1. A method performed by a processor comprising: acquiring data of patterns of a single cell from a plurality of cells, wherein an evaluation value of an optical image of the single cell is calculated and an identified pattern is identified for which the calculated evaluation value falls outside a first allowable range among the patterns of the single cell; creating a pattern of a mask used for a transferring method, by arranging the patterns of the plurality of cells that include the identified pattern; extracting a portion in the created pattern of the mask based on the identified pattern; and evaluating an optical image of a pattern in the portion, wherein the transferring method comprises transferring the pattern of the mask onto a substrate.