The present, invention relates to a manufacturing method of a combination material of metal foil and ceramic by joining a metal foil onto surfaces of various types of ceramics, and also relates to a metal foil laminated ceramic substrate manufactured from said combination material of metal foil and ceramic.
Recently, a new improvement has been attempted by combining ceramics with metals in the application fields of ceramics. For example, a metal material composed of nickel alloy, titanium alloy, chromium alloy, or the like is joined to a ceramic material composed of alumina, zirconia, magnesia, or the like by using a combination technique such as diffusion combination so as to manufacture a combination material of metal and ceramic, which is used in various devices and apparatuses.
However, since such conventional combination material of metal and ceramic is manufactured by simply joining a metal material to a ceramic material under a certain pressure, when the pressure is applied, there sometimes occurs fracture of the ceramic material which is a much more brittle material as compared with the metal material, thus causing problems in productivity.
An object of the present invention is to solve the problem mentioned above and provide a manufacturing method of a combination material of metal foil and ceramic capable of completely joining a metal foil to a ceramic material even with a low pressure applied thereto and preventing the ceramic material from fracturing so as to improve the productivity of a combination material of metal foil and ceramic or a metal foil laminated ceramic substrate, and also provide such metal foil laminated ceramic substrate.
In order to achieve the object mentioned above, the manufacturing method of a combination material of metal foil and ceramic comprises the steps of ion-etching a surface of a metal foil and a ceramic material to be joined together to activate and clean the surfaces, heating said surface of the ceramic material, which is held on a holder, to a temperature range of 250 to 500xc2x0 C., pressure-welding said surface of the metal foil to said surface of the ceramic material held on the holder under a pressure not more than 1 kg/mm2, and thus heat-joining the metal foil and the ceramic material to manufacture a combination material of metal foil and ceramic.