Zero AND Subsets

Given a multiset of nonnegative integers a_1, a_2, .., a_N.

How many non-empty subsets of this set have a value bitwiseAND of 0?

Find the remainder of the answer divided by 10 ^ 9 + 7.

input


N
a_1 a_2 ... a_N


output

Divide the answer by 10 ^ 9 + 7 and output the remainder.

Constraint

* 1 \ leq N \ leq 10 ^ 5
* 0 \ leq a_i \ leq 2 ^ {20} -1



Input example


6
8 6 9 1 2 1


Output example


51






Example

Input

6
8 6 9 1 2 1


Output

51
// #define _GLIBCXX_DEBUG // for STL debug (optional)
#include <iostream>
#include <iomanip>
#include <cstdio>
#include <string>
#include <cstring>
#include <deque>
#include <list>
#include <queue>
#include <stack>
#include <vector>
#include <utility>
#include <algorithm>
#include <map>
#include <set>
#include <complex>
#include <cmath>
#include <limits>
#include <cfloat>
#include <climits>
#include <ctime>
#include <cassert>
#include <numeric>
#include <fstream>
#include <functional>
#include <bitset>
using namespace std;
using ll = long long int;
using int64 = long long int;
 
template<typename T> void chmax(T &a, T b) {a = max(a, b);}
template<typename T> void chmin(T &a, T b) {a = min(a, b);}
template<typename T> void chadd(T &a, T b) {a = a + b;}
 
int dx[] = {0, 0, 1, -1};
int dy[] = {1, -1, 0, 0};
const int INF = 1LL << 29;
const ll LONGINF = 1LL << 60;
const ll MOD = 1000000007LL;

// ModInt begin

using ll = long long;
template<ll mod>
struct ModInt {
    ll v;
    ll mod_pow(ll x, ll n) const {
        return (!n) ? 1 : (mod_pow((x*x)%mod,n/2) * ((n&1)?x:1)) % mod;
    }
    ModInt(ll a = 0) : v((a %= mod) < 0 ? a + mod : a) {}
    ModInt operator+ ( const ModInt& b ) const {
        return (v + b.v >= mod ? ModInt(v + b.v - mod) : ModInt(v + b.v));
    }
    ModInt operator- () const {
        return ModInt(-v);
    }
    ModInt operator- ( const ModInt& b ) const {
        return (v - b.v < 0 ? ModInt(v - b.v + mod) : ModInt(v - b.v));
    }
    ModInt operator* ( const ModInt& b ) const {return (v * b.v) % mod;}
    ModInt operator/ ( const ModInt& b ) const {return (v * mod_pow(b.v, mod-2)) % mod;}
    
    bool operator== ( const ModInt &b ) const {return v == b.v;}
    bool operator!= ( const ModInt &b ) const {return !(*this == b); }
    ModInt& operator+= ( const ModInt &b ) {
        v += b.v;
        if(v >= mod) v -= mod;
        return *this;
    }
    ModInt& operator-= ( const ModInt &b ) {
        v -= b.v;
        if(v < 0) v += mod;
        return *this;
    }
    ModInt& operator*= ( const ModInt &b ) {
        (v *= b.v) %= mod;
        return *this;
    }
    ModInt& operator/= ( const ModInt &b ) {
        (v *= mod_pow(b.v, mod-2)) %= mod;
        return *this;
    }
    ModInt pow(ll x) { return ModInt(mod_pow(v, x)); }
    // operator int() const { return int(v); }
    // operator long long int() const { return v; }
};

template<ll mod>
ostream& operator<< (ostream& out, ModInt<mod> a) {return out << a.v;}
template<ll mod>
istream& operator>> (istream& in, ModInt<mod>& a) {
    in >> a.v;
    return in;
}

// ModInt end
using mint = ModInt<MOD>;

int dp[1 << 20];
int main() {
    int N; cin >> N;
    vector<int> A(N);
    for(int i=0; i<N; i++) cin >> A[i], dp[ A[i] ]++;

    const int B = 20;
    for(int i=0; i<B; i++) {
        for(int bit=0; bit<(1<<B); bit++) {
            if(bit >> i & 1) dp[bit ^ (1 << i)] += dp[bit];
        }
    }

    mint ans = 0;
    for(int bit=0; bit<(1<<B); bit++) {
        mint p = mint(2).pow(dp[bit]) - mint(1);
        if(__builtin_parity(bit)) ans -= p;
        else ans += p;
    }
    cout << ans << endl;
    return 0;
}

