1. A device for monitoring a process parameter of a process to manufacture an integrated circuit using integrated circuit processing equipment, the device comprising: a substrate having a wafer or wafer-like shape which is capable of being disposed within the integrated circuit processing equipment; an event sensor, disposed on or in the substrate, to generate output data which is representative of events in or of the integrated circuit processing equipment; a controller, coupled to the event sensor, to receive the output data and to detect a predetermined event or sequence of predetermined events based thereon, wherein the controller generates a control signal in response to detecting the predetermined event or predetermined sequence of events; and a process parameter sensor, coupled to the controller and disposed on or in the substrate, to sample a process parameter of the process to manufacture an integrated circuit in response to the control signal.