SHAPE MEASURING PROBE
FIG8 is a sectional view of a measuring probe according to Second exemplary embodiment
Next, a second exemplary embodiment of the disclosure will be described with reference to FIG8. Since measuring probe 5 of the second exemplary embodiment has substantially the same configuration as that of measuring probe 5 of the first exemplary embodiment, the difference will be mainly described.
sectional view
8
Z reference mirror
24
air bearing
28
groove
22
stylus
29
elastic material
25
27
provided with air coupling
26
housing
21
movable member
23
reflection surface
['1. A shape measuring probe (5) comprising: a rod-like movable member (21) having a reflection surface (23) for reflecting laser light at an upper end; a stylus (22) that is provided at a lower end of the movable member and comes into contact with an object; an air bearing (24) that has a shaft hole (24a), allows the movable member to penetrate the shaft hole, and supports the movable member to be movable in a first direction; a plate -like elastic material (29) that adheres to the upper end portion of the movable member (21) and is placed on a first supporter (30a) and a second supporter (30b),  characterized in that  it further comprises: a first magnet (31a) and a second magnet (31b) that are fixed to an upper end portion of the air bearing, the first magnet and the second magnet being substantially symmetrical with respect to a shaft center of the movable member, and wherein the spherical first supporter (30a) is a magnetic body connected to the first magnet with a magnetic force so as to be movable on the first magnet; the spherical second supporter (30b) is a magnetic body connected to the second magnet with a magnetic force so as to be movable on the second magnet.']