1. An imaging system for imaging a mask which can be positioned in an object plane of the imaging system on to a photosensitive layer which can be positioned in an image plane of the imaging system, the imaging system comprising: an object plane-side subsystem which produces a first intermediate image with an object plane-side imaging scale β o ; at least one further subsystem which produces a further intermediate image between the first intermediate image and the image plane; and an image plane-side subsystem which images the further intermediate image into the image plane with an image plane-side imaging scale β i ; wherein the condition 0.75≦β o *β i ≦1.25 is satisfied.