1. An imaging system comprising: means for inspecting a semiconductor die to determine the efficacy of a process previously performed on the semiconductor die, the means for inspecting comprising a multiline laser light source that emits laser light of a plurality of wavelengths, means for directing the laser light toward the semiconductor die, and means for measuring a first intensity of laser light reflected from the semiconductor die; and means for analyzing a defect on the semiconductor die to determine the nature and origin of the defect.