1. An image measurement apparatus comprising: a measurement processing block for obtaining a plurality of first images of an object to be measured, taken while very small movements are being made in an imaging area; a feature extraction processing block for extracting an approximate feature portion of the object from the plurality of first images obtained by the measurement processing block; a partial-image creation processing block for creating a plurality of first partial images by grouping the plurality of first images obtained by the measurement processing block in the vicinity of the approximate feature portion extracted by the feature extraction processing block; and a super-resolution-image creation processing block for creating a super-resolution image from the plurality of first partial images created by the partial-image creation processing block; wherein the feature extraction processing block extracts a detailed feature portion from the super-resolution image.