1. A method for inspecting a sample, comprising the steps of: storing inspection data with defect candidates position information on a sample, the inspection data being obtained by inspecting the sample under plural inspection conditions; checking an identity of the defect candidates among inspection data of the plural inspection conditions by using the stored defect candidates position information on the sample; determining at least one defect on the sample to be reviewed in detail from the defect candidates position information; analyzing the determined at least one defect on the sample; and determining an inspection condition of the sample by using data result of the analyzing step.