Measurement of Dipoles/Roll-Off /Work Functions by Coupling CV and IPE and Study of Their Dependence on Fabrication Process
We study the effective metal gate work function (WFMeff) of different metal/high-κ gate stacks. Both capacitance versus voltage measurement and internal photo emission measurement were used, leading to a better understanding of the WFMeff variations. We demonstrate that these variations are related to two main process dependent parameters, a voltage drop at the high- κ/SiO2 interface and the metal work function. These two parameters are studied for various process conditions.
ILO pub-WEP pub. Working paper on export-led economic growth and employment in Korea R, 1945 to 1982 - covers economic planning, foreign investment, the labour market, labour productivity, trade unions, the industrial sector (especially the textile industry and the electronics industry) and state intervention. Graphs, map and references.