1. A charged particle beam device comprising: a charged particle source; and an optical charged particle system which focuses a charged particle beam emitted from the charged particle source to scan the charged particle beam on a sample, the device further comprising: a control unit which forms a bright-field image or a back-scattered electron image and a dark-field image based on a transmission electron scattered in the sample or an electron scattered back from the sample, wherein the control unit compares the bright-field image or the back-scattered electron image with the dark-field image to calculate a correlation between the bright-field image or the back-scattered electron image and the dark-field image.