ELECTRICAL CONNECTION DEVICE
FIG2 is a schematic cross-sectional view illustrating the configuration of a guide pin and guide holes in the electric connection device according to the embodiment of the present invention  FIG1 is a schematic view illustrating the configuration of an electric connection device according to an embodiment of the present invention
The probe head 12 is provided with guide pins 14 for alignment of the probe head 12 and electrode substrate 13. The electrode substrate 13 includes a guide hole group composed of plural guide holes corresponding to each guide pin 14. In the electric connection device 10, each guide pin 14 corresponds to a guide hole group including a reference guide hole 150, which is located at a design reference position, and spare guide holes 151 and 152, which are located in the vicinity of the reference guide hole 150, as illustrated in FIG2. FIG2 illustrates a state where the guide pin 14 is fitted in the reference guide hole 150.  As illustrated in FIG1, an electric connection device 10 according to an embodiment of the present invention includes: a probe head 12, which holds probes 11; and an electrode substrate 13, on which electrode pads 131 are provided. FIG1 illustrates the probes 11 through the side surface of the probe head 12. The probe head 12 is laid on and attached to the electrode substrate 13, and proximal ends of the probes 11 are electrically connected to the respective electrode pads 131. As illustrated in FIG1, the proximal ends of the probes 11 protruding from the upper surface of the probe head 12, that faces the electrode substrate 13, are connected to the respective electrode pads 131, which are provided on the lower surface of the electrode substrate 13, that faces the probe head 12. The electric connection device 10 illustrated in FIG1 is a vertically-moving probe card, and the distal ends of the probes 11 exposed from the lower surface of the probe head 12 are brought into contact with inspection pads (not illustrated) of an inspection object 20 that is placed under the electric connection device 10. In the state illustrated in FIG1, the probes 11 are not in contact with the inspection object 20. When a chuck 30 with the inspection object 20 placed thereon is elevated, the distal ends of the probes 11 come into contact with the inspection object 20, for example. As described above, the electric connection device 10 according to the embodiment of the present invention is equipped with a guide hole group, that is composed of the reference guide hole 150 and spare guide holes provided around the same. The guide holes to be fitted to the guide pins 14 can be selected from the spare guide holes in addition to the reference guide holes 150 so that the probes 11 can come into proper contact with the respective electrode pads 131 of the electrode substrate 13. According to the electric connection device 10 illustrated in FIG1, it is possible to easily resolve misalignment of the probes 11 and electrode pads 131.
schematic cross-sectional view, schematic view
30
chuck
14
guide pins guide pin
151
spare guide holes
133
connection pads
20
inspection object
152
spare guide holes
131
electrode pads electrode pad
132
through respective electrode interconnections
150
reference guide hole reference guide holes
13
electrode substrate
['1. An electric connection device, comprising: a probe; a probe head that holds the probe; and an electrode substrate on which an electrode pad to be connected to a proximal end of the probe is provided, wherein the probe head is provided with a guide pin for alignment of the probe head and the electrode substrate, and the electrode substrate is provided with a guide hole group composed of a plurality of guide holes corresponding to the guide pin.', '2. The electric connection device according to claim 1, wherein the probe head is provided with a plurality of the guide pins, the guide hole group is provided in the electrode substrate corresponding to each of the guide pins, the guide hole group is composed of a reference guide hole located at a design reference position and a spare guide hole located in the vicinity the reference guide hole.', '4. The electric connection device according to claim 2, wherein a plurality of the spare guide holes are located around the reference guide hole.']