1. A method of generating an error correction table, which comprises: scanning a probe array by irradiating the probe array with an illumination beam, wherein the probe array comprises one or more calibration features; detecting one or more signal intensity values responsive to the illumination beam; generating one or more error correction values, wherein each of the one or more error correction values is based, at least in part, on a difference between the detected signal intensity value position and a corresponding known probe array position obtained from stored calibration feature data comprised of one or more probe array positions; and generating an error correction table, wherein the error correction table comprises the one or more error correction values.