Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process
Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device.
A conception and method of space breeding mechanism study with solid statenuclear track detector is briefly introduced. The detector system, etching conditionsand measured parameters are described. The methodology of particle identification isdiscussed. Finally, dependence of variation observed in the field on hitting particlesis analysed.