1. A method comprising: forming a polymer layer over a substrate; patterning the polymer layer to form a first feature and a second feature, the first feature and the second feature being separated at a first distance; applying a rinse material to the polymer layer including the first feature and the second feature; removing the rinse material from the polymer layer including the first feature and the second feature to cause the first feature and the second feature to come into contact with each other; and forming a third feature based on the first feature and the second feature being in contact with each other.