1. A method of measuring a position of an object, comprising: performing a first position measurement by a first sensor while the object is stationary and a second position measurement by a second sensor while the object is stationary, the first and second position measurement differing in type from one another, one of the first and second sensors being configured and arranged to measure a position of an alignment mark positioned either on the object or on a substrate positioned on the object and the other of the first and second sensors being configured and arranged to measure the position of the object at a position other than the position of the alignment mark, both the first position measurement and the second position measurement comprising taking a plurality of samples in time, and presenting the first measurement and the second measurement.