ELECTRICAL CONNECTION DEVICE
FIG8 is a schematic plan view illustrating another arrangement example of a guide hole group in the electric connection device according to the modification of the embodiment of the present invention 
Alternatively, as illustrated in FIG8, the spare guide holes (reference numerals thereof are not illustrated) may be arranged concentrically around the reference guide hole 150. The spare guide holes may be arranged around the reference guide hole 150 in multiple layers.
schematic plan view
150
reference guide hole reference guide holes
13
electrode substrate
['1. An electric connection device, comprising: a probe; a probe head that holds the probe; and an electrode substrate on which an electrode pad to be connected to a proximal end of the probe is provided, wherein the probe head is provided with a guide pin for alignment of the probe head and the electrode substrate, and the electrode substrate is provided with a guide hole group composed of a plurality of guide holes corresponding to the guide pin.', '2. The electric connection device according to claim 1, wherein the probe head is provided with a plurality of the guide pins, the guide hole group is provided in the electrode substrate corresponding to each of the guide pins, the guide hole group is composed of a reference guide hole located at a design reference position and a spare guide hole located in the vicinity the reference guide hole.']