Single layers with a thickness between 500 and 650 nm have been grown on various substrates for different purposes: (i) on fused-silica witness samples (50 mm in diameter, 6-mm thick) for transmission spectrophotometry; (ii) on silicon wafers (75 mm in diameter, 0.5-mm thick) for reflection spectroscopic ellipsometry and EDX analyses; (iii) and on a Corning 7980 fused-silica disk-shaped mechanical resonator of 75 mm in diameter and 1-mm thick for measuring coating mechanical loss, Young modulus, Poisson ratio and density. Additionally, Ta\(_2\) O\(_5\) -ZrO\(_2\) /SiO2 HR coatings with the same design of those of Advanced LIGO and Advanced Virgo [1]} have been deposited on micro-polished fused-silica witness samples for optical absorption and scattering measurements.
