Recently, Scanning Electron Microscopy (hereinafter referred to as “SEM”), Transmission Electron Microscopy (hereinafter referred to as “TEM”), or Scanning Transmission Electron Microscopy (hereinafter referred to as “STEM”) are often used to analyze a sample having a fine structure. Before introducing a sample into these observation devices, it is necessary to prepare a cross section or thin film of the sample, and thus a Focused Ion Beam (hereinafter referred to as “FIB”) device is used. A method for FIB processing an observation portion into a thin film shape is called FIB microsampling, and this is the most suitable sample preparation method when using electron microscopy and the like to analyze the condition/structure on the order of several nm, which is the subject of recent nanotechnology research (PTL 1).
In processing or observation of a sample using a charged particle beam device, the temperature of the sample rises due to the energy of the charged particle beam, and there are cases in which it can be difficult to analyze the original structure of the sample. Thus, a method of processing or observing a sample using a charged particle beam device while cooling the sample has been proposed (PTL 2).
Further, in the procedure for preparing a thin film sample in order to observe the cooled sample with a TEM device or STEM device, a method of using a cooled manipulator to remount a sample with a thin film shape prepared on a base material onto a cooling sample holder has been proposed as disclosed in PTL 4.
In addition, among methods for preparing a cross section of a material that is sensitive to heat such as a liquid sample, a biological sample, or a polymer material without using a FIB device, a method of cutting a frozen sample with a cooled knife such as freeze etching is known (NPL 1).