1. A method of picking up an image of a substrate being transferred between processing and treatment units in a coating and developing treatment apparatus by an image pickup unit to inspect the substrate for a defect, said method comprising: causing a transfer member, which is part of the treatment apparatus but removed from the image pickup unit, to hold and transfer the substrate between units of the treatment apparatus, synchronizing drive of the transfer member with the image pickup unit, obtaining, by the image pickup unit while the image pickup unit and the transfer member are synchronized, the image of the substrate, and inspecting the obtained image for a defect.