Micro-electromechanical (MEMS) resonator devices have been developed as potential replacements for traditional quartz-based oscillators to provide a time reference frame in electronics applications. However, many of the materials suitable for use in MEMS applications have temperature-sensitive resonance properties, such as high temperature coefficients of elasticity (TCE). Resonators formed from materials with a high TCE have high temperature coefficients of frequency (TCF). Various methods and structures have been proposed for decreasing the TCF of such resonators, including passive compensation techniques and active compensation techniques, the latter typically increasing the energy consumption in some form.