1. Apparatus for high resolution processing of a generally planar workpiece having microscopic features to be imaged, comprising: a video camera acquiring at least two candidate images for each of selected microscopic portions on generally planar workpiece; a motion controller operative to effect motion, relative to the workpiece, of at least an optical element of said video camera along an optical axis extending generally normally to a location on a surface of the workpiece, said video camera acquiring said at least two candidate images at selected time intervals, each of said at least two candidate images differing by at least one image parameter; an image selector operative to select an individual image corresponding to a selected microscopic portion from among said at least two candidate images according to predefined criteria of image quality, said image selector being operative to avoid delaying acquisition of candidate images for said each of selected microscopic portions; and a selected image analyzer operative to analyze said individual image selected by said image selector corresponding to a selected microscopic portion.