1. A pattern position detecting method, the method comprising: (a) acquiring a model image of a detection target; (b) dividing the model image into a plurality of reference images, each reference image including a specific pattern and having a position in the detection target; (c) acquiring a detected image of a detection target, the detected image comprising a plurality of detected image regions, each region divided into a plurality of sections; (d) matching, for each reference image, the position of the reference image with one of a plurality of predetermined positions on the detected image; (e) sequentially comparing each of the plurality of sections with the corresponding reference image of the plurality of reference images while displacing the origin of the corresponding reference image in X and Y directions from the corresponding one of the plurality of predetermined positions on the detected image, and sequentially acquiring correlation values between the detected image section and the corresponding reference image; (g) integrating the correlation values between the detected image sections and the corresponding reference images at respective comparison positions within an integrated XY plane to generate integrated correlation values; and (h) recognizing a value of integrated XY coordinates at a peak of the integrated correlation values as indicating positional deviation of the specific patterns included in the reference images from the predetermined positions of the detection target within the XY plane.