1. A process for breakage detection in a thermal processing system, comprising: accessing data indicative of a plurality of temperature measurements for a substrate, the plurality of measurements obtained during a cool down period for the substrate during a thermal process; estimating one or more metrics associated with a cooling model based at least in part on the data indicative of the plurality of temperature measurements; and determining a breakage detection signal based at least in part on the one or more metrics associated with the cooling model, the breakage detection signal indicative of whether the substrate has broken during thermal processing.