Conventionally, there is known a plasma generation device that generates electromagnetic wave plasma. For example, Japanese Unexamined Patent Application, Publication No. 2010-001827 discloses an ignition device for an internal combustion engine as a plasma generation device of this kind.
The ignition device for the internal combustion engine disclosed in Japanese Unexamined Patent Application, Publication No. 2010-001827 emits a microwave generated by a microwave oscillation device to a cylinder, thereby generates low temperature plasma. The low temperature plasma thus generated allows a continuous generation of a large number of OH radicals from moisture in fuel air mixture. In the ignition device for the internal combustion engine, the microwave oscillation device is manufactured as a solid state component.