1. A process flow checking system for checking a semiconductor process flow including a plurality of processes, the process flow checking system comprising: a manufacturing route generator generating manufacturing route information indicating the processes arranged in a first order while associating additional information with the respective processes, the additional information including at least keyword information corresponding to the respective processes; a rule-information storage part storing therein rule information indicating at least part of the processes arranged in a second order, the rule information including keyword information indicating processing contents corresponding to the processes indicated in the rule information and order information indicating an order of the keyword information included in the rule information; and a check processor checking appropriateness of the order of the processes indicated in the manufacturing route information based on matching between the first order and the second order by comparing the keyword information of the processes indicated in the manufacturing route information and an order of the keyword information corresponding to the respective processes indicated in the manufacturing route information with the keyword information of the processes indicated in the rule information and the order information included in the rule information before processing wafers according to the manufacturing route information.