1. A review apparatus comprising: a display for displaying an optical microscope image transmitted from a SEM visual inspection apparatus; and a controller for moving a stage to an alignment coordinate of a SEM image obtained from an alignment coordinate of an optical microscope image set in accordance with a mark marked on said optical microscope image and offset information of an alignment coordinate of the SEM image transmitted from the SEM visual inspection apparatus, displaying an alignment dictionary image of a SEM image on said display and setting an alignment coordinate of a SEM image of said review apparatus in accordance with a mark displayed on the alignment dictionary image of said displayed SEM image.