1. A method for detecting and measuring aberrations in an optical system comprising: providing a test target with at least one open figure including a multiple component array of phase zones, wherein the multiple phase zones are arranged within the open figure so that their responses to lens aberrations are interrelated and the phase zones respond uniquely to specific aberrations depending on their location within the figure; placing the test target in an object plane of a projection system; imaging a photoresist film with the projection system; and comparing the image in the photoresist film to a reference image without aberrations to detect aberrations in the optical system.