1. A system for inspecting a sample, the system comprising: at least one illumination relay configured to direct light generated by an illumination source onto the sample; image relay optics configured to direct light outputs from the sample to at least one channel image mode relay; and an image sensor configured to receive said light outputs from the channel image mode relay, the sensor including an image region including pixels disposed in a two-dimensional array on an epitaxial silicon membrane, the epitaxial silicon membrane including readout circuit elements formed on a first surface of the epitaxial silicon membrane and a pure boron layer disposed on an opposing second surface, wherein the system is configured such that the readout circuit elements read out charges from the pixels that correspond to the light outputs directed onto the image region by the channel image mode relay.