1. A camera module comprising: an image sensor disposed with respect to an optical axis; a first lens group disposed with respect to said optical axis; a second lens group disposed with respect to said optical axis, said second lens group being disposed between said first lens group and said image sensor; a third lens group disposed between said first lens group and said second lens group; a MEMS actuator coupled to move said third lens group with respect to said image sensor; and a MEMS actuator driver coupled to drive said MEMS actuator, said MEMS actuator driver including a capacitance measurement component operative to measure physical values indicative of a position or motion, or both, of a MEMS component, a capacitance estimation component that calculates estimated values indicative of said position or motion, or both, of said MEMS component, a smart logic component that determines a set of MEMS driver control values based on analyzing said measured physical values and said estimated values, and a MEMS driver component that receives said set of MEMS driver control values and controls said position or motion, or both, of said MEMS component based on said MEMS driver control values; and wherein said capacitance measurement component further comprises a programmable driver equalization component configured to provide a voltage drive signal based on a capacitance sensing settling time.