1. A method of defining evaluation points for use in optical proximity correction of a rectangular target geometry, comprising: predicting at least one point on a predicted image of an optical proximity correction simulation of a target geometry having a plurality of line segments and a plurality of evaluation points, each line segment of the plurality having one evaluation point of the plurality defined thereon; and shifting at least one evaluation point of the plurality of evaluation points to a corresponding point of the at least one predicted point on the predicted image.