PYROELECTRIC SENSOR
FIG1 is a schematic cross sectional view of a pyroelectric sensor of a first embodiment
FIG1 is a schematic cross sectional view of a pyroelectric sensor 1 of a first embodiment of the invention. For the ease of recognition, a film thickness of each layer or a ratio thereof is suitably changed and does not reflect actual film thickness or ratio (the same applies to the following drawings).
schematic cross-sectional view
24
upper electrode
30
optical filter
11
Si substrate
22
lower electrode lower electrodes
18
heat absorption layer
3
pyroelectric sensor
2
Example
20
laminated portion
25
portion portions
10
Si substrate
23
piezoelectric film
['1. A pyroelectric sensor comprising: an Si substrate; a laminated portion in which a heat absorption layer formed of an inorganic material, a lower electrode, a piezoelectric film, and an upper electrode are laminated in this order from one surface side of the Si substrate on the one surface; and an optical filter that is provided at a position of the other surface of the Si substrate corresponding to the laminated portion and selectively transmits an infrared ray, wherein an infrared ray incident to the laminated portion from the optical filter side through the Si substrate is sensed.']