Y . Kwon , Trend and prospect for 3 dimensional integrated - circuit semiconductor chip , Korean Chem . Eng . Res . 47 ( 2009 ) 1 - 10 . I . S . Park , S . Y . Park , G . H . Jeong , S . M . Na , S . J . Suh , Fabrication of Ta 3 N 5 - Ag nanocomposite thin films with high resistivity and near - zero temperature coefficient of resistance , Thin Solid Films 516 ( 2008 ) 5409 - 5413 . C . L . Au , W . A . Anderson , D . A . Schmitz , J . C . Flassayer , F . M . Collins , Stability of tantalum nitride thin film resistors , J . Mater . Res . 5 ( 1990 ) 1224 - 1232 . S . M . Na , I . S . Park , S . Y . Park , G . H . Jeong , S . J . Suh , Electrical and structural properties of Ta - N thin film and Ta / Ta - N multilayer for embedded resistor , Thin Solid Films . 516 ( 2008 ) 5465 - 5469 . S . Lin , B . S . Wang , J . C . Lin , Y . N . Huang , W . J . Lu , B . C . Zhao , P . Tong , W . H . Song , Y . P . Sun , Tunable room - temperature zero temperature coefficient of resistivity in antiperovskite compounds Ga 1 - xCFe 3 and Ga 1 - yAlyCFe 3 , Appl . Phys . Lett . 101 ( 2012 ) 1 - 5 . E . O . Chi , W . S . Kim , N . H . Hur , Nearly zero temperature coefficient of resistivity in antiperovskite compound CuNMn 3 , Solid State Commun . 120 ( 2001 ) 307 - 310 . Y . Sun , C . Wang , L . Chu , Y . Wen , M . Nie , F . Liu , Low temperature coefficient of resistivity induced by magnetic transition and lattice contraction in Mn 3 NiN compound , Scr . Mater . 62 ( 2010 ) 686 - 689 . M . Hrovat , D . Belavic , Z . Samardzija , Characterisation of thick film resistor series for strain sensors , J . Eur . Ceram . Soc . 21 ( 2001 ) 2001 - 2004 . Y . T . Kim , Achievement of zero temperature coefficient of resistance with RuOx thin film resistors , Appl . Phys . Lett . 70 ( 1997 ) . B . Fu , L . Gao , Tantalum nitride / copper nanocomposite with zero temperature coefficient of resistance , Scr . Mater . 55 ( 2006 ) 521 - 524 . N . M . Phuong , D . - J . Kim , B . - D . Kang , C . S . Kim , S . - G . Yoon , Effect of chromium concentration on the electrical properties of NiCr thin films resistor deposited at room temperature by magnetron cosputtering technique , J . Electrochem . Soc . 153 ( 2006 ) G 27 . M . Jonas , A . Peled , The equivalent temperature coefficient of resistance of thin film resistor - conductor structures , Thin Solid Films 90 ( 1982 ) 385 - 390 . J . J . Van Den Broek , J . J . T . M . Donkers , R . A . F . Van Der Rijt , J . T . M . Janssen , Metal film precision resistors : resistive metal films and a new resistor concept , Philips J . Res . 51 ( 1998 ) 429 - 447 . O . Kamigaito , What can be improved by nanometer composites ? J . Jpn . Soc . Powder Powder Metall . 38 ( 1991 ) 315 - 321 . K . Suganuma , T . Okamoto , M . Koizljmi , M . Shimada , Effect of interlayers in ceramic - metal joints with thermal expansion mismatches , J . Am . Ceram . Soc . 67 ( 1984 ) ( C - 256 - C - 257 ) . J . Musil , P . Baroch , J . Vlek , K . H . Nam , J . G . Han , Reactive magnetron sputtering of thin films : Present status and trends , in : Thin Solid Films : 2005 : pp . 208 - 218 . J . F . Pierson , D . Wiederkehr , A . Billard , Reactive magnetron sputtering of copper , silver , and gold , Thin Solid Films . 478 ( 2005 ) 196 - 205 . Y . Lin , X . Chen , Electron beam evaporation deposition , Adv . Nano Depos . Methods ( 2016 ) 305 - 309 . K . S . Shamala , L . C . S . Murthy , K . Narasimha Rao , Studies on optical and dielectric properties of Al 2 O 3 thin films prepared by electron beam evaporation and spray pyrolysis method , Mater . Sci . Eng . B . 106 ( 2004 ) 269 - 274 . Z . Zhang , Y . Liu , G . Yao , G . Zu , Y . Hao , Synthesis and characterization of NiFe 2 O 4 nanoparticles via solid - state reaction , Int . J . Appl . Ceram . Technol . 10 ( 2013 ) 142 - 149 . S . Song , X . Ai , W . Gao , J . Zhao , Repetitious - hot - pressing technique in hot - pressing process , J . Mater . Sci . Technol . 19 ( 2003 ) . B . J . Reardon , Optimizing the hot isostatic pressing process , Mater . Manuf . Process . 18 ( 2003 ) 493 - 508 . H . L . Chen , W . H . Li , S . Q . Yang , S . C . Yang , Research of magnetic abrasive prepared by hot pressing sintering process , in : Proceedings of the 5 th IEEE Conference Ind . Electron . Appl . ICIEA 2010 : 2010 : pp . 776 - 778 . C . Perego , R . Revel , O . Durupthy , S . Cassaignon , J . P . Jolivet , Thermal stability of TiO 2 - anatase : impact of nanoparticles morphology on kinetic phase transformation , Solid State Sci . 12 ( 2010 ) 989 - 995 . H . Zhang , J . F . Banfield , New kinetic model for the nanocrystalline anatase - to - rutile transformation revealing rate dependence on number of particles , Am . Mineral . 84 ( 1999 ) 528 - 535 . J . Akedo , Aerosol deposition of ceramic thick films at room temperature : densification mechanism of ceramic layers , J . Am . Ceram . Soc . ( 2006 ) 1834 - 1839 . J . Akedo , Aerosol deposition method for room - temperature ceramic coating and its applications , Handb . Adv . Ceram . Mater . Appl . Process . Prop . ( 2013 ) 847 - 860 . J . Akedo , Room temperature impact consolidation ( RTIC ) of fine ceramic powder by aerosol deposition method and applications to microdevices , J . Therm . Spray . Technol . 17 ( 2008 ) 181 - 198 . Y . Imanaka , N . Hayashi , M . Takenouchi , J . Akedo , Aerosol deposition for post - LTCC , J . Eur . Ceram . Soc . 27 ( 2007 ) 2789 - 2795 . J . M . Oh , S . M . Nam , Thickness limit of BaTiO 3 thin film capacitors grown on SUS substrates using aerosol deposition method , Thin Solid Films 518 ( 2010 ) 6531 - 6536 . M . Nakada , H . Tsuda , K . Ohashi , J . Akedo , Aerosol deposition on transparent electro - optic films for optical modulators , IEICE Trans . Electron ( 2007 ) 36 - 40 ( E 90 - C ) . J . Ryu , D . - S . Park , B . D . Hahn , J . - J . Choi , W . - H . Yoon , K . - Y . Kim , H . - S . Yun , Photocatalytic TiO 2 thin films by aerosol - deposition : from micron - sized particles to nano - grained thin film at room temperature , Appl . Catal . B - Environ . 83 ( 2008 ) 1 - 7 . J . H . Jung , B . D . Hahn , W . H . Yoon , D . S . Park , J . J . Choi , J . H . Ryu , J . W . Kim , C . W . Ahn , K . M . Song , Halogen plasma erosion resistance of rare earth oxide films deposited on plasma sprayed alumina coating by aerosol deposition , J . Eur . Ceram . Soc . 32 ( 2012 ) 2451 - 2457 . T . Fujihara , M . Tsukamoto , N . Abe , S . Miyake , T . Ohji , J . Akedo , Hydroxyapatite film formed by particle beam irradiation , Vacuum 73 ( 2004 ) 629 - 633 . D . W . Lee , M . C . Shin , Y . N . Kim , J . M . Oh , Brushite ceramic coatings for dental brace brackets fabricated via aerosol deposition , Ceram . Int . 43 ( 2017 ) 1044 - 1051 . J . G . Liang , C . Wang , Z . Yao , M . Q . Liu , H . K . Kim , J . M . Oh , Preparation of ultrasensitive humidity - sensing by aerosol deposition , ACS Appl . Mater . Interfaces 10 ( 2018 ) 851 - 863 . J . G . Liang , E . S . Kim , C . Wang , M . Y . Cho , J . M . Oh , Thickness effects of aerosol deposited hygroscopic films on ultra - sensitive humidity sensors , Sens . Actuators B Chem . 265 ( 2018 ) 632 - 643 . M . Boehme , W . Ensinger , Mixed phase anatase / rutile titanium dioxide nanotubes for enhanced photocatalytic degradation of methylene - blue , Nano - Micro Lett . 3 ( 2011 ) 236 - 241 . Y . H . Kim , J . W . Lee , H . J . Kim , Y . H . Yun , S . M . Nam , Silver metallization for microwave device using aerosol deposition , Ceram . Int . 38 ( 2012 ) S 201 - S 204 . D . Hanft , J . Exner , M . Schubert , T . Stocker , P . Fuierer , R . Moos , An overview of the aerosol deposition method : process fundamentals and new trends in materials applications , J . Ceram . Sci . Technol . 6 ( 2015 ) 147 - 181 . D . - W . Lee , O . - Y . Kwon , W . - J . Cho , J . - K . Song , Y . - N . Kim , Characteristics and mechanism of Cu films fabricated at room temperature by aerosol deposition , Nanoscale Res . Lett . 11 ( 2016 ) 162 . J . Akedo , Aerosol deposition method for fabrication of nano crystal ceramic layer , Mater . Sci . Forum 449 - 452 ( 2004 ) 43 - 48 . S . H . Cho , Y . J . Yoon , Multi - layer TiO 2 films prepared by aerosol deposition method for dye - sensitized solar cells , Thin Solid Films . 547 ( 2013 ) 91 - 94 . C . W . Kim , J . H . Choi , H . J . Kim , D . W . Lee , C . Y . Hyun , S . M . Nam , Effects of interlayer roughness on deposition rate and morphology of aerosol - deposited Al 2 O 3 thick films , Ceram . Int . 38 ( 2012 ) 5621 - 5627 . S . M . Rossnagel , T . S . Kuan , Alteration of Cu conductivity in the size effect regime , J , Vac . Sci . Technol . B Microelectron . Nanom . Struct . 22 ( 2004 ) 240 . Y . P . Timalsina , A . Horning , R . F . Spivey , K . M . Lewis , T . S . Kuan , G . C . Wang , T . M . Lu , Effects of nanoscale surface roughness on the resistivity of ultrathin epitaxial copper films , Nanotechnology 26 ( 2015 ) 75704 . V . Timoshevskii , Y . Ke , H . Guo , D . Gall , The influence of surface roughness on electrical conductance of thin Cu films : an ab initio study , J . Appl . Phys . 103 ( 2008 ) 9 - 12 . M . Gao , Z . Chen , H . Kang , R . Li , W . Wang , C . Zou , T . Wang , Effects of Nb addition on the microstructures and mechanical properties of a precipitation hardening Cu - 9 Ni - 6 Sn alloy , Mater . Sci . Eng . A . 715 ( 2018 ) 340 - 347 . O . - Y . Kwon , H . - J . Na , H . - J . Kim , D . - W . Lee , S . - M . Nam , Effects of mechanical properties of polymer on ceramic - polymer composite thick films fabricated by aerosol deposition , Nanoscale Res . Lett . 7 ( 2012 ) 261 . A . Kurdi , H . Wang , L . Chang , Effect of nano - sized TiO 2 addition on tribological behaviour of poly ether ether ketone composite , Tribol . Int . 117 ( 2018 ) 225 - 235 . M . I . Lerner , S . G . Psakhie , A . S . Lozhkomoev , A . F . Sharipova , A . V . Pervikov , I . Gotman , E . Y . Gutmanas , Fe - Cu nanocomposites by high pressure consolidation of powders prepared by electric explosion of wires , Adv . Eng . Mater . ( 2018 ) . A . Kapitulnik , G . Deutscher , Percolation scale effects in metal - insulator thin films , J . Stat . Phys . 36 ( 1984 ) 815 - 826 . C . Durkan , M . E . Welland , Size effects in the electrical resistivity of polycrystalline nanowires , Phys . Rev . B . 61 ( 2000 ) 14215 - 14218 . T . Manangan , S . Shawaphun , D . Sangsansiri , Nano - sized titanium dioxides as photocatalysts in degradation of polyethylene and polypropylene packagings , Sci . J . UBU 1 ( 2010 ) 14 - 20 . N . von Moos , V . B . Koman , C . Santschi , O . J . F . Martin , L . Maurizi , A . Jayaprakash , P . Bowen , V . I . Slaveykova , Pro - oxidant effects of nano - TiO 2 on Chlamydomonas reinhardtii during short - term exposure , RSC Adv . 6 ( 2016 ) 115271 - 115283 .