1. A process for the production of a three-dimensional object by layer-wise solidification of a material solidifiable by the action of electromagnetic irradiation by means of mask illumination, wherein the mask is produced by an image forming unit having a prescribed resolution, which mask is formed from a constant number of image forming elements (pixel) being discrete and spatially arranged in a fixed manner to each other, characterized in that, for improving the resolution in the sub-pixel range along the outer and inner contours of the sectional areas of the object to be generated layer-wise, a multiple illumination is carried out for each layer which consists of a sequence of a multitude of images mutually shifted in the sub-pixel range in the image/construction plane, wherein a separate mask/bitmap is produced for each shifted image.