The present invention relates to photonics chips and, more particularly, to structures providing optical beam steering and methods of fabricating such structures.
A photonics chip integrates multiple optical components, such as waveguides and optical switches, and multiple electronic components, such as field-effect transistors, into a unified platform. Among other factors, layout area, cost, and operational overhead may be reduced by the integration of both types of components on the photonics chip.
Optical beam steering finds many practical applications as, for example, part of a photonics chip. Beam steering may be accomplished by scanning with mechanical assistance through the use of movable optical elements, such as mirrors, prisms, or lenses. A distinct disadvantage of mechanically-assisted beam steering techniques is the necessity of moving the optical element with a mechanism, such as a micromechanical system, to provide directional changes needed for steering.
Improved structures providing optical beam steering and methods of fabricating such structures are needed.