From hopcroft at snf.stanford.edu Thu Aug 17 14:30:36 2000
From: hopcroft at snf.stanford.edu (Matt Hopcroft)
Date: Thu, 17 Aug 2000 14:30:36 -0700 (PDT)
Subject: resist streaks
Message-ID:
Hello,
I have been experiencing recurring problems with streaks and
bubbles in the 3612 resist. The streaks don't seem to be related to any
topographical feature on the wafer, or any visible contamination.
Has anybody else had similar problems? Can anybody suggest a
cleaning procedure, or other possible solution? Thank you,
-Matt
Matt Hopcroft
hopcroft at snf.stanford.edu