1. A method for inspecting a sample, comprising the steps of: storing inspection data with position information on a sample, the inspection data being obtained by inspecting the sample under plural inspection conditions; checking an identity of the stored inspection data to identify defect candidates by using the stored position information on the sample; determining a position on the sample to be reviewed in detail from the identity checked inspection data; analyzing the determined position on the sample; and determining an inspection condition of the sample by using the identity checked inspection data.