Capacitive Sensors for Distance and Displacement Measurement
Among displacement measurement systems, only capacitive sensors offer the resolution of distance measuring interferometers. Since capacitive sensors are completely non-contact, they will not perturb the target being measured through contact or by adding mass. Typical uses of our sensors as a displacement measurement system include:
- Measuring axial displacement of shafts, precision ball screws and diaphragms.
- Repeatability measurement of precision mechanisms and stages.
- Non-contact dimensional measurement of machined parts.
- Precision bearing measurement
Straightness & Flatness Measurement of Precision Stages
MicroSense capacitive sensors provides a method for making direct measurements of straightness and flatness of high precision machine tools and stages, without the averaging errors found in laser interferometer based systems.
||General purpose displacement measurement requiring good stability|
||General purpose displacement measurement requiring good stability; testing of precision stages|