1. An apparatus for inspecting a specimen, comprising: inspection means having a sensor to detect an image of a pattern formed on a specimen to be inspected and a processor to process the detected image to extract a defect candidate of the pattern with its location information; output means outputting an image of the detected defect candidate and data including location information of the defect candidate; information transfer means transferring information outputted from the output means; store means storing information outputted from the output means and transferred by the information transfer means; and processing means having a display screen and the processing means processes the information stored in the store means and displays the processed information on the display screen.