1. A mark partitioning inspection method, comprising the steps of: acquiring a reference image which is a reference for determining whether or not a mark has a defect; acquiring an inspection image for determining whether or not a mark has a defect; obtaining a correlation in a character unit for the reference image and the inspection image, and then comparing a correlation value with a first threshold value that has been previously set; partitioning the relevant character into a predetermined number of regions if the correlation value is greater than the first threshold value; obtaining a correlation between the reference image and the inspection image for each of the partitioned regions; and comparing a difference between maximum and minimum values of the correlation with a second threshold value that has been previously set to determine whether or not the inspection image is defective.