An electrostatic deceleration lens for highly charged ions.
The design and implementation of a purely electrostatic deceleration lens used to obtain beams of highly charged ions at very low energies is presented. The design of the lens is such that it can be used with parallel as well as diverging incoming beams and delivers a well focused low energy beam at the target. In addition, tuning of the final energy of the beam over a wide range (1 eV/q to several hundred eV/q, where q is the beam charge state) is possible without any change in hardware configuration. The deceleration lens was tested with Ar(8+), extracted from an electron cyclotron resonance ion source, having an initial energy of 30 keV/q and final energies as low as 70 eV/q have been achieved.