1. A method for prognostic maintenance in semiconductor manufacturing equipments, comprising the following steps: collecting a plurality of raw data and preprocessing the plurality of collected raw data; performing classification through a statistic classification model on the plurality of preprocessed raw data to generate a plurality of health indices; performing classification on the plurality of generated health indices by a prescribed classification method to generate a plurality of health information; using a regression analysis method to process the plurality of health information to generate a plurality of health reports; and performing repairs and maintenance actively by in-situ engineers based on the plurality of generated health reports.