1. A method of automatically inspecting a processing apparatus that processes a workpiece, comprising: a registration step in which at least inspection items to be checked in an inspection process and a time point for the inspection process are registered in advance; a verification step in which the operating state of said processing apparatus is verified when the registered inspection time point arrives; an inspection step in which the inspection process to check the registered inspection items is automatically and immediately executed if said processing apparatus is determined to be in a non-operating state, or after the operation in said verification step of said processing apparatus ends, if said processing apparatus is determined to be engaged in operation in said verification step; and a decision-making step in which a decision is made as to whether or not the inspection process has been completed.