Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond
Graham C.B. Lee, Shi Su, Jiangling Li, Kate Sugden, Nima Roohpour, Haixue Yan, Haitao Ye*
Preliminary work is reported on 2-D and 3-D microstructures written directly with a Yb:YAG 1026 nm femtosecond (fs) laser on bulk chemical vapour deposition (CVD) single-crystalline diamond. Smooth graphitic lines and other structures were written on the surface of a CVD diamond sample with a thickness of 0.7mm under low laser fluences. This capability opens up the opportunity for making electronic devices and micro-electromechanical structures on diamond substrates. The fabrication process was optimised through testing a range of laser energies at a 100 kHz repetition rate with sub-500fs pulses. These graphitic lines and structures have been characterised using optical microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. Using these analysis techniques, the formation of sp2 and sp3 bonds is explored and the ratio between sp2 and sp3 bonds after fs laser patterning is quantified. We present the early findings from this study and characterise the relationship between the graphitic line formation and the different fs laser exposure conditions.
Journal of Experimental Nanoscience
Ultrashort pulses
X ray photoelectron spectroscopy
Funding: EPSRC: EP/H034269/1
femtosecond laser patterning
graphitic
microstructures
single-crystalline diamond
Lee, G. C. B., Su, S., Li, J., Sugden, K., Roohpour, N., Yan, H., & Ye, H. (2012). Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond. Journal of Experimental Nanoscience, 7(6), 662-672. https://doi.org/10.1080/17458080.2012.724181
Lee, Graham C.B. ; Su, Shi ; Li, Jiangling ; Sugden, Kate ; Roohpour, Nima ; Yan, Haixue ; Ye, Haitao. / Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond. In: Journal of Experimental Nanoscience. 2012 ; Vol. 7, No. 6. pp. 662-672.
@article{c036457e371e46d19b798a3cdd6df664,
title = "Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond",
abstract = "Preliminary work is reported on 2-D and 3-D microstructures written directly with a Yb:YAG 1026 nm femtosecond (fs) laser on bulk chemical vapour deposition (CVD) single-crystalline diamond. Smooth graphitic lines and other structures were written on the surface of a CVD diamond sample with a thickness of 0.7mm under low laser fluences. This capability opens up the opportunity for making electronic devices and micro-electromechanical structures on diamond substrates. The fabrication process was optimised through testing a range of laser energies at a 100 kHz repetition rate with sub-500fs pulses. These graphitic lines and structures have been characterised using optical microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. Using these analysis techniques, the formation of sp2 and sp3 bonds is explored and the ratio between sp2 and sp3 bonds after fs laser patterning is quantified. We present the early findings from this study and characterise the relationship between the graphitic line formation and the different fs laser exposure conditions.",
keywords = "femtosecond laser patterning, graphitic, MEMS, microstructures, single-crystalline diamond",
author = "Lee, {Graham C.B.} and Shi Su and Jiangling Li and Kate Sugden and Nima Roohpour and Haixue Yan and Haitao Ye",
note = "Funding: EPSRC: EP/H034269/1",
doi = "10.1080/17458080.2012.724181",
journal = "Journal of Experimental Nanoscience",
Lee, GCB, Su, S, Li, J, Sugden, K, Roohpour, N, Yan, H & Ye, H 2012, 'Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond', Journal of Experimental Nanoscience, vol. 7, no. 6, pp. 662-672. https://doi.org/10.1080/17458080.2012.724181
Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond. / Lee, Graham C.B.; Su, Shi; Li, Jiangling; Sugden, Kate; Roohpour, Nima; Yan, Haixue; Ye, Haitao.
In: Journal of Experimental Nanoscience, Vol. 7, No. 6, 12.2012, p. 662-672.
T1 - Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond
AU - Lee, Graham C.B.
AU - Su, Shi
AU - Li, Jiangling
AU - Sugden, Kate
AU - Roohpour, Nima
AU - Yan, Haixue
AU - Ye, Haitao
N1 - Funding: EPSRC: EP/H034269/1
N2 - Preliminary work is reported on 2-D and 3-D microstructures written directly with a Yb:YAG 1026 nm femtosecond (fs) laser on bulk chemical vapour deposition (CVD) single-crystalline diamond. Smooth graphitic lines and other structures were written on the surface of a CVD diamond sample with a thickness of 0.7mm under low laser fluences. This capability opens up the opportunity for making electronic devices and micro-electromechanical structures on diamond substrates. The fabrication process was optimised through testing a range of laser energies at a 100 kHz repetition rate with sub-500fs pulses. These graphitic lines and structures have been characterised using optical microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. Using these analysis techniques, the formation of sp2 and sp3 bonds is explored and the ratio between sp2 and sp3 bonds after fs laser patterning is quantified. We present the early findings from this study and characterise the relationship between the graphitic line formation and the different fs laser exposure conditions.
AB - Preliminary work is reported on 2-D and 3-D microstructures written directly with a Yb:YAG 1026 nm femtosecond (fs) laser on bulk chemical vapour deposition (CVD) single-crystalline diamond. Smooth graphitic lines and other structures were written on the surface of a CVD diamond sample with a thickness of 0.7mm under low laser fluences. This capability opens up the opportunity for making electronic devices and micro-electromechanical structures on diamond substrates. The fabrication process was optimised through testing a range of laser energies at a 100 kHz repetition rate with sub-500fs pulses. These graphitic lines and structures have been characterised using optical microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. Using these analysis techniques, the formation of sp2 and sp3 bonds is explored and the ratio between sp2 and sp3 bonds after fs laser patterning is quantified. We present the early findings from this study and characterise the relationship between the graphitic line formation and the different fs laser exposure conditions.
KW - femtosecond laser patterning
KW - graphitic
KW - MEMS
KW - microstructures
KW - single-crystalline diamond
UR - http://www.tandfonline.com/10.1080/17458080.2012.724181
U2 - 10.1080/17458080.2012.724181
DO - 10.1080/17458080.2012.724181
JO - Journal of Experimental Nanoscience
JF - Journal of Experimental Nanoscience
Lee GCB, Su S, Li J, Sugden K, Roohpour N, Yan H et al. Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond. Journal of Experimental Nanoscience. 2012 Dec;7(6):662-672. https://doi.org/10.1080/17458080.2012.724181
10.1080/17458080.2012.724181
http://www.tandfonline.com/10.1080/17458080.2012.724181