1. A method of inspection illuminating a surface of an object under inspection by white light from an illumination unit while scanning a surface of said object under inspection by an image capturing unit to obtain a captured image and using said captured image as a basis to inspect the state of the surface of said object under inspection, said method having a first step of changing a state of polarization of light striking the image capturing unit from an illuminated location of said object under inspection and a second step of obtaining a plurality of captured images based on light of different polarization states striking said image capturing unit.