Liquid-crystal display device having slits formed between terminals or along conductors to remove short circuits
BACKGROUND OF THE INVENTION 
     The present invention relates to a liquid-crystal display device and, more particularly, to an active matrix array substrate having thereon a plurality of switching elements arranged in a matrix and a plurality of wirings connecting the elements. 
     An active matrix liquid-crystal panel having a switching element array formed on a large-size substrate made of a glass is put into practical use, and thus as a thin, light-weight display device, may replace conventional CRTs. The active matrix-array plate having thereon a plurality of active switching elements arranged as a matrix and a plurality of wiring connecting them to one another is fabricated by repeating the depositing and patterning of a semiconductor layer, an insulating film and a conductive film on the substrate. 
     Thin-film transistors (TFTs) are used as active switching elements and arranged in a matrix consisting of rows and columns. The TFTs arranged in the same row have respective gates connected in common to a gate wiring which is in turn connected to gate terminal receiving a gate drive signal. On the other hand, the drains of the TFTs arranged in the same column are connected in common to a drain wiring which is in turn connected to a drain terminal receiving drain drive signals. The source of each of the TFTs is connected to a transparent electrode constituting a pixel. 
     The gate wirings are arranged in rows with a predetermined pitch according to the size of each pixel, and the drain wirings are arranged in columns similarly. On the other hand, in view of the connection to a driving IC for applying the respective drive signals to the gate and drain terminals, the gate and drain terminals are arranged with a pitch that is considerably smaller than the pitch of the gate or drain wirings. 
     The gate and drain wirings and the gate and drain terminals are formed by forming a conductive film on a glass plate and then selective removing the conductive film by means of the so-called photoresist process. In the photoresist process, however, if dust contamination occurs, a portion or portions of the conductive film would undesirably remain, although such portions should have been removed. The portions of the conductive film thus left are so small that no substantial short-circuit occurs between the gate wirings or the drain wiring in the matrix array. As described above, however, the pitches between gate terminals and between drain terminals are so small as to allow such portions of the conductive film to produce short-circuits between these terminals. There is further a tendency to produce short-circuits between adjacent ones of partial wirings for connecting the respective terminals to the gate and drain wirings. 
     SUMMARY OF THE INVENTION 
     It is therefore an object of the present invention to provide a liquid-crystal display free from short-circuits between terminals and/or partial wirings. 
     Another object of the present invention is to provide a process of manufacturing the liquid-crystal display free from short-circuits between terminals and/or partial wirings without adding any step to a string of manufacturing steps. 
     A liquid-crystal display according to one aspect of the present invention comprises, on an insulating substrate, a plurality of first (gate) wirings arranged with a first pitch in a plurality of rows, a plurality of second (drain) wirings arranged with a second pitch in a plurality of columns, TFTs disposed at the respective intersections of the first and second wirings, a plurality of terminals arranged with a smaller pitch than the first and second pitches in line in a column direction, a plurality of partial wirings connecting the terminals to the first wirings, respectively, a first insulating layer covering the first wirings, a part of each of the plurality of terminals and the partial wirings, and a plurality of slits selectively formed in the first insulating film between adjacent ones of the terminals and between adjacent ones of the partial wirings, each of the slits reaching the substrate. 
     According to another aspect of the present invention, after forming first wirings, terminals and partial wirings, on an insulating plate, an insulating film is formed over the entire surface, and the insulating film is selectively removed to expose respective parts of the terminals and simultaneously to form slits between adjacent terminals and between adjacent partial wirings, followed by selective-etching to form second wiring. The slits are subjected to an etchant in the selective-etching for forming the second wirings. 
     Thus, the undesired conductive portion forming a short-circuit between adjacent terminals, between adjacent partial wirings, and/or between the terminal and the partial wiring is cut or broken by the slit. 
    
    
     BRIEF DESCRIPTION OF THE DRAWINGS 
     The above and other objects, advantages and features of the present invention will be more apparent from the following description taken in conjunction with the accompanying drawings, in which: 
     FIG. 1 is a plan view of an active matrix array substrate illustrative of an embodiment of the present invention; 
     FIG. 2 is a cross-sectional view taken along line A--A&#39; of FIG. 1; 
     FIG. 3 is a plan view for illustrating a processing step according to an embodiment of the present invention; 
     FIG. 4 is a plan view for illustrating another processing step of the embodiment, 
     FIG. 5 is a plan view for illustrating a further processing step of the embodiment, 
     FIG. 6 is a cross-sectional view taken along line B--B&#39; of FIG. 5; 
     FIG. 7 is a plan view for illustrating a still further processing step of the embodiment; 
     FIG. 8 is a cross-sectional view taken along line C--C&#39; of FIG. 7; 
     FIG. 9 is a plan view for illustrating a still further processing step of the embodiment; 
     FIG. 10 is a cross-sectional view taken along line D--D&#39; of FIG. 9; 
     FIG. 11 is a plan view for illustrating an alternative example of one TFT area on the active matrix array plate according to the present invention; 
     FIG. 12 is a plan view for illustrating another alternative example of one TFT area; 
     FIG. 13 is a plan view for illustrating a further alternative example of one TFT area; 
     FIG. 14 is a plan view for illustrating a still further alternative example of one TFT area; 
     FIG. 15 is a plan view for illustrating a still further alternative example of one TFT area; and 
     FIG. 16 is a cross-sectional view taken along line E-E&#39; of FIG. 15. 
    
    
     DETAILED DESCRIPTION OF THE INVENTION 
     Referring to FIG. 1, there is shown an active matrix array substrate for a liquid-crystal display according to an embodiment of the present invention, this substrate indicating a state immediately before the so-called oriented film is formed. 
     Formed on a glass plate 1 is an array of TFTs Q which are arranged in a matrix of N rows and M columns. Each TFT Q is constructed of a gate G, a semiconductor layer SS formed above gate G with a gate insulating film (not shown) sandwiched between them, a drain D and a source S formed at each edge of semiconductor layer SS. Each source S is connected to a transparent electrode PS which together with another electrode (not shown), constitutes a pixel. The semiconductor layer SS is made of amorphous silicon. 
     The gates G of TFTs Q arrange in the same row are connected in common to a gate wiring or bus GC. There are provided N gate wirings or buses GC1 to GCn arranged in rows which a predetermined pitch, accordingly. Likewise, to drains D of TFTs Q arranged in the same column are connected in common to a drain wiring or bus DC. There are thus provided M drain wirings or buses DCl to DCn arranged in columns with a specified pitch. These pitches depend on the size of the pixel, i.e. the transparent electrode PS. 
     The gate buses GC are connected through partial wirings GC to gate terminals TG, respectively. As shown, gate terminals TGl to TGn are arranged in line in column with a very small pitch because an IC (not shown) supplying gate drive signals to gate terminals TG is connected in general by means of carrier tape. Similarly, the drain buses DC are connected respectively through partial wirings PD to drain terminals TDl to TDn which are arranged in line in row also with a very small pitch. In this embodiment, although described later in detail, the drain terminals TD and the partial wirings PD are formed simultaneously with the gate terminals TG and the partial wirings PG and before forming the drain buses DC, and hence the drain buses DC are connected at contacts CC to the corresponding one of drain-bus connections PD, respectively. 
     This matrix substrate further includes, in accordance with the present invention, a plurality of slits SG each formed between adjacent gate terminals TG and between adjacent partial wirings PG and slits SD each formed between adjacent drain terminals TD and between adjacent partial wirings PD. With these slits SG and SD, short-circuit conductive-portions indicated as GSD and DSD are cut or broken. Thus, an electrical isolation is carried out and secured between the gate wirings in different rows and between the drain wirings in different columns. 
     Turning to FIG. 2 which is a cross-sectional view along line A-A&#39; of FIG. 1, the partial wirings PG are selectively formed on the glass substrate 1. This selective formation is performed by forming a conductive film over the entire surface of the substrate 1, followed by patterning using a photoresist. At this time, since the contamination caused by dust that happens to be contained during the photoresist process, the short-circuit-conductive-portion GSD is formed between the partial wirings PG2 and PG3. A gate insulating film 10 is thereafter formed to cover the terminals TG and TD, partial wirings PG and PD and the gate buses GC and then subjected to the selective etching to make holes through which parts of terminals TG, TD are exposed. Utilizing this selective etching, the slits SG are simultaneously formed, through which parts of the short-circuit-conductive portions SG and DSD are exposed. Each of the slits GSD and SD reaches the substrate 1 if there is no short-circuit-conductive portion thereunder. Subsequently, the drain buses DC are formed by selectively removing another conductive layer which has been formed over the entire layer. By this selective-etching, the conductive-portion GSD and DSD are cut because an etchant for the conductive layer also etches them. An insulating film 20 is formed as passivation film to fill slits SG and SD. an oriented film (not shown) is then formed. 
     Next, description will be made below on a method for obtaining the above active matrix array with reference to FIGS. 3 to 10 each showing a part of the substrate of FIG. 1. 
     As shown in FIG. 3, on the glass plate 1 conductive thin conductive film of chromium (Cr) is formed and patterned by the selective-etching to form the gate buses GC, the gate terminals TG, the partial wirings PG, the drain terminals TD, the partial wirings PD and the contacts areas CC. Each of the gate buses GC has projections each constituting the gate G of the TFT. As described hereinbefore, by the defect in patterning process, the short-circuit-conductive-portion GSD is formed to short-circuit the partial wirings PG2 and PG3. 
     Referring to FIG. 4, after forming the gate insulating film (not shown in this drawing) over the entire surface, an amorphous silicon (a-Si) film is formed over the entire surface of the gate insulating film and then patterned to form a-Si films S of the TFTs. 
     Thereafter, as shown in FIG. 5, the gate insulating film is selectively etched to make contact holes TGC for the gate terminals TG, contact holes TDC for the drain terminals TD and contact holes CCC for the contact terminals CC as well as the slits SG and SD. The slit SG thus exposes a part of the conductive portion GSD and a part of the glass plate 1, as apparent from FIG. 6 which is a cross-sectional view along long B-B&#39; of FIG. 5. 
     Subsequently, a Cr conductive film is formed over the entire surface and then patterned to form the drain wirings DC and electrode conductive layers 15 and 16 which is in contact with the terminals TG and TD through the contact holes TGC and TDC, as shown in FIG. 7. The drain buses DC are connected through the contact holes CCC to the contact terminals CC, respectively. Each of the drain buses DC has projections each connected to one end of the a-Si film S as a drain D of a TFT. Further, the sources S of the TFTs are simultaneously formed, each of which is connected to the other end of the a-Si film S. By this selective etch, the conductive-portion GSD exposed through the slit SG is cut, as shown in FIG. 8 which is a cross-sectional view along line C-C&#39; of FIG. 7. 
     Subsequently, a transparent conductive film is formed over the entire surface, followed by the selective-etching to form one electrode PS of each pixel connected to the source S. Simultaneously, transparent conductive layers 17 and 18 are formed in contact with the electrode conductive layers 15 and 16, as shown in FIG. 9. A passivation film 20 is thereafter formed over the whole surface, and contact holes for terminals are then opened (See FIG. 10 which is a cross-sectional view along line D-D&#39; of FIG. 9). 
     Subsequently, an oriented film (not shown) is screen-printed only on the matrix array, subjected to the so-called treatment, and is laid on so as to oppose the other plate on which a common electrode is formed. Then the liquid crystal is sealed to produce a liquid crystal display device. 
     The process according to the present invention described above permits the cutting of conductive-film shorts in a processing step needed to fabricate the active matrix plate. Thus, an additional processing step is not required. 
     As described above, in the TFT matrix array area, connections may be arranged at so large a pitch that slit cutting is unnecessary. On the other hand, the more the number of pixels, the smaller the pitch becomes, and hence it shorts may be produced in the matrix array area as well. 
     As illustrated in FIG. 10 through FIG. 14, therefore, slit or slits PSS may be provided along a side or sides of the transparent electrode S of each TFT or pixel. The slits PSS together with slits SG, SD are formed in the same processing step. 
     The slits PSS can cut the shorts between gate-bus connections GC but cannot cut the shorts between drain-bus connections DC. As shown in FIG. 15, therefore, slits PDS for cutting drain-bus connections are cut every TFT. 
     AS shown in FIG. 16 which is a cross-sectional view along line E-E&#39; of FIG. 15, slits PDS are formed at the same time in the process step (FIG. 10) of selectively etching a passivation film 20. Further, the process proceeds as follows: A photoresist film 30 is formed over the entire surface, holes are opened along slits PDS, and etching using an etchant for Cr is applied to cut shorts between drain-bus connections DC. FIGS. 11 through 14 and FIG. 15 can be applied to each TFT. 
     As described above, according to the invention, conductive-film shorts, even if left due to defective patterning, the conductive film are cut, and thus an active matrix array plate which secures insulation between buses and between connections on it is provided. Further a process of manufacturing the same plate is provided which permits the insulation without any extra processing step.