Stochastic exposure kinetics of extreme ultraviolet photoresists: Trapping model
The mechanism of extreme ultraviolet resist exposure is still in debate, with various competing mechanisms proposed. Here, three different continuum exposure models and two stochastic exposure models are compared, using predictions of acid concentration and yield as a function of dose and photoacid generator (PAG) loading. The models studied are a stochastic excitation model (and its continuum counterpart), a stochastic PAG trapping model (and its newly derived continuum counterpart), and the continuum Higgins competing traps model. These models produce different predictions for acid concentration as a function of dose and PAG loading, and for acid yield as a function of PAG loading. Thus, it may be possible to use experimental data to differentiate between these mechanisms, though the possibility of multiple simultaneous mechanisms cannot be ruled out.
In this paper we present a macro-economic demographic growth modelhaving a special focus on social security. It is designed to study the variability of responses of the system in presence of risks and uncertainties. Here we analyze the robustness of the model towards uncertainties in parameterspecifications, introduced by ARCH-M models with the incorporation ofintervention processes. The parameters varied are labor force participationrates (one of the key sources of uncertainty in the social security policydebate), and the parameters of the production function (the key source ofuncertainty in any long-run economic analysis). The sensitivity analysisfocuses on two variables: assets of the private pension system and thebalance of the public `Pay As You Go' pension system. Special attentionis given to convergence properties of the macro-economic model.