1. A method of aligning a wafer, comprising: aligning a first wafer to form a first template pattern corresponding to an image of the first wafer; inputting image data of a second wafer, a kind of the second wafer being different from that of the first wafer; forming a second template pattern by transforming the first template pattern in response to the image data of the second wafer; and aligning the second wafer in response to the second template pattern.