1. A response surface modeling device, comprising: executing instructions to a processor create a linear model by changing a plurality of factor values, drive a target for measurement, resulting in a response value calculated as a result of such driving, using input values as the plurality of factor values, and substitute a sample into Equation (1), the sample being obtained by using input values as the plurality of factor values, and an output value as the response value; determine to partition the linear model, when a value calculated by Equation (2) is greater than a threshold; partition the linear model, when the processor determines to partition the linear model; and create a response surface model by determining whether to further partition each region of the linear model partitioned by the partitioning unit, and when the processor determines that each region cannot be further partitioned, a sample belonging to each region partitioned is substituted into Equation (1) to create a linear model, and adjacent linear models are connected to each other to create a response surface model, 
 ŷ=W (1 /x )  (Equation 1) wherein “ŷ” is a response value, “W” is a coefficient of a linear model, and “x” is a factor value, and 
 det( x i T x i )  (Equation 2) wherein “Xi” is a local matrix of a region i, and “T” is a symbol denoting a transposed matrix; a memory effective to store the plurality of factor values, the response value, and the response surface model; and a display to display the response surface model.