1. A method of locating defects, comprising: providing an inspection image of a device under test including detected coordinates of potential defects; converting the inspection image into a first image in a predetermined image format; providing CAD data for the device under test; converting the CAD data into a second image in the predetermined image format; aligning the first and second images; converting the detected coordinates of potential defects into CAD coordinates; and locating defects as a function of the CAD coordinates.