  The interaction of 32.5 and 6 nm ultrashort X-ray pulses with the solidmaterials B4C, SiC and Si is simulated with a non-local thermodynamicequilibrium (NLTE) radiation transfer code. We study the ionization dynamics asfunction of depth in the material, modifications of the opacity duringirradiation and estimate crater depth. Furthermore, we compare the estimatedcrater depth with experimental data, for fluences up to 2.2 J/cm2. Our resultsshow that at 32.5 nm irradiation, the opacity changes with less than a factorof 2 for B4C and Si and a factor of 3 for SiC, for fluences up to 200 J/cm2. Ata laser wavelength of 6 nm, the model predicts a dramatic decrease in opacitydue to the weak inverse bremsstrahlung, increasing the crater depth for highfluences.
The interaction of 32.5 and 6 nm ultrashort X-ray pulses with the solid materials B4C, SiC and Si is simulated with a non-local thermodynamic equilibrium (NLTE) radiation transfer code. We study the ionization dynamics as function of depth in the material, modifications of the opacity during irradiation and estimate crater depth.