1. Field of the Invention
An aspect of the present invention relates to a thin film deposition apparatus and a method of manufacturing an organic light emitting device (OLED) by using the same, and more particularly, to a thin film deposition apparatus to form a fine pattern on a large-sized substrate and a method of manufacturing an OLED by using the same.
2. Description of the Related Art
A display device using an organic light emitting device (OLED) has a wide viewing angle, excellent contrast, and rapid response time and thus has recently been highlighted as a next generation display device.
In general, an OLED emits light when holes and electrons respectively injected from an anode and a cathode are recombined in an organic light emitting layer, thereby generating visible light. However, in this structure, it is difficult to obtain high light emission efficiency. Thus, in an OLED, other organic layers such as an electron injection layer, an electron transport layer, a hole transport layer, and a hole injection layer may be selectively disposed between the anode and the cathode along with the organic light emitting layer.
Moreover, electrodes, the organic light emitting layer, and the organic layer of the OLED may be formed using various methods including deposition. In order to manufacture an organic light emitting display device using deposition, a fine metal mask (FMM) having a pattern of a thin film to be formed is closely adhered to the surface of a substrate on which the thin film is to be formed, and a material for forming the thin film is deposited on the FMM, thereby forming a thin film having a predetermined pattern.
However, it is difficult to form a fine pattern of organic thin films and red, green, and blue luminous efficiency may vary according to the pattern and thickness of the organic thin films. Thus, there are limitations in improving luminous efficiency of an OLED.
In addition, while the size of current display devices is gradually increasing, it is difficult to pattern an organic thin film over a large area by using a conventional thin film deposition apparatus. Thus, it is difficult to manufacture a large-sized OLED having satisfactory driving voltage, current density, brightness, color purity, luminous efficiency, and life span.