1. A method of inspecting a sample, comprising the steps of: inspecting a sample under a plurality of inspection conditions; storing inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and the position information on the sample of the inspection date in correspondence with the respective inspection conditions; checking the inspection data for each of the plurality of inspection conditions against each other by the use of the position information on the sample to determine a position to be inspected in detail; obtaining an image of the sample at a position to be inspected in detail; classifying the obtained image; and determining the inspection condition of the sample by the use of information of classification of the image.