1. Field of the Invention
The present invention relates generally to semiconductor devices and manufacturing methods thereof, and more particularly, to a semiconductor device which permits the area occupied by positional detection marks or the like to be reduced and a manufacturing method thereof.
2. Description of the Background Art
In conventional manufacturing processes of semiconductor devices, positional detection marks are used in order to improve the positional precision of circuit patterns transferred by means of photolithography. FIG. 25 is a cross sectional view of a semiconductor device having conventional positional detection marks. Referring to FIG. 25, such a conventional semiconductor device will be described.
Referring to FIG. 25, the conventional semiconductor device includes a semiconductor substrate 101, first to third interlayer insulating films 102, 108 and 110, and a positional detection mark 112. First interlayer insulating film 102 is formed on a main surface of semiconductor substrate 101. Second interlayer insulating film 108 is formed on first interlayer insulating film 102. Third interlayer insulating film 110 is formed on Marks and Manufacturing Method Thereof second interlayer insulating film 108. Grooves 11a to 111h serving as positional detection mark 112 are formed on the surface of third interlayer insulating film 110. Positional detection mark 112 is used as an alignment mark in the process of photolithography to an aluminum film or the like formed on third interlayer insulating film 110. Note that, in a region not shown in FIG. 25, elements such as transistors and interconnections are formed depending upon the function of the semiconductor device.
Herein, grooves 111a to 111h serving as positional detection mark 112 are simultaneously formed in the process of forming in the process of forming through holes in third interlayer insulating film 110. More specifically, in the process of photolithography for through holes formed in third interlayer insulating film 110, a resist pattern is formed on the region to form positional detection mark 112 in third interlayer insulating film 110. In the process of anisotropic etching to form the through holes in third interlayer insulating film 110, a part of third interlayer insulating film 110 is used, using the resist pattern as a mask, and grooves 111a to 111h result.
As shown in FIG. 25, conventionally, in the region positioned under positional detection mark 112, positional detection marks or interconnections are not formed in the process of forming elements on the first or second interlayer insulating film. This is for the purpose of preventing errors in positional detection. More specifically, normally, light is directed to positional detection mark 112 and light reflected therefrom is used for detection of the mark. If structures such as interconnections are present in the underlying layer of positional detection mark 112, the light for detecting positional detection mark 112 could reach such structures through first to third interlayer insulating films 102, 108 and 111. Then, these structures cause the light for detecting positional detection mark 112 to scatter, which impedes the accurate detection of positional detection mark 112. In order to prevent this problem, structures such as interconnections or positional detection marks are not conventionally formed in the underlying layer of positional detection mark 112.
Meanwhile, as semiconductor devices have become more highly integrated and complicated, layered structures are employed for the devices. Thus, a positional detection mark is necessary for each layer. As shown in FIG. 25, however, only one positional detection mark may be formed at one position, and therefore the area occupied by positional detection marks increase as the number of layers increases.
One method of manufacturing a semiconductor device to solve this disadvantage is disclosed by Japanese Patent Laying-Open No. 2-229419, wherein positional detection marks in different layers are formed at the same position so as to overlap two-dimensionally. In the disclosed semiconductor device, however, errors or the like in the manufacturing process during forming positional detection marks cause positional detection marks to be erroneously recognized as is the case with the above conventional case, if the positions of positional detection marks in the upper and lower layers are even slightly shifted from each other.
Another method of manufacturing a semiconductor device, proposed in order to solve the above-described disadvantage is disclosed by Japanese Patent Laying-Open No. 3-177013, wherein a light beam for detecting a positional detection mark is obliquely irradiated and only the positional detection mark in a layer of interest is detected. By this method, however, other positional detection marks formed in the underlying layers of a positional detection mark to be detected are also recognized through the interlayer insulating film as is the case with the above conventional method, and it was difficult to completely prevent the erroneous detection of positional detection marks in the underlying layers.
In the conventionally proposed semiconductor devices including positional detection marks, the influence of other positional detection marks formed in the underlying layer of a positional detection mark of interest cannot be eliminated, and it was difficult to form positional detection marks in a layered manner while preventing erroneous recognition of such positional detection marks.
Referring to FIG. 26, a conventional semiconductor device includes a semiconductor substrate 101, an interlayer insulating film 102, a bonding pad 134a, and a glass coat 135. Interlayer insulating film 102 is formed on semiconductor substrate 101. Bonding pad 134a is formed on interlayer insulating film 102. Glass coat 135 is formed on interlayer insulating film 102 and bonding pad 134a, and has an opening in the region positioned on bonding pad 134a. 
As shown in FIG. 26, in the region positioned under bonding pad 134a serving as an external electrode for the semiconductor device, conventionally, no such structure as interconnections is formed. This is because the insulation property of interlayer insulating film 102 could deteriorate by damages such as cracks made in interlayer insulating film 102 under bonding pad 134a, at the time of thermo-compression bonding of an interconnection of gold or the like to bonding pad 134a. If the insulation property of interlayer insulating film 102 thus deteriorates, and an interconnection is formed under bonding pad 134a, the interconnection and bonding pad 134a could be short-circuited, which causes the erroneous operations of the semiconductor device.
Thus, conventionally, in the region positioned under positional detection mark 112 (see FIG. 25) or under bonding pad 134a (see FIG. 26), no structure such as interconnections is formed, in other words, the region is a so-called dead (unused) space. However, today, as semiconductor devices are to be more miniaturized and highly integrated, there arises a need to efficiently use such unused spaces.
It is one object of the invention to provide a semiconductor device which permits effective use of a region positioned under positional detection marks or external electrodes, in other words, the region which has not been conventionally used.
Another object of the invention is to provide a method of manufacturing a semiconductor device which permits effective use of a region positioned under positional detection marks and external electrodes, in other words, the region which has not been conventionally used.
A semiconductor device according to one aspect of the present invention includes a lower layer, a shielding film, and an upper layer. The lower layer includes at least one selected from the group consisting of a positional detection mark, a quality testing element, and a circuit element. The shielding film is formed on the lower layer and shields an energy beam used for detecting a positional detection mark. The upper layer is formed on the shielding film and includes a positional detection mark.
Herein, the quality testing element refers to an element used for operations to control the manufacturing steps and the quality of the semiconductor device, operations including confirmation of the conduction of interconnections or confirmation of the thickness of films formed in the device. The circuit element refers to an element necessary for the operation of the semiconductor device such as electrodes and interconnections in the device. The energy beam refers to light or an electron beam that can be used for detecting a positional detection mark.
Therefore, in the semiconductor device according to the above aspect of the invention, the presence of the shielding film prevents the energy beam from reaching the lower layer at the time of irradiating an energy beam upon a positional detection mark in the upper layer for the purpose of detecting the mark. This prevents errors in detecting the position of a positional detection mark in the upper layer, errors caused by the scattering of the energy beam by the presence of a positional detection mark in the lower layer. As a result, in the region positioned under the positional detection mark in the upper layer, a lower layer may be formed through the shielding film. Thus, the area occupied by positional detection marks or the like in the surface of the semiconductor device may be reduced. Consequently, a larger number of semiconductor devices may be obtained from a semiconductor wafer in the same size as the conventional case.
In the device according to the above aspect of the invention, the shielding film may have a substantially flat upper surface.
Thus, irregularities to scatter the energy beam used for detecting positional detection marks are not present on the upper surface of the shielding film. As a result, errors in detecting positional detection marks in the upper layer caused by the scattering of the energy beam according to irregularities on the upper surface of the shielding film may be more effectively prevented.
In the semiconductor device according to the above aspect of the invention, the shielding film may be a metal film.
In the semiconductor device according to the above aspect of the invention, the metal film may be an aluminum film.
Thus, the shielding film may be formed as well at the time of forming an aluminum interconnection. As a result, the shielding film may be formed without increasing the number of manufacturing steps as compared to the conventional case.
In the semiconductor device according to the above aspect of the invention, the lower layer may include an insulating film, and the positional detection mark may be a groove formed in the insulating film.
In the semiconductor device according to the above aspect of the present invention, the lower layer may include a lower metal film, and the positional detection mark may be a groove formed in the lower metal film.
In the semiconductor device according to the above aspect of the present invention, the upper layer may include an upper insulating film, and the positional detection mark may be a groove formed in the upper insulating film.
In the semiconductor device according to the above aspect of the present invention, the upper layer may include an upper metal film, and the positional detection mark may be a groove formed in the upper metal film.
In the semiconductor device according to the above aspect of the present invention, the positional detection mark may be formed from a polysilicon film.
A semiconductor device according to another aspect of the invention includes a lower layer, an isolation insulating film, and an upper layer. The lower layer includes at least one of a positional detection mark and a quality testing element. The isolation insulating film is formed on the lower layer. The upper layer is formed on the isolation insulating film and includes at least one selected from the group consisting of the quality testing element, an external electrode, and a dummy layer.
Herein, the external electrode refers to an electrode for connecting a bonding wire for use in transmission of an electrical signal between the semiconductor device and the outside. The dummy layer refers to a structure not directly related to the essential operations of the semiconductor device. The dummy layer includes, for example, a dummy pattern for improving the flatness of the device in the planarization step in the manufacture of the semiconductor device.
Therefore, in the semiconductor device according to the above aspect of the invention, the upper layer and the lower layer are formed upon each other through the isolation insulating film, the region positioned under the quality testing element or external electrode, in other words, the region which has not been effectively used conventionally, can be effectively used for forming positional detection marks. As a result, the area occupied by the quality detecting element or the like may be reduced.
In the semiconductor device according to the aspect of the invention, the lower layer may include an insulating film, and the positional detection mark may be a groove formed in the insulating film.
In the semiconductor device according to the aspect of the invention, the lower layer may include a metal film, and the positional detection mark may be a groove formed in the metal film.
In a method of manufacturing a semiconductor device according to another aspect of the invention, the lower layer including at least one selected from the group consisting of a positional detection mark, a quality testing element, and a circuit element is formed. A shielding film for shielding an energy beam used for detecting a positional detection mark is formed on the lower layer. The upper layer including a positional detection mark is formed on the shielding film.
As a result, a semiconductor device having a lower layer including a positional detection mark or the like through a shielding film under an upper layer including a positional detection mark may be readily obtained.
In the method of manufacturing a semiconductor device according to the above aspect of the invention, an interlayer insulating film may be formed between the lower layer and the shielding film, and the upper surface of the interlayer insulating film may be planarized (flattened).
Consequently, irregularities according to the lower layer structure can be prevented from forming on the surface of the shielding film.
The foregoing and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings.