Zero AND Subsets

Given a multiset of nonnegative integers a_1, a_2, .., a_N.

How many non-empty subsets of this set have a value bitwiseAND of 0?

Find the remainder of the answer divided by 10 ^ 9 + 7.

input


N
a_1 a_2 ... a_N


output

Divide the answer by 10 ^ 9 + 7 and output the remainder.

Constraint

* 1 \ leq N \ leq 10 ^ 5
* 0 \ leq a_i \ leq 2 ^ {20} -1



Input example


6
8 6 9 1 2 1


Output example


51






Example

Input

6
8 6 9 1 2 1


Output

51
#ifndef CLASS_MODINT
#define CLASS_MODINT

#include <cstdint>

template <std::uint32_t mod>
class modint {
private:
	std::uint32_t n;
public:
	modint() : n(0) {};
	modint(std::int64_t n_) : n((n_ >= 0 ? n_ : mod - (-n_) % mod) % mod) {};
	static constexpr std::uint32_t get_mod() { return mod; }
	std::uint32_t get() const { return n; }
	bool operator==(const modint& m) const { return n == m.n; }
	bool operator!=(const modint& m) const { return n != m.n; }
	modint& operator+=(const modint& m) { n += m.n; n = (n < mod ? n : n - mod); return *this; }
	modint& operator-=(const modint& m) { n += mod - m.n; n = (n < mod ? n : n - mod); return *this; }
	modint& operator*=(const modint& m) { n = std::uint64_t(n) * m.n % mod; return *this; }
	modint operator+(const modint& m) const { return modint(*this) += m; }
	modint operator-(const modint& m) const { return modint(*this) -= m; }
	modint operator*(const modint& m) const { return modint(*this) *= m; }
	modint inv() const { return (*this).pow(mod - 2); }
	modint pow(std::uint64_t b) const {
		modint ans = 1, m = modint(*this);
		while (b) {
			if (b & 1) ans *= m;
			m *= m;
			b >>= 1;
		}
		return ans;
	}
};

#endif // CLASS_MODINT

#include <vector>
#include <iostream>
using namespace std;
using mint = modint<1000000007>;
int main() {
	int N;
	cin >> N;
	int bits = 20;
	vector<int> c(1 << bits);
	for (int i = 0; i < N; ++i) {
		int x;
		cin >> x;
		c[x] += 1;
	}
	for (int i = 0; i < bits; ++i) {
		for (int j = 0; j < 1 << bits; ++j) {
			if ((j >> i) & 1) {
				c[j - (1 << i)] += c[j];
			}
		}
	}
	mint ans = 0;
	for (int i = 0; i < 1 << bits; ++i) {
		int cnt = 0;
		for (int j = 0; j < bits; ++j) {
			if ((i >> j) & 1) ++cnt;
		}
		if (cnt % 2 == 0) {
			ans += mint(2).pow(c[i]);
		}
		else {
			ans -= mint(2).pow(c[i]);
		}
	}
	cout << ans.get() << endl;
	return 0;
}
