Adsorption Behavior in a Model CMP Slurry
to their high surface area, abrasive particles in CMP slurry can
have a significant impact on the effective concentration of key
chemical components, which in turn, can have a profound influence
on the slurry performance. Working with Dr. William America of IBM,
Professor Yuzhuo Li and his graduate students Fadwa Odeh and Sameer
Dhane have conducted research to observe the adsorption of a key
ingredient in the slurry, benzotriazole (BTA) onto the surface of
representative abrasive particles such as silica. It was observed
that the extent of surface adsorption is heavily controlled by the
type of silica and the presence of other chemicals such as glycine
and copper ions. The complex formed between BTA and copper ions
results in a greater driving force for the surface adsorption. Furthermore,
the copper ions introduced during the CMP process have an even greater
impact on the adsorption behavior of BTA and other key chemical
ingredients. This research is particularly useful in providing insight
into the chemical mechanical polishing mechanism and the further
optimization of a CMP slurry.
between Nanoparticles, Fundamentals of CMP, Nanobiosensors, Self-Assembly
of Nanoporous Colloids, Film Coating, Nanocomposites, and Biophysics
(Human Skin, Ageing of Human Cells, Bacterial Bioremediation)
CAMP Professor Igor Sokolov, from the Department of
Physics at Clarkson University, uses Scanning Probe Microscopy (SPM)
for a variety of research topics. He has used SPM to study the fundamentals
of copper CMP. The SPM tip was used to mimic a single abrasive silica
particle, typical of those used in CMP slurry, to study the removal
rate of copper oxides (collaboration with CAMP Professor Babu).
He is using the SPM in a project involving the measurement of particle-wafer
and particle-pad interactions using an Atomic Force Microscope (collaboration
with CAMP Professor Subramanian).
Professor Sokolov is working with CAMP Professor Ian
Suni, in studying a new architecture of biosensors. He also studies
glucose biosensor molecules in cooperation with Professor Linda
Luck, of Clarkson's Biology Department
Professor Sokolov's research includes self-assembly
of nanoporous colloids with different shapes and various functions.
This includes making "smart dust" particles with encoded color "bar
codes" (patent pending), which can be used in biomedical labeling,
security and product tagging. (See Figure 2.)
In addition Professor Sokolov is investigating the
force interaction in complex biological systems, including epithelial
human cells and various bacteria. In collaboration with Professor
Craig Woodworth (of Clarkson's Department of Biology), he studies
the mechanical properties of ageing human cells. He is also collaborating
with CAMP Professor Anja Mueller and Professor Stefan Grimberg (of
Clarkson's Civil and Environmental Engineering Department) to study
molecular mechanisms of bacterial interaction with various oils
during the process of bioremediation.
2: An image of smart dust particles that are really nanoporous glass.
Technical Writer and Editor Dr. Dana M. Barry accepts a ChemLuminary
Award for Public Relations on behalf of the Northern NY section
of the American Chemical Society (ACS), at the ACS National Convention
in Philadelphia, PA on August 24. This national award was for Dr.
Barry's Chemical Sensation Project. From left: Dr. William Oliver
(Chair of the Committee on Public Relations and Communications),
Dr. Dana Barry (officer of the Northern NY section of the ACS),
and Dr. James Burke (Chair of the Board of Directors of the ACS).
NY Section of the American Chemical Society Receives National Awards
for Programs Run by Clarkson's Dr. Dana Barry
Northern New York section of the American Chemical Society (ACS)
received national awards for programs run by Dr. Dana Barry, technical
writer and editor of Clarkson University's Center for Advanced Materials
Processing. The section received a ChemLuminary Award in Public
Relations for Dr. Barry's Chemical Sensation Project with Japan,
as well as a ChemPower Award (Certificate of Excellence) for her
World First MarsLink Space Mission Program. The awards were presented
at the ACS National Convention held during the month of August in
Chemical Sensation Project is an international effort to promote
and improve perceptions of chemistry and chemical professionals.
Dr. Barry's main collaborator for this project is Professor Hideyuki
Kanematsu of Suzuka National College of Technology in Japan. Dr.
Barry's Mars Mission Program provides students with a unique opportunity
to experience first hand the excitement of chemistry through an
educational program linked to the NASA Mars Missions.
Her international team has participants in the United States and
Malaysia. She has program support from Space Explorers Inc., and
her main collaborator is Dr. Roger Haw, Co-Founder of Ansted University.
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