1. A method of mastering a waferscale imaging lens array comprising: fabricating a sub-array of lenses comprised of a plurality of individual lens elements, wherein the number of individual lens elements in the sub-array is a sub-set of the number of individual lens elements contained in the waferscale lens array; checking the sub-array for shape deviations and pitch accuracy and repeating the fabricating step until a final sub-array is formed, said final sub-array being substantially free of shape and pitch deviations; and duplicating said final sub-array on a substrate a number of times sufficient to form the master waferscale lens array.