1. A method of extracting process parameters, comprising: selecting a device parameter; collecting process data, wherein the process data includes time series process data, and wherein the process data includes values associated with a plurality of process parameters; summarizing the time series process data; and performing a correlation analysis, wherein the correlation analysis identifies a key parameter included the plurality of process parameters, wherein the key process parameter is correlative to the selected device parameter, and wherein the correlation analysis includes generating a gene map for the selected device parameter.