THERMAL INTERFACE MATERIAL SHEET AND METHOD OF MANUFACTURING A THERMAL INTERFACE MATERIAL SHEET
FIG6 shows a schematic view of a TIM sheet with PVD grown thin film sensor   FIG5 shows a schematic construction of a TIM sheet with PVD grown thin film sensor
FIG6 shows a different view of a simplified structure of the invention with the sensor and its electrical connectors visible. The structure shows a planar view of a carbon based material layer 61, a sensor 62 and the electrical conductors of the sensor.  FIG5 shows another view of an embodiment of the present invention for better understanding the invention. A graphite sheet 51 is provided and an electrically insulating layer 52 is set on top of the graphite sheet 51. The electrically insulating layer is not covering the graphite sheet 51 completely as the purpose of the insulating layer is to be a base for the PVD grown sensor 53. A second electrically insulating layer 54 is placed on top of the sensor 53, and a wear resistant layer 55 is provided on top of the second insulating layer. As can be seen from FIG5, the graphite sheet or layer 51 has a surface area that is larger than the surface areas of the other layers. The other layers are provided in order to enable manufacturing of the sensor and to protect the sensor, and therefore the layers are dimensioned such that the surface area of the layers is covering the sensor. It should be noted, that base plate of the component or module may be formed of electrically insulating material, such as ceramic material. When the base plate is electrically insulating, the insulating layer on top of the graphite sheet is not required. Further, the surface of the cooling device may also be coated with an electrically insulating material, which also reduces the need of insulating layers in the thermal interface material sheet. The coating may be a ceramic coating or anodised coating when the cooling device is of aluminium.
schematic, schematic view
51
graphite sheet
6
andFigure
52
electrically insulating layer
61
carbon based material layer
53
sensor
62
sensor
55
wear resistant layer
['1. A thermal interface material sheet to be disposed between a heat generating electrical component and a cooling device, the thermal interface material sheet comprising at least one thin film sensor and electrical conductors connected to the at least one thin film sensor for measuring a property related to the heat generating electrical component.', '4. The thermal interface material sheet according to claim 1, wherein the thermal interface material sheet comprises a thermal interface material layer, an electrically insulating layer on which the at least one thin film sensor is disposed, and a second electrically insulating layer on top of the at least one thin film sensor.']