Feedforward control is fundamental for the tracking performance of motion systems, including wafer stages [1]} and printing systems [2]}. Traditionally, feedforward control is based on manual tuning. Recently, due to the increase of computational power, the focus has shifted towards learning feedforward from data [3]}. For example, Iterative Learning Control (ILC) achieves high tracking performance by learning feedforward in a trial-to-trial fashion [4]}. In contrast, fast motion is realised by designing lightweight systems, introducing dominant flexible dynamics affecting the tracking performance [5]}. In addition, the combination of moving bodies and flexible dynamics introduce position-dependent behavior [6]}, [7]}.
