1. A method of defining evaluation points for use in optical proximity correction of a target geometry, comprising: predicting at least one point on a predicted image from a computer simulation of an optical proximity correction of a target geometry of a patterning tool, the target geometry having a plurality of pre-defined line segments and a plurality of evaluation points used in the computer simulation of the optical proximity correction, each line segment of the plurality having at least one evaluation point of the plurality defined thereon; and replacing at least one evaluation point of the plurality of evaluation points with the at least one point on the predicted image, the at least one point on the predicted image being defined as an evaluation point for use in an optical proximity correction operation.