1. An alignment method of aligning an object to be aligned by measuring an alignment mark position on the object, comprising: detecting the alignment mark on the object; obtaining position data of the alignment mark on the basis of the detected mark information; extracting a feature amount of the alignment mark on the basis of the mark information; obtaining a correction value of the position data on the basis of the extracted feature amount of the alignment mark; and aligning the object on the basis of position information corrected using the correction value.