1. A pattern evaluation method comprising: processing image data of at least one pattern serving as an object to be evaluated and detecting coordinates of edge points of the pattern in an image of the image data; making pairs of edge points from said edge points of the pattern; setting an arbitrary axis; calculating a distances between said edge points of each pair of said pairs of edge points and an angle between a straight line connecting the edge points of said pair and said axis; preparing a distance/angle distribution map which represents distribution of said distances and angles of said pairs of edge points; extracting a characteristic point of said distance/angle distribution map; and analyzing the pattern on the basis of said extracted characteristic point.