1. A method for quantitative analysis of a material in which an electron beam is caused to impinge upon the material, the method comprising: detecting low loss electrons (LLEs) that have been backscattered from a first region of the material due to interaction with the electron beam and generating corresponding LLE data; detecting x-rays received from a second region of the material due to interaction with the electron beam and generating corresponding x-ray data, wherein the first and second regions overlap; and analysing the LLE data together with the x-ray data so as to generate compositional data representative of the composition of the first region.