  By modifying and extending recent ideas [C. Seoanez et al., Europhys. Lett.78, 60002 (2007)], a theoretical framework to describe dissipation processes inthe surfaces of vibrating micro- and nanoelectromechanical devices, thought tobe the main source of friction at low temperatures, is presented. Qualityfactors as well as frequency shifts of flexural and torsional modes in doublyclamped beams and cantilevers are given, showing the scaling with dimensions,temperature, and other relevant parameters of these systems. Full agreementwith experimental observations is not obtained, leading to a discussion oflimitations and possible modifications of the scheme to reach a quantitativefitting to experiments. For nanoelectromechanical systems covered with metallicelectrodes, the friction due to electrostatic interaction between the flowingelectrons and static charges in the device and substrate is also studied.
By modifying and extending recent ideas [C. Seoanez et al., Europhys. Lett.78, 60002 (2007)], a theoretical framework to describe dissipation processes in the surfaces of vibrating micro- and nanoelectromechanical devices, thought to be the main source of friction at low temperatures, is presented. Quality factors as well as frequency shifts of flexural and torsional modes in doubly clamped beams and cantilevers are given, showing the scaling with dimensions, temperature, and other relevant parameters of these systems.