1. A method of determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system, the method comprising the steps of: calculating a tool matching precision based on a set of parameters including: a slope-induced shift offset (SISOffset) between a MSUT measurement of an artifact and a benchmark measurement of the artifact by a benchmark measurement system (BMS) and a non-linearity (σ non-linearity ) of a linear regression analysis comparing the MSUT and the BMS; and determining whether the tool matching precision meets a matching threshold, wherein the MSUT is considered matched in the case that the matching threshold is met.