1. A method for examining an object, the method comprising: receiving data indicative of a plurality of alignment targets, each alignment target being associated with a target location on an object; identifying a plurality of locations to be captured; selecting by a processor, an alignment target subset of the plurality of alignment targets, wherein each of the plurality of locations is within a determined distance from a single alignment target from the alignment target subset, the distance determined being in accordance with a provided field of view, and wherein the alignment target subset comprises fewer targets than locations to be reviewed; and aligning the object relative to an examination tool for capturing the locations within the determined distance from the single alignment target by using the alignment target subset.