caption: Diagram of the Side View of XPS System
exif: {"Image DocumentName": "Diagram of the Side View of XPS System", "Image ImageDescription": "X-Ray source. Ion source. Axial Electron Gun. Detector. CMA. sample. SIMS Analyzer. Sample introduction Chamber. Sample Holder. Ion Pump. Roughing Pump. Slits.", "Image XResolution": "300", "Image YResolution": "300", "Image ResolutionUnit": "Pixels/Inch", "Image Software": "SlidePlayer", "Image YCbCrPositioning": "Centered"}