1. A method for configuring a reagent supply system for an electronic device manufacturing facility, the method comprising: a. collecting representative information for process tools within the fabrication facility which use the reagent; b. creating a simulation of process tool operation to model an overall demand profile for the process tools; c. creating a statistical probability distribution of the reagentdemand by the process tools using data from the model; and d. correlating data from the probability distribution with supply system characterization data to configure the supply system.