Microwave nano-electro-mechanical systems (NEMS) are promising devices for such applications in quantum data processing [1]}, [2]}. Such elements, which are based on the coupling of electro-magnetic waves with mechanical motion [3]}, are proposed as new (quantum-limited) electric components [4]} or new (quantum-limited) sensors [5]}.
This principle was already foreseen in the 80s by C. Caves and V. Braginsky [6]}, [7]}, and gravitational wave detection is indeed based on the fantastic sensitivity of opto-mechanics for motion detection [8]}.
