1. A method for inspecting a specimen having at least one feature located thereon, comprising: performing a transmitted energy inspection and a reflected energy inspection of said specimen; submitting results from said transmitted energy inspection and said reflected energy inspection to a transmitted-reflected look up table, wherein said transmitted-reflected look up table comprises transmitted and reflected modification parameters dependent upon predetermined characteristics of said feature; and outputting modified combined transmitted energy data and reflected energy data based on modified results determined by said transmitted-reflected look up table.