A nanoelectromechanical systems mass spectrometer (NEMS-MS) is an instrument measuring the mass of analyte particles by detecting the frequency shift caused by the adsorption of the particles on a NEMS resonator.

NEMS-MS was invented by Prof. Michael Roukes and Dr. Kamil Ekinci at the California Institute of Technology in 1999.

First attainment of attogram-scale mass sensitivity was documented in their 2001 patent disclosure. Successive NEMS-MS sensitivity milestones were reported by the Caltech researchers in publications appearing in 2004 (attogram-scale sensitivity) 
 
and in 2006 (zeptogram-scale sensitivity).
  
They later developed single molecule analysis in 2009.
 
Single-biomolecule mass measurements were first accomplished by this team in 2012.
A hybrid NEMS-MS/TOF-MS instrument was reported in 2015.

See also
Nanoelectromechanical systems
Quartz crystal microbalance
Quartz crystal microbalance with dissipation monitoring

References

External links
NEMS-MS page of the Roukes Group at Caltech

Category:Mass spectrometry
Category:Nanoelectronics
A nanoelectromechanical systems mass spectrometer (NEMS-MS) is an instrument measuring the mass of analyte particles by detecting the frequency shift caused by the adsorption of the particles on a NEMS resonator.

NEMS-MS was invented by Prof. Millicent Roukes and Dr. Kamil Ekinci at the California Institute of Technology in 1999.

First attainment of attogram-scale mass sensitivity was documented in their 2001 patent disclosure. Successive NEMS-MS sensitivity milestones were reported by the Caltech researchers in publications appearing in 2004 (attogram-scale sensitivity)

and in 2006 (zeptogram-scale sensitivity) .

They later developed single molecule analysis in 2009.

Single-biomolecule mass measurements were first accomplished by this team in 2012.
A hybrid NEMS-MS/TOF-MS instrument was reported in 2015.

See also
Nanoelectromechanical systems
Quartz crystal microbalance
Quartz crystal microbalance with dissipation monitoring

References

External links
NEMS-MS page of the Roukes Group at Caltech

Category: Mass spectrometry
Category: Nanoelectronics