1. A method for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site, the method comprising: receiving reference data which represent locations of microstructures to be processed at the site; determining a plurality of possible trajectories based on the data; estimating a change of temperature of at least one motor caused when the at least one motor drives the stage based on each of the possible trajectories; and determining a substantially optimum trajectory from the possible trajectories wherein positioning accuracy of the stage is maximized by following the substantially optimum trajectory.