  Fabrication of the bimorph lithium niobate cantilevers involves a micromachining of a z-cut wafer to create a multidomain structure. After etching,the bimorph ferroelectric cantilevers are fabricated at the locations nearinterdomain walls. Cantilever vibrations are excited by rf voltage due topiezoelectric effect in a ferroelectric chip, and optical detection is employedto pickup the vibrations. The self-assembling layers of two different Silanesare chemically deposited on the micro cantilevers. The layers are detectedindependently by two methods including a low frequency shift of cantilevernatural vibrations, and Raman spectral lines from the Silane layers. Possibleapplications include smart biosensors in a real time domain.
Fabrication of the bimorph lithium niobate cantilevers involves a micromachining of a z-cut wafer to create a multidomain structure. After etching, the bimorph ferroelectric cantilevers are fabricated at the locations near interdomain walls. Cantilever vibrations are excited by rf voltage due to piezoelectric effect in a ferroelectric chip, and optical detection is employed to pickup the vibrations. The self-assembling layers of two different Silanes are chemically deposited on the micro cantilevers.