1. A computer-implemented method for generating a process for inspecting reticle layout data, comprising: identifying a first region in the reticle layout data, wherein a printability of the first region is more sensitive to changes in process parameters than a printability of a second region in the reticle layout data; and assigning one or more inspection parameters to the first region and the second region such that the first region will be inspected during the process with a higher sensitivity than the second region.