1. A method of maintaining a processing apparatus, comprising: a registration step in which unit operations corresponding to each part of said processing apparatus undergoing maintenance are registered in advance; a macro writing step in which a maintenance macro is configured for executing said unit operations as at least one of in units of the individual operations and a combination of unit operations the combination of unit operations being executed through at least one of a sequence operation and a parallel operation; and a macro execution step in which maintenance is performed by executing said maintenance macro.