1. An aberration evaluation pattern for evaluating aberration of an irradiation system scanning an electron beam onto a surface of a sample by deflecting the electron beam, the aberration evaluation pattern comprising: a periodical structure having a prescribed line width and a prescribed distance between the lines, the periodical structure being provided on the same plane and formed outward from a center that is an irradiated position of the electron beam when the electron beam is not deflected, the periodical structure being formed to extend 360 degrees around the periphery of the center and has either a concentric-circle figure or a spiral figure whose center is positioned at the center that is the irradiated position of the electron beam when the electron beam is not deflected.