1. An inspection apparatus for inspecting an object comprising: an imaging system configured to acquire a plurality of alignment mark images from the object; a computer implementation system configured to draw a plurality of template candidate images having different shapes; and a processing system configured to use a function to calculate a score based on a correlation between said alignment mark images and said template candidate images, wherein: said processing system is configured to acquire a first feature point from at least one of the first alignment mark images and a second feature point from at least one of the template candidate images, and said function is expressed by a number of matched feature points between said first feature point and said second feature point, a number of first feature points, and a number of second feature points.