1. A method of determining dynamic lens field curvature associated with a photolithographic scanner having a projection lens, the method comprising: exposing at least one row of an array of focusing fiducials in a reticle of the scanner onto a substrate that is coated with a recording media; shifting the substrate and exposing the focusing fiducials to create at least one row of printed overlapped focusing fiducials on the substrate; and determining dynamic lens field curvature of the projection lens in accordance with focal plane deviation (FPD) values determined from measurement of the focusing fiducials on a developed substrate.