1. A lithographic apparatus comprising: an object table configured to carry an object, the object table being movable in at least one direction, the object table comprising a channel for the passage therethrough of a two-phase flow, wherein the two-phase flow through the channel causes a varying load to act on the object table causing deformation of a part of the object; and a control system to control the movement of the object table in the at least one direction based on a quantity representative of the deformation of the part of the object.