1. An inspection method comprising the steps of: detecting either discretely or simultaneously elastic or stokes scattered light and inelastic or anti-stokes scattered light occurring from a surface and an inside of an inspection object by irradiation of inspection light by deviating them time-wise from each other; detecting the existence/absence of a defect of the surface and the feature of said defect by said elastic or stokes scattered light detected; detecting the position of said defect on the surface; classifying said detected defect in accordance with the feature; and conducting an analysis of said defect by said inelastic or anti-stokes scattered light on the basis of the position of said defect, the feature of said defect or the classification result of said defect.