1. An inspection apparatus comprising: an image acquiring unit for inspecting an object to be inspected on which a pattern is formed so as to acquire an image including a defect of the object to be inspected; an inspection processing operation unit for detecting a defect from the image including the defect acquired by the image acquiring unit so as to extract inspection data including information about a position and a size of the detected defect; a storage unit for storing data of a pattern layout of the object to be inspected; and a judging unit for creating information about priority of a defect to be reviewed, from among defects of the object to be inspected, using the inspection data determined by the inspection processing operation unit and the layout data stored in the storage unit.