1. An analytical method comprising the steps of: obtaining a first image of a specimen fixed to a specimen stage as a reference image when the specimen is in a first position of the specimen stage; storing said reference image and said first position of the specimen as determined by the position of the specimen stage in memory; specifying an analysis point within said reference image; storing coordinates of the specified analysis point in memory; returning said specimen into a returned position according to the stored position of the specimen; obtaining a second image in said returned position; comparing said returned image with said reference image and calculating the amount of deviation in position between both images; and correcting the amount of deflection of the electron beam based on the calculated amount of deviation between the images and shining the beam at the analysis point to thereby perform an analysis of the analysis point.