1. A method for modifying process recipe information utilized by a wafer processing system having a controller with permanent rewritable storage, memory, a first and a second communication interface, and a user interface; and one or more process cells to process a wafer; which method comprises steps of: storing baseline process recipe information in permanent rewritable storage; retrieving baseline process recipe information from permanent rewritable storage and storing it in memory for a wafer in a group of wafers to be processed; receiving process recipe modification information utilizing the second communication interface and storing the process recipe modification information in memory; overwriting at least portions of the baseline recipe information in memory with the process recipe modification information to form new recipe information; and processing the wafer utilizing the new recipe information.