1. A method for testing a mask article, comprising steps of: applying a bias voltage to the mask article, wherein the mask article includes a conductive layer, and the bias voltage is applied to the conductive layer; electrically connecting a conductor to an electrical sensor; contacting a plurality of testing sites of the mask article with the conductor; measuring at least one current distribution of the testing sites with the electrical sensor through the conductor; and determining the quality of the mask article by taking the at least one current distribution into consideration, wherein the determining of the quality of the mask article includes a step of counting a number of testing sites with a current value lower than a threshold value.