Corrugated Silicon Platelet Feed Horn Array for CMB Polarimetry at 150
  GHz
  Next generation cosmic microwave background (CMB) polarization anisotropy
measurements will feature focal plane arrays with more than 600 millimeter-wave
detectors. We make use of high-resolution photolithography and wafer-scale etch
tools to build planar arrays of corrugated platelet feeds in silicon with
highly symmetric beams, low cross-polarization and low side lobes. A compact
Au-plated corrugated Si feed designed for 150 GHz operation exhibited
performance equivalent to that of electroformed feeds: ~-0.2 dB insertion loss,
<-20 dB return loss from 120 GHz to 170 GHz, <-25 dB side lobes and <-23 dB
cross-polarization. We are currently fabricating a 50 mm diameter array with 84
horns consisting of 33 Si platelets as a prototype for the SPTpol and ACTpol
telescopes. Our fabrication facilities permit arrays up to 150 mm in diameter.
