having a plurality of such wafers alternating with conductive layers, alternate ones of said conductive layers being exposed at the same edge faces of the capacitor and electrically joined there, for example by a termination electrode.  
  In a typical known method for producing such ccramic capacitors, an electroding paste ofa noble metal such as platinum or palladium is applied to the top face of a small, usually cast, thin sheet of a suitable ceramic dielectric composition bonded with an organic temporary binder, the application being made in such manner that the deposit of electroding paste extends to one edge of the sheet only and a clear margin is left around three sides of the deposit. A plurality of the smali sheets thus coated with electrode paste are then stacked, successive sheets being rotated about an axis normal to the plane of the sheet, whereby successive electroding paste deposits extend to opposite edges of the stack. The stack of paste-coated sheets is then suitably consolidated and heated to drive off or decompose the organic binders of the ceramic sheet and the electroding paste and to sinter the dielectric composition into a unitary, multilayer body having successive electrodes exposed on opposite ends thereof. The electrodes exposed on each end are then electrically connected with a termination electrode in known manner.  
  Because of the necessity for using noble metal internal electrodes in the process just described, monolithic ceramic capacitors are expensive. Lower cost, silver electrodes such as are commonly used with other ceramic capacitors are generally unsuitable for monolithic capacitors because the silver, applied as an electrode paste, would be subjected to a high temperature during firing to mature the ceramic and would thereby be deleteriously affected. Accordingly, a method of producing monolithic capacitors that does not require the use of noble or very expensive metals has been desired.  
  Such a method has been described in US. Pat. No. 3,679,950, granted July 25, 1972. In that patent a number of procedures are disclosed which involve the formation of sintered ceramic matrices that have strata of dense dielectric material alternating with strata of porous ceramic material and the subsequent deposition of conductive material, which may be low-cost metals, in said porous strata.  
  While very satisfactory, relatively inexpensive, monolithic capacitors have been made by methods disclosed in the above-mentioned patent, maintaining continuity of metal in the internal electrodes has been found to be a problem at times. It is also desirable, particularly when producing capacitors for use at high frequency, to keep the electrode resistance as low as possible.  
  Accordingly, it is an object of the present invention to provide an improvement on the procedures disclosed in the above-mentioned patent which will result in the production of sintered ceramic matrices in which internal electrodes can be formed by introduction of conductive material, such as metal, to form capacitors wherein continuity of and low resistance in such electrodes is easily obtained, while the ceramic matrix prior to impregnation has adequate strength.  
 SUMMARY OF THE INVENTION The foregoing object of the invention is achieved by providing as matrices ceramic bodies that have a plurality of superposed thin layers or strata of dense dielectric material, adjacent laycrs having between them thin spaces or cavities open at one edge region that are substantially planar. The spaces or cavities are interrupted only by one or more distant pillars, substantially all of which, when there are a plurality, are separated. Thus, it is possible to readily introduce conductive material, such as metal, into the cavities in the matrix to provide a body having continuous conductive layers or strata alternating with dielectric ceramic strata. More specifically, the invention of the present application comprises a capacitor formed by introducing a conductive material, metal being generally preferred, into one or more thin, essentially planar spaces between thin strata of dense dielectric material in a unitary, sintered ceramic body, said strata being integrally joined at a plurality of edge portions and said thin space or spaces being interrupted only by one or more distinct metal or ceramic pillars, substantially all of said pillars, when there are a plurality, being separated. In the resulting capacitor, the internal electrodes have low resistance since the spaces between the dielectric strata were only obstructed to a small degree. The invention also comprehends production of other ceramic devices having internal electrodes, such as multilayer circuit strue tures, by a substantially similar procedure. In the production of both capacitors and multilayer circuit struc tures, the procedure includes the use of pseudoconductors composed largely of thermally fugitive material that is removed when the ceramic is fired, thereby providing cavities or channels into which conductive material is introduced. The shape, size, and location of the conductors and/or electrodes are essentially the same as those of the pseudo-conductive electrodes or lines in the green, unfired body, which they replace.  
 SHORT DESCRIPTION OF THE DRAWINGS FIG. I is a sectional view of a capacitor produced in accordance with the present invention;  
  FIG. 2 is a sectional view taken on line 2-2 of FIG. 1 of such a capacitor;  
  FIG. 3 is an enlarged perspective view of two leaves of a bonded, ceramic, dielectric composition, each leaf having thereon a layer of a composition consisting of thermally fugitive material having dispersed therein a minor amount of ceramic granules;  
  FIG. 4 is a fragmentary plan view of a bonded leaf or sheet of a ceramic dielectric composition having thereon a patterned layer which consists of thermally fugitive material having dispersed therein a minor amount of ceramic granules;  
  FIG. 5 is a further enlarged, fragmentary, sectional view of a ceramic body according to the present invention after assembly, consolidation, and sintering of a plurality of coated leaves such as shown in FIG. 3;  
  FIG. 6 is an enlarged sectional view of a multilayer circuit structure according to the present invention;  
  FIG. 7 is an enlarged exploded view showing the several ceramic sheets forming the structure illustrated in FIG. 6 with pseudoconductors thereon;  
  FIG. 8 is a greatly enlarged view of a bonded, composite, ceramic granule suitable for use in carrying out the present invention;  
  FIG. 9 is a greatly enlarged, fragmentary, plan view of a bonded leaf or sheet of ceramic, dielectric composition having thereon a patterned layer of thermally fugitive material adapted for use in a modified process according to the invention; and  
  FIG. 10 is a greatly enlarged, fragmentary, sectional view of a sintered ceramic matrix formed from a plurality of leaves such as shown in FIG. 9.  
  It should be noted that in the drawings certain relative dimensions are exaggerated.  
 DESCRIPTION OF THE INVENTION In accordance with the present invention a monolithic capacitor can be produced in the following manner.  
  A plurality of thin leaves of a finely divided ceramic composition are made by the use ofa thermally fugitive bonding material, for example, a resin or cellulose derivative, the ceramic composition being such as to form a dense dielectric layer when sintered. Such compositions, many of which are well known, include barium titanate, with or without admixed modifiers of the dielectric constant and/or other properties thereof, as well as many other types of ceramic compositions. There is then applied to each of a plurality of said leaves a thin layer which consists principally of thermally fugitive material having dispersed therein a minor amount of ceramic and/or metallic granules of such size as to extend substantially through said layer. These layers may be performed, but preferably are produced by depositing a liquid or pasty composition on the leaves, for example, by painting or screen printing. The thermally fugitive material of said layers, hereinafter sometimes referred to as pseudo-conductors, may be a suitable combustible and/or volatile organic filmforming material. but is preferably a mixture of fine combustible and/or volatile particles bonded with such a film-forming material. The ceramic and/or metal granules may be mixed with and dispersed in the filmforming material of the layers.  
  The layers referred to above are smaller in surface area than the thin leaves to which they are applied and each layer is of such shape as to allow a margin of the associated leaf to extend around a major portion of the perimeter of the layer while a portion of the latter extends to an edge of the leaf on which it is deposited. Preferably, the layers are equal in size.  
  A plurality of the leaves of the bonded ceramic composition are then stacked, with layers of the granulecontaining, thermally fugitive composition intervening, and consolidated. The consolidation can be accomplished by means suitable to the particular materials employed and may involve pressing, heating, and/or the use of a solvent. The leaves and intervening layers in the stack are so arranged that successive layers extend to different edge regions ofthe consolidated stack, but a major portion of the edges of each of said leaves is in contact with the edges of the adjacent leaves in the stack. The consolidated stack of leaves and intervening layers is then fired to remove the thermally fugitive materials and to sinter the ceramic composition. There is thereby formed an integral, sintered, ceramic body having a plurality of thin sheets or strata of dense dielectric material, said sheets being joined at portions of their edges but being separated from one another over substantial portions of their adjacent surfaces and having between them thin cavities interrupted only by one or more distinct ceramic and/or metal pillars, substantially all of which, when there are a plurality, are separate.  
  At the edge regions of the sintered body to which the layers of heat-fugitive material containing the granules of metal and/or ceramic material extended, there are openings into the thin cavities between adjacent ceramic sheets. Through such openings a conductive material, such as metal, may be introduced into said spaces by a suitable method, for example one of the methods disclosed in US. Pat. No. 3,679,950. The result is a body to which termination electrodes can be applied by any desired procedure to form a capacitor and which may, if desired, be suitably encapsulated after leads are attached to such termination electrodes.  
  Obviously, various modifications and variations of the procedure set forth above may be made and a number of these will be described hereinafter.  
 DETAILED DESCRIPTION OF AN EMBODIMENT Although, as pointed out above, there are a number of variations and modifications possible, a procedure preferred when producing a few rather large monolithic capacitors, is essentially that above-described. A fully detailed description of the procedure is as follows:  
 EXAMPLE I A dispersion is made by ball-milling for 4 hours the following composition:  
 400 g dielectric powder 4 g diethylene glycol laurate 30 g butylbenzyl phthalate I20 ml toluene )6 parts Ba&#39;I&#39;iO 4 parts CeO, .2%) all having an average particle size range of l 2;;  
  After such milling, the dispersion is added to a solution formed by dissolving 37 g of ethyl cellulose in I ml of toluene and stirred to obtain thorough mixing. The mixture is then de-aired and a film of the mixture, approximately mm by l,500 mm in size is formed with a doctor blade on a smooth sheet of glass. The film, which after drying is approximately 0.045 mm thick, is removed and cut into small, rectangular sheets or leaves, each approximately 10 mm by 20 mm.  
  A thermally fugitive composition for depositing a pseudo-conductive layer on the leaves prepared as above described may be made by mixing, for example on a 3-roll mill, 25 g of finely divided carbon with 50 g ofa 50 percent solution of a phenolic-modified, rosin ester resin (PENTALYN 858) in a high-boiling, aliphatic petroleum naphtha solvent which has a Kauributanol value of 33.8 (No. 460 Solvent). To this composition is added 20 g of ceramic granules such as shown in FIG. 8, approximately 37;.t 201.1 in size, formed from barium titanate powder in the manner hereinafter described. The viscosity of the composition is then made suitable for screen printing by mixing therewith additional naphtha solvent. The resulting composition or ink, as it is often referred to, is screen printed on one side of each of a plurality of the leaves of the dielectric composition in a layer about 0.01 mm in thickness when dry. it will be observed that care should be taken in forming the granule-containing layers to use components which do not dissolve or unduly soften the bonding material in the leaves of dielectric material. Preferably. the solvents used are aliphatic, petroleum naphthas with a low (about 35) Kauri-butanol value and an evaporation rate slow enough so that the ink does not blind the printing screen used between printing cycles. The granule-containing, heat-fugitive ink layer or pseudoconductor is so applied to each of the leaves or sheets of bonded dielectric material that the layer extends to one edge of the leaf but has a substantial margin around it on its other sides.  
  The printed leaves are then indexed and stacked in groups of ten so that on alternate leaves in each group the edges of the leaves to which the printed layers extend are aligned and the intervening leaves are turned horizontally 180 whereby the printed layers thereon are exposed at the opposite end region of the stack. Non-printed leaves are placed on the top and bottom of the stack. The stack is then consolidated by applying a pressure of about 104 kg/cm thereto at a temperature of about 85C for 1 minute to obtain a coherent green body or chip, as these bodies are frequently referred to. The chips are then heated to remove the thermally fugitive materials therein and to sinter the ceramic composition.  
  To preclude possible disruption of the chips during firing, they are first heated slowly, in air, to remove the thermally fugitive components and are subsequently fired at a higher temperature to form small, coherent, sintered matrices or chips, each of which has a plurality of thin strata of dense, dielectric material that are integrally joined at a plurality of edge portions thereof and has between said strata thin cavities that are interrupted only by distinct ceramic pillars substantially all of which are separate, i.e., spaced apart. Each of the cavities has an opening from one of the edge regions of the chip because of the extension of each of the several granule-containing, heat-fugitive printed layers to an edge of a leaf of dielectric composition when the green chip was formed. Since the printed leaves were stacked with alternate granule-containing layers extending to the same edge region of the stack, the openings to the adjacent cavities in the sintered chip are at opposite edge regions of the chip.  
  A suitable heating schedule for removal of the thermally fugitive materials in the green chips is as follows, all temperatures being in degrees C:  
  to lot) 2 hours 310 to 314 4 hours 160 to 220 hours at 400 1 hour 220 to 225 I2 hours at 500 1 hour 225 to 310 20 hours at 600 1 hour Upon completion of the foregoing schedule, the temperature is raised to 1.370C and maintained at that level for 1.25 hours to sinter the chips.  
  After cooling of the sintered chips, the cavities therein are filled with conductive material, a metal being preferred, any of the methods disclosed in the above-mentioned U.S. Pat. being suitable. Termination electrodes are then applied by any suitable means, the application of such electrodes being well known. Alternatively, the end terminations can be applied and the cavities then filled with metal in accordance with the disclosure in copending U.S. Pat. application, Ser. No.  
 274,668 when the process disclosed in the later or that described in example 10 of the above mentioned patent is employed molten metal solidifies in the cavities. This metal when solid has the characteristics of cast metal.  
  FIGS. 1 and 2 of the accompanying drawings depict, on an enlarged and exaggerated scale. such a monolithic capacitor as that produced by the abovedescribed procedure. The numeral 11 comprehensively designates the capacitor which has strata 13 of ceramic dielectric material with layers 15 of conductive material therebetween that serve as internal electrodes. The latter are so formed, as a result of the size and placement of the pillarcontaining cavities into which the conductive material was introduced, that successive ones extend to the opposite end faces of the capacitor, the group of electrodes exposed at each end face being electrically joined by end termination electrodes 17. Where there is no intervening conductive material, the dielectric layers are united as shown at 19. They are also joined, of course, by the ceramic pillars (not shown) introduced in the pseudo-conductive layers.  
  In FIG. 3 there are shown enlarged, two thin sheets or leaves 3] and 33 of ceramic, dielectric material bonded with a thermally fugitive bond, each of which has thereon a layer 35 composed of thermally fugitive material in which is dispersed a plurality of ceramic granules. It will be seen that the layer 35 on the sheet 31 extends to the front edge of the sheet but has a margin around the sides and the rear thereof while the layer 35 on the sheet 33 extends to the rear edge of the sheet and has a margin around the sides and the front of the sheet. Thus, when a plurality of sheets 31 and 33 with the layers 35 thereon are stacked alternately, consolidated, and fired, the cavities produced in the resultant sintered body by removal of the thermally fugitive material of the layers 35 will open alternately at opposite ends of the body.  
  FIG. 5 depicts, on a further enlarged scale, the structure of a fired ceramic body or chip, suitable as a matrix for production of a monolithic capacitor, which has been made in accordance with the present invention. The strata 37 are of dielectric material and the cavities or spaces 39 there between resulting from the removal of the thermally fugitive material in layers 35 are unobstructed except for the pillars 41.  
  It will be understood that monolithic capacitors according to the present invention may be produced individually as described in the foregoing example. It is preferred, however, when a considerable number of capacitors are to be produced or when the individual capacitors are very small, to employ a procedure in which a plurality of green chips are produced simultaneously and sintered at the same time. Such a procedure is described in the following example.  
 EXAMPLE 2 Using the same ceramic dielectric composition and temporary organic bond therefor as in the preceding example, leaves 50 mm X mm and about 0.05 mm thick after drying are prepared in the manner therein described. Using the same composition or ink as employed in Example 1 for forming the granulecontaining, thermally fugitive layers, a recurring pattern is then deposited on each of said leaves, preferably by screen printing. After the deposit has dried, forming a film about 0.0l mm thick, the printed leaves are indexed and stacked in groups of ten with the printed film pattern on each successive leaf being offset with respect to the pattern on the preceding one. Blocks are then formed by consolidating the stacked leaves, one or more unprinted leaves preferably being placed on the top and bottom of the stack, the consolidation being produced by applying a pressure of about 104 kg/cm thereto at a temperature of about 85C for about a minute. There is thus obtained a green, solid block which is severed or cut. by suitable means such as knives, into smaller blocks or chips.  
  The manner in which this is done will be more readily understood by referring to FIGv 4 of the accompanying drawings. In that figure, the numeral 51 represents (somewhat enlarged and diagrammatic) a large leaf of ceramic dielectric material temporarily bonded with a thermally fugitive bonding material. The spaced, rectangular elements 53 thereon are layers of the granulecontaining, thermally fugitive material that have been deposited thereon. e.g., by screen printing. ln assembling a stack of such printed sheets for consolidation into a large block, all of the sheets are indexed so that the elements 53 thereon are vertically aligned along two opposite edges; but on successive sheets the elements are offset so that only on alternate sheets are the elements 53 wholly in vertical alignment. This is indicated in FIG. 4 by the areas 55 (shown in broken lines) which represent the offset. extending portions of the elements 53 on the leaves 51 located in the stack above and below the leafSl illustrated. After consolidation of the printed leaves into a green. large block (not shown) the block is severed, e.g., by cutting, along the lines 57 and 59 to form a plurality of smaller, green, ceramic blocks or chips in which the elements 53 are exposed alternately at opposite ends of the chips.  
  These chips are heated in the same manner as described in Example 1 to remove the thermally fugitive materials and to sinter the dielectric composition of each into a unitary body having thin ceramic dielectric strata separated by thin cavities between said sheets, said cavities or spaces being interrupted only by distinct pillars substantially all of which are separate. By suitable procedures conductive material. preferably metal. is then introduced into said cavities and termination electrodes are provided on each end to electrically connect the conductive layers exposed at each said end. There are thus produced very satisfactory monolithic capacitors.  
  A somewhat modified procedure for forming a plurality of chips simultaneously is described below.  
 EXAMPLE 3 The same materials and procedure are employed as set forth above in Example 2 to form green blocks from leaves of a dielectric composition carrying thin films or elements of heat-fugitive materials containing granules of metal and/or ceramic. Then. instead of severing the block into a plurality of green chips, the whole block is heated to remove the thermally fugitive materials and to sinter the ceramic material. The heating and sintering conditions may be substantially the same as those described above. However. because of the greater mass of the large blocks. a somewhat longer soaking time may be necessary to achieve proper sintering. After the blocks are sintered. they are severed, e.g., by a diamond saw, into the desired ceramic matrix chips by cutting along lines corresponding to the lines 57 and 59 in FIG. 3.  
  Although in the foregoing examples the dielectric materials used are modified barium titanate compositions, it will be clear that there are many other known ceramic dielectric compositions that may also be used. For example. TiO glass. steatite, and barium strontium niobate, as well as barium titanate alone, can be used. suitable changes well known in the art being made as required in firing procedures and the like to achieve proper sintering. Obviously, the capacitance and other characteristics of the resulting capacitors will vary as a result of using materials with higher or lower dielectric constants.  
  It will also be understood that the composition of the granule-containing layers produced in accordance with the present invention may vary. The granules may be formed of a suitable ceramic material or of a highmelting, oxidation resistant metal, such as palladium, platinum, gold, and alloys thereof. Ceramic materials that may be used for granules are alumina, zirconia, and barium titanate. However, since it is generally important to avoid such reaction between the granules and the dielectric ceramic material as might modify the dielectric properties of the latter, ceramics that melt or react with the dielectric material are not suitable. It is preferred in most cases to use a material of the same composition as the dielectric material.As indicated above, the granules should be of such size as to extend substantially through the layer in which they are used. The number of or amount of granules in the layers may vary widely according to the number of pillars desired in the cavities that result from the removal of the heatfugitive material in the layers. Very satisfactory results have been obtained when using small ceramic aggregates as granules.  
  FIG. 8 illustrates, greatly enlarged, such a ceramic aggregate before firing. The ceramic particles 71 are bonded with a thermally fugitive bond 73. Such aggregates can be readily made, for example. by forming a mixture of finely divided ceramic dielectric material of the kind used for the dielectric leaves and a temporary bond such as employed therefor and allowing the mixture to dry. The mass is then broken up and bonded aggregates of the desired size are obtained by selective sieving. These aggregates may be fired under proper conditions to sinter together the individual ceramic particles therein. However, it will be seen that by using for granules, unfired aggregates such as described, sintering of the ceramic particles in the aggregates will take place contemporaneously with the sintering of the dielectric layers, and no problems are likely to arise from the unequal shrinkage that may occur when different materials are employed. Whether the aggregates used are fired or unfired, there is, of course, no danger of deleterious reaction between the granules and the dielectric material. While it should not be soluble in the solvent employed in depositing the pseudo-conductive layers, the nature of the temporary, thermally fugitive bond used in forming such aggregates is not particularly critical, a number of suitable materials being usable. e.g.. those usable in forming the dielectric ceramic sheets.  
  Monolithic capacitors according to the present invention may vary widely in size. Capacitors as small as 2.0 mm X 3.0 mm X 0.9 mm with 20 dielectric strata. each as thin as about 0.03 mm, and 19 internal electrodes, each as thin as about 0.01 mm, can be readily made, and larger ones are, of course, possible. Not only may the dimensions of the capacitor be varied. but the number and thickness of the strata therein may also vary. Capacitors of any desired capacitance may be obtained according to the invention by proper choice of dielectric material and the size. thickness. and number of the strata and the intervening pseudo-conductive layers. In general. it is desirable to form the dielectric strata and electrodes as thin as is feasible since a smaller amount of expensive dielectric material is used and the capacitance per unit of volume of the capacitors is thus increased, thus reducing the space required in circuits. It will be understood that the thinness of the dielectric strata is limited by the necessity of having such strata solid and non-porous and of such thickness as to withstand the voltage applied in use. Although irregularities in the surface or the thickness of the leaves of dielectric material may provide problems in the formation of capacitors where extremely thin layers or films of granule-containing. pseudo-conductive material are applied since one or more cavities between such irregular leaves may be blocked after firing. it is generally preferred to make the electrodes thinner than the dielectric strata. It will also be understood that one or more extra or additional dielectric leaves or sheets may be placed at the bottom and/or top of a stack of alternated dielectric leaves or sheets and granulecontaining, thermally fugitive layers. This is often done to give additional mechanical strength to the capacitors and/or to adjust their thickness. Unprinted leaves of a dielectric ceramic composition can be used. However, the presence of a ceramic deposit on the top dielectric film or leaf of such a stack will ordinarily not be detrimental.  
  Firing of green ceramic blocks. units, or chips to sinter them into unitary or monolithic bodies is preferably carried out in a kiln in an oxidizing atmosphere. such as air. An electrically heated tunnel kiln or furnace is preferred. but other kilns or other heating means may be employed. The temperature and the time of firing will depend on the ceramic compositions employed. Those skilled in the art are familiar with such details. as pointed out above, and with the fact that. in general, the sintering time necessary varies inversely with the temperature. As the term is used herein. sintering temperature&#34; refers to the temperature necessary to obtain the desired ceramic properties in the body or bodies. As indicated above. a prolonged period of heating at relatively low temperatures is preferred for removal of the temporary bonds used in the leaves and granule-containing layers. The removal of the thermally fugitive materials should be sufficiently slow so that expansion of gases formed in the decomposition or vaporization thereof does not rupture the bodies.  
  In the general description and the examples, the leaves of insulating or dielectric material and the granule-containing, heat-fugitive deposits or layers as well as the capacitors or multilayer circuit structures formed therefrom are assumed to be rectangular. However, the present invention comprehends capacitors and circuit structures of other shapes. In such cases, obviously. alternate thin cavities and the electrodes or conductors introduced may not be exposed on opposite edge faces. Consequently. it will be understood that in the appended claims the term edge region&#34; is used comprehensively to indicate an area on the surface of a body of whatever shape. formed as described herein,  
 which surface meets or intersects the plane of one or more planar spaces or cavities in said body.  
  In FIG. 6 there is illustrated a typical ceramic. multilayer circuit structure 8l such as is used for hybrid integrated circuits. The structure or body 81 has a ceramic matrix 83 and a plurality of conductors 85 extending into and/or through the matrix. The thickness of both conductors and matrix is exaggerated in FIG. 6 for convenience in viewing. Hitherto. such structures have been expensive to produce and normally would be made by screen printing a metallic electroding type paste containing a noble metal such as palladium or platinum in the desired conductor patterns on a plurality of temporarily bonded sheets of desired thickness of an electrically insulating. ceramic material such as fine alumina powder. stacking and consolidating the several printed sheets with one or more unprinted sheets on the top and bottom. and sintering the consolidated stack into a unitary body.  
  As mentioned above. such ceramic. multilayer circuit structures may also be produced by techniques essentially similar to the processes disclosed herein for producing capacitors. thus avoiding the necessity for using expensive, noble metals as conductors. The production of such a structure as shown in FIG. 6 by the technique of the present invention will be briefly described with reference to FIG. 7. It will be understood that the procedure described is only exemplary and that other procedures such, for example. as forming large ceramic blocks as in Example 2. which may be cut to produce individual circuit structure bodies. may also be used.  
  The sheets or films A. B. and C. shown in FIG. 7 are formed in the desired size. shape, and thickness by cast ing, molding. or the like. a desired ceramic, electrical insulating composition. for example. finely divided alumina, using a thermally fugitive material such as a resin. ethyl cellulose. or the like as a temporary bond therefor. Pseudo-conductors 87 following the paths of the desired conductors 85 in the structure shown in FIG. 6 are then screen printed on the sheets or films B and C using a screen printing composition or ink consisting principally of thermally fugitive material con taining a suitable. relatively small amount of ceramic or metallic granules. It will be understood that the patterns of pseudo-conductors 87 illustrated are only examples and that any desired patterns may be employed. The printed sheets are stacked. covered by one or more unprinted top sheets. and the stack is then consolidated in suitable manner and heated to remove the thermally fugitive materials and to sinter the ceramic material in the sheets into a unitary body. all in substantially the same manner as described above in the production of capacitors. As with the latter, the unitary or monolithic matrix produced by firing comprises a dense body of the ceramic, insulating composition having therein cavities or channels that are interruped only by distinct pillars 86, substantially all of which are separate. Each of said channels communicates with at least one region on a face. e.g.. an edge face, of said body. Conductors in and through said bodies are formed by introducing into the channels a suitable conductive material. metal being preferred.  
  It will be evident that except for the fact that the matrix thus produced may contain a number of thin channels between two adjacent strata of non-conductive ceramic material instead of a single thin cavity. the structure is essentially the same as that of the matrices for capacitors described hereinbefore. in both cases, the bodies when green comprise leaves of non-conductive ceramic material with a thermally fugitive temporary bond. have intervening deposits or layers of granule containing, thermally fugitive material serving as pseudo-conductors, and the matrices, after sintering, comprise dense, substantially parallel. ceramic strata with intervening planar cavities, interrupted only be distinct pillars. substantially all of which are separate, into which conductive material such as metal may be introduced. Because of the variation possible in the thermally fugitive materials and ceramic materials used in producing the bodies, the heating and sintering procedures will also vary. However, those skilled in the art will be able to choose satisfactory times and temperatures.  
  An appropriate one of the procedures mentioned above for introduction of conductive material may be used. Leads may be attached by suitable known means to selected exposed conductors or end termination electrodes when these are used, and small components such as transistors, diodes, etc. may be soldered at predetermined points, leads therefrom extending, if desired, to underlying conductors 85 through holes 89 provided in desired locations in one or more of the insulating ceramic strata. Such holes also may serve, when containing conductive material, to electrically connect conductors on two or more levels of the circuit board.  
  It will be understood that in producing multilayer circuit structures in accordance with the present invention, any desired number of sheets or leaves of the temporarily bonded, ceramic insulating composition may be used with the desired pattern of pseudo-conductors printed or otherwise applied thereon. Thus, structures with conductors on a number of different levels therein may be obtained. The thickness of the ceramic sheets and the pseudo-conductive coatings may vary within a relatively wide range. In general however, the sheets will range in thickness from about 0.05 mm to about 0.25 mm and the pseudo-conductors will range in thickness from about 0.007 mm to about 0.04 mm. It will be seen, therefore, that relatively thin structures may contain many conductors. The width of the pseudo-conductors, and thus the channels for the conductive material, may vary as desired. However, such channels will in substantially all cases have cross-sections that are small relative to the matrix body and generally be normal to the thin direction ofthe body. Because of the relative thinness of the channels relative to the width and length thereof, they can be regarded as planar cavities.  
  As previously indicated. there are a number of possible variations and/or modifications of the procedure set forth in Examples l and 2. For example, instead of screen printing a layer of thermally fugitive material and ceramic or metallic granules on the small bonded ceramic leaves such as employed in Example I, small pieces of a suitable, preformed, thermally decomposible, plastic film of appropriate size and shape containing dispersed metal and/or ceramic granules and a fine combustible material can be laid in proper position between the leaves as the stack ofleaves is built up. Also, the layers of granule-containing, thermally fugitive ma terial may be applied by painting or spraying, ifdesired. As a further alternative procedure, a layer consisting of granule-containing, thermally fugitive material can be applied by suitable means to both sides of a leaf of bonded dielectric or insulating ceramic material, thereby eliminating the need for such layers on the leaves above and below it when stacking the leaves. For the purpose of providing physical protection to thin chips and increasing their resistance to breakage, one or more extra leaves, without any such layers thereon may be included in the formed stack. Although in forming multilayer circuit structures the conductor patterns may be and often are different in each of the several levels therein, it is generally desirable in capacitors produced according to the present invention to have all the internal electrodes of substantially the same size and shape. Such uniformity makes production easier and helps to ensure that the resulting products will have uniform capacitance.  
  It will be understood that the compositions used in forming the dielectric or insulating leaves and the pseudo-conductors used in producing ceramic matrices in accordance with the present invention may vary widely. There have been set out above numerous usable ceramic materials. There are also a great many usable media or vehicles that can be used as heat-fugitive bonding materials for these ceramic materials. Many of these are commercially available or easily prepared by those skilled in the art. Essentially, the purpose of such media and vehicles is to suspend and disperse the particle used to form the leaves and/or layers and provide a temporary, thermally fugitive bond therefor during formation of leaves and/or layers therefrom and the production of green ceramic bodies from a plurality of leaves and layers. In the sintered ceramic bodies, the temporary bond has disappeared. Accordingly, the medium and/or vehicle used is largely a matter of choice or convenience.  
  Since the purpose of the heat-fugitive material in the pseudo-conductive layers is to provide support for and separate the ceramic-containing leaves or layers until the latter are self-supporting so that the desired cavities or channels will be left in the sintered matrices during the heating cycle used to remove thermally fugitive materials, the pseudo-conductors should not adversely affect the temporarily bonded ceramic sheets and should remain until the plasticity of said sheets has decreased to such an extent that the sheets are rigid and do not deform or sag so as to close off the cavities or channels. If the film-forming material used for printing the pseudo-conductors does not meet this requirement, it is necessary to add a particulate, thermally fugitive material which does, enough of such material being added to the pseudo-conductor composition to produce the desired result.  
  In choosing such particulate, thermally fugitive material. however, it is important to avoid those which on combustiton leave appreciable ash that contains elements detrimental to the dielectric or insulating composition used in the ceramic leaves or strata. Generally suitable for the purpose are fine particles of carbon or carbonizable material such, for example, as starch and cellulose. Among the large number of thermally fugitive, film-forming materials suitable for use with such particulate materials in forming the thermally fugitive layers or deposits are ethyl cellulose, acryloid resins, and polyvinyl alcohol. A suitable solvent for the filmforming material is employed in such amount as to give the desired viscosity to the composition.  
  As previously indicated, in some cases the pillarcontaining cavities or channels between the ceramic layers can be produced by the use of preformed, thermally fugitive films, a thin film of suitable resin containing fine particles of carbon. for example, and suitable granules of metal or ceramic being usable. Also usable for the purpose is a thin deposit of a mixture of fine, granular, combustible material such as carbon and suitable granules of metal or ceramic, containing no binder, placed in the desired pattern or design on the ceramic leaves. As used herein, a thermally fugitive or heat-fugitive&#34; material is one which, under the conditions of the processes herein described, volatilizes as such or is wholly converted, with or without oxidation, into products that volatilize.  
  ln forming the pillars, there are a number of procedures that can be employed in addition to those abovedescribed. For example, a two-step printing procedure may be employed wherein a desired grid pattern of heat-fugitive material is deposited, as by screen printing, on leaves of fine dielectric or insulating material bonded by a heat-fugitive bond and then ceramic granules or ceramic material which on sintering will form pillars, dispersed in a heat-fugitive vehicle, are deposited in the vacant areas of said grid pattern. If desired, the procedure can be reversed, the ceramic or metallic granules being first deposited in a grid pattern and the heat-fugitive deposits without such granules being printed subsequently.  
  According to a further modification, the pillars can be formed by a method similar to that just described except that instead of using preformed granules in the vacant areas of said grid pattern there is deposited in said areas a composition containing material which on sintering forms pillars. For instance, there can be employed a conventional platinum or palladium electroding type paste which is laid down in small areas or spots of desired thickness. Still another possible procedure is to deposit, e.g., by screen printing, a layer consisting of heat-fugitive material on each of a plurality of sheets of finely divided ceramic material bonded with a heatfugitive bond, but leaving in said layer one or more spaced-apart areas that form holes through said layer. When a plurality of sheets having such layers are consolidated and fired to remove the thermally fugitive materials and to sinter the ceramic material, the sheets above and/or below the open areas or holes will deform sufficiently to produce ceramic pillars in said holes. After completion of the firing. of course, such pillars stand in the cavity resulting from the disappearance of the thermally fugitive material constituting the layer.  
  FIGS. 9 and illustrate diagrammatically the lastmentioned procedure. FIG. 9 is a fragmentary plan view, greatly enlarged, which shows two sheets 91 of finely divided ceramic material bonded with a suitable thermally fugitive bond between which has been provided a layer 93 consisting of thermally fugitive material. A plurality of spaced holes 95 have been left in the layer 93. FIG. 10 is a further enlarged, fragmentary sec tional view, taken along the line l0l0 of FIG. 9. It shows a portion of the body illustrated in FIG. 9 after the body has been consolidated and fired, for example, by the procedure set forth in Example 1, to remove the thermally fugitive materials and to sinter the ceramic material. The numeral 97 designates a ceramic pillar in the planar space 99, which pillar has been formed by deformation of the ceramic sheets above and below and extrusion of ceramic material therefrom into the hole 95. It will be understood that, although FIGS. 9 and 10 illustrate only two sheets of ceramic and an intervening layer of thermally fugitive material, in forming a monolithic capacitor many such sheets would be superposed with such intervening layers and that similar pillars would be formed in others of the holes during the consolidation and firing of the stack of sheets and layers. The shape of the holes 95 is not critical and any convenient shape can be used. Because of the difficulty encountered in providing very small holes in the layers of thermally fugitive material, the smallest horizontal dimensions of such holes will ordinarily be several times the thickness of the thermally fugitive layer in which they are formed. In any case, however, the smallest horizontal dimension should be at least as great as the thickness of such layer. The number and arrangement of the holes may vary in accordance with the number and placement of the pillars desired. Not only can pillars of the type here described be used in the process of Example I, but also in the processes of Examples 2 and 3. Such pillars can also, in some cases, be employed in forming multilayer circuit structure matrices where the size of the channels for the conductors permits.  
  it should be understood that the function of the pillars is to provide some support in the cavities or channels of fired bodies according to the invention, whereby the compressive strength of the bodies will be increased sufficiently to reduce possibility of breakage in handling. Obviously the number of pillars necessary to give the desired strength will vary with the size and shape of the cavities or channels. To maintain an open structure in the cavities or channels the pillars should not exceed in volume 40 percent of the volume of the cavity or channel and in most cases 10 percent by volume or even less wil be desirable. Indeed, where the cavity or channel is very small only a single pillar may be desired. When the pillars are formed by ceramic or metallic granules in a pseudo-conductive layer they will, of course be randomly located. However, as mentioned above, they should be separated so as to provide no substantial impediment to entry of conductive material into the cavities and therefore the concentration of granules in the pseudo-conductor should be no greater than required to obtain the desired strength. Preferably the pillars are of a diameter approximating the thickness of the pseudo-conductor in which they are held.  
  As stated above, the conductive material introduced into the thin cavities to form internal electrodes in producing capacitors or to form conductors in circuit structures is preferably a metal. This term is meant to include single metals as well as alloys and in some cases can include semimetals or metalloids; e.g., germanium. Suitable metals include lead, tin, zine, aluminum, silver, and copper. The metal employed should have a melting point lower than the maximum temperatures employed in sintering the ceramic of the matrix and should not react deleteriously with ingredients of the matrix.  
  As used herein the term &#34;dense&#34; means that the ma terial so designated absorbs substantially no water when immersed therein; and &#34;thin&#34; is a relative term, which with reference, for example, to the ceramic strata indicates a thickness of the order of 0.5 mm or less. Such strata can, however, for specific purposes, be thicker.  
  The terms upper, lower, top,&#34; bottom,&#34; right,&#34; left, &#34;above,&#34; below, and similar terms of position and/or direction as used herein refer to the illustrations in the accompanying drawings but are used only for convenience in description or reference. Such terms should not be so construed as to imply a necessary positioning of the structures or portions thereof or to limit the scope of this invention.  
  In the foregoing specification and the appended claims, parts and percentages are by weight.  
 I claim:  
  1. A capacitor which comprises: a plurality of superposed dielectric strata and metal layers, said strata being of dense, ceramic material integrally sintered together at a plurality of edge portions thereof to form a monolithic matrix; said metal layers having a structure characteristic of cast metal and a melting point lower than the maximum temperature employed in sintering said ceramic material, and at least one of said metal layers intervening between an adjacent pair of said strata; at least one distinct pillar between said adjacent pair of strata, said pillar extending only between said pair of strata with its top and bottom contacting rela tively small areas of said pair of strata and with its sides being surrounded by said metal layer; and electrical connections to said metal layers.  
  2. A capacitor as defined in claim I wherein said intervening metal layer is thinner than at least one of said adjacent strata.  
  3. A capacitor as defined in claim 1 wherein there are a plurality of said intervening metal layers, said intervening layers being separated and each being disposed between two of said superposed dielectric strata with alternate ones of said metal layers being electrically joined together.  
  4. A capacitor as defined in claim 3 wherein the areas of said intervening metal layers are substantially the same.  
  5. A capacitor as defined in claim 3 wherein at least some of said intervening metal layers are thinner than at least one of said strata adjacent thereto.  
  6. A capacitor as defined in claim 3 wherein at least two of said intervening metal layers are exposed on different faces thereof.  
  7. A capacitor which comprises: a plurality of superposed dielectric strata and metal layers, said strata being of dense, sintered, ceramic material and said metal layers alternating with said strata, at least one of said metal layers consisting principally of metal having a melting point lower than the maximum temperature employed in sintering said ceramic material and at least one pillar, formed of a high melting point metal, of such size as to substantially extend through said layer only, said strata being integrally joined by sintering at a plurality of edge portions thereof to form a monolithic ma trix, and electrical connections other than said pillar to said metal layers.  
  8. A capacitor as defined in claim 7 wherein said pillar is fonned of ceramic material.  
  9. A capacitor as defined in claim 7 wherein said pillar is fonned of a high melting point metal.  
  10. A capacitor as defined in claim 3 wherein at least one of said pillars is provided in each of said intervening metal layers.  
  II. A capacitor as defined in claim 10 wherein said pillars are formed of ceramic material.  
 12. A capacitor as defined in claim 10 wherein said pillars are formed of a high melting point metal.  
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