The present invention relates to lamp holders in general and, more particularly, to a lamp holder that provides an accurate positioning of an arcuate lamp with compensation for thermal expansion of the lamp during operation.
High intensity arcuate lamps are used in the semi-conductor industry as a light source for mask-to-wafer projection printers. The arcuate lamp must be accurately positioned with respect to the optical system of the projection printer. In addition, the lamp must be easily replaceable in the projection printer. Provisions must also be made for providing electrical power to the lamp and a flow of coolant fluid around the lamp during the lamp operation.
It is accordingly a general object of the present invention to provide an improved lamp holder for an arcuate lamp.
It is a specific object of the invention to provide a lamp holder for an arcuate lamp that accurately positions the lamp with respect to an optical system.
It is another object of the present invention to provide a lamp holder that is easily replaceable without sacrificing the positional accuracy of the lamp with respect to an optical system.
It is still another object of the present invention to provide a lamp holder for an arcuate lamp that compensates for thermally induced expansion of the lamp.
It is a feature of the invention that the lamp holder configuration provides a convenient handle to grip the holder without touching the arcuate lamp.
It is another feature of the invention that the lamp holder can be fabricated easily from readily available materials.
It is still another feature of the invention that replacement of coolant supply hoses, electrical power leads, and the lamp holder and lamp does not affect the positional location of the lamp with respect to an optical system.